CN112251732B - Material carrying device of coating machine - Google Patents
Material carrying device of coating machine Download PDFInfo
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- CN112251732B CN112251732B CN202010899378.5A CN202010899378A CN112251732B CN 112251732 B CN112251732 B CN 112251732B CN 202010899378 A CN202010899378 A CN 202010899378A CN 112251732 B CN112251732 B CN 112251732B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4411—Cooling of the reaction chamber walls
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
Abstract
The invention relates to the technical field of coating equipment, in particular to a material loading device of a coating machine, which comprises a vacuum cover, a liquid cooling platform deck assembly, an elastic sealing element and a vacuum cover base cold plate, wherein the vacuum cover base cold plate is hermetically arranged on the bottom wall of the vacuum cover, the liquid cooling platform deck assembly is slidably arranged on the bottom wall of the vacuum cover, the liquid cooling platform deck assembly and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform deck assembly and the vacuum cover base cold plate to realize cooling, one end of the elastic sealing element is hermetically arranged with the liquid cooling platform deck assembly, and the other end of the elastic sealing element is hermetically arranged with the vacuum cover base cold plate. The invention can effectively and quickly cool the liquid cooling platform deck and the bottom wall of the vacuum cover, so that the liquid cooling platform deck can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform deck is avoided, the installation tightness of the liquid cooling platform deck assembly and the vacuum cover can be enhanced, and the film deposition effect on the surface of the cutter is good.
Description
Technical Field
The invention relates to the technical field of coating equipment, in particular to a material loading device of a coating machine.
Background
The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the diamond film deposition is carried out on the blade part of a drill bit or a milling cutter by using the HFCVD method, the surface temperature value, the temperature field and the distribution uniformity of the reactive group density field of the deposition region (blade region, substrate) have great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films range from about 500 deg.C to about 1000 deg.C, with a range of about 700 deg.C to about 900 deg.C being most preferred.
The feeding device of the traditional coating equipment is usually in a vacuum high-temperature state, and is usually cooled by water in order to prevent the feeding device from being burnt, but the cooling structure of the feeding device of the coating equipment in the prior art is unreasonable in design, and at least the following problems exist:
1. generally, the bottom wall of the vacuum cover and the feeding device are closer to a heating source, so that the working temperatures of the feeding device and the bottom wall of the vacuum cover are too high, the feeding device and the bottom wall of the vacuum cover are easily burnt by high temperature, the service life is short, the production cost is high, and the production standard cannot be met;
2. the vacuum cover is assembled with the feeding device, the sealing performance is not enough, the condition of air leakage can appear on the vacuum cover when the feeding device acts, the film deposition effect on the surface of the cutter is influenced, and the yield is low.
Disclosure of Invention
The technical problem to be solved by the invention is to provide the material carrying device of the coating machine, which can effectively and quickly cool the liquid cooling platform deck and the bottom wall of the vacuum cover, so that the liquid cooling platform deck can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform deck is avoided, the sealing performance of the installation of the liquid cooling platform deck assembly and the vacuum cover can be enhanced, and the film deposition effect on the surface of a cutter is good.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a material loading device of coating machine, it includes the vacuum cover, liquid cooling microscope carrier subassembly, elastic sealing element and the cold dish of vacuum cover base, the cold dish seal installation of vacuum cover base is in the diapire of vacuum cover, the cold dish of vacuum cover base is used for cooling down the vacuum cover, liquid cooling microscope carrier subassembly slides and sets up in the vacuum cover diapire, liquid cooling microscope carrier subassembly is used for bearing the weight of the cutter and adjusts the position height of cutter, liquid cooling microscope carrier subassembly and the cold dish of vacuum cover base are hollow structure, the leading-in liquid cooling microscope carrier subassembly of coolant liquid and the inside cooling that is in order to realize the cooling of vacuum cover base cold dish, liquid cooling microscope carrier subassembly is located to elastic sealing element cover, elastic sealing element's one end and liquid cooling microscope carrier subassembly seal installation, elastic sealing element's the other end and the cold dish seal installation of vacuum cover base.
Further, the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid outlet hollow supporting pipe, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the rack and is in driving connection with the liquid outlet hollow supporting pipe, the upper end of the liquid outlet hollow supporting pipe extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting pipe is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting pipe is arranged on a cold plate of a base of the vacuum cover in a sliding mode, a liquid cooling cavity is arranged inside the liquid cooling platform, the liquid outlet hollow supporting pipe is communicated with the liquid cooling cavity, a rotary liquid guiding plate is installed in the liquid cooling cavity in a rotating mode, the output end of the rotary driving piece is connected with the rotary liquid guiding plate, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guiding plate is used for stirring the cooling liquid inside the liquid cooling cavity.
