CN213388881U - Coating device with elastic sealing element - Google Patents
Coating device with elastic sealing element Download PDFInfo
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- CN213388881U CN213388881U CN202021871559.9U CN202021871559U CN213388881U CN 213388881 U CN213388881 U CN 213388881U CN 202021871559 U CN202021871559 U CN 202021871559U CN 213388881 U CN213388881 U CN 213388881U
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- liquid cooling
- cold plate
- vacuum cover
- supporting tube
- hollow supporting
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Abstract
The utility model relates to the technical field of coating equipment, in particular to a coating device with an elastic sealing element, which comprises a vacuum cover, a liquid cooling platform assembly, an elastic sealing element and a vacuum cover base cold plate, wherein the vacuum cover base cold plate is hermetically arranged on the bottom wall of the vacuum cover, the liquid cooling platform assembly comprises a liquid cooling platform and a hollow supporting tube, the hollow supporting tube is slidably arranged on the vacuum cover base cold plate, the upper end of the hollow supporting tube extends to the inside of the vacuum cover and is fixedly connected with the liquid cooling platform, the vacuum cover base cold plate is used for cooling the vacuum cover, the liquid cooling platform assembly is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling platform and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform and the inside of the vacuum cover base cold plate to realize cooling, the elastic sealing element is sleeved on the outer side of the hollow supporting tube, one, the other end of the elastic sealing element is hermetically arranged with the cold plate of the vacuum cover base.
Description
Technical Field
The utility model belongs to the technical field of coating equipment technique and specifically relates to indicate a coating device with elastic sealing element.
Background
The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the diamond film deposition is carried out on the blade part of a drill bit or a milling cutter by using the HFCVD method, the surface temperature value, the temperature field and the distribution uniformity of the reactive group density field of the deposition region (blade region, substrate) have great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films are in the range of about 500-1000 deg.C, with an optimum range of about 700-900 deg.C.
The feeding device of the traditional coating equipment is usually in a vacuum high-temperature state, and is usually cooled by water in order to prevent the feeding device from being burnt, but the cooling structure of the feeding device of the coating equipment in the prior art is unreasonable in design, and the bottom wall of the vacuum cover and the feeding device are usually close to a heat source, so that the working temperatures of the feeding device and the bottom wall of the vacuum cover are overhigh, the feeding device is easily burnt by high temperature, the service life is short, the production cost is high, and the production standard cannot be reached; the vacuum cover is assembled with the feeding device, the sealing performance is not enough, the vacuum cover can leak gas when the feeding device acts, the film deposition effect on the surface of the cutter is influenced, and the yield is low.
Disclosure of Invention
The to-be-solved technical problem of the utility model is to provide a coating device with elastic sealing element can effectively, realize the cooling to liquid cooling microscope carrier and vacuum hood bottom wall fast for the liquid cooling microscope carrier can be in work under the high temperature environment for a long time, avoids the liquid cooling microscope carrier to burn and lose, can also strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation, and the film deposition on cutter surface is effectual.
In order to solve the technical problem, the utility model discloses a following technical scheme:
a coating device with an elastic sealing element comprises a vacuum cover and a liquid cooling stage assembly, the vacuum cover base cold plate is arranged on the bottom wall of the vacuum cover in a sealing mode, the liquid cooling platform assembly comprises a liquid cooling platform and a hollow supporting tube, the hollow supporting tube is arranged on the vacuum cover base cold plate in a sliding mode, the upper end of the hollow supporting tube protrudes to the inside of the vacuum cover and is fixedly connected with the liquid cooling platform, the vacuum cover base cold plate is used for cooling the vacuum cover, the liquid cooling platform assembly is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling platform and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform and the inside of the vacuum cover base cold plate to achieve cooling, the elastic sealing element is sleeved on the outer side of the hollow supporting tube, one end of the elastic sealing element is connected with one end, far away from the liquid cooling platform, of the elastic sealing element is arranged on the.
Further, the liquid cooling platform assembly further comprises a frame and a lifting driving structure, the frame is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the frame and is in driving connection with the hollow supporting tube, a liquid cooling cavity is arranged inside the liquid cooling platform, and the hollow supporting tube is communicated with the liquid cooling cavity.
Further, the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the hollow supporting tube, the lifting driving body drives the hollow supporting tube and the liquid cooling carrying platform to lift through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.
