CN213825684U - Material carrying device of coating machine - Google Patents
Material carrying device of coating machine Download PDFInfo
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- CN213825684U CN213825684U CN202021871617.8U CN202021871617U CN213825684U CN 213825684 U CN213825684 U CN 213825684U CN 202021871617 U CN202021871617 U CN 202021871617U CN 213825684 U CN213825684 U CN 213825684U
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Abstract
The utility model belongs to the technical field of the coating equipment technique and specifically relates to indicate a material loading device of coating machine, it includes the vacuum cover, liquid cooling microscope carrier subassembly, the cold dish of elastic sealing element and vacuum cover base, the cold dish seal installation of vacuum cover base is in the diapire of vacuum cover, liquid cooling microscope carrier subassembly slides and sets up in the vacuum cover diapire, liquid cooling microscope carrier subassembly and the cold dish of vacuum cover base are hollow structure, the leading-in liquid cooling microscope carrier subassembly of coolant liquid and the cold dish of vacuum cover base are inside in order to realize the cooling, elastic sealing element's one end and liquid cooling microscope carrier subassembly seal installation, elastic sealing element's the other end and the cold dish seal installation of vacuum cover base. The utility model discloses can be effective, realize the cooling to liquid cooling microscope carrier and vacuum hood bottom wall fast for the liquid cooling microscope carrier can be in work under the high temperature environment for a long time, avoids the liquid cooling microscope carrier to burn out, can also strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation, and the film deposition on cutter surface is effectual.
Description
Technical Field
The utility model belongs to the technical field of the coating equipment technique and specifically relates to indicate a material loading device of coating machine.
Background
The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the diamond film deposition is carried out on the blade part of a drill bit or a milling cutter by using the HFCVD method, the surface temperature value, the temperature field and the distribution uniformity of the reactive group density field of the deposition region (blade region, substrate) have great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films are in the range of about 500-1000 deg.C, with an optimum range of about 700-900 deg.C.
The feeding device of the traditional coating equipment is usually in a vacuum high-temperature state, and is usually cooled by water in order to prevent the feeding device from being burnt, but the cooling structure of the feeding device of the coating equipment in the prior art is unreasonable in design, and at least the following problems exist:
1. generally, the bottom wall of the vacuum cover and the feeding device are closer to a heating source, so that the working temperatures of the feeding device and the bottom wall of the vacuum cover are too high, the feeding device and the bottom wall of the vacuum cover are easily burnt by high temperature, the service life is short, the production cost is high, and the production standard cannot be met;
2. the vacuum cover is assembled with the feeding device, the sealing performance is not enough, the condition of air leakage can appear on the vacuum cover when the feeding device acts, the film deposition effect on the surface of the cutter is influenced, and the yield is low.
Disclosure of Invention
The to-be-solved technical problem of the utility model is to provide a material loading device of coating machine can be effectively, realize the cooling to liquid cooling microscope carrier and vacuum hood bottom wall fast for the liquid cooling microscope carrier can be in work under the high temperature environment for a long time, avoids the liquid cooling microscope carrier to burn and lose, can also strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation, and the film deposition on cutter surface is effectual.
In order to solve the technical problem, the utility model discloses a following technical scheme:
the utility model provides a material loading device of coating machine, it includes the vacuum cover, liquid cooling microscope carrier subassembly, elastic sealing element and the cold dish of vacuum cover base, the cold dish seal installation of vacuum cover base is in the diapire of vacuum cover, the cold dish of vacuum cover base is used for cooling down the vacuum cover, liquid cooling microscope carrier subassembly slides and sets up in the vacuum cover diapire, liquid cooling microscope carrier subassembly is used for bearing the weight of the cutter and adjusts the position height of cutter, liquid cooling microscope carrier subassembly and the cold dish of vacuum cover base are hollow structure, the leading-in liquid cooling microscope carrier subassembly of coolant liquid and the inside cooling that is in order to realize the cooling of vacuum cover base cold dish, liquid cooling microscope carrier subassembly is located to elastic sealing element cover, elastic sealing element's one end and liquid cooling microscope carrier subassembly seal installation, elastic sealing element's the other end and the cold dish seal installation of vacuum cover base.
