CN112635145B - 一种复合磁粉的制备方法 - Google Patents

一种复合磁粉的制备方法 Download PDF

Info

Publication number
CN112635145B
CN112635145B CN202110043995.XA CN202110043995A CN112635145B CN 112635145 B CN112635145 B CN 112635145B CN 202110043995 A CN202110043995 A CN 202110043995A CN 112635145 B CN112635145 B CN 112635145B
Authority
CN
China
Prior art keywords
magnetic powder
composite magnetic
heat treatment
mnbi
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110043995.XA
Other languages
English (en)
Other versions
CN112635145A (zh
Inventor
泮敏翔
俞能君
杨杭福
葛洪良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Jiliang University
Original Assignee
China Jiliang University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Jiliang University filed Critical China Jiliang University
Priority to CN202110043995.XA priority Critical patent/CN112635145B/zh
Publication of CN112635145A publication Critical patent/CN112635145A/zh
Application granted granted Critical
Publication of CN112635145B publication Critical patent/CN112635145B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0579Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B with exchange spin coupling between hard and soft nanophases, e.g. nanocomposite spring magnets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/16Metallic particles coated with a non-metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/17Metallic particles coated with metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/04Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0273Imparting anisotropy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/04Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • B22F2009/043Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by ball milling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Dispersion Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Hard Magnetic Materials (AREA)

Abstract

本发明公开了一种复合磁粉的制备方法,属于磁性材料技术领域。该制备方法包括:按照MnBi合金成分称量配料、熔炼和高能球磨,在高能球磨过程中通过氩气高速气流将稀土氮化物喷射到MnBi磁粉中,使MnBi磁粉表面得到稀土氮化物的有效包覆;通过感应熔炼制备Fe30Co70合金溅射靶材;利用磁控溅射技术将Fe30Co70合金靶材溅射在稀土氮化物包覆的MnBi磁粉上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为5~20 Hz,随后将复合磁粉在氩气保护下,进行一级和二级回火热处理,最终获得复合磁粉。本发明工艺过程简单,易操作,有利于复合磁粉在更多永磁器件中的应用,以满足市场需求。

