CN112731116A - 一种控制针卡在线复用增减针的方法 - Google Patents
一种控制针卡在线复用增减针的方法 Download PDFInfo
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- CN112731116A CN112731116A CN202110011814.5A CN202110011814A CN112731116A CN 112731116 A CN112731116 A CN 112731116A CN 202110011814 A CN202110011814 A CN 202110011814A CN 112731116 A CN112731116 A CN 112731116A
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000003247 decreasing effect Effects 0.000 title claims abstract description 8
- 238000012360 testing method Methods 0.000 claims abstract description 61
- 238000011161 development Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 11
- 230000002159 abnormal effect Effects 0.000 abstract description 4
- 238000009966 trimming Methods 0.000 description 14
- 239000000523 sample Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000012942 design verification Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
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CN202110011814.5A CN112731116B (zh) | 2021-01-06 | 2021-01-06 | 一种控制针卡在线复用增减针的方法 |
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CN202110011814.5A CN112731116B (zh) | 2021-01-06 | 2021-01-06 | 一种控制针卡在线复用增减针的方法 |
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CN112731116A true CN112731116A (zh) | 2021-04-30 |
CN112731116B CN112731116B (zh) | 2024-04-05 |
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Citations (16)
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---|---|---|---|---|
GB2061630A (en) * | 1979-10-17 | 1981-05-13 | Standard Telephones Cables Ltd | Apparatus for testing printed circuit boards |
KR19980048637A (ko) * | 1996-12-18 | 1998-09-15 | 문정환 | 반도체 웨이퍼 검사용 프로브 카드 |
WO1998047010A1 (en) * | 1997-04-17 | 1998-10-22 | Cerprobe Corporation | Probe assembly and method for switchable multi-dut testing of integrated circuit wafers |
US20060170435A1 (en) * | 2005-01-31 | 2006-08-03 | Formfactor Inc. | Programmable devices to route signals on probe cards |
KR20090075312A (ko) * | 2008-01-04 | 2009-07-08 | 주식회사 에스디에이 | 프로브 카드 평탄도 검사장치 및 그 제공방법 |
CN101510520A (zh) * | 2009-03-18 | 2009-08-19 | 上海华岭集成电路技术有限责任公司 | 一种抗干扰异步修调晶圆测试方法 |
WO2009113183A1 (ja) * | 2008-03-11 | 2009-09-17 | 株式会社東京精密 | マルチチッププロ-バ |
CN201392350Y (zh) * | 2009-03-18 | 2010-01-27 | 上海华岭集成电路技术有限责任公司 | 一种抗干扰异步修调晶圆测试用探针卡 |
CN102288897A (zh) * | 2011-05-17 | 2011-12-21 | 上海华岭集成电路技术股份有限公司 | 具有物理隔离特征的测试装置 |
CN102520332A (zh) * | 2011-12-15 | 2012-06-27 | 无锡中星微电子有限公司 | 晶圆测试装置及方法 |
CN102662092A (zh) * | 2012-04-28 | 2012-09-12 | 无锡中星微电子有限公司 | 晶圆测试装置及方法 |
CN103197227A (zh) * | 2013-03-25 | 2013-07-10 | 西安华芯半导体有限公司 | 一种用于设计分析目的的晶圆测试方法 |
CN205958617U (zh) * | 2016-08-30 | 2017-02-15 | 上海依然半导体测试有限公司 | 一种探针卡固定基板 |
CN107368100A (zh) * | 2017-06-26 | 2017-11-21 | 上海华岭集成电路技术股份有限公司 | 调整悬臂探针卡针迹的方法 |
CN108878306A (zh) * | 2018-08-02 | 2018-11-23 | 江苏七维测试技术有限公司 | 一种多工位集成电路熔丝修调测试系统及其修调方法 |
CN211578700U (zh) * | 2020-04-22 | 2020-09-25 | 强一半导体(苏州)有限公司 | 一种抗干扰异步修调封装测试用探针头及关键机构 |
-
2021
- 2021-01-06 CN CN202110011814.5A patent/CN112731116B/zh active Active
Patent Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2061630A (en) * | 1979-10-17 | 1981-05-13 | Standard Telephones Cables Ltd | Apparatus for testing printed circuit boards |
KR19980048637A (ko) * | 1996-12-18 | 1998-09-15 | 문정환 | 반도체 웨이퍼 검사용 프로브 카드 |
WO1998047010A1 (en) * | 1997-04-17 | 1998-10-22 | Cerprobe Corporation | Probe assembly and method for switchable multi-dut testing of integrated circuit wafers |
US20060170435A1 (en) * | 2005-01-31 | 2006-08-03 | Formfactor Inc. | Programmable devices to route signals on probe cards |
KR20090075312A (ko) * | 2008-01-04 | 2009-07-08 | 주식회사 에스디에이 | 프로브 카드 평탄도 검사장치 및 그 제공방법 |
WO2009113183A1 (ja) * | 2008-03-11 | 2009-09-17 | 株式会社東京精密 | マルチチッププロ-バ |
CN101510520A (zh) * | 2009-03-18 | 2009-08-19 | 上海华岭集成电路技术有限责任公司 | 一种抗干扰异步修调晶圆测试方法 |
CN201392350Y (zh) * | 2009-03-18 | 2010-01-27 | 上海华岭集成电路技术有限责任公司 | 一种抗干扰异步修调晶圆测试用探针卡 |
CN102288897A (zh) * | 2011-05-17 | 2011-12-21 | 上海华岭集成电路技术股份有限公司 | 具有物理隔离特征的测试装置 |
CN102520332A (zh) * | 2011-12-15 | 2012-06-27 | 无锡中星微电子有限公司 | 晶圆测试装置及方法 |
CN102662092A (zh) * | 2012-04-28 | 2012-09-12 | 无锡中星微电子有限公司 | 晶圆测试装置及方法 |
CN103197227A (zh) * | 2013-03-25 | 2013-07-10 | 西安华芯半导体有限公司 | 一种用于设计分析目的的晶圆测试方法 |
CN205958617U (zh) * | 2016-08-30 | 2017-02-15 | 上海依然半导体测试有限公司 | 一种探针卡固定基板 |
CN107368100A (zh) * | 2017-06-26 | 2017-11-21 | 上海华岭集成电路技术股份有限公司 | 调整悬臂探针卡针迹的方法 |
CN108878306A (zh) * | 2018-08-02 | 2018-11-23 | 江苏七维测试技术有限公司 | 一种多工位集成电路熔丝修调测试系统及其修调方法 |
CN211578700U (zh) * | 2020-04-22 | 2020-09-25 | 强一半导体(苏州)有限公司 | 一种抗干扰异步修调封装测试用探针头及关键机构 |
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Effective date of registration: 20240511 Address after: 201306 Building 1, No. 550 and 558 Yunshui Road, Lingang New Area, China (Shanghai) Pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: Shanghai Hualingshen Porcelain Integrated Circuit Co.,Ltd. Country or region after: China Address before: 1st floor, building 2, 351 GuoShouJing Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai, 201203 Patentee before: SINO IC TECHNOLOGY Co.,Ltd. Country or region before: China |