JP4619538B2 - 伸張可能な回復力部材を有する微細加工ミラー - Google Patents

伸張可能な回復力部材を有する微細加工ミラー Download PDF

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Publication number
JP4619538B2
JP4619538B2 JP2000571445A JP2000571445A JP4619538B2 JP 4619538 B2 JP4619538 B2 JP 4619538B2 JP 2000571445 A JP2000571445 A JP 2000571445A JP 2000571445 A JP2000571445 A JP 2000571445A JP 4619538 B2 JP4619538 B2 JP 4619538B2
Authority
JP
Japan
Prior art keywords
mirror
flat base
mirror assembly
longitudinal axis
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000571445A
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English (en)
Japanese (ja)
Other versions
JP2002525691A5 (enExample
JP2002525691A (ja
Inventor
ドレイク、ジョセフ、ディ
ジャーマン、ジョン、エイチ
グレード、ジョン、ディ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of JP2002525691A publication Critical patent/JP2002525691A/ja
Publication of JP2002525691A5 publication Critical patent/JP2002525691A5/ja
Application granted granted Critical
Publication of JP4619538B2 publication Critical patent/JP4619538B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)
JP2000571445A 1998-09-18 1999-09-17 伸張可能な回復力部材を有する微細加工ミラー Expired - Fee Related JP4619538B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10098998P 1998-09-18 1998-09-18
US60/100,989 1998-09-18
PCT/US1999/021682 WO2000017865A1 (en) 1998-09-18 1999-09-17 Micromachined mirror with stretchable restoring force member

Publications (3)

Publication Number Publication Date
JP2002525691A JP2002525691A (ja) 2002-08-13
JP2002525691A5 JP2002525691A5 (enExample) 2006-11-09
JP4619538B2 true JP4619538B2 (ja) 2011-01-26

Family

ID=22282566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000571445A Expired - Fee Related JP4619538B2 (ja) 1998-09-18 1999-09-17 伸張可能な回復力部材を有する微細加工ミラー

Country Status (7)

Country Link
JP (1) JP4619538B2 (enExample)
KR (1) KR100473693B1 (enExample)
CN (1) CN1128440C (enExample)
AU (1) AU6254999A (enExample)
DE (1) DE19983566T1 (enExample)
GB (1) GB2362224B (enExample)
WO (1) WO2000017865A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7002215B1 (en) * 2002-09-30 2006-02-21 Pts Corporation Floating entrance guard for preventing electrical short circuits

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153870A (en) * 1989-06-29 1992-10-06 Digital Equipment Corporation Rotary head actuator for optical disk
US5202875A (en) * 1991-06-04 1993-04-13 International Business Machines Corporation Multiple data surface optical data storage system
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
JPH09152505A (ja) * 1995-11-30 1997-06-10 Sharp Corp 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置
US6044056A (en) * 1996-07-30 2000-03-28 Seagate Technology, Inc. Flying optical head with dynamic mirror
WO1998009289A1 (en) * 1996-08-27 1998-03-05 Quinta Corporation Optical head using micro-machined elements
JPH10188319A (ja) * 1996-12-26 1998-07-21 Sharp Corp 変形可能ミラーおよびその変形可能ミラーを用いた光記録再生装置
KR100620341B1 (ko) * 1998-09-02 2006-09-13 엑스로스, 인크. 비틀림 굴곡 힌지에 의해 상대 회전하도록 연결된 미세가공 구조체

Also Published As

Publication number Publication date
GB0109131D0 (en) 2001-05-30
DE19983566T1 (de) 2001-08-16
CN1325530A (zh) 2001-12-05
CN1128440C (zh) 2003-11-19
AU6254999A (en) 2000-04-10
KR100473693B1 (ko) 2005-03-08
GB2362224B (en) 2003-03-19
WO2000017865A1 (en) 2000-03-30
KR20010075212A (ko) 2001-08-09
GB2362224A (en) 2001-11-14
JP2002525691A (ja) 2002-08-13

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