Further, the liquid cooling stage comprises a liquid cooling stage body and a bearing upper cover arranged on the liquid cooling stage body, a sealing ring is arranged between the bearing upper cover and the liquid cooling stage body, and the cutter is borne on the bearing upper cover.
Furthermore, the cold dish of vacuum hood base includes seal installation in the cold dish body of vacuum hood bottom and sets up in the inside cold dish cavity of cold dish body, and the leading-in coolant liquid that flows of cold dish cavity is used for cooling cold dish body, and the hollow stay tube passes cold dish body and slides and set up in cold dish body.
Further, a plurality of second guide rods which are arranged in parallel are fixedly installed on the cold plate body, and the second guide rods are respectively connected with the hollow supporting tube in a sliding mode.
Further, the elastic sealing element is an elastic annular body; when the liquid cooling carrying platform moves up and down, the elastic sealing element is in a compression state and an expansion state respectively.
The utility model has the advantages that:
1. the liquid cooling platform deck and the vacuum cover base cold plate are both of hollow structures, and flowing cooling liquid is introduced into the liquid cooling platform deck and the vacuum cover base cold plate, so that the liquid cooling platform deck and the vacuum cover base cold plate can be effectively and quickly cooled, the liquid cooling platform deck and the vacuum cover can work in a high-temperature environment for a long time, the service lives of the liquid cooling platform deck and the vacuum cover are prolonged, and the production cost is reduced;
2. the elastic sealing element adapts to the up-and-down movement of the liquid cooling carrying platform through the elasticity of the elastic sealing element, so that the sealing performance of the installation of the liquid cooling carrying platform and the vacuum cover can be greatly enhanced, the air leakage of the vacuum cover is effectively avoided, and the film deposition effect on the surface of the cutter is good.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic sectional view of the present invention.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
As shown in fig. 1 to 2, the coating apparatus with elastic sealing element provided by the present invention comprises a vacuum cover 21, a liquid cooling stage assembly 65, an elastic sealing element 66 and a vacuum cover base cooling plate 67, wherein the vacuum cover base cooling plate 67 is hermetically mounted on the bottom wall of the vacuum cover 21, the liquid cooling stage assembly 65 comprises a liquid cooling stage 50 and a hollow support tube 58, the hollow support tube 58 is slidably disposed on the vacuum cover base cooling plate 67, the upper end of the hollow support tube 58 protrudes into the vacuum cover 21 and is fixedly connected with the liquid cooling stage 50, the vacuum cover base cooling plate 67 is used for cooling the vacuum cover 21, the liquid cooling stage assembly 65 is used for carrying a tool and adjusting the position height of the tool, the liquid cooling stage 50 and the vacuum cover base cooling plate 67 are both of a hollow structure, the cooling liquid is introduced into the liquid cooling stage 50 and the inside of the vacuum cover base cooling plate 67 to realize cooling, the elastic sealing element 66 is sleeved outside the hollow support tube 58, one end of the elastic sealing member 66 is hermetically connected with one end of the hollow supporting tube 58 far away from the liquid cooling stage 50, and the other end of the elastic sealing member 66 is hermetically installed with the vacuum hood base cold plate 67.
In practical application, the cutter is placed on the liquid cooling stage 50, the vacuum cover 21 is vacuumized and heated, the surface of the cutter is at the optimal deposition temperature, the liquid cooling stage 50 and the vacuum cover base cold plate 67 are both of a hollow structure, flowing cooling liquid is introduced into the liquid cooling stage 50 and the vacuum cover base cold plate 67, the liquid cooling stage 50 and the vacuum cover base cold plate 67 can be effectively and quickly cooled, the liquid cooling stage 50 and the vacuum cover 21 can work in a high-temperature environment for a long time, the service lives of the liquid cooling stage 50 and the vacuum cover 21 are prolonged, and production cost is reduced. The hollow support tube 58 is arranged on the vacuum cover base cold plate 67 in a sliding manner, the vacuum cover base cold plate 67 is arranged on the bottom wall of the vacuum cover 21 in a sealing manner, a mounting hole is reserved at the joint of the liquid cooling stage 50 and the vacuum cover base cold plate 67, the liquid cooling stage 50 can generate air leakage in the action process of moving up and down in the mounting hole, because the interior of the elastic sealing element 66 is also pumped to form a vacuum environment, one end of the elastic sealing element 66 is fixedly and hermetically arranged on the liquid cooling stage 50, the elastic sealing element 66 does not need to act relative to the liquid cooling stage assembly 65, the other end of the elastic sealing element 66 is fixedly and hermetically arranged on the vacuum cover base cold plate 67, the elastic sealing element 66 does not need to act relative to the vacuum cover base cold plate 67, the elastic sealing element 66 adapts to the up and down action of the liquid cooling stage 50 through the elasticity of the elastic sealing element, and therefore, effectively avoiding the air leakage of the vacuum cover and having good film deposition effect on the surface of the cutter.