Furthermore, the elastic sealing element is an elastic annular body, the elastic sealing element is sleeved outside the liquid outlet hollow supporting tube, one end of the elastic sealing element is in sealing connection with the bottom wall of the vacuum cover, and the other end of the elastic sealing element is in sealing connection with the rotary driving element; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.
Furthermore, rotatory drain dish includes the drain flat board and sets up in a plurality of leaves of drain flat board, and a plurality of leaves are the annular array along the dull and stereotyped central axis of drain, and the drain flat board rotates to be installed in the liquid cooling cavity, and a plurality of leaves are used for mixxing the inside coolant liquid of liquid cooling cavity, and the drain flat board is equipped with drain centre bore and assembly bulge loop body, and assembly bulge loop body and drain centre bore coaxial setting.
Further, liquid cooling microscope carrier subassembly still includes the feed liquor hollow tube, and the feed liquor hollow tube sets up in going out liquid hollow stay tube insidely, and the lower extreme and the output of rotary driving piece of feed liquor hollow tube are connected, and the upper end of feed liquor hollow tube stretches to in the liquid cooling cavity and with the joint of assembly bulge loop body, feed liquor hollow tube and drain centre bore intercommunication, and rotary driving piece is used for ordering about feed liquor hollow tube and rotatory drain dish and rotates.
Furthermore, the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow pipe, the liquid outlet cavity is communicated with the liquid outlet hollow supporting pipe, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow pipe, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting pipe and the liquid outlet cavity.
Further, the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the rotary driving piece, the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to ascend and descend through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.
Further, the liquid cooling stage comprises a liquid cooling stage body and a bearing upper cover arranged on the liquid cooling stage body, a sealing ring is arranged between the bearing upper cover and the liquid cooling stage body, and the cutter is borne on the bearing upper cover.
Further, the cold dish of vacuum cup base includes seal installation in the cold dish body of vacuum cup bottom and sets up in the inside cold dish cavity of cold dish body, and the leading-in mobile coolant liquid of cold dish cavity is used for cooling cold dish body, and liquid cooling microscope carrier subassembly passes cold dish body and slides and set up in cold dish body.
Further, a plurality of second guide rods which are arranged in parallel are fixedly installed on the cold plate body, and the second guide rods are respectively connected with the liquid cooling stage assembly in a sliding mode.
The invention has the beneficial effects that:
1. the liquid cooling stage assembly and the vacuum cover base cold plate can be cooled effectively and quickly, so that the liquid cooling stage assembly and the vacuum cover can work in a high-temperature environment for a long time, the service lives of the liquid cooling stage assembly and the vacuum cover are prolonged, and the production cost is reduced;
2. the inside vacuum environment that also bleeds of elastic sealing element, elastic sealing element's one end is fixed and sealed and sets up in liquid cooling microscope carrier subassembly, do not need the action for liquid cooling microscope carrier subassembly elastic sealing element, elastic sealing element's the other end is fixed and sealed and set up in the cold dish of vacuum hood base, also do not need the action for the cold dish elastic sealing element of vacuum hood base, elastic sealing element is through the up-and-down motion of self elasticity in order to adapt to liquid cooling microscope carrier subassembly, consequently, can strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation greatly, effectively avoid the air leakage of vacuum hood, the film deposition on cutter surface is effectual.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic cross-sectional structure of the present invention.
FIG. 3 is a schematic structural diagram of a spin-on fluid-conducting disk according to the present invention.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
As shown in fig. 1 to 3, the loading device of a coating machine provided by the invention comprises a vacuum cover 21, a liquid cooling stage assembly 65, an elastic sealing member 66 and a vacuum cover base cold plate 67, wherein the vacuum cover base cold plate 67 is hermetically mounted on the bottom wall of the vacuum cover 21, the vacuum cover base cold plate 67 is used for cooling the vacuum cover 21, the liquid cooling stage assembly 65 is slidably arranged on the bottom wall of the vacuum cover 21, the liquid cooling stage assembly 65 is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67 are both of a hollow structure, cooling liquid is introduced into the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67 to realize cooling, the elastic sealing member 66 is sleeved on the liquid cooling stage assembly 65, one end of the elastic sealing member 66 is hermetically mounted with the liquid cooling stage assembly 65, and the other end of the elastic sealing member 66 is hermetically mounted with the vacuum cover base cold plate 67. The elastomeric seal 66 is made of an elastomeric material.
