CN213388885U - Vacuum heat source structure with heating wire tensioning piece - Google Patents

Vacuum heat source structure with heating wire tensioning piece Download PDF

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Publication number
CN213388885U
CN213388885U CN202021871963.6U CN202021871963U CN213388885U CN 213388885 U CN213388885 U CN 213388885U CN 202021871963 U CN202021871963 U CN 202021871963U CN 213388885 U CN213388885 U CN 213388885U
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heater
heat source
vacuum
rack
heating wire
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CN202021871963.6U
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王俊锋
袁明
谢文荣
秦兴耀
王�锋
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Guangdong Ucan Robot Technology Co Ltd
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Guangdong Ucan Robot Technology Co Ltd
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Abstract

The utility model belongs to the technical field of the coating equipment technique and specifically relates to indicate a vacuum heat source structure with taut piece of heater, it includes vacuum cover, the taut piece of heater and sets up the heat source subassembly in vacuum cover, and the heat source subassembly includes the heater net spare, and the heater net spare includes heater rack and equipartition in a plurality of heaters of heater rack, and the heater rack sets up inside the vacuum cover, and the taut piece fixed mounting of heater is in the heater rack, and the taut piece of heater is used for taut a plurality of heaters. Taut through the heater tensioning member, the rate of tension of controlling a plurality of heaters keeps unanimous, realizes that deposition temperature is even for it is even to generate heat, and the deposition temperature of the different positions of cutter cutting edge keeps unanimous, and the cutter cutting edge is heated evenly, avoids the handle of a knife blackening phenomenon to appear, improves the yields greatly.

Description

Vacuum heat source structure with heating wire tensioning piece
Technical Field
The utility model belongs to the technical field of coating equipment technique and specifically relates to indicate a vacuum heat source structure with taut piece of heater.
Background
The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the diamond film deposition is carried out on the blade part of a drill bit or a milling cutter by using the HFCVD method, the surface temperature value, the temperature field and the distribution uniformity of the reactive group density field of the deposition region (blade region, substrate) have great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films are in the range of about 500-1000 deg.C, with an optimum range of about 700-900 deg.C.
Traditional coating equipment has the heater of heat source and arranges inhomogeneously, and heater rate of tension is inconsistent, the inhomogeneous problem of deposition temperature appears, and the deposition temperature of the different positions of cutter cutting edge must have the difference, and uneven cutter impurity deposit is heated, leads to the handle of a knife blackening phenomenon to appear, and the yields is low.
Disclosure of Invention
The to-be-solved technical problem of the utility model is to provide a vacuum heat source structure with tight piece of heater, take-up and control the rate of tension of a plurality of heaters unanimously to a plurality of heaters, realize that deposition temperature is even, effectively avoid the handle of a knife blackening phenomenon to appear, improve the yields.
In order to solve the technical problem, the utility model discloses a following technical scheme:
the utility model provides a vacuum heat source structure with taut piece of heater, its includes vacuum cover, the taut piece of heater and sets up the heat source subassembly in vacuum cover, and the heat source subassembly includes hot wire net spare, and hot wire net spare includes hot wire rack and a plurality of heaters of equipartition in the hot wire rack, and the hot wire rack sets up inside vacuum cover, and the taut piece fixed mounting of heater is in the hot wire rack, and the taut piece of heater is used for taut a plurality of heaters.
Further, the heat source component further comprises a plurality of liquid cooling electrode rods, the liquid cooling electrode rods are all installed on the bottom wall of the vacuum cover in an insulating mode, the hot wire net rack is arranged inside the vacuum cover and borne on the liquid cooling electrode rods, the liquid cooling electrode rods are electrically connected with the hot wire net rack, the hot wire net rack is electrically connected with the heating wires, the liquid cooling electrode rods are used for supplying power to the heating wires, the liquid cooling electrode rods are of a hollow structure, and cooling liquid is introduced into the liquid cooling electrode rods to achieve cooling.
Further, the vacuum cover comprises a vacuum cover body, an air exhaust sealing flange arranged on the vacuum cover body, a temperature detector arranged inside the vacuum cover body and a sealing stop door rotatably installed on the vacuum cover body, the temperature detector is used for detecting the internal temperature of the vacuum cover, the vacuum cover body and the sealing stop door are both provided with interlayer liquid cooling cavities, cooling liquid is introduced into the interlayer liquid cooling cavities to cool the vacuum cover, the air exhaust sealing flange is provided with a dust baffle plate, and the air exhaust sealing flange is used for being in sealing connection with an external vacuum pumping system.
Further, the hot wire rack comprises an anode rack rod and a cathode rack rod, two ends of the anode rack rod are fixedly connected with the two liquid cooling electrode bars respectively, two ends of the cathode rack rod are fixedly connected with the two liquid cooling electrode bars respectively, one end of the heating wire is fixed on the anode rack rod, and the other end of the heating wire is fixed on the anode rack rod.
Furthermore, the positive pole hack lever cover is equipped with a plurality of anodal wire winding locating component, and the negative pole hack lever cover is equipped with a plurality of negative pole wire winding locating component, is equipped with anodal wire winding clearance between two adjacent anodal wire winding locating component, is equipped with negative pole wire winding clearance between two adjacent negative pole wire winding locating component, and the one end of heater is fixed and is spacing in anodal wire winding clearance, and the one end of heater is fixed and is spacing in negative pole wire winding clearance.
Furthermore, the heating wire tensioning piece comprises a tensioning piece frame and a plurality of elastic components, the tensioning piece frame is fixedly installed on the heating wire net rack, the elastic components are linearly arranged, one ends of the elastic components are respectively fixed on the tensioning piece frame, the other ends of the elastic components are respectively connected with the heating wires, and the pulling direction of the elastic components is arranged in a plane where the heating wire net rack is located in a crossed mode.
The utility model has the advantages that: taut through the heater tensioning member, the rate of tension of controlling a plurality of heaters keeps unanimous, realizes that deposition temperature is even for it is even to generate heat, and the deposition temperature of the different positions of cutter cutting edge keeps unanimous, and the cutter cutting edge is heated evenly, avoids the handle of a knife blackening phenomenon to appear, improves the yields greatly.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic structural view of the heater tensioning member and the heat source assembly of the present invention.
Fig. 3 is the structure schematic diagram of the hot wire net rack, the heating wire tensioning member and the liquid cooling electrode bar of the utility model.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
As shown in fig. 1 to 3, the utility model provides a pair of vacuum heat source structure with taut piece of heater, it includes vacuum cover 21, the taut piece 39 of heater and sets up the heat source subassembly 28 in vacuum cover 21, heat source subassembly 28 includes hot wire net spare 29, hot wire net spare 29 includes hot wire rack 31 and a plurality of heaters 32 of equipartition in hot wire rack 31, hot wire rack 31 sets up inside vacuum cover 21, the taut piece 39 fixed mounting of heater in hot wire rack 31, the taut piece 39 of heater is used for taut a plurality of heaters 32. Preferably, the heating wire 32 is made of tantalum wire or tungsten wire.
In the practical application, a plurality of cutter work pieces that need cladding material to handle are placed in the below of heater rack 31, and adjust the height between cutter work piece and the heater 32, so that the cutter work piece is in the best reaction temperature, a plurality of heater 32 equipartitions in heater rack 31, and take-up through heater tensioning member 39, the rate of tension of controlling a plurality of heater 32