In this embodiment, the liquid cooling stage assembly 65 further includes a frame 68 and a lifting driving structure 69, the frame 68 is fixedly installed at the bottom of the vacuum cover 21, the lifting driving structure 69 is installed on the frame 68 and is in driving connection with the hollow supporting tube 58, the liquid cooling cavity 52 is arranged inside the liquid cooling stage 50, and the hollow supporting tube 58 is communicated with the liquid cooling cavity 52. Specifically, the cutter is placed on liquid cooling microscope carrier 50, the inside evacuation of vacuum cover 21 and heating, lift drive structure 69 is used for accurately drive control liquid cooling microscope carrier 50 along the displacement of vertical direction, the distance of strict control cutter and the source that generates heat, make the cutter surface be in the best deposition temperature, the leading-in mobile coolant liquid of liquid cooling cavity 52, can be effective, realize the cooling to liquid cooling microscope carrier 50 fast, make liquid cooling microscope carrier 50 can be in work under the high temperature environment for a long time, avoid the liquid cooling microscope carrier to burn out, and service life is prolonged, and production cost is reduced.
In this embodiment, the lifting driving structure 69 includes a lifting driving body 70 fixedly mounted on the frame 68 and a supporting frame 71 drivingly connected to the lifting driving body 70, one end of the supporting frame 71 is slidably disposed on the frame 68, the other end of the supporting frame 71 is fixedly mounted on the hollow supporting tube 58, the lifting driving body 70 drives the hollow supporting tube 58 and the liquid cooling stage 50 to move up and down via the supporting frame 71, a plurality of first guiding rods 72 are mounted on the frame 58, the plurality of first guiding rods 72 are disposed in parallel, and the supporting frame 71 moves along the first guiding rods 72. Specifically, the lifting driving body 70 can be driven by a screw rod, the screw rod driving has the characteristic of high precision, the up-and-down movement distance of the liquid cooling carrier 50 can be accurately controlled, the stroke of the cutter can be controlled, the distance between the cutter and a heating source is strictly controlled, the surface of the cutter is at the optimal deposition temperature, and the film deposition effect on the surface of the cutter is good; first guide bar 72 bears a weight of 71 and has the guide effect for bear a weight of 71 and accurately follow the route removal of predetermineeing, further make the displacement of liquid cooling microscope carrier 50 accurate, a plurality of cutter surfaces can thermally equivalent, and the coating is effectual, and the yields is high.
In this embodiment, the liquid cooling stage 50 includes a liquid cooling stage body 63 and a bearing upper cover 64 installed on the liquid cooling stage body 63, a seal ring 25 is provided between the bearing upper cover 64 and the liquid cooling stage body 63, and the tool is borne on the bearing upper cover 64. Specifically, the seal ring 25 can prevent the coolant in the liquid cooling cavity 52 from overflowing, enhance the sealing performance of the liquid cooling stage 50, and prevent the coolant from being wasted.
In this embodiment, the vacuum hood base cold plate 67 includes a cold plate body 73 hermetically installed at the bottom of the vacuum hood 21 and a cold plate cavity 74 disposed inside the cold plate body 73, the cold plate cavity 74 guides flowing cooling liquid to cool the cold plate body 73, and the hollow support pipe 58 penetrates through the cold plate body 73 and is slidably disposed on the cold plate body 73. Specifically, the cold plate body 73 is arranged at the bottom of the vacuum cover 21, and the flowing cooling liquid is introduced into the cold plate cavity 74, so that the vacuum cover 21 can be effectively protected, when the cold plate 67 on the base of the vacuum cover is used up, a new cold plate 67 on the base of the vacuum cover can be replaced, and the maintenance cost can be saved; the cold plate cavity 74 is flat, so that the cooling area can be enlarged, quick cooling is realized, and the cooling effect is good.
