CN112210767B - Coating machine - Google Patents
Coating machine Download PDFInfo
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- CN112210767B CN112210767B CN202010899392.5A CN202010899392A CN112210767B CN 112210767 B CN112210767 B CN 112210767B CN 202010899392 A CN202010899392 A CN 202010899392A CN 112210767 B CN112210767 B CN 112210767B
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- liquid
- liquid cooling
- vacuum cover
- cooling
- cold plate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Abstract
The invention relates to the technical field of coating equipment, in particular to a coating machine which comprises a vacuum cover, a liquid cooling platform assembly, an elastic sealing element, a vacuum cover base cold plate and a heat source assembly, wherein the vacuum cover base cold plate is hermetically arranged on the bottom wall of the vacuum cover, the liquid cooling platform assembly is slidably arranged on the bottom wall of the vacuum cover, the liquid cooling platform assembly and the vacuum cover base cold plate are both of a hollow structure, the liquid cooling platform assembly is used for bearing a cutter and adjusting the distance between the cutter and the heat source assembly, one end of the elastic sealing element is hermetically arranged with the liquid cooling platform assembly, and the other end of the elastic sealing element is hermetically arranged with the vacuum cover base cold plate. The liquid cooling platform assembly and the vacuum cover can be effectively and quickly cooled, so that the liquid cooling platform assembly and the vacuum cover can work in a high-temperature environment for a long time, the sealing performance of the installation of the liquid cooling platform assembly and the vacuum cover can be enhanced, the uniform deposition temperature is realized, the blackening phenomenon of the knife handle is effectively avoided, and the yield is improved.
Description
Technical Field
The invention relates to the technical field of coating equipment, in particular to a coating machine.
Background
The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the HFCVD method is used to deposit a diamond film on the cutting edge portion of a drill or a milling cutter, the surface temperature value, the temperature field, and the distribution uniformity of the reactive group density field in the deposition region (cutting edge region, substrate) have a great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films range from about 500 deg.C to about 1000 deg.C, with a range of about 700 deg.C to about 900 deg.C being most preferred.
The coating equipment in the prior art has unreasonable structural design and at least has the following problems:
1. generally, the bottom wall of the vacuum cover and the feeding device are closer to a heating source, so that the working temperatures of the feeding device and the bottom wall of the vacuum cover are too high, the feeding device and the bottom wall of the vacuum cover are easily burnt by high temperature, the service life is short, the production cost is high, and the production standard cannot be met;
2. the vacuum cover is assembled with the feeding device, the sealing performance is insufficient, the vacuum cover leaks air when the feeding device acts, the film deposition effect on the surface of the cutter is influenced, and the yield is low;
3. the distance between cutter and the heat source is difficult to accurate control, leads to the cutter to be heated the temperature not accurate enough, appears the inhomogeneous problem of deposition temperature, and the deposition temperature of the different positions of cutter cutting edge must have the difference, is heated inhomogeneous cutter impurity deposit, leads to the handle of a knife blackening phenomenon to appear, and the yields is low.
Disclosure of Invention
The coating machine can effectively and quickly cool the bottom walls of the liquid cooling platform deck assembly and the vacuum cover, so that the liquid cooling platform deck assembly and the vacuum cover can work in a high-temperature environment for a long time, the installation tightness of the liquid cooling platform deck assembly and the vacuum cover can be enhanced, the uniform deposition temperature is realized, the blackening phenomenon of the knife handle is effectively avoided, and the yield is improved.
In order to solve the technical problem, the invention adopts the following technical scheme:
the utility model provides a coating machine, it includes the vacuum cover, liquid cooling microscope carrier subassembly, elastic sealing element, vacuum cover base cold plate and heat source subassembly, vacuum cover base cold plate seal installation is in the diapire of vacuum cover, liquid cooling microscope carrier subassembly slides and sets up in the vacuum cover diapire, vacuum cover base cold plate is used for cooling down the vacuum cover, liquid cooling microscope carrier subassembly and vacuum cover base cold plate are hollow structure, the leading-in liquid cooling microscope carrier subassembly of coolant liquid and the inside in order to realize the cooling of vacuum cover base cold plate, liquid cooling microscope carrier subassembly is located to elastic sealing element cover, liquid cooling microscope carrier subassembly is used for bearing the cutter and adjusts the distance between cutter and the heat source subassembly, elastic sealing element's one end and liquid cooling microscope carrier subassembly seal installation, elastic sealing element's the other end and the vacuum cover base cold plate seal installation.
Further, the heat source component comprises a hot wire net rack, a hot wire tensioning piece, a plurality of liquid cooling electrode rods and a plurality of heating wires uniformly distributed on the hot wire net rack, the liquid cooling electrode rods are all arranged on the bottom wall of the vacuum cover, the hot wire net rack is located inside the vacuum cover and is borne on the liquid cooling electrode rods, the liquid cooling electrode rods are electrically connected with the hot wire net rack, the hot wire net rack is electrically connected with the heating wires, the liquid cooling electrode rods are used for supplying power to the heating wires, the liquid cooling electrode rods are of a hollow structure, cooling liquid is introduced into the liquid cooling electrode rods to achieve cooling, the heating wire tensioning piece is fixedly installed on the hot wire net rack, the heating wire tensioning piece is used for tensioning the heating wires, the liquid cooling platform rack is located below the hot wire net rack and is used for bearing a cutter, and the heating wires are used for heating the cutter borne on the liquid cooling platform rack.