In the practical application, the cutter is placed on liquid cooling microscope stage subassembly 65, the inside evacuation of vacuum cover 21 is and the heating, make the cutter surface be in the best deposition temperature, liquid cooling microscope stage subassembly 65 and vacuum cover base cold plate 67 are hollow structure, liquid cooling microscope stage subassembly 65 and the inside leading-in mobile coolant liquid of vacuum cover base cold plate 67, can be effective, realize the cooling to liquid cooling microscope stage subassembly 65 and vacuum cover base cold plate 67 fast, make liquid cooling microscope stage subassembly 65 and vacuum cover 21 can be in high temperature environment work for a long time, prolong liquid cooling microscope stage subassembly 65 and vacuum cover 21's life, and the production cost is reduced. The liquid cooling stage assembly 65 is arranged on the vacuum cover base cold plate 67 in a sliding mode, the vacuum cover base cold plate 67 is installed on the bottom wall of the vacuum cover 21 in a sealing mode, a mounting hole is reserved at the connecting position of the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67, the liquid cooling stage assembly 65 can leak gas in the action process that the mounting hole moves up and down, the elastic sealing element 66 is fixed and arranged at one end of the elastic sealing element 66 in a sealing mode and does not need to move relative to the liquid cooling stage assembly 65, the other end of the elastic sealing element 66 is fixed and arranged on the vacuum cover base cold plate 67 in a sealing mode, the elastic sealing element 66 does not need to move relative to the vacuum cover base cold plate 67, the elastic sealing element 66 does not need to move due to the elasticity of the elastic sealing element 66, the sealing performance of the installation of the liquid cooling stage assembly 65 and the vacuum cover 21 can be greatly enhanced, the vacuum cover is effectively prevented from leaking gas, and the film deposition effect on the surface of the cutter is good.
In this embodiment, the liquid cooling stage assembly 65 includes a frame 68, a liquid cooling stage 50, a liquid outlet hollow support tube 58, a lifting drive structure 69 and a rotary drive member 59, the frame 68 is fixedly mounted at the bottom of the vacuum cover 21, the lifting drive structure 69 is mounted on the frame 68 and is drivingly connected to the liquid outlet hollow support tube 58, the upper end of the liquid outlet hollow support tube 58 protrudes into the vacuum cover 21 and is fixedly connected to the liquid cooling stage 50, the lower end of the liquid outlet hollow support tube 58 is fixedly connected to the rotary drive member 59, the liquid outlet hollow support tube 58 is slidably disposed on the cooling plate 67 of the vacuum cover base, a liquid cooling cavity 52 is disposed inside the liquid cooling stage 50, the liquid outlet hollow support tube 58 is communicated with the liquid cooling cavity 52, a rotary liquid guiding plate 51 is rotatably mounted in the liquid cooling cavity 52, an output end of the rotary drive member 59 is connected to the rotary liquid guiding plate 51, cooling liquid is introduced into the liquid cooling cavity 52, and the rotary liquid guiding plate 51 is used for stirring the cooling liquid inside the liquid cooling cavity 52.
In practical application, the cutter is placed on the liquid cooling microscope stage 50, the inside evacuation and the heating of vacuum cover 21, lift drive structure 69 is used for accurately drive control liquid cooling microscope stage 50 along the displacement of vertical direction, the distance of strict control cutter and the source that generates heat, make the cutter surface be in the best deposition temperature, liquid cooling cavity 52 leading-in flowing coolant liquid, rotatory drain pan 51 lasts the rotation, stir the inside coolant liquid of liquid cooling cavity 52 uniformly, rotatory drain pan 51's design can be effectively, realize the cooling to liquid cooling microscope stage 50 fast, make liquid cooling microscope stage 50 can work under the high temperature environment for a long time, avoid the liquid cooling microscope stage to burn and lose, service life is prolonged, and production cost is reduced.
In this embodiment, the elastic sealing element 66 is an elastic ring body, the elastic sealing element 66 is sleeved outside the hollow liquid outlet supporting tube 58, one end of the elastic sealing element 66 is connected with the bottom wall of the vacuum cover 21 in a sealing manner, and the other end of the elastic sealing element 66 is connected with the rotary driving element 59 in a sealing manner; when the liquid-cooled stage 50 moves upward, the elastic sealing member 66 is in a compressed state; when the liquid-cooled stage 50 moves downward, the elastomeric seal 66 is in an expanded state.