In this embodiment, the cold plate body 73 is fixedly installed with a plurality of second guide rods 75 arranged in parallel, and the plurality of second guide rods 75 are respectively connected with the hollow support tube 58 in a sliding manner. Specifically, the second guide rod 75 and the first guide rod 72 all have a guiding effect on the bearing frame 71, so that the central axes of the cold plate body 73, the bearing frame 71, the liquid outlet hollow support tube 58 and the liquid cooling carrying platform 50 are arranged in parallel, the bearing frame 71 horizontally and accurately moves along a preset path, the displacement of the liquid cooling carrying platform 50 is further accurate, the surfaces of a plurality of cutters can be uniformly heated, the coating effect is good, and the yield is high.
In this embodiment, the elastic sealing element 66 is an elastic ring-shaped body; the flexible seal 66 is in a compressed state and an expanded state when the liquid-cooled stage 50 moves up and down, respectively.
All the technical features in the embodiment can be freely combined according to actual needs.
The above-mentioned embodiment is the utility model discloses the implementation scheme of preferred, in addition, the utility model discloses can also realize by other modes, any obvious replacement is all within the protection scope of the utility model under the prerequisite that does not deviate from this technical scheme design.
Claims (7)
1. A coating apparatus with an elastic seal, comprising a vacuum hood, characterized in that: also comprises a liquid-cooled stage assembly, the vacuum cover base cold plate is arranged on the bottom wall of the vacuum cover in a sealing mode, the liquid cooling platform assembly comprises a liquid cooling platform and a hollow supporting tube, the hollow supporting tube is arranged on the vacuum cover base cold plate in a sliding mode, the upper end of the hollow supporting tube protrudes to the inside of the vacuum cover and is fixedly connected with the liquid cooling platform, the vacuum cover base cold plate is used for cooling the vacuum cover, the liquid cooling platform assembly is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling platform and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform and the inside of the vacuum cover base cold plate to achieve cooling, the elastic sealing element is sleeved on the outer side of the hollow supporting tube, one end of the elastic sealing element is connected with one end, far away from the liquid cooling platform, of the elastic sealing element is arranged on the.
2. A coating apparatus with an elastic seal according to claim 1, characterized in that: the liquid cooling platform assembly further comprises a frame and a lifting driving structure, the frame is fixedly mounted at the bottom of the vacuum cover, the lifting driving structure is mounted on the frame and is in driving connection with the hollow supporting tube, a liquid cooling cavity is arranged in the liquid cooling platform, and the hollow supporting tube is communicated with the liquid cooling cavity.
3. A coating apparatus with an elastic seal according to claim 2, characterized in that: the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the hollow supporting tube, the lifting driving body drives the hollow supporting tube and the liquid cooling platform deck to lift through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.
4. A coating apparatus with an elastic seal according to claim 1, characterized in that: the liquid cooling microscope carrier comprises a liquid cooling microscope carrier body and a bearing upper cover arranged on the liquid cooling microscope carrier body, a sealing ring is arranged between the bearing upper cover and the liquid cooling microscope carrier body, and the cutter is borne on the bearing upper cover.
5. A coating apparatus with an elastic seal according to claim 1, characterized in that: the vacuum cover base cold plate comprises a cold plate body and a cold plate cavity, wherein the cold plate body is hermetically arranged at the bottom of the vacuum cover, the cold plate cavity is arranged inside the cold plate body, flowing cooling liquid is introduced into the cold plate cavity to be used for cooling the cold plate body, and the hollow supporting tube penetrates through the cold plate body and is slidably arranged on the cold plate body.
6. A coating apparatus with an elastic seal according to claim 5, characterized in that: the cold plate body is fixedly provided with a plurality of second guide rods which are arranged in parallel, and the second guide rods are respectively connected with the hollow supporting tube in a sliding manner.
7. A coating apparatus with an elastic seal according to claim 1, characterized in that: the elastic sealing element is an elastic annular body; when the liquid cooling carrying platform moves up and down, the elastic sealing element is in a compression state and an expansion state respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021871559.9U CN213388881U (en) | 2020-08-31 | 2020-08-31 | Coating device with elastic sealing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021871559.9U CN213388881U (en) | 2020-08-31 | 2020-08-31 | Coating device with elastic sealing element |
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| Publication Number | Publication Date |
|---|---|
| CN213388881U true CN213388881U (en) | 2021-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021871559.9U Active CN213388881U (en) | 2020-08-31 | 2020-08-31 | Coating device with elastic sealing element |
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| Country | Link |
|---|---|
| CN (1) | CN213388881U (en) |
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2020
- 2020-08-31 CN CN202021871559.9U patent/CN213388881U/en active Active
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