Further, the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid outlet hollow supporting pipe, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the rack and is in driving connection with the liquid outlet hollow supporting pipe, the upper end of the liquid outlet hollow supporting pipe extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting pipe is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting pipe is arranged on a cold plate of a base of the vacuum cover in a sliding mode, a liquid cooling cavity is arranged inside the liquid cooling platform, the liquid outlet hollow supporting pipe is communicated with the liquid cooling cavity, a rotary liquid guiding plate is installed in the liquid cooling cavity in a rotating mode, the output end of the rotary driving piece is connected with the rotary liquid guiding plate, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guiding plate is used for stirring the cooling liquid inside the liquid cooling cavity.
Furthermore, the elastic sealing element is an elastic annular body, the elastic sealing element is sleeved outside the liquid outlet hollow supporting tube, one end of the elastic sealing element is in sealing connection with the bottom wall of the vacuum cover, and the other end of the elastic sealing element is in sealing connection with the rotary driving element; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.
Further, rotatory drain dish is including leading the liquid dull and stereotyped and set up in a plurality of leaves of leading the liquid dull and stereotyped, and a plurality of leaves are the annular array along the dull and stereotyped central axis of leading the liquid, and the dull and stereotyped rotation of leading the liquid is installed in the liquid cooling cavity, and a plurality of leaves are used for stirring the inside coolant liquid of liquid cooling cavity, and the dull and stereotyped liquid that leads is equipped with drain centre bore and assembly bulge loop body, and assembly bulge loop body sets up with drain centre bore is coaxial.
Further, liquid cooling microscope carrier subassembly still includes the feed liquor hollow tube, and the feed liquor hollow tube sets up in going out liquid hollow stay tube insidely, and the lower extreme and the output of rotary driving piece of feed liquor hollow tube are connected, and the upper end of feed liquor hollow tube stretches to in the liquid cooling cavity and with the joint of assembly bulge loop body, feed liquor hollow tube and drain centre bore intercommunication, and rotary driving piece is used for ordering about feed liquor hollow tube and rotatory drain dish and rotates.
Furthermore, the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.
Further, the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the rotary driving piece, the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to ascend and descend through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.
Further, the liquid cooling stage comprises a liquid cooling stage body and a bearing upper cover arranged on the liquid cooling stage body, a sealing ring is arranged between the bearing upper cover and the liquid cooling stage body, and the cutter is borne on the bearing upper cover.
Further, the cold dish of vacuum cup base includes seal installation in the cold dish body of vacuum cup bottom and sets up in the inside cold dish cavity of cold dish body, and the leading-in mobile coolant liquid of cold dish cavity is used for cooling cold dish body, and liquid cooling microscope carrier subassembly passes cold dish body and slides and set up in cold dish body.
Further, a plurality of second guide rods which are arranged in parallel are fixedly installed on the cold plate body, and the second guide rods are respectively connected with the liquid cooling stage assembly in a sliding mode.
The utility model has the advantages that:
1. the liquid cooling stage assembly and the vacuum cover base cold plate can be cooled effectively and quickly, so that the liquid cooling stage assembly and the vacuum cover can work in a high-temperature environment for a long time, the service lives of the liquid cooling stage assembly and the vacuum cover are prolonged, and the production cost is reduced;
2. the inside vacuum environment that also bleeds of elastic sealing element, elastic sealing element's one end is fixed and sealed and sets up in liquid cooling microscope carrier subassembly, do not need the action for liquid cooling microscope carrier subassembly elastic sealing element, elastic sealing element's the other end is fixed and sealed and set up in the cold dish of vacuum hood base, also do not need the action for the cold dish elastic sealing element of vacuum hood base, elastic sealing element is through the up-and-down motion of self elasticity in order to adapt to liquid cooling microscope carrier subassembly, consequently, can strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation greatly, effectively avoid the air leakage of vacuum hood, the film deposition on cutter surface is effectual.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic sectional view of the present invention.