Description

一种复合磁粉的制备方法
技术领域
本发明涉及磁性材料技术领域,尤其涉及一种复合磁粉的制备方法。
背景技术
近年来,随着世界稀土资源的日益减少、价格快速增长,及时开发一类新型高磁性稀土永磁体,是磁性产品发展的要求,更是我国稀土产业可持续发展的重大课题。MnBi永磁体具有价格低廉、不易腐蚀、力学性能好等优点,特别是它在一定温度范围内矫顽力呈正的温度系数,可以弥补NdFeB永磁体的不足之处。但是,由于MnBi低温相是由包晶反应形成,极难制备单相合金,从而导致其磁性能偏低,极大地限制该类材料的应用。因此,如何获得高性能纯单相锰铋合金,成为锰铋永磁材料拓宽应用范围的关键问题。
双相纳米晶结构永磁体中的软磁相为合金提供高的矫顽力,而硬磁相为合金提供高的矫顽力,两相之间的交换耦合作用直接体现在了合金的磁性能。目前,国内外研究较多的是NdFeB/α-Fe、SmCo/(α-Fe,Fe-Co)等复合磁体上。而在MnBi基复合磁体中,对其研究的较少,因此,本专利通过选取高各向异性常数的MnBi作为硬磁相,而具有高饱和磁化强度的FeCo作为软磁相,同时通过氩气高速气流将粒径范围为200~500 nm的稀土氮化物喷射到高能球磨过程中的MnBi磁粉中,使MnBi磁粉表面得到稀土氮化物的有效包覆,实现了稀土元素在软/硬磁相之间的扩散,有效实现了软/硬磁相的复合及稀土元素的扩散,最终获得了高性能的复合磁粉。
发明内容
针对现有技术中存在的问题,本发明目的在于提供一种复合磁粉的制备方法。
本发明的复合磁粉的制备方法,包括如下步骤:
(1)按照原子百分比MnxBi100-x进行称重配料并通过真空感应熔炼获得合金铸锭,其中35≤x≤65,随后MnBi合金铸锭通过高能球磨机制得MnBi磁粉,并且MnBi合金铸锭在高能球磨的运行过程中,通过氩气高速气流将粒径范围为200~500 nm的稀土氮化物喷射到MnBi磁粉中,使MnBi磁粉表面得到稀土氮化物的有效包覆;
(2)按照Fe30Co70合金成分称量配料,并通过感应熔炼制备Fe30Co70合金溅射靶材;
(3)利用磁控溅射技术将步骤(2)制得的Fe30Co70合金靶材溅射在步骤(1)制得的混合粉体上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为5~20 Hz;
(4)将步骤(3)制得的复合磁粉在氩气保护下,进行一级和二级回火热处理,最终获得复合磁粉。
进一步的,步骤(1)中所述的高能球磨的时间为1~8 h,氩气高速气流的流速为100~200 m/s;所述的稀土氮化物为氮化铽、氮化镥、氮化钇或氮化镝中的一种或者几种。
进一步的,步骤(3)中所述的溅射过程中磁控溅射电流为20~40 A,磁控溅射时间为0.5~5 h。
进一步的,步骤(4)中所述的一级回火热处理的温度为600~900 ℃,热处理时间为1~10 h,随后水冷至室温;所述的二级回火热处理的温度为200~500 ℃,热处理时间为1~3 h,最后水冷至室温。
与现有的技术相比,本发明具有如下优点和有益效果:本发明将高各向异性常数的MnBi作为硬磁相,而具有高饱和磁化强度的FeCo作为软磁相,同时通过氩气高速气流稀土氮化物喷射到高能球磨过程中的MnBi磁粉上,使MnBi磁粉表面得到稀土氮化物的有效包覆,实现了稀土元素在软/硬磁相之间的扩散,在提升复合磁体的磁性能的同时可以在一定程度降低原料成本;同时,本发明通过磁控溅射及溅射过程中对基底混合粉体施加振动,有效避免了溅射过程中磁粉的团聚和分散,并通过一级和二级回火热处理,最终获得了高性能的复合磁粉。
具体实施方式
下面将结合实施例对本发明做进一步的详细说明,但本发明并不仅仅局限于以下实施例。
实施例1
(1)按照原子百分比Mn35Bi65进行称重配料并通过真空感应熔炼获得合金铸锭,随后Mn35Bi65合金铸锭在高能球磨的运行过程中(高能球磨时间为8 h),通过氩气高速气流(流速为200 m/s)将粒径范围为200 nm的稀土氮化铽喷射到Mn35Bi65磁粉中,使Mn35Bi65磁粉表面得到稀土氮化铽的有效包覆;
(2)按照Fe30Co70合金成分称量配料,并通过感应熔炼制备Fe30Co70合金溅射靶材;
(3)利用磁控溅射技术将步骤(2)制得的Fe30Co70合金靶材溅射在步骤(1)制得的混合粉体上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为20 Hz;所述的溅射过程中磁控溅射电流为40 A,磁控溅射时间为5 h;
(4)将步骤(3)制得的复合磁粉在氩气保护下,进行一级和二级回火热处理,所述的一级回火热处理的温度为900 ℃,热处理时间为9 h,随后水冷至室温;所述的二级回火热处理的温度为200 ℃,热处理时间为2 h,最后水冷至室温,最终获得复合磁粉。
采用本发明制备的复合磁粉经磁性能测试,矫顽力为18.79 kOe,饱和磁化强度为60.2 emu/g。
实施例2
(1)按照原子百分比Mn50Bi50进行称重配料并通过真空感应熔炼获得合金铸锭,随后Mn50Bi50合金铸锭在高能球磨的运行过程中(高能球磨时间为5 h),通过氩气高速气流(流速为180 m/s)将粒径范围为300 nm的稀土氮化镥喷射到Mn50Bi50磁粉中,使Mn50Bi50磁粉表面得到稀土氮化镥的有效包覆;
(2)按照Fe30Co70合金成分称量配料,并通过感应熔炼制备Fe30Co70合金溅射靶材;
(3)利用磁控溅射技术将步骤(2)制得的Fe30Co70合金靶材溅射在步骤(1)制得的混合粉体上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为15 Hz;所述的溅射过程中磁控溅射电流为35 A,磁控溅射时间为3 h;
(4)将步骤(3)制得的复合磁粉在氩气保护下,进行一级和二级回火热处理,所述的一级回火热处理的温度为800 ℃,热处理时间为8 h,随后水冷至室温;所述的二级回火热处理的温度为300 ℃,热处理时间为2 h,最后水冷至室温,最终获得复合磁粉。
采用本发明制备的复合磁粉经磁性能测试,矫顽力为17.56 kOe,饱和磁化强度为57.5 emu/g。
实施例3
(1)按照原子百分比Mn60Bi40进行称重配料并通过真空感应熔炼获得合金铸锭,随后Mn60Bi40合金铸锭在高能球磨的运行过程中(高能球磨时间为3 h),通过氩气高速气流(流速为130 m/s)将粒径范围为400 nm的稀土氮化钇喷射到Mn60Bi40磁粉中,使Mn60Bi40磁粉表面得到稀土氮化钇的有效包覆;
(2)按照Fe30Co70合金成分称量配料,并通过感应熔炼制备Fe30Co70合金溅射靶材;
(3)利用磁控溅射技术将步骤(2)制得的Fe30Co70合金靶材溅射在步骤(1)制得的混合粉体上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为10 Hz;所述的溅射过程中磁控溅射电流为25 A,磁控溅射时间为2 h;
(4)将步骤(3)制得的复合磁粉在氩气保护下,进行一级和二级回火热处理,所述的一级回火热处理的温度为700 ℃,热处理时间为7 h,随后水冷至室温;所述的二级回火热处理的温度为400 ℃,热处理时间为3 h,最后水冷至室温,最终获得复合磁粉。
采用本发明制备的复合磁粉经磁性能测试,矫顽力为15.28 kOe,饱和磁化强度为52.7 emu/g。
实施例4
(1)按照原子百分比Mn65Bi35进行称重配料并通过真空感应熔炼获得合金铸锭,随后Mn65Bi35合金铸锭在高能球磨的运行过程中(高能球磨时间为1 h),通过氩气高速气流(流速为100 m/s)将粒径范围为500 nm的稀土氮化镝喷射到Mn65Bi35磁粉中,使Mn65Bi35磁粉表面得到稀土氮化镝的有效包覆;
(2)按照Fe30Co70合金成分称量配料,并通过感应熔炼制备Fe30Co70合金溅射靶材;
(3)利用磁控溅射技术将步骤(2)制得的Fe30Co70合金靶材溅射在步骤(1)制得的混合粉体上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为5 Hz;所述的溅射过程中磁控溅射电流为20 A,磁控溅射时间为0.5 h;
(4)将步骤(3)制得的复合磁粉在氩气保护下,进行一级和二级回火热处理,所述的一级回火热处理的温度为600 ℃,热处理时间为6 h,随后水冷至室温;所述的二级回火热处理的温度为500 ℃,热处理时间为3 h,最后水冷至室温,最终获得复合磁粉。
采用本发明制备的复合磁粉经磁性能测试,矫顽力为9.87 kOe,饱和磁化强度为51.9 emu/g。

