CN213388886U - Vacuum cover liquid cooling structure with elastic sealing element - Google Patents
Vacuum cover liquid cooling structure with elastic sealing element Download PDFInfo
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- CN213388886U CN213388886U CN202021871521.1U CN202021871521U CN213388886U CN 213388886 U CN213388886 U CN 213388886U CN 202021871521 U CN202021871521 U CN 202021871521U CN 213388886 U CN213388886 U CN 213388886U
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Abstract
The utility model belongs to the technical field of the coating equipment technique and specifically relates to indicate a vacuum cover liquid cooling structure with elastic sealing element, it includes the vacuum cover, liquid cooling microscope carrier subassembly and elastic sealing element, liquid cooling microscope carrier subassembly includes the liquid cooling microscope carrier, go out liquid hollow stay tube and rotary driving piece, elastic sealing element is the elasticity ring body, the inside liquid cooling cavity that is equipped with of liquid cooling microscope carrier, the liquid cooling cavity rotates and is installed rotatory liquid guide plate, rotary driving piece's output and rotatory liquid guide plate are connected, the leading-in coolant liquid of liquid cooling cavity, rotatory liquid guide plate is used for mixxing the inside coolant liquid of liquid cooling cavity. The utility model discloses can be effective, realize the cooling to the liquid cooling microscope carrier fast for the liquid cooling microscope carrier can be in work under the high temperature environment for a long time, avoids the liquid cooling microscope carrier to burn out, can also strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation, and the film deposition on cutter surface is effectual.
Description
Technical Field
The utility model belongs to the technical field of coating equipment technique and specifically relates to indicate a vacuum cup liquid cooling structure with elastic sealing element.
Background
The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the diamond film deposition is carried out on the blade part of a drill bit or a milling cutter by using the HFCVD method, the surface temperature value, the temperature field and the distribution uniformity of the reactive group density field of the deposition region (blade region, substrate) have great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films are in the range of about 500-1000 deg.C, with an optimum range of about 700-900 deg.C.
The feeding device of the traditional coating equipment is usually in a vacuum high-temperature state, and is usually cooled by water in order to prevent the feeding device from being burnt, but the cooling structure of the feeding device of the coating equipment in the prior art is unreasonable in design, and at least the following problems exist:
1. the feeding device has poor cooling effect, is easy to burn and has short service life, and can not reach the production standard;
2. the vacuum cover is assembled with the feeding device, the sealing performance is not enough, the condition of air leakage can appear on the vacuum cover when the feeding device acts, the film deposition effect on the surface of the cutter is influenced, and the yield is low.
Disclosure of Invention
The to-be-solved technical problem of the utility model is to provide a vacuum cover liquid cooling structure with elastic sealing element can effectively, realize the cooling to the liquid cooling microscope carrier fast for the liquid cooling microscope carrier can be in work under the high temperature environment for a long time, avoids the liquid cooling microscope carrier to burn out, can also strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum cover installation, and the film deposition on cutter surface is effectual.
In order to solve the technical problem, the utility model discloses a following technical scheme:
a vacuum cover liquid cooling structure with an elastic sealing element comprises a vacuum cover, the elastic sealing element and a liquid cooling platform assembly which is slidably installed in the vacuum cover, wherein the liquid cooling platform assembly comprises a liquid cooling platform, a liquid outlet hollow supporting tube and a rotary driving element, the upper end of the liquid outlet hollow supporting tube extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting tube is fixedly connected with the rotary driving element, the liquid outlet hollow supporting tube is slidably arranged on the bottom wall of the vacuum cover, the elastic sealing element is an elastic annular body, the elastic sealing element is sleeved on the outer side of the liquid outlet hollow supporting tube, one end of the elastic sealing element is hermetically connected with the bottom wall of the vacuum cover, and the; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing piece is in an expansion state; a liquid cooling cavity is arranged in the liquid cooling platform, the liquid outlet hollow supporting tube is communicated with the liquid cooling cavity, a rotary liquid guiding disc is rotatably mounted in the liquid cooling cavity, the output end of the rotary driving piece is connected with the rotary liquid guiding disc, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guiding disc is used for stirring the cooling liquid in the liquid cooling cavity.
Further, rotatory drain dish is including leading the liquid dull and stereotyped and set up in a plurality of leaves of leading the liquid dull and stereotyped, and a plurality of leaves are the annular array along the dull and stereotyped central axis of leading the liquid, and the dull and stereotyped rotation of leading the liquid is installed in the liquid cooling cavity, and a plurality of leaves are used for stirring the inside coolant liquid of liquid cooling cavity, and the dull and stereotyped liquid that leads is equipped with drain centre bore and assembly bulge loop body, and assembly bulge loop body sets up with drain centre bore is coaxial.