Fig. 3 is a schematic structural view of the rotary liquid guiding plate of the present invention.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
As shown in fig. 1 to 3, the present invention provides a loading device of a coating machine, which comprises a vacuum cover 21, a liquid cooling stage assembly 65, elastic sealing member 66 and the cold dish 67 of vacuum cover base, the cold dish 67 of vacuum cover base is seal installation in the diapire of vacuum cover 21, the cold dish 67 of vacuum cover base is used for cooling down the cooling of vacuum cover 21, liquid cooling microscope stage subassembly 65 slides and sets up in the diapire of vacuum cover 21, liquid cooling microscope stage subassembly 65 is used for bearing the weight of the cutter and adjusts the position height of cutter, liquid cooling microscope stage subassembly 65 and the cold dish 67 of vacuum cover base are hollow structure, the cooling liquid is introduced into inside liquid cooling microscope stage subassembly 65 and the cold dish 67 of vacuum cover base in order to realize the cooling, elastic sealing member 66 overlaps and locates liquid cooling microscope stage subassembly 65, the one end and the liquid cooling microscope stage subassembly 65 seal installation of elastic sealing member 66, the other end and the cold dish 67 seal installation of vacuum cover base of elastic sealing member 66. The elastomeric seal 66 is made of an elastomeric material.
In practical application, the cutter is placed on the liquid cooling stage assembly 65, the vacuum cover 21 is internally vacuumized and heated, the surface of the cutter is at the optimal deposition temperature, the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67 are both of a hollow structure, flowing cooling liquid is introduced into the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67, the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67 can be effectively and quickly cooled, the liquid cooling stage assembly 65 and the vacuum cover 21 can work in a high-temperature environment for a long time, the service lives of the liquid cooling stage assembly 65 and the vacuum cover 21 are prolonged, and the production cost is reduced. The liquid cooling stage assembly 65 is arranged on the vacuum cover base cold plate 67 in a sliding mode, the vacuum cover base cold plate 67 is installed on the bottom wall of the vacuum cover 21 in a sealing mode, an installation hole is reserved at the connection position of the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67, air leakage occurs when the liquid cooling stage assembly 65 moves up and down in the action process of the installation hole, because the interior of the elastic sealing element 66 is also exhausted to form a vacuum environment, one end of the elastic sealing element 66 is fixedly and hermetically arranged on the liquid cooling stage assembly 65, the elastic sealing element 66 does not need to move relative to the liquid cooling stage assembly 65, the other end of the elastic sealing element 66 is fixedly and hermetically arranged on the vacuum cover base cold plate 67, the elastic sealing element 66 does not need to move relative to the vacuum cover base cold plate 67, the elastic sealing element 66 adapts to the up and down movement of the liquid cooling stage assembly 65 through elasticity of the elastic sealing element, and therefore the sealing performance of the installation of the liquid cooling stage assembly 65 and the vacuum cover 21 can be greatly enhanced, effectively avoiding the air leakage of the vacuum cover and having good film deposition effect on the surface of the cutter.