Claims (4)

1.一种复合磁粉的制备方法,其特征在于包括如下步骤:
(1)按照原子百分比MnxBi100-x进行称重配料并通过真空感应熔炼获得合金铸锭,其中35≤x≤65,随后MnBi合金铸锭通过高能球磨机制得MnBi磁粉,并且在高能球磨的运行过程中,通过氩气高速气流将粒径范围为200~500 nm的稀土氮化物喷射到MnBi磁粉中,使MnBi磁粉表面得到稀土氮化物的有效包覆;
(2)按照Fe30Co70合金成分称量配料,并通过感应熔炼制备Fe30Co70合金溅射靶材;
(3)利用磁控溅射技术将步骤(2)制得的Fe30Co70合金靶材溅射在步骤(1)制得的混合粉体上,为了避免溅射过程中磁粉的团聚和分散,溅射过程中对基底混合粉体施加振动,振动频率为5~20 Hz;
(4)将步骤(3)制得的复合磁粉在氩气保护下,进行一级和二级回火热处理,最终获得复合磁粉。
2. 根据权利要求1 所述的一种复合磁粉的制备方法,其特征在于:步骤(1)中所述的高能球磨的时间为1~8 h,氩气高速气流的流速为100~200 m/s;所述的稀土氮化物为氮化铽、氮化镥、氮化钇或氮化镝中的一种或者几种。
3. 根据权利要求1 所述的一种复合磁粉的制备方法,其特征在于:步骤(3)中所述的溅射过程中磁控溅射电流为20~40 A,磁控溅射时间为0.5~5 h。
4. 根据权利要求1 所述的一种复合磁粉的制备方法,其特征在于:步骤(4)中所述的一级回火热处理的温度为600~900 ℃,热处理时间为1~10 h,随后水冷至室温;所述的二级回火热处理的温度为200~500 ℃,热处理时间为1~3 h,最后水冷至室温。
CN202110043995.XA 2021-01-13 2021-01-13 一种复合磁粉的制备方法 Active CN112635145B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110043995.XA CN112635145B (zh) 2021-01-13 2021-01-13 一种复合磁粉的制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110043995.XA CN112635145B (zh) 2021-01-13 2021-01-13 一种复合磁粉的制备方法

Publications (2)

Publication Number Publication Date
CN112635145A CN112635145A (zh) 2021-04-09
CN112635145B true CN112635145B (zh) 2024-03-05

Family

ID=75293985

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110043995.XA Active CN112635145B (zh) 2021-01-13 2021-01-13 一种复合磁粉的制备方法

Country Status (1)