Further, the liquid cooling structure of the vacuum cover further comprises a liquid inlet hollow pipe, the liquid inlet hollow pipe is arranged inside the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is clamped with the assembling convex ring body, the liquid inlet hollow pipe is communicated with the liquid guiding center hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guiding disc to rotate.
Furthermore, the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.
Further, a sealing ring is arranged between the liquid outlet hollow supporting tube and the liquid cooling platform deck.
Further, the liquid cooling stage comprises a liquid cooling stage body and a bearing upper cover arranged on the liquid cooling stage body, and a sealing ring is arranged between the bearing upper cover and the liquid cooling stage body.
Further, the liquid cooling structure of the vacuum cover further comprises a direct-drive device fixedly installed on the vacuum cover, and the direct-drive device is in driving connection with the liquid cooling platform deck assembly.
The utility model has the advantages that:
1. the liquid cooling cavity is used for introducing flowing cooling liquid, the rotary liquid guide plate continuously rotates to uniformly stir the cooling liquid in the liquid cooling cavity, and the design of the rotary liquid guide plate can effectively and quickly cool the liquid cooling platform, so that the liquid cooling platform can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform is avoided, the service life is prolonged, and the production cost is reduced;
2. because the interior of the elastic sealing element is also pumped to form a vacuum environment, the elastic sealing element does not need to act relative to the bottom wall of the vacuum cover, and the elastic sealing element also does not need to act relative to the rotary driving element, and the elastic sealing element adapts to the up-and-down action of the liquid outlet hollow supporting tube through the elasticity of the elastic sealing element, so that the sealing property of the installation of the liquid cooling stage assembly and the vacuum cover can be greatly enhanced, and the film deposition effect on the surface of the cutter is good.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic structural view of the rotary liquid guiding plate of the present invention.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
As shown in fig. 1 to 2, the utility model provides a vacuum hood liquid cooling structure with elastic sealing element, it includes vacuum hood 21, elastic sealing element 66 and liquid cooling stage assembly 65 that slidable mounting is in vacuum hood 21 inside, liquid cooling stage assembly 65 includes liquid cooling stage 50, goes out liquid hollow support tube 58 and rotary driving piece 59, the upper end of going out liquid hollow support tube 58 protrudes to vacuum hood 21 inside and with liquid cooling stage 50 fixed connection, the lower extreme of going out liquid hollow support tube 58 and rotary driving piece 59 fixed connection, it sets up in vacuum hood 21 bottom wall to go out liquid hollow support tube 58 to slide, elastic sealing element 66 is the elastic ring body, elastic sealing element 66 overlaps the outside of going out liquid hollow support tube 58, one end and the vacuum hood 21 bottom wall sealing connection of elastic sealing element 66, the other end and the rotary driving piece 59 sealing connection of elastic sealing element 66; when the liquid-cooled stage 50 moves upward, the elastic sealing member 66 is in a compressed state; when the liquid-cooled stage 50 moves downward, the elastic sealing member 66 is in an expanded state; a liquid cooling cavity 52 is arranged in the liquid cooling carrying platform 50, a liquid outlet hollow supporting pipe 58 is communicated with the liquid cooling cavity 52, a rotary liquid guiding disc 51 is rotatably installed in the liquid cooling cavity 52, the output end of a rotary driving piece 59 is connected with the rotary liquid guiding disc 51, cooling liquid is introduced into the liquid cooling cavity 52, and the rotary liquid guiding disc 51 is used for stirring the cooling liquid in the liquid cooling cavity 52. The elastomeric seal 66 is made of an elastomeric material.
In practical application, the cutter is placed on the liquid cooling microscope stage 50, the vacuum cover 21 is internally vacuumized and heated, the surface of the cutter is at the optimal deposition temperature, flowing cooling liquid is introduced into the liquid cooling cavity 52, the rotary liquid guide disc 51 continuously rotates and uniformly stirs the cooling liquid inside the liquid cooling cavity 52, the design of the rotary liquid guide disc 51 can effectively and quickly cool the liquid cooling microscope stage 50, the liquid cooling microscope stage 50 can work in a high-temperature environment for a long time, the burning loss of the liquid cooling microscope stage is avoided, the service life is prolonged, and the production cost is reduced. The liquid outlet hollow support pipe 58 is arranged on the bottom wall of the vacuum cover 21 in a sliding way, a mounting hole is reserved at the joint of the liquid outlet hollow support pipe 58 and the bottom wall of the vacuum cover, the liquid outlet hollow support pipe 58 is positioned in the air leakage situation during the up-and-down movement of the mounting hole, because the interior of the elastic sealing member 66 is also evacuated to form a vacuum environment, one end of the elastic sealing member 66 is fixedly and hermetically arranged on the bottom wall of the vacuum hood, the elastic sealing member 66 does not need to act relative to the bottom wall of the vacuum hood, the other end of the elastic sealing member 66 is fixedly and hermetically arranged on the rotary driving member 59, the elastic sealing member 66 does not need to act relative to the rotary driving member 59, the elastic sealing member 66 adapts to the up-and-down action of the liquid outlet hollow supporting pipe 58 through the elasticity of the elastic sealing member 66, therefore, the tightness of the installation of the liquid cooling stage assembly and the vacuum cover can be greatly enhanced, and the film deposition effect on the surface of the cutter is good.