In practical application, the liquid outlet hollow support tube 58 is slidably arranged on the bottom wall of the vacuum cover 21, a mounting hole is reserved at the joint of the liquid outlet hollow support tube 58 and the vacuum cover base cold plate 67, and an air leakage situation occurs in the action process that the liquid outlet hollow support tube 58 moves up and down in the mounting hole.
In this embodiment, the rotary liquid guiding disc 51 includes a liquid guiding flat plate 53 and a plurality of blades 54 disposed on the liquid guiding flat plate 53, the plurality of blades 54 are in an annular array along a central axis of the liquid guiding flat plate 53, the liquid guiding flat plate 53 is rotatably mounted in the liquid cooling cavity 52, the plurality of blades 54 are used for stirring the cooling liquid in the liquid cooling cavity 52, the liquid guiding flat plate 53 is provided with a liquid guiding central hole 55 and an assembling convex ring body 56, and the assembling convex ring body 56 and the liquid guiding central hole 55 are coaxially disposed.
In practical application, during cutter deposition heating, the cutter is placed on the liquid cooling platform 50, flowing cooling liquid is introduced into the liquid cooling cavity 52, the rotary liquid guiding plate 51 continuously rotates, the cooling liquid inside the liquid cooling cavity 52 is uniformly stirred, the sheet 54 is of a sheet structure, the panel height of the sheet 54 is matched with the height of the liquid cooling cavity 52, the sheet 54 can fully drive the cooling liquid to flow, the liquid cooling platform 50 is uniform and can be cooled quickly, the rotary liquid guiding plate 51 can be effectively and quickly designed to cool the liquid cooling platform 50, the liquid cooling platform 50 can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform is avoided, the service life is prolonged, and the production cost is reduced. The rotary fluid conducting disc 51 may be an integrally formed structure, and the fluid conducting central hole 55 is used for introducing the flowing cooling fluid.
In this embodiment, the liquid cooling stage assembly 65 further includes a liquid inlet hollow tube 57, the liquid inlet hollow tube 57 is disposed inside the liquid outlet hollow support tube 58, the lower end of the liquid inlet hollow tube 57 is connected to the output end of the rotary driving member 59, the upper end of the liquid inlet hollow tube 57 protrudes into the liquid cooling cavity 52 and is clamped to the assembling convex ring body 56, the liquid inlet hollow tube 57 is communicated with the liquid guiding central hole 55, and the rotary driving member 59 is used for driving the liquid inlet hollow tube 57 and the rotary liquid guiding disc 51 to rotate. Specifically, when feed liquor hollow tube 57 is used for leading-in the coolant liquid, still be used for driving about rotatory liquid guide plate 51 and continuously rotate, feed liquor hollow tube 57 is connected with the drive of liquid guide plate 53 through assembly convex ring body 56, and structural design is reasonable, and rotatory liquid guide plate 51 can be effectively, evenly, realize the cooling to liquid cooling microscope carrier 50 fast for liquid cooling microscope carrier 50 can be in work under the high temperature environment for a long time, avoids liquid cooling microscope carrier 50 to burn out, increase of service life, reduction in production cost.
In this embodiment, the rotary driving member 59 is provided with a liquid inlet cavity 60 and a liquid outlet cavity 61, the liquid inlet cavity 60 is communicated with the liquid inlet hollow tube 57, the liquid outlet cavity 61 is communicated with the liquid outlet hollow support tube 58, and the cooling liquid sequentially flows through the liquid inlet cavity 60, the liquid inlet hollow tube 57, the liquid guiding central hole 55, the liquid cooling cavity 52, the liquid outlet hollow support tube 58 and the liquid outlet cavity 61. Specifically, because the coolant through liquid cooling cavity 52 has absorbed the heat, consequently the coolant temperature of going out liquid chamber 61 is higher than the coolant temperature of going into liquid chamber 60, goes into liquid chamber 60 and goes out the hot interval setting of liquid chamber 61, guarantees the cooling effect of the coolant of going into liquid chamber 60, can effectively, evenly, realize the cooling to the liquid cooling microscope carrier fast.