Further, the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid inlet hollow pipe, a liquid outlet hollow supporting pipe, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the rack and is in driving connection with the liquid outlet hollow supporting pipe, the upper end of the liquid outlet hollow supporting pipe extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting pipe is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting pipe is slidably arranged on a cold plate of a base of the vacuum cover, a liquid cooling cavity is formed in the liquid cooling platform, the liquid outlet hollow supporting pipe is communicated with the liquid cooling cavity, a rotary liquid guiding plate is rotatably installed in the liquid cooling cavity, the output end of the rotary driving piece is connected with the rotary liquid guiding plate, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guiding plate is used for stirring cooling liquid in the liquid cooling cavity; the rotary liquid guide disc comprises a liquid guide flat plate and a plurality of blades arranged on the liquid guide flat plate, the plurality of blades are in an annular array along the central axis of the liquid guide flat plate, the liquid guide flat plate is rotatably arranged in the liquid cooling cavity, the plurality of blades are used for stirring cooling liquid in the liquid cooling cavity, the liquid guide flat plate is provided with a liquid guide central hole and an assembling convex ring body, and the assembling convex ring body and the liquid guide central hole are coaxially arranged; the liquid cooling platform comprises a liquid cooling platform body and a bearing upper cover arranged on the liquid cooling platform body, a sealing ring is arranged between the bearing upper cover and the liquid cooling platform body, and the cutter is borne on the bearing upper cover; the liquid inlet hollow pipe is arranged in the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is clamped with the assembling convex ring body, the liquid inlet hollow pipe is communicated with the liquid guide central hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guide disc to rotate; the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.
Furthermore, the elastic sealing element is an elastic annular body, the elastic sealing element is sleeved outside the liquid outlet hollow supporting tube, one end of the elastic sealing element is in sealing connection with the bottom wall of the vacuum cover, and the other end of the elastic sealing element is in sealing connection with the rotary driving element; when the liquid cooling platform deck moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.
Further, the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the rotary driving piece, the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to ascend and descend through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.
Furthermore, the cold plate of the vacuum cover base comprises a cold plate body and a cold plate cavity, the cold plate body is hermetically installed at the bottom of the vacuum cover, the cold plate cavity is arranged inside the cold plate body, flowing cooling liquid is introduced into the cold plate cavity to be used for cooling the cold plate body, the liquid cooling platform deck assembly penetrates through the cold plate body and is arranged in the cold plate body in a sliding mode, the cold plate body is fixedly provided with a plurality of second guide rods which are arranged in parallel, and the second guide rods are respectively connected with the liquid cooling platform deck assembly in a sliding mode.
Furthermore, the liquid-cooled electrode rod comprises an insulation external member, a heating element fixing component, an inner core pipe fitting, a liquid-cooled electrode rod body arranged in the vacuum cover, a first installation insulating member and a second installation insulating member which are sleeved outside the liquid-cooled electrode rod body, a first flow channel is arranged inside the liquid-cooled electrode rod body, the inner core pipe fitting is arranged in the first flow channel, the inner core pipe fitting is provided with a second flow channel, the first flow channel is communicated with the second flow channel, cooling liquid sequentially flows through the first flow channel and the second flow channel, the liquid-cooled electrode rod body is connected with power supply current, and the heating element fixing component is arranged at the end part of the liquid-cooled electrode rod body; the heating element fixing component comprises a shaft body and a flat body which is integrally arranged with the shaft body, the shaft body comprises an upper shaft body and a lower shaft body which are respectively arranged on two sides of the flat body, the upper shaft body is in threaded connection with a nut element, a clamping groove is formed between the nut element and the flat body, the liquid-cooled electrode rod body is provided with a shaft body fixing groove, the lower shaft body is arranged in the shaft body fixing groove, the flat body is abutted against the end face of the liquid-cooled electrode rod body, and the hot wire net rack is installed in the clamping groove in a limiting manner; the liquid cooling electrode bar body is integrally provided with an assembly ring body, the insulation sleeve is sleeved outside the assembly ring body, the liquid cooling electrode bar further comprises a sealing ring arranged between the first installation insulation part and the assembly ring body, the first installation insulation part and the second installation insulation part are respectively arranged on the inner side and the outer side of the vacuum cover, and another sealing ring is arranged between the first installation insulation part and the bottom wall of the vacuum cover.
Furthermore, the hot wire rack comprises an anode rack rod and a cathode rack rod, two ends of the anode rack rod are fixedly connected with the two liquid-cooled electrode rods respectively, two ends of the cathode rack rod are fixedly connected with the two liquid-cooled electrode rods respectively, one end of the heating wire is fixed on the anode rack rod, and the other end of the heating wire is fixed on the anode rack rod; the positive pole hack lever cover is equipped with a plurality of anodal wire winding locating component, and negative pole hack lever cover is equipped with a plurality of negative pole wire winding locating component, is equipped with anodal wire winding clearance between two adjacent anodal wire winding locating component, is equipped with negative pole wire winding clearance between two adjacent negative pole wire winding locating component, and the one end of heater is fixed and is spacing in anodal wire winding clearance, and the one end of heater is fixed and is spacing in negative pole wire winding clearance.
Furthermore, the heating wire tensioning piece comprises a tensioning piece frame and a plurality of elastic components, the tensioning piece frame is fixedly installed on the heating wire net frame, the elastic components are linearly arranged, one ends of the elastic components are respectively fixed on the tensioning piece frame, and the other ends of the elastic components are respectively connected with the heating wires.
Furthermore, the vacuum cover comprises a vacuum cover body, an air exhaust sealing flange arranged on the vacuum cover body, a temperature detector arranged inside the vacuum cover body and a sealing baffle door rotatably installed on the vacuum cover body, wherein the temperature detector is used for detecting the temperature inside the vacuum cover, the vacuum cover body and the sealing baffle door are both provided with interlayer liquid cooling cavities, cooling liquid is introduced into the interlayer liquid cooling cavities to cool the vacuum cover, the air exhaust sealing flange is provided with a dust baffle plate, and the air exhaust sealing flange is used for being in sealing connection with an external vacuum pumping system.