In this embodiment, the rotary liquid guiding disc 51 includes a liquid guiding flat plate 53 and a plurality of blades 54 disposed on the liquid guiding flat plate 53, the plurality of blades 54 are in an annular array along a central axis of the liquid guiding flat plate 53, the liquid guiding flat plate 53 is rotatably mounted in the liquid cooling cavity 52, the plurality of blades 54 are used for stirring the cooling liquid in the liquid cooling cavity 52, the liquid guiding flat plate 53 is provided with a liquid guiding central hole 55 and an assembling convex ring body 56, and the assembling convex ring body 56 and the liquid guiding central hole 55 are coaxially disposed.
In practical application, during cutter deposition heating, the cutter is placed on the liquid cooling platform 50, flowing cooling liquid is introduced into the liquid cooling cavity 52, the rotary liquid guiding plate 51 continuously rotates, the cooling liquid inside the liquid cooling cavity 52 is uniformly stirred, the sheet 54 is of a sheet structure, the panel height of the sheet 54 is matched with the height of the liquid cooling cavity 52, the sheet 54 can fully drive the cooling liquid to flow, the liquid cooling platform 50 is uniform and can be cooled quickly, the rotary liquid guiding plate 51 can be effectively and quickly designed to cool the liquid cooling platform 50, the liquid cooling platform 50 can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform is avoided, the service life is prolonged, and the production cost is reduced. The rotary fluid conducting disc 51 may be an integrally formed structure, and the fluid conducting central hole 55 is used for introducing the flowing cooling fluid.
In this embodiment, the liquid cooling structure of the vacuum hood further includes a liquid inlet hollow tube 57, the liquid inlet hollow tube 57 is disposed inside the liquid outlet hollow support tube 58, the lower end of the liquid inlet hollow tube 57 is connected with the output end of the rotary driving member 59, the upper end of the liquid inlet hollow tube 57 protrudes into the liquid cooling cavity 52 and is clamped with the assembling convex ring body 56, the liquid inlet hollow tube 57 is communicated with the liquid guiding central hole 55, and the rotary driving member 59 is used for driving the liquid inlet hollow tube 57 and the rotary liquid guiding disc 51 to rotate. Specifically, when feed liquor hollow tube 57 is used for leading-in coolant liquid, still be used for driving about rotatory liquid guide plate 51 and continuously rotate, feed liquor hollow tube 57 is connected with the drive of liquid guide plate 53 via assembly bulge loop body 56, and structural design is reasonable, and rotatory liquid guide plate 51 can be effectively, evenly, realize the cooling to liquid cooling microscope carrier 50 fast for liquid cooling microscope carrier 50 can be in work under the high temperature environment for a long time, avoids liquid cooling microscope carrier 50 to burn out, increase of service life, reduction in production cost.
In this embodiment, the rotary driving member 59 is provided with a liquid inlet cavity 60 and a liquid outlet cavity 61, the liquid inlet cavity 61 is communicated with the liquid inlet hollow tube 57, the liquid outlet cavity 61 is communicated with the liquid outlet hollow support tube 58, and the cooling liquid sequentially flows through the liquid inlet cavity 60, the liquid inlet hollow tube 57, the liquid guiding central hole 55, the liquid cooling cavity 52, the liquid outlet hollow support tube 58 and the liquid outlet cavity 61. Specifically, because the coolant through liquid cooling cavity 52 has absorbed the heat, consequently the coolant temperature of going out liquid chamber 61 is higher than the coolant temperature of going into liquid chamber 60, goes into liquid chamber 60 and goes out the hot interval setting of liquid chamber 61, guarantees the cooling effect of the coolant of going into liquid chamber 60, can effectively, evenly, realize the cooling to the liquid cooling microscope carrier fast.
In this embodiment, a sealing ring 25 is disposed between the hollow liquid outlet supporting tube 58 and the liquid cooling stage 50. Specifically, the seal ring 25 can prevent the coolant in the liquid cooling cavity 52 from overflowing, enhance the sealing performance of the liquid cooling stage 50, and prevent the coolant from being wasted.