In this embodiment, the lifting driving structure 69 includes a lifting driving body 70 fixedly mounted on the frame 68 and a supporting frame 71 drivingly connected to the lifting driving body 70, one end of the supporting frame 71 is slidably disposed on the frame 68, the other end of the supporting frame 71 is fixedly mounted on the rotary driving member 59, the lifting driving body 70 drives the rotary driving member 59, the liquid outlet hollow supporting tube 58 and the liquid cooling stage 50 to move up and down via the supporting frame 71, a plurality of first guiding rods 72 are mounted on the frame 68, the plurality of first guiding rods 72 are disposed in parallel, the supporting frame 71 is penetrated by the plurality of first guiding rods 72, and the supporting frame 71 moves along the first guiding rods 72. Specifically, the lifting driving body 70 can be driven by a screw rod, the screw rod driving has the characteristic of high precision, the up-and-down movement distance of the liquid cooling carrier 50 can be accurately controlled, the stroke of the cutter can be controlled, the distance between the cutter and a heating source is strictly controlled, the surface of the cutter is at the optimal deposition temperature, and the film deposition effect on the surface of the cutter is good; first guide bar 72 bears a weight of 71 and has the guide effect for bear a weight of 71 and accurately follow the route removal of predetermineeing, further make the displacement of liquid cooling microscope carrier 50 accurate, a plurality of cutter surfaces can thermally equivalent, and the coating is effectual, and the yields is high.
In this embodiment, the liquid cooling stage 50 includes a liquid cooling stage body 63 and a bearing upper cover 64 installed on the liquid cooling stage body 63, a sealing ring 25 is disposed between the bearing upper cover 64 and the liquid cooling stage body 63, and the tool is supported by the bearing upper cover 64. Specifically, the seal ring 25 can prevent the coolant in the liquid cooling cavity 52 from overflowing, enhance the sealing performance of the liquid cooling stage 50, and prevent the coolant from being wasted.
In this embodiment, the vacuum cover base cold plate 67 includes a cold plate body 73 hermetically mounted at the bottom of the vacuum cover 21 and a cold plate cavity 74 disposed inside the cold plate body 73, the cold plate cavity 74 introduces flowing cooling liquid for cooling the cold plate body 73, and the liquid cooling stage assembly 65 passes through the cold plate body 73 and is slidably disposed on the cold plate body 73. Specifically, the cold plate body 73 is arranged at the bottom of the vacuum cover 21, and the flowing cooling liquid is introduced into the cold plate cavity 74, so that the vacuum cover 21 can be effectively protected, when the cold plate 67 on the base of the vacuum cover is used up, a new cold plate 67 on the base of the vacuum cover can be replaced, and the maintenance cost can be saved; the cold plate cavity 74 is flat, so that the cooling area can be enlarged, quick cooling is realized, and the cooling effect is good.
In this embodiment, the plurality of second guide rods 75 arranged in parallel to each other are fixedly mounted on the cold plate body 73, and the plurality of second guide rods 75 are slidably connected to the carrier 71 of the liquid cooling stage assembly 65, respectively. Specifically, the second guide rod 75 and the first guide rod 72 all have a guiding effect on the bearing frame 71, so that the central axes of the cold plate body 73, the bearing frame 71, the liquid outlet hollow support tube 58 and the liquid cooling carrying platform 50 are arranged in parallel, the bearing frame 71 horizontally and accurately moves along a preset path, the displacement of the liquid cooling carrying platform 50 is further accurate, the surfaces of a plurality of cutters can be uniformly heated, the coating effect is good, and the yield is high.
All the technical features in the embodiment can be freely combined according to actual needs.
The above embodiments are preferred implementations of the present invention, and besides, the present invention can be implemented in other ways, and any obvious substitutions without departing from the concept of the present invention are within the protection scope of the present invention.