Country Link
CN (1) CN112635145B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113421762B (zh) * 2021-07-02 2022-12-16 中国计量大学 一种高性能钐铁氮磁体的制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1089385A (zh) * 1992-12-26 1994-07-13 中国科学院物理研究所 一种高稳定稀土-铁-永磁碳化物及其制备方法
CN102610346A (zh) * 2011-12-01 2012-07-25 中国计量学院 一种新型无稀土纳米复合永磁材料及其制备方法
CN105551789A (zh) * 2016-02-04 2016-05-04 宁波韵升股份有限公司 一种稀土永磁体的制造方法
CN106537525A (zh) * 2015-04-20 2017-03-22 Lg电子株式会社 包含MnBi的各向异性复合烧结磁体和用于制备其的常压烧结工艺
CN106521437A (zh) * 2016-10-28 2017-03-22 北京科技大学 一种粉末颗粒振动式磁控溅射镀膜法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101585483B1 (ko) * 2015-04-29 2016-01-15 엘지전자 주식회사 열적 안정성이 향상된 MnBi계 소결자석 및 이들의 제조 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1089385A (zh) * 1992-12-26 1994-07-13 中国科学院物理研究所 一种高稳定稀土-铁-永磁碳化物及其制备方法
CN102610346A (zh) * 2011-12-01 2012-07-25 中国计量学院 一种新型无稀土纳米复合永磁材料及其制备方法
CN106537525A (zh) * 2015-04-20 2017-03-22 Lg电子株式会社 包含MnBi的各向异性复合烧结磁体和用于制备其的常压烧结工艺
CN105551789A (zh) * 2016-02-04 2016-05-04 宁波韵升股份有限公司 一种稀土永磁体的制造方法
CN106521437A (zh) * 2016-10-28 2017-03-22 北京科技大学 一种粉末颗粒振动式磁控溅射镀膜法

Also Published As

Publication number Publication date
CN112635145A (zh) 2021-04-09

Similar Documents

Publication Publication Date Title
JP7220330B2 (ja) R-t-b系永久磁石材料、製造方法、並びに応用
EP3182423B1 (en) Neodymium iron boron magnet and preparation method thereof
CN108962523B (zh) 一种掺杂SmCu合金的钐钴基纳米复合永磁体的制备方法
WO2015078362A1 (zh) 一种低b的稀土磁铁
CN108565109B (zh) 一种软磁复合材料的制备方法
CN109448946B (zh) 一种各向异性SmCo/MnBi复合磁体及其制备方法
CN111564305B (zh) 一种高性能复合磁体的制备方法
JP2019535121A (ja) 高温耐性ネオジム・鉄・ボロン磁石及びその製造方法
CN111916284B (zh) 一种高矫顽力烧结钕铁硼磁体的制备方法
CN111230127B (zh) 一种复合磁性粉末的制备方法
CN112635145B (zh) 一种复合磁粉的制备方法
CN113593873A (zh) 一种高矫顽力混合稀土永磁材料及其制备方法
CN109326404B (zh) 一种钕铁硼磁性材料及制备方法
CN112017835A (zh) 一种低重稀土高矫顽力烧结钕铁硼磁体及其制备方法
CN104959618B (zh) 一种高电阻率高磁性能核壳结构NdFeB磁粉及用途
CN108538568B (zh) 一种软磁复合材料的热变形界面扩散制备方法
CN116612956A (zh) 一种具有核壳结构的含铈钕铁硼磁体及其制备方法和应用
CN114464443B (zh) 一种同时提高多主相LaCe基烧结永磁材料矫顽力和耐腐蚀性的方法
CN113539664B (zh) 一种Sm基各向异性复合磁体的制备方法
JP7170377B2 (ja) Nd-Fe-B系焼結磁性体の製造方法
CN112259314B (zh) 一种R(Fe,M)12型的稀土永磁材料及其制备方法
CN113782331B (zh) 一种高性能双硬磁相纳米复合磁体的制备方法
JP7305554B2 (ja) R-t-b永久磁石材料およびその調製方法
CN112735718A (zh) 一种高耐蚀高矫顽力烧结钕铁硼磁体的制备方法
CN111462974B (zh) 一种高性能双主相复合稀土永磁体材料及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right

Effective date of registration: 20240201

Address after: School of Materials and Chemistry, China University of Metrology, No. 258 Xiasha Xueyuan Street, Qiantang District, Hangzhou City, Zhejiang Province, 310018

Applicant after: China Jiliang University

Country or region after: China

Address before: No.258, Xiasha Xueyuan street, Qiantang New District, Hangzhou City, Zhejiang Province, 310018

Applicant before: Pan Minxiang

Country or region before: China

TA01 Transfer of patent application right
GR01 Patent grant
GR01 Patent grant