The invention has the beneficial effects that:
1. the liquid cooling stage assembly and the vacuum cover base cold plate can be cooled effectively and quickly, so that the liquid cooling stage assembly and the vacuum cover can work in a high-temperature environment for a long time, the service lives of the liquid cooling stage assembly and the vacuum cover are prolonged, and the production cost is reduced;
2. the interior of the elastic sealing element is also pumped to form a vacuum environment, one end of the elastic sealing element is fixedly and hermetically arranged on the liquid cooling stage assembly, the elastic sealing element does not need to act relative to the liquid cooling stage assembly, the other end of the elastic sealing element is fixedly and hermetically arranged on the cold plate of the vacuum cover base, the elastic sealing element also does not need to act relative to the cold plate of the vacuum cover base, and the elastic sealing element adapts to the up-and-down action of the liquid cooling stage assembly through the elasticity of the elastic sealing element per se, so that the sealing property of the installation of the liquid cooling stage assembly and the vacuum cover can be greatly enhanced, the air leakage of the vacuum cover is effectively avoided, and the film deposition effect on the surface of the cutter is good;
3. the cutter is placed on the liquid cooling microscope carrier subassembly of heat source subassembly below to adjust the lift of liquid cooling microscope carrier subassembly, with the height between accurate cutter of control and the heat source subassembly, so that the cutter is in the best deposit reaction temperature, so that generate heat evenly, the deposit temperature of the different positions of cutter cutting edge keeps unanimous, and the cutter cutting edge is heated evenly, avoids the handle of a knife blackening phenomenon to appear, improves the yields greatly.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
FIG. 2 is a schematic view of a hidden vacuum housing and heat source assembly according to the present invention.
FIG. 3 is a schematic cross-sectional view of a vacuum-hidden cover and a heat source assembly according to the present invention.
FIG. 4 is a schematic structural diagram of a spin transfer fluid disk of the present invention.
FIG. 5 is a schematic diagram of the hidden liquid cooling stage assembly, the elastic sealing member and the vacuum cup base cold plate of the present invention.
Fig. 6 is a schematic structural view of a heat source assembly of the present invention.
Fig. 7 is a schematic view of the structure of the vacuum housing and the heat source assembly of the present invention.
Fig. 8 is a schematic perspective view of a liquid-cooled electrode rod according to the present invention.
FIG. 9 is a schematic cross-sectional view of a liquid-cooled electrode rod according to the present invention.
FIG. 10 is a schematic cross-sectional view of the vacuum housing, the liquid-cooled electrode bar and the positive electrode frame bar according to the present invention.
Fig. 11 is a partially enlarged schematic view of a portion a in fig. 10.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention is further described below with reference to the following examples and the accompanying drawings, which are not intended to limit the present invention.
As shown in fig. 1 to 11, the coating machine provided by the present invention includes a vacuum cover 21, a liquid cooling stage assembly 65, an elastic sealing member 66, a vacuum cover base cold plate 67 and a heat source assembly 28, wherein the vacuum cover base cold plate 67 is hermetically mounted on the bottom wall of the vacuum cover 21, the liquid cooling stage assembly 65 is slidably disposed on the bottom wall of the vacuum cover 21, the vacuum cover base cold plate 67 is used for cooling the vacuum cover 21, the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67 are both hollow structures, cooling liquid is introduced into the liquid cooling stage assembly 65 and the vacuum cover base cold plate 67 to achieve cooling, the elastic sealing member 66 is sleeved on the liquid cooling stage assembly 65, the liquid cooling stage assembly 65 is used for bearing a tool and adjusting a distance between the tool and the heat source assembly 28, one end of the elastic sealing member 66 is hermetically mounted on the liquid cooling stage assembly 65, and the other end of the elastic sealing member 66 is hermetically mounted on the vacuum cover base cold plate 67. The elastomeric seal 66 is made of an elastomeric material.
In the practical application, vacuum cover base cold plate 67 seal installation is in the diapire of vacuum cover 21, liquid cooling microscope carrier subassembly 65 and vacuum cover base cold plate 67 are hollow structure, the inside leading-in mobile coolant liquid of liquid cooling microscope carrier subassembly 65 and vacuum cover base cold plate 67, can be effective, realize the cooling to liquid cooling microscope carrier subassembly 65 and vacuum cover base cold plate 67 fast, make liquid cooling microscope carrier subassembly 65 and vacuum cover 21 can be in work under the high temperature environment for a long time, prolong liquid cooling microscope carrier subassembly 65 and vacuum cover 21's life, and the production cost is reduced. The inside vacuum environment that also bleeds of elastic sealing member 66 forms, the one end of elastic sealing member 66 is fixed and sealed the setting in liquid cooling stage subassembly 66, elastic sealing member 66 does not need the action for liquid cooling stage subassembly 65, the other end of elastic sealing member 66 is fixed and sealed the setting in vacuum cover base cold plate 67, elastic sealing member 66 also does not need the action for vacuum cover base cold plate 67, elastic sealing member 66 passes through the elasticity of self in order to adapt to the upper and lower action of liquid cooling stage subassembly 65, consequently, can strengthen the leakproofness of liquid cooling stage subassembly 65 and vacuum cover 21 installation greatly, effectively avoid vacuum cover 21 gas leakage, make the film deposition on cutter surface effectual. The cutter is placed on liquid cooling microscope carrier subassembly 65 of heat source subassembly 28 below to adjust liquid cooling microscope carrier subassembly 65's lift, with the height between accurate cutter of control and the heat source subassembly 28, so that the cutter is in the best deposit reaction temperature, make to generate heat evenly, the deposit temperature of cutter cutting edge different positions keeps unanimous, the cutter cutting edge is heated evenly, avoids the handle of a knife blackening phenomenon to appear, improves the yields greatly.
The heat source component 28 comprises a hot wire net rack 31, a hot wire tensioning member 39, a plurality of liquid cooling electrode rods 30 and a plurality of hot wires 32 uniformly distributed on the hot wire net rack 31, the plurality of liquid cooling electrode rods 30 are all arranged on the bottom wall of the vacuum cover 21, the hot wire net rack 31 is positioned inside the vacuum cover 21 and is borne on the plurality of liquid cooling electrode rods 30, the liquid cooling electrode rods 30 are electrically connected with the hot wire net rack 31, the hot wire net rack 31 is electrically connected with the plurality of hot wires 32, the liquid cooling electrode rods 30 are used for supplying power to the hot wires 32, the liquid cooling electrode rods 30 are of a hollow structure, cooling liquid is introduced into the liquid cooling electrode rods 30 to realize cooling, the hot wire tensioning member 39 is fixedly arranged on the hot wire net rack 31, the hot wire tensioning member 39 is used for tensioning the plurality of hot wires 32, the liquid cooling platform component 65 is positioned below the hot wire net rack 31 and is used for bearing cutters, and the hot wires 32 are used for heating cutters borne on the liquid cooling platform net rack component 65.
In this embodiment, the liquid cooling stage assembly 65 includes a frame 68, a liquid cooling stage 50, a liquid outlet hollow support tube 58, a lifting drive structure 69 and a rotary drive member 59, the frame 68 is fixedly mounted at the bottom of the vacuum cover 21, the lifting drive structure 69 is mounted on the frame 68 and is drivingly connected to the liquid outlet hollow support tube 58, the upper end of the liquid outlet hollow support tube 58 protrudes into the vacuum cover 21 and is fixedly connected to the liquid cooling stage 50, the lower end of the liquid outlet hollow support tube 58 is fixedly connected to the rotary drive member 59, the liquid outlet hollow support tube 58 is slidably disposed on the cooling plate 67 of the vacuum cover base, a liquid cooling cavity 52 is disposed inside the liquid cooling stage 50, the liquid outlet hollow support tube 58 is communicated with the liquid cooling cavity 52, a rotary liquid guiding plate 51 is rotatably mounted in the liquid cooling cavity 52, an output end of the rotary drive member 59 is connected to the rotary liquid guiding plate 51, cooling liquid is introduced into the liquid cooling cavity 52, and the rotary liquid guiding plate 51 is used for stirring the cooling liquid inside the liquid cooling cavity 52.
In practical application, the cutter is placed on the liquid cooling microscope stage 50, the inside evacuation and the heating of vacuum cover 21, lift drive structure 69 is used for accurately drive control liquid cooling microscope stage 50 along the displacement of vertical direction, the distance of strict control cutter and the source that generates heat, make the cutter surface be in the best deposition temperature, liquid cooling cavity 52 leading-in flowing coolant liquid, rotatory drain pan 51 lasts the rotation, stir the inside coolant liquid of liquid cooling cavity 52 uniformly, rotatory drain pan 51's design can be effectively, realize the cooling to liquid cooling microscope stage 50 fast, make liquid cooling microscope stage 50 can work under the high temperature environment for a long time, avoid the liquid cooling microscope stage to burn and lose, service life is prolonged, and production cost is reduced.
In this embodiment, the elastic sealing element 66 is an elastic ring body, the elastic sealing element 66 is sleeved outside the hollow liquid outlet supporting tube 58, one end of the elastic sealing element 66 is connected with the bottom wall of the vacuum cover 21 in a sealing manner, and the other end of the elastic sealing element 66 is connected with the rotary driving element 59 in a sealing manner; when the liquid-cooled stage 50 moves upward, the elastic sealing member 66 is in a compressed state; when the liquid-cooled stage 50 moves downward, the resilient seal 66 is in an expanded state.
In practical application, the liquid outlet hollow support tube 58 is slidably arranged on the bottom wall of the vacuum cover 21, a mounting hole is reserved at the joint of the liquid outlet hollow support tube 58 and the vacuum cover base cold plate 67, and an air leakage situation occurs in the action process that the liquid outlet hollow support tube 58 moves up and down in the mounting hole.
In this embodiment, the rotary liquid guiding disc 51 includes a liquid guiding flat plate 53 and a plurality of blades 54 disposed on the liquid guiding flat plate 53, the plurality of blades 54 are in an annular array along a central axis of the liquid guiding flat plate 53, the liquid guiding flat plate 53 is rotatably mounted in the liquid cooling cavity 52, the plurality of blades 54 are used for stirring the cooling liquid in the liquid cooling cavity 52, the liquid guiding flat plate 53 is provided with a liquid guiding central hole 55 and an assembling convex ring body 56, and the assembling convex ring body 56 and the liquid guiding central hole 55 are coaxially disposed.
In practical application, during cutter deposition heating, the cutter is placed on the liquid cooling platform 50, flowing cooling liquid is introduced into the liquid cooling cavity 52, the rotary liquid guiding plate 51 continuously rotates, the cooling liquid inside the liquid cooling cavity 52 is uniformly stirred, the sheet 54 is of a sheet structure, the panel height of the sheet 54 is matched with the height of the liquid cooling cavity 52, the sheet 54 can fully drive the cooling liquid to flow, the liquid cooling platform 50 is uniform and can be cooled quickly, the rotary liquid guiding plate 51 can be effectively and quickly designed to cool the liquid cooling platform 50, the liquid cooling platform 50 can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform is avoided, the service life is prolonged, and the production cost is reduced. The rotary fluid conducting disc 51 may be an integrally formed structure, and the fluid conducting central hole 55 is used for introducing the flowing cooling fluid.
In this embodiment, the liquid cooling stage assembly 65 further includes a liquid inlet hollow tube 57, the liquid inlet hollow tube 57 is disposed inside the liquid outlet hollow support tube 58, the lower end of the liquid inlet hollow tube 57 is connected to the output end of the rotary driving member 59, the upper end of the liquid inlet hollow tube 57 protrudes into the liquid cooling cavity 52 and is clamped to the assembling convex ring body 56, the liquid inlet hollow tube 57 is communicated with the liquid guiding central hole 55, and the rotary driving member 59 is used for driving the liquid inlet hollow tube 57 and the rotary liquid guiding disc 51 to rotate. Specifically, when feed liquor hollow tube 57 is used for leading-in coolant liquid, still be used for driving about rotatory liquid guide plate 51 and continuously rotate, feed liquor hollow tube 57 is connected with the drive of liquid guide plate 53 via assembly bulge loop body 56, and structural design is reasonable, and rotatory liquid guide plate 51 can be effectively, evenly, realize the cooling to liquid cooling microscope carrier 50 fast for liquid cooling microscope carrier 50 can be in work under the high temperature environment for a long time, avoids liquid cooling microscope carrier 50 to burn out, increase of service life, reduction in production cost.
In this embodiment, the rotary driving member 59 is provided with a liquid inlet cavity 60 and a liquid outlet cavity 61, the liquid inlet cavity 60 is communicated with the liquid inlet hollow tube 57, the liquid outlet cavity 61 is communicated with the liquid outlet hollow support tube 58, and the cooling liquid sequentially flows through the liquid inlet cavity 60, the liquid inlet hollow tube 57, the liquid guiding central hole 55, the liquid cooling cavity 52, the liquid outlet hollow support tube 58 and the liquid outlet cavity 61. Specifically, because the coolant through liquid cooling cavity 52 has absorbed the heat, consequently the coolant temperature of going out liquid chamber 61 is higher than the coolant temperature of going into liquid chamber 60, goes into liquid chamber 60 and goes out the hot interval setting of liquid chamber 61, guarantees the cooling effect of the coolant of going into liquid chamber 60, can effectively, evenly, realize the cooling to the liquid cooling microscope carrier fast.
In this embodiment, the lifting driving structure 69 includes a lifting driving body 70 fixedly mounted on the frame 68 and a supporting frame 71 drivingly connected to the lifting driving body 70, one end of the supporting frame 71 is slidably disposed on the frame 68, the other end of the supporting frame 71 is fixedly mounted on the rotating driving member 59, the lifting driving body 70 drives the rotating driving member 59, the liquid outlet hollow supporting tube 58 and the liquid cooling stage 50 to move up and down through the supporting frame 71, a plurality of first guiding rods 72 are mounted on the frame 68, the plurality of first guiding rods 72 respectively penetrate through the supporting frame 71, and the supporting frame 71 moves along the first guiding rods 72. Specifically, the lifting driving body 70 can be driven by a screw rod, the screw rod driving has the characteristic of high precision, the up-and-down movement distance of the liquid cooling carrier 50 can be accurately controlled, the stroke of the cutter can be controlled, the distance between the cutter and a heating source is strictly controlled, the surface of the cutter is at the optimal deposition temperature, and the film deposition effect on the surface of the cutter is good; first guide bar 72 bears a weight of 71 and has the guide effect for bear a weight of 71 and accurately follow the route removal of predetermineeing, further make the displacement of liquid cooling microscope carrier 50 accurate, a plurality of cutter surfaces can thermally equivalent, and the coating is effectual, and the yields is high.
In this embodiment, the liquid cooling stage 50 includes a liquid cooling stage body 63 and a bearing upper cover 64 installed on the liquid cooling stage body 63, a seal ring 25 is provided between the bearing upper cover 64 and the liquid cooling stage body 63, and the tool is borne on the bearing upper cover 64. Specifically, the seal ring 25 can prevent the coolant in the liquid cooling cavity 52 from overflowing, enhance the sealing performance of the liquid cooling stage 50, and prevent the coolant from being wasted.
In this embodiment, the vacuum cover base cold plate 67 includes a cold plate body 73 hermetically mounted at the bottom of the vacuum cover 21 and a cold plate cavity 74 disposed inside the cold plate body 73, the cold plate cavity 74 introduces flowing cooling liquid for cooling the cold plate body 73, and the liquid cooling stage assembly 65 passes through the cold plate body 73 and is slidably disposed on the cold plate body 73. Specifically, the cold plate body 73 is arranged at the bottom of the vacuum cover 21, and the flowing cooling liquid is introduced into the cold plate cavity 74, so that the vacuum cover 21 can be effectively protected, when the cold plate 67 on the base of the vacuum cover is used up, a new cold plate 67 on the base of the vacuum cover can be replaced, and the maintenance cost can be saved; the cold plate cavity 74 is flat, so that the cooling area can be enlarged, quick cooling is realized, and the cooling effect is good.
In this embodiment, the plurality of second guide rods 75 arranged in parallel to each other are fixedly mounted on the cold plate body 73, and the plurality of second guide rods 75 are slidably connected to the carrier 71 of the liquid cooling stage assembly 65, respectively. Specifically, the second guide rod 75 and the first guide rod 72 all have a guiding effect on the bearing frame 71, so that the central axes of the cold plate body 73, the bearing frame 71, the liquid outlet hollow support tube 58 and the liquid cooling carrying platform 50 are arranged in parallel, the bearing frame 71 horizontally and accurately moves along a preset path, the displacement of the liquid cooling carrying platform 50 is further accurate, the surfaces of a plurality of cutters can be uniformly heated, the coating effect is good, and the yield is high.
In this embodiment, the liquid cooling electrode rod 30 includes the liquid cooling electrode rod body 01 that sets up in the vacuum hood 21, generate heat a fixed part 02 and inner core pipe fitting 03, the inside first class liquid passageway 04 that is equipped with of liquid cooling electrode rod body 01, inner core pipe fitting 03 is installed in first class liquid passageway 04, inner core pipe fitting 03 is equipped with second class liquid passageway 05, first class liquid passageway 04 and second class liquid passageway 05 intercommunication, the coolant liquid flows through first class liquid passageway 04 and second class liquid passageway 05 in proper order, liquid cooling electrode rod body 01 inserts supply current, generate heat a fixed part 02 and install in the tip of liquid cooling electrode rod body 01. Specifically, electrode rod body 01 installs in vacuum device 21's diapire, and the leading-in first flow liquid passageway 04 of coolant liquid for inside the coolant liquid is deep into electrode rod body 01, flowed out by second flow liquid passageway 05 again, and the cooling can be with higher speed to electrode rod body 01 deep cooling to the coolant liquid that flows, and the cooling effect is good, effectively avoids the electrode rod to burn out, prolongs electrode rod's life. Heating element fixing part 02 is installed in the upper end of electrode bar body 01, and the heating element is connected with electrode bar body 01 through heating element fixing part 02 for electrode bar body 01 and heating element reasonable connection realize stably supplying power and evenly generating heat.
In this embodiment, the heating element fixing component 02 includes a shaft body 12 and a flat plate body 13 integrally arranged with the shaft body 12, the shaft body 12 includes an upper shaft body 14 and a lower shaft body 15 respectively arranged at two sides of the flat plate body 13, the upper shaft body 14 is in threaded connection with a nut member 26, a clamping groove 16 is arranged between the nut member 26 and the flat plate body 13, the liquid-cooled electrode rod body 01 is provided with a shaft body fixing groove 17, the lower shaft body 15 is arranged in the shaft body fixing groove 17, the flat plate body 13 is abutted against the end surface of the liquid-cooled electrode rod body 01, and the hot wire net rack 31 is installed in the clamping groove 16 in a limiting manner. Specifically, the hot wire net rack 31 is arranged in the clamping groove 16, the nut member 26 is used for locking the hot wire net rack 31 in the clamping groove 16, the width of the clamping groove 16 can be adjusted according to the specific width of the hot wire net rack 31, the shaft body 12 is of an integrally formed structure, the hot wire net rack 31, the shaft body 12 and the liquid cooling electrode rod body 01 are in good contact, the introduced power current is more stable, and stable power supply and uniform heating are realized.
In this embodiment, the liquid-cooled electrode rod 30 further includes an insulating sleeve 18, the assembly ring 22 is integrally disposed on the liquid-cooled electrode rod body 01, and the insulating sleeve 18 is sleeved outside the assembly ring 22. The insulating sleeve 18 is used for insulating other parts in the vacuum cover 21 from the liquid-cooled electrode rod body 01 and preventing the other parts from being damaged due to mistaken touch of a high-voltage power supply.
In this embodiment, the liquid-cooled electrode rod 30 further includes a first installation insulator 23 and a second installation insulator 24 both sleeved outside the liquid-cooled electrode rod body 01, a sealing ring 25 is disposed between the first installation insulator 23 and the assembling ring 22, the first installation insulator 23 and the second installation insulator 24 are respectively disposed inside and outside the vacuum cover 21, and another sealing ring 25 is disposed between the first installation insulator 23 and the bottom wall of the vacuum cover 21. Specifically, the first mounting insulator 23 and the second mounting insulator 24 are used for mounting the liquid-cooled electrode rod body 01 and the vacuum cover 21 in an insulating manner, so that the liquid-cooled electrode rod body 01 is prevented from being in direct contact with the vacuum cover 21 to cause electric leakage, and potential safety hazards are eliminated.
In this embodiment, the hot wire rack 31 includes an anode rack bar 33 and a cathode rack bar 34, two ends of the anode rack bar 33 are respectively fixedly connected to the two liquid-cooled electrode bars 30, two ends of the cathode rack bar 34 are respectively fixedly connected to the two liquid-cooled electrode bars 30, one end of the hot wire 32 is fixed to the anode rack bar 33, and the other end of the hot wire 32 is fixed to the anode rack bar 33. Specifically, the positive pole frame bar 33 is connected to the positive pole, and the negative pole frame bar 34 is connected to the negative pole, so that the heating wire 32 is conducted and generates heat.
In this embodiment, the positive pole frame bar 33 is sleeved with a plurality of positive pole winding positioning components 35, the negative pole frame bar 34 is sleeved with a plurality of negative pole winding positioning components 36, a positive pole winding gap 37 is disposed between two adjacent positive pole winding positioning components 35, a negative pole winding gap 38 is disposed between two adjacent negative pole winding positioning components 36, one end of the heating wire 32 is fixed and limited in the positive pole winding gap 37, and one end of the heating wire 32 is fixed and limited in the negative pole winding gap 38. Specifically, through the distance between the tight control a plurality of negative pole wire winding locating component 36 and the distance between a plurality of positive pole wire winding locating component 35, make a plurality of heater 32 strict evenly arrange, because heater 32's even arrangement has decided the complicated shape diamond film coating cutter in-process of preparing in batches, cutter cutting edge different positions surface base member temperature strictly keeps unanimous, guarantee the homogeneity of diamond film deposition thickness and quality between cutter different positions and the cutter in batches, effectively avoid the handle of a knife blackening phenomenon to appear, improve the yields greatly.
In this embodiment, the heating wire tensioning member 39 includes a tensioning member frame 46 and a plurality of elastic members 47, the tensioning member frame 46 is fixedly mounted on the heating wire rack 31, the elastic members 47 are linearly arranged, one ends of the elastic members 47 are respectively fixed to the tensioning member frame 46, the other ends of the elastic members 47 are respectively connected with the heating wires 32, and the pulling direction of the elastic members 47 is arranged to intersect with the plane where the heating wire rack 31 is located. Specifically, the crossing angle of the elastic member 47 and the plane of the hot wire rack 31 is adjusted to an optimal angle, and the hot wire 32 is tensioned effectively and laborsavingly. Preferably, the elastic component 47 is a high-temperature resistant spring; tensioning is carried out to the heater 32 through elastomeric element 47, and the rate of tension of controlling a plurality of heaters 32 keeps unanimous, prevents that heater 32 is not hard up, realizes that deposition temperature is even for it is even to generate heat, and the deposition temperature of the different positions of cutter cutting edge keeps unanimous, and the cutter cutting edge is heated evenly, avoids the handle of a knife blackening phenomenon to appear, improves the yields greatly.
In this embodiment, the vacuum cover 21 includes a vacuum cover body 40, an air exhaust sealing flange 41 disposed on the vacuum cover body 40, a temperature detector 42 disposed inside the vacuum cover body 40, and a sealing shutter 43 rotatably mounted on the vacuum cover body 40, where the temperature detector 42 is configured to detect the temperature inside the vacuum cover 21, the vacuum cover body 40 and the sealing shutter 43 are both provided with an interlayer liquid cooling cavity 44, the interlayer liquid cooling cavity 44 introduces a cooling liquid to cool the vacuum cover 21, the air exhaust sealing flange 41 is provided with a dust baffle 45, and the air exhaust sealing flange 41 is configured to be hermetically connected with an external vacuum pumping system. Specifically, the temperature detector 42 is used to monitor the deposition temperature in real time; the interlayer liquid cooling cavity 44 introduces flowing cooling liquid, so that high-temperature burning loss of the vacuum cover 21 is prevented, the service life is prolonged, and the production cost is reduced; the dust guard plate 45 is used for preventing dust, and the yield of the cutter coating is improved.
All the technical features in the embodiment can be freely combined according to actual needs.
The above embodiments are preferred implementations of the present invention, and besides, the present invention can be implemented in other ways, and any obvious substitutions without departing from the concept of the present invention are within the protection scope of the present invention.
Claims (9)
1. A coating machine, includes the vacuum hood, its characterized in that: the vacuum cover comprises a vacuum cover base and is characterized by further comprising a liquid cooling platform deck assembly, an elastic sealing element, a vacuum cover base cold plate and a heat source assembly, wherein the vacuum cover base cold plate is hermetically arranged on the bottom wall of the vacuum cover;
the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid inlet hollow pipe, a liquid outlet hollow supporting pipe, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly arranged at the bottom of the vacuum cover, the lifting driving structure is arranged on the rack and is in driving connection with the liquid outlet hollow supporting pipe, the upper end of the liquid outlet hollow supporting pipe extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting pipe is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting pipe is arranged on a cold plate of a base of the vacuum cover in a sliding manner, a liquid cooling cavity is arranged in the liquid cooling platform, the liquid outlet hollow supporting pipe is communicated with the liquid cooling cavity, a rotary liquid guiding plate is rotatably arranged in the liquid cooling cavity, the output end of the rotary driving piece is connected with the rotary liquid guiding plate, cooling liquid is introduced into the liquid cooling cavity, and the rotary liquid guiding plate is used for stirring the cooling liquid in the liquid cooling cavity;
the rotary liquid guide disc comprises a liquid guide flat plate and a plurality of blades arranged on the liquid guide flat plate, the plurality of blades are in an annular array along the central axis of the liquid guide flat plate, the liquid guide flat plate is rotatably arranged in the liquid cooling cavity, the plurality of blades are used for stirring cooling liquid in the liquid cooling cavity, the liquid guide flat plate is provided with a liquid guide central hole and an assembling convex ring body, and the assembling convex ring body and the liquid guide central hole are coaxially arranged;
the liquid cooling platform comprises a liquid cooling platform body and a bearing upper cover arranged on the liquid cooling platform body, a sealing ring is arranged between the bearing upper cover and the liquid cooling platform body, and the cutter is borne on the bearing upper cover;
the liquid inlet hollow pipe is arranged in the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is clamped with the assembling convex ring body, the liquid inlet hollow pipe is communicated with the liquid guide central hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guide disc to rotate;
the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity;
the lifting driving structure comprises a lifting driving body fixedly mounted on the rack and a bearing frame in driving connection with the lifting driving body, a plurality of first guide rods which are arranged in parallel are mounted on the rack, the first guide rods penetrate through the bearing frame respectively, and the bearing frame moves along the first guide rods.
2. A coating machine as claimed in claim 1, characterized in that: the heat source component comprises a hot wire net rack, a hot wire tensioning piece, a plurality of liquid cooling electrode rods and a plurality of heating wires uniformly distributed on the hot wire net rack, the liquid cooling electrode rods are all arranged on the bottom wall of the vacuum cover, the hot wire net rack is located inside the vacuum cover and is borne on the liquid cooling electrode rods, the liquid cooling electrode rods are electrically connected with the hot wire net rack, the hot wire net rack is electrically connected with the heating wires, the liquid cooling electrode rods are used for supplying power to the heating wires, the liquid cooling electrode rods are of a hollow structure, cooling liquid is introduced into the liquid cooling electrode rods to realize cooling, the heating wire tensioning piece is fixedly installed on the hot wire net rack, the heating wire tensioning piece is used for tensioning the heating wires, the liquid cooling net rack component is located below the hot wire and is used for bearing a cutter, and the heating wires are used for heating the cutter borne on the liquid cooling net rack component.
3. A coating machine as claimed in claim 1, characterized in that: the elastic sealing element is an elastic annular body and is sleeved outside the liquid outlet hollow supporting tube; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.
4. A coating machine as claimed in claim 1, characterized in that: one end of the bearing frame is arranged on the rack in a sliding mode, the other end of the bearing frame is fixedly installed with the rotary driving piece, and the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to lift through the bearing frame.
5. A coating machine as claimed in claim 1, characterized in that: the vacuum cover base cold plate comprises a cold plate body and a cold plate cavity, wherein the cold plate body is hermetically arranged at the bottom of the vacuum cover, the cold plate cavity is arranged in the cold plate body, flowing cooling liquid is introduced into the cold plate cavity to be used for cooling the cold plate body, the liquid cooling platform deck assembly penetrates through the cold plate body and is arranged in the cold plate body in a sliding mode, the cold plate body is fixedly provided with a plurality of second guide rods which are arranged in parallel, and the second guide rods are respectively connected with the liquid cooling platform deck assembly in a sliding mode.
6. A coating machine as claimed in claim 2, characterized in that: the liquid cooling electrode rod comprises an insulation external member, a heating element fixing component, an inner core pipe fitting, a liquid cooling electrode rod body arranged in the vacuum cover, a first installation insulating member and a second installation insulating member which are sleeved outside the liquid cooling electrode rod body, a first fluid channel is arranged inside the liquid cooling electrode rod body, the inner core pipe fitting is arranged in the first fluid channel, the inner core pipe fitting is provided with a second fluid channel, the first fluid channel is communicated with the second fluid channel, cooling fluid sequentially flows through the first fluid channel and the second fluid channel, the liquid cooling electrode rod body is connected with power supply current, and the heating element fixing component is arranged at the end part of the liquid cooling electrode rod body;
the heating element fixing component comprises a shaft body and a flat body which is integrally arranged with the shaft body, the shaft body comprises an upper shaft body and a lower shaft body which are respectively arranged on two sides of the flat body, the upper shaft body is in threaded connection with a nut element, a clamping groove is formed between the nut element and the flat body, the liquid-cooled electrode rod body is provided with a shaft body fixing groove, the lower shaft body is arranged in the shaft body fixing groove, the flat body is abutted against the end face of the liquid-cooled electrode rod body, and the hot wire net rack is installed in the clamping groove in a limiting manner;
the liquid cooling electrode bar body is integrally provided with an assembly ring body, the insulation sleeve is sleeved outside the assembly ring body, the liquid cooling electrode bar further comprises a sealing ring arranged between the first installation insulation part and the assembly ring body, the first installation insulation part and the second installation insulation part are respectively arranged on the inner side and the outer side of the vacuum cover, and another sealing ring is arranged between the first installation insulation part and the bottom wall of the vacuum cover.
7. A coating machine as claimed in claim 2, characterized in that: the hot wire rack comprises an anode rack rod and a cathode rack rod, two ends of the anode rack rod are fixedly connected with the two liquid-cooled electrode rods respectively, two ends of the cathode rack rod are fixedly connected with the two liquid-cooled electrode rods respectively, one end of a heating wire is fixed on the anode rack rod, and the other end of the heating wire is fixed on the cathode rack rod;
the positive pole hack lever cover is equipped with a plurality of anodal wire winding locating component, and negative pole hack lever cover is equipped with a plurality of negative pole wire winding locating component, is equipped with anodal wire winding clearance between two adjacent anodal wire winding locating component, is equipped with negative pole wire winding clearance between two adjacent negative pole wire winding locating component, and the one end of heater is fixed and is spacing in anodal wire winding clearance, and the one end of heater is fixed and is spacing in negative pole wire winding clearance.
8. A coating machine as claimed in claim 2, characterized in that: the heating wire tensioning piece comprises a tensioning piece frame and a plurality of elastic components, the tensioning piece frame is fixedly installed on the heating wire net frame, the elastic components are linearly arranged, one ends of the elastic components are fixed on the tensioning piece frame respectively, and the other ends of the elastic components are connected with the heating wires respectively.
9. A coating machine as claimed in claim 1, characterized in that: the vacuum cover comprises a vacuum cover body, an air exhaust sealing flange arranged on the vacuum cover body, a temperature detector arranged inside the vacuum cover body and a sealing stop door rotatably arranged on the vacuum cover body, wherein the temperature detector is used for detecting the internal temperature of the vacuum cover, the vacuum cover body and the sealing stop door are both provided with interlayer liquid cooling cavities, cooling liquid is introduced into the interlayer liquid cooling cavities to cool the vacuum cover, the air exhaust sealing flange is provided with a dust guard plate, and the air exhaust sealing flange is used for being in sealing connection with an external vacuum pumping system.
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| CN202010899392.5A CN112210767B (en) | 2020-08-31 | 2020-08-31 | Coating machine |
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