Claims (5)
1. The utility model provides a material loading device of coating machine, includes the vacuum hood, its characterized in that: the vacuum cover base cold plate is hermetically arranged on the bottom wall of the vacuum cover, the vacuum cover base cold plate is used for cooling the vacuum cover, the liquid cooling platform assembly is slidably arranged on the bottom wall of the vacuum cover, the liquid cooling platform assembly is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling platform assembly and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform assembly and the vacuum cover base cold plate to realize cooling, the elastic sealing member is sleeved on the liquid cooling platform assembly, one end of the elastic sealing member is hermetically connected with the bottom wall of the vacuum cover, and the other end of the elastic sealing member is hermetically connected with the rotary driving member;
the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid outlet hollow supporting tube, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly arranged at the bottom of the vacuum cover, the lifting driving structure is arranged on the rack and is in driving connection with the liquid outlet hollow supporting tube, the upper end of the liquid outlet hollow supporting tube extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting tube is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting tube is slidably arranged on a cooling plate of a base of the vacuum cover, a liquid cooling cavity is arranged in the liquid cooling platform, the liquid outlet hollow supporting tube is communicated with the liquid cooling cavity, a rotary liquid guide plate is rotatably arranged in the liquid cooling cavity, the output end of the rotary driving piece is connected with the rotary liquid guide plate, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guide plate is used for stirring the cooling liquid in the liquid cooling cavity;
the rotary liquid guide disc comprises a liquid guide flat plate and a plurality of blades arranged on the liquid guide flat plate, the plurality of blades are in an annular array along the central axis of the liquid guide flat plate, the liquid guide flat plate is rotatably arranged in the liquid cooling cavity, the plurality of blades are used for stirring cooling liquid in the liquid cooling cavity, the liquid guide flat plate is provided with a liquid guide central hole and an assembling convex ring body, and the assembling convex ring body and the liquid guide central hole are coaxially arranged;
the liquid cooling platform deck assembly further comprises a liquid inlet hollow pipe, the liquid inlet hollow pipe is arranged inside the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is clamped with the assembling convex ring body, the liquid inlet hollow pipe is communicated with the liquid guiding central hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guiding disc to rotate;
the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow pipe, the liquid outlet cavity is communicated with the liquid outlet hollow supporting pipe, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow pipe, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting pipe and the liquid outlet cavity;
the lifting driving structure comprises a lifting driving body fixedly arranged on the rack and a bearing frame in driving connection with the lifting driving body, a plurality of first guide rods arranged in parallel are arranged on the rack, the plurality of first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods;
the liquid cooling microscope carrier comprises a liquid cooling microscope carrier body and a bearing upper cover arranged on the liquid cooling microscope carrier body, a sealing ring is arranged between the bearing upper cover and the liquid cooling microscope carrier body, and the cutter is borne on the bearing upper cover.
2. The loading device of a coating machine according to claim 1, characterized in that: the elastic sealing element is an elastic annular body and is sleeved outside the liquid outlet hollow supporting tube; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.
3. The loading device of a coating machine according to claim 1, characterized in that: one end of the bearing frame is arranged on the rack in a sliding mode, the other end of the bearing frame is fixedly installed with the rotary driving piece, and the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to lift through the bearing frame.
4. The loading device of a coating machine according to claim 1, characterized in that: the vacuum cover base cold plate comprises a cold plate body and a cold plate cavity, wherein the cold plate body is hermetically arranged at the bottom of the vacuum cover, the cold plate cavity is arranged inside the cold plate body, flowing cooling liquid is introduced into the cold plate cavity to be used for cooling the cold plate body, and the liquid cooling platform deck assembly penetrates through the cold plate body and is arranged on the cold plate body in a sliding mode.
5. The loading device of the coating machine according to claim 4, characterized in that: the cold plate body is fixedly provided with a plurality of second guide rods which are arranged in parallel, and the second guide rods are respectively connected with the liquid cooling carrying platform assembly in a sliding manner.
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| CN202010899378.5A CN112251732B (en) | 2020-08-31 | 2020-08-31 | Material carrying device of coating machine |
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| CN112251732B true CN112251732B (en) | 2023-02-17 |
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| US6902623B2 (en) * | 2001-06-07 | 2005-06-07 | Veeco Instruments Inc. | Reactor having a movable shutter |
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| US20080035306A1 (en) * | 2006-08-08 | 2008-02-14 | White John M | Heating and cooling of substrate support |
| KR102437125B1 (en) * | 2014-06-27 | 2022-08-25 | 어플라이드 머티어리얼스, 인코포레이티드 | Plasma corrosion resistive heater for high temperature processing |
| US10266943B2 (en) * | 2014-06-27 | 2019-04-23 | Applied Materials, Inc. | Plasma corrosion resistive heater for high temperature processing |
| CN107841727A (en) * | 2017-12-15 | 2018-03-27 | 北京创昱科技有限公司 | A kind of cooling component and vacuum coating equipment |
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| JPH07316847A (en) * | 1994-05-17 | 1995-12-05 | Anelva Corp | Electrode for substrate treating device |
| CN107400875A (en) * | 2017-07-12 | 2017-11-28 | 华中科技大学 | A kind of hot-filament chemical vapor deposition equipment |
| CN111448646A (en) * | 2017-12-11 | 2020-07-24 | 应用材料公司 | Cryogenically cooled rotatable electrostatic chuck |
| CN213825684U (en) * | 2020-08-31 | 2021-07-30 | 广东鼎泰机器人科技有限公司 | Material carrying device of coating machine |
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