In this embodiment, the liquid-cooled stage assembly 65 includes a frame 68 and a liquid-cooled stage 50, the liquid cooling device comprises a liquid outlet hollow supporting pipe 58, a lifting driving structure 69 and a rotary driving part 59, wherein a rack 68 is fixedly arranged at the bottom of the vacuum cover 21, the lifting driving structure 69 is arranged on the rack 68 and is in driving connection with the liquid outlet hollow supporting pipe 58, the upper end of the liquid outlet hollow supporting pipe 58 protrudes into the vacuum cover 21 and is fixedly connected with the liquid cooling platform 50, the lower end of the liquid outlet hollow supporting pipe 58 is fixedly connected with the rotary driving part 59, the liquid outlet hollow supporting pipe 58 is arranged on a vacuum cover base cooling disc 67 in a sliding mode, a liquid cooling cavity 52 is arranged inside the liquid cooling platform 50, the liquid outlet hollow supporting pipe 58 is communicated with the liquid cooling cavity 52, a rotary liquid guiding disc 51 is rotatably arranged in the liquid cooling cavity 52, the output end of the rotary driving part 59 is connected with the rotary liquid guiding disc 51, cooling liquid is introduced into the liquid cooling cavity 52, and the rotary liquid guiding disc 51 is used for stirring cooling liquid inside the liquid cooling cavity 52.
In practical application, the cutter is placed on the liquid cooling microscope stage 50, the inside evacuation and the heating of vacuum cover 21, lift drive structure 69 is used for accurately drive control liquid cooling microscope stage 50 along the displacement of vertical direction, the distance of strict control cutter and the source that generates heat, make the cutter surface be in the best deposition temperature, liquid cooling cavity 52 leading-in flowing coolant liquid, rotatory drain pan 51 lasts the rotation, stir the inside coolant liquid of liquid cooling cavity 52 uniformly, rotatory drain pan 51's design can be effectively, realize the cooling to liquid cooling microscope stage 50 fast, make liquid cooling microscope stage 50 can work under the high temperature environment for a long time, avoid the liquid cooling microscope stage to burn and lose, service life is prolonged, and production cost is reduced.
In this embodiment, the elastic sealing element 66 is an elastic ring body, the elastic sealing element 66 is sleeved outside the hollow liquid outlet supporting tube 58, one end of the elastic sealing element 66 is connected with the bottom wall of the vacuum cover 21 in a sealing manner, and the other end of the elastic sealing element 66 is connected with the rotary driving element 59 in a sealing manner; when the liquid-cooled stage 50 moves upward, the elastic sealing member 66 is in a compressed state; when the liquid-cooled stage 50 moves downward, the elastomeric seal 66 is in an expanded state.
In practical application, the liquid-discharging hollow support tube 58 is slidably arranged on the bottom wall of the vacuum cover 21, a mounting hole is reserved at the joint of the liquid-discharging hollow support tube 58 and the vacuum cover base cold plate 67, and air leakage occurs during the up-and-down movement of the mounting hole of the liquid-discharging hollow support tube 58, because the interior of the elastic sealing member 66 is also evacuated to form a vacuum environment, one end of the elastic sealing member 66 is fixedly and hermetically arranged on the vacuum cover base cold plate 67, the elastic sealing member 66 does not need to move relative to the vacuum cover base cold plate 67, the other end of the elastic sealing member 66 is fixedly and hermetically arranged on the rotary driving member 59, the elastic sealing member 66 does not need to move relative to the rotary driving member 59, and the elastic sealing member 66 adapts to the up-and-down movement of the liquid-discharging hollow support tube 58 through the elasticity of the elastic sealing member 66, so that the sealing performance of the installation of the liquid-cooling stage assembly 65 and the vacuum cover 21 can be greatly enhanced, the film deposition effect on the surface of the cutter is good.
In this embodiment, the rotary liquid guiding disc 51 includes a liquid guiding flat plate 53 and a plurality of blades 54 disposed on the liquid guiding flat plate 53, the plurality of blades 54 are in an annular array along a central axis of the liquid guiding flat plate 53, the liquid guiding flat plate 53 is rotatably mounted in the liquid cooling cavity 52, the plurality of blades 54 are used for stirring the cooling liquid in the liquid cooling cavity 52, the liquid guiding flat plate 53 is provided with a liquid guiding central hole 55 and an assembling convex ring body 56, and the assembling convex ring body 56 and the liquid guiding central hole 55 are coaxially disposed.