In this embodiment, the liquid cooling stage 50 includes a liquid cooling stage body 51 and a bearing upper cover 64 mounted on the liquid cooling stage body 51, and a seal ring 25 is provided between the bearing upper cover 64 and the liquid cooling stage body 63. Specifically, the seal ring 25 can prevent the coolant in the liquid cooling cavity 52 from overflowing, enhance the sealing performance of the liquid cooling stage 50, and prevent the coolant from being wasted.
In this embodiment, the liquid cooling structure of the vacuum cover further includes a direct-drive device (not shown in the figure) fixedly installed on the vacuum cover 21, and the direct-drive device is drivingly connected to the liquid cooling stage assembly 65. The direct drive device drives the whole liquid cooling stage assembly 65 to lift in the vertical direction.
All the technical features in the embodiment can be freely combined according to actual needs.
The above-mentioned embodiment is the utility model discloses the implementation scheme of preferred, in addition, the utility model discloses can also realize by other modes, any obvious replacement is all within the protection scope of the utility model under the prerequisite that does not deviate from this technical scheme design.
Claims (7)
1. The utility model provides a vacuum cover liquid cooling structure with elastic sealing member, includes the vacuum cover, its characterized in that: the liquid cooling platform assembly comprises a liquid cooling platform, a liquid outlet hollow supporting tube and a rotary driving piece, the upper end of the liquid outlet hollow supporting tube extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting tube is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting tube is arranged on the bottom wall of the vacuum cover in a sliding mode, the elastic sealing piece is an elastic annular body, the elastic sealing piece is sleeved on the outer side of the liquid outlet hollow supporting tube, one end of the elastic sealing piece is connected with the bottom wall of the vacuum cover in a sealing mode, and the other end of the elastic sealing piece is connected with the rotary driving piece in a sealing; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing piece is in an expansion state; a liquid cooling cavity is arranged in the liquid cooling platform, the liquid outlet hollow supporting tube is communicated with the liquid cooling cavity, a rotary liquid guiding disc is rotatably mounted in the liquid cooling cavity, the output end of the rotary driving piece is connected with the rotary liquid guiding disc, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guiding disc is used for stirring the cooling liquid in the liquid cooling cavity.
2. The vacuum housing liquid cooling structure with elastic seal of claim 1, wherein: rotatory drain dish is including leading the liquid flat board and set up in a plurality of leaves of leading the liquid flat board, and a plurality of leaves are annular array along the dull and stereotyped the central axis of leading the liquid, and the dull and stereotyped rotation of leading the liquid is installed in the liquid cooling cavity, and a plurality of leaves are used for stirring the inside coolant liquid of liquid cooling cavity, and the liquid flat board of leading is equipped with the drain centre bore and assembles the bulge loop body, assembles the bulge loop body and leads the coaxial setting of liquid centre bore.
3. The vacuum housing liquid cooling structure with elastic seal of claim 2, wherein: the liquid cooling structure of the vacuum cover further comprises a liquid inlet hollow pipe, the liquid inlet hollow pipe is arranged inside the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is connected with the assembling convex ring body in a clamped mode, the liquid inlet hollow pipe is communicated with the liquid guiding center hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guiding disc to rotate.
4. The vacuum housing liquid cooling structure with elastomeric seal of claim 3, wherein: the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.
5. The vacuum housing liquid cooling structure with elastic seal of claim 1, wherein: and a sealing ring is arranged between the liquid outlet hollow supporting tube and the liquid cooling platform deck.
6. The vacuum housing liquid cooling structure with elastic seal of claim 1, wherein: the liquid cooling microscope carrier comprises a liquid cooling microscope carrier body and a bearing upper cover arranged on the liquid cooling microscope carrier body, and a sealing ring is arranged between the bearing upper cover and the liquid cooling microscope carrier body.
7. The vacuum housing liquid cooling structure with elastic seal of claim 1, wherein: the liquid cooling structure of the vacuum cover further comprises a direct-drive device fixedly installed on the vacuum cover, and the direct-drive device is in driving connection with the liquid cooling platform assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021871521.1U CN213388886U (en) | 2020-08-31 | 2020-08-31 | Vacuum cover liquid cooling structure with elastic sealing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021871521.1U CN213388886U (en) | 2020-08-31 | 2020-08-31 | Vacuum cover liquid cooling structure with elastic sealing element |
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| Publication Number | Publication Date |
|---|---|
| CN213388886U true CN213388886U (en) | 2021-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021871521.1U Active CN213388886U (en) | 2020-08-31 | 2020-08-31 | Vacuum cover liquid cooling structure with elastic sealing element |
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|---|---|
| CN (1) | CN213388886U (en) |
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- 2020-08-31 CN CN202021871521.1U patent/CN213388886U/en active Active
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