In practical application, during cutter deposition heating, the cutter is placed on the liquid cooling platform 50, flowing cooling liquid is introduced into the liquid cooling cavity 52, the rotary liquid guiding plate 51 continuously rotates, the cooling liquid inside the liquid cooling cavity 52 is uniformly stirred, the sheet 54 is of a sheet structure, the panel height of the sheet 54 is matched with the height of the liquid cooling cavity 52, the sheet 54 can fully drive the cooling liquid to flow, the liquid cooling platform 50 is uniform and can be cooled quickly, the rotary liquid guiding plate 51 can be effectively and quickly designed to cool the liquid cooling platform 50, the liquid cooling platform 50 can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform is avoided, the service life is prolonged, and the production cost is reduced. The rotary fluid conducting disc 51 may be an integrally formed structure, and the fluid conducting central hole 55 is used for introducing the flowing cooling fluid.
In this embodiment, the liquid cooling stage assembly 65 further includes a liquid inlet hollow tube 57, the liquid inlet hollow tube 57 is disposed inside the liquid outlet hollow support tube 58, the lower end of the liquid inlet hollow tube 57 is connected to the output end of the rotary driving member 59, the upper end of the liquid inlet hollow tube 57 protrudes into the liquid cooling cavity 52 and is clamped to the assembling convex ring body 56, the liquid inlet hollow tube 57 is communicated with the liquid guiding central hole 55, and the rotary driving member 59 is used for driving the liquid inlet hollow tube 57 and the rotary liquid guiding disc 51 to rotate. Specifically, when feed liquor hollow tube 57 is used for leading-in coolant liquid, still be used for driving about rotatory liquid guide plate 51 and continuously rotate, feed liquor hollow tube 57 is connected with the drive of liquid guide plate 53 via assembly bulge loop body 56, and structural design is reasonable, and rotatory liquid guide plate 51 can be effectively, evenly, realize the cooling to liquid cooling microscope carrier 50 fast for liquid cooling microscope carrier 50 can be in work under the high temperature environment for a long time, avoids liquid cooling microscope carrier 50 to burn out, increase of service life, reduction in production cost.
In this embodiment, the rotary driving member 59 is provided with a liquid inlet cavity 60 and a liquid outlet cavity 61, the liquid inlet cavity 60 is communicated with the liquid inlet hollow tube 57, the liquid outlet cavity 61 is communicated with the liquid outlet hollow support tube 58, and the cooling liquid sequentially flows through the liquid inlet cavity 60, the liquid inlet hollow tube 57, the liquid guiding central hole 55, the liquid cooling cavity 52, the liquid outlet hollow support tube 58 and the liquid outlet cavity 61. Specifically, because the coolant through liquid cooling cavity 52 has absorbed the heat, consequently the coolant temperature of going out liquid chamber 61 is higher than the coolant temperature of going into liquid chamber 60, goes into liquid chamber 60 and goes out the hot interval setting of liquid chamber 61, guarantees the cooling effect of the coolant of going into liquid chamber 60, can effectively, evenly, realize the cooling to the liquid cooling microscope carrier fast.
In this embodiment, the lifting driving structure 69 includes a lifting driving body 70 fixedly mounted on the frame 68 and a supporting frame 71 drivingly connected to the lifting driving body 70, one end of the supporting frame 71 is slidably disposed on the frame 68, the other end of the supporting frame 71 is fixedly mounted on the rotating driving member 59, the lifting driving body 70 drives the rotating driving member 59, the liquid outlet hollow supporting tube 58 and the liquid cooling stage 50 to move up and down through the supporting frame 71, a plurality of first guiding rods 72 are mounted on the frame 68, the plurality of first guiding rods 72 respectively penetrate through the supporting frame 71, and the supporting frame 71 moves along the first guiding rods 72. Specifically, the lifting driving body 70 can be driven by a screw rod, the screw rod driving has the characteristic of high precision, the up-and-down movement distance of the liquid cooling carrier 50 can be accurately controlled, the stroke of the cutter can be controlled, the distance between the cutter and a heating source is strictly controlled, the surface of the cutter is at the optimal deposition temperature, and the film deposition effect on the surface of the cutter is good; first guide bar 72 bears a weight of 71 and has the guide effect for bear a weight of 71 and accurately follow the route removal of predetermineeing, further make the displacement of liquid cooling microscope carrier 50 accurate, a plurality of cutter surfaces can thermally equivalent, and the coating is effectual, and the yields is high.
In this embodiment, the liquid cooling stage 50 includes a liquid cooling stage body 63 and a bearing upper cover 64 installed on the liquid cooling stage body 63, a seal ring 25 is provided between the bearing upper cover 64 and the liquid cooling stage body 63, and the tool is borne on the bearing upper cover 64. Specifically, the seal ring 25 can prevent the coolant in the liquid cooling cavity 52 from overflowing, enhance the sealing performance of the liquid cooling stage 50, and prevent the coolant from being wasted.
In this embodiment, the vacuum cover base cold plate 67 includes a cold plate body 73 hermetically mounted at the bottom of the vacuum cover 21 and a cold plate cavity 74 disposed inside the cold plate body 73, the cold plate cavity 74 introduces flowing cooling liquid for cooling the cold plate body 73, and the liquid cooling stage assembly 65 passes through the cold plate body 73 and is slidably disposed on the cold plate body 73. Specifically, the cold plate body 73 is arranged at the bottom of the vacuum cover 21, and the flowing cooling liquid is introduced into the cold plate cavity 74, so that the vacuum cover 21 can be effectively protected, when the cold plate 67 on the base of the vacuum cover is used up, a new cold plate 67 on the base of the vacuum cover can be replaced, and the maintenance cost can be saved; the cold plate cavity 74 is flat, so that the cooling area can be enlarged, quick cooling is realized, and the cooling effect is good.
In this embodiment, the plurality of second guide rods 75 arranged in parallel to each other are fixedly mounted on the cold plate body 73, and the plurality of second guide rods 75 are slidably connected to the carrier 71 of the liquid cooling stage assembly 65, respectively. Specifically, the second guide rod 75 and the first guide rod 72 all have a guiding effect on the bearing frame 71, so that the central axes of the cold plate body 73, the bearing frame 71, the liquid outlet hollow support tube 58 and the liquid cooling carrying platform 50 are arranged in parallel, the bearing frame 71 horizontally and accurately moves along a preset path, the displacement of the liquid cooling carrying platform 50 is further accurate, the surfaces of a plurality of cutters can be uniformly heated, the coating effect is good, and the yield is high.
All the technical features in the embodiment can be freely combined according to actual needs.
The above-mentioned embodiment is the utility model discloses the implementation scheme of preferred, in addition, the utility model discloses can also realize by other modes, any obvious replacement is all within the protection scope of the utility model under the prerequisite that does not deviate from this technical scheme design.
Claims (10)
1. The utility model provides a material loading device of coating machine, includes the vacuum hood, its characterized in that: the vacuum cover base cold plate is hermetically mounted on the bottom wall of the vacuum cover, the vacuum cover base cold plate is used for cooling the vacuum cover, the liquid cooling platform assembly is slidably arranged on the bottom wall of the vacuum cover, the liquid cooling platform assembly is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling platform assembly and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform assembly and the inside of the vacuum cover base cold plate to realize cooling, the liquid cooling platform assembly is sleeved with the elastic sealing member, one end of the elastic sealing member is hermetically mounted with the liquid cooling platform assembly, and the other end of the elastic sealing member is hermetically mounted with the vacuum cover base cold plate.
2. The loading device of a coating machine according to claim 1, characterized in that: the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid outlet hollow supporting tube, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the rack and is in driving connection with the liquid outlet hollow supporting tube, the upper end of the liquid outlet hollow supporting tube extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting tube is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting tube is arranged on a cold plate of a base of the vacuum cover in a sliding mode, a liquid cooling cavity is arranged inside the liquid cooling platform, the liquid outlet hollow supporting tube is communicated with the liquid cooling cavity, a rotary liquid guide plate is installed in the liquid cooling cavity in a rotating mode, the output end of the rotary driving piece is connected with the rotary liquid guide plate, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guide plate is used for stirring cooling liquid inside the liquid cooling cavity.
3. The loading device of a coating machine according to claim 2, characterized in that: the elastic sealing element is an elastic annular body and is sleeved outside the liquid outlet hollow supporting tube, one end of the elastic sealing element is in sealing connection with the bottom wall of the vacuum cover, and the other end of the elastic sealing element is in sealing connection with the rotary driving element; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.
4. The loading device of a coating machine according to claim 3, characterized in that: rotatory drain dish is including leading the liquid flat board and set up in a plurality of leaves of leading the liquid flat board, and a plurality of leaves are annular array along the dull and stereotyped the central axis of leading the liquid, and the dull and stereotyped rotation of leading the liquid is installed in the liquid cooling cavity, and a plurality of leaves are used for stirring the inside coolant liquid of liquid cooling cavity, and the liquid flat board of leading is equipped with the drain centre bore and assembles the bulge loop body, assembles the bulge loop body and leads the coaxial setting of liquid centre bore.
5. The loading device of the coating machine according to claim 4, characterized in that: the liquid cooling stage assembly further comprises a liquid inlet hollow pipe, the liquid inlet hollow pipe is arranged inside the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is clamped with the assembling convex ring body, the liquid inlet hollow pipe is communicated with the liquid guiding central hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guiding disc to rotate.
6. The loading device of the coating machine according to claim 5, characterized in that: the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.
7. The loading device of a coating machine according to claim 2, characterized in that: the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the rotary driving piece, the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to lift through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.
8. The loading device of a coating machine according to claim 2, characterized in that: the liquid cooling microscope carrier comprises a liquid cooling microscope carrier body and a bearing upper cover arranged on the liquid cooling microscope carrier body, a sealing ring is arranged between the bearing upper cover and the liquid cooling microscope carrier body, and the cutter is borne on the bearing upper cover.
9. The loading device of a coating machine according to claim 1, characterized in that: the vacuum cover base cold plate comprises a cold plate body and a cold plate cavity, wherein the cold plate body is hermetically arranged at the bottom of the vacuum cover, the cold plate cavity is arranged inside the cold plate body, flowing cooling liquid is introduced into the cold plate cavity to be used for cooling the cold plate body, and the liquid cooling platform deck assembly penetrates through the cold plate body and is arranged on the cold plate body in a sliding mode.
10. The loading device of a coating machine according to claim 9, characterized in that: the cold plate body is fixedly provided with a plurality of second guide rods which are arranged in parallel, and the second guide rods are respectively connected with the liquid cooling carrier assembly in a sliding manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021871617.8U CN213825684U (en) | 2020-08-31 | 2020-08-31 | Material carrying device of coating machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021871617.8U CN213825684U (en) | 2020-08-31 | 2020-08-31 | Material carrying device of coating machine |
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| CN213825684U true CN213825684U (en) | 2021-07-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251732A (en) * | 2020-08-31 | 2021-01-22 | 广东鼎泰机器人科技有限公司 | Material carrying device of coating machine |
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2020
- 2020-08-31 CN CN202021871617.8U patent/CN213825684U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251732A (en) * | 2020-08-31 | 2021-01-22 | 广东鼎泰机器人科技有限公司 | Material carrying device of coating machine |
| CN112251732B (en) * | 2020-08-31 | 2023-02-17 | 广东鼎泰机器人科技有限公司 | Material carrying device of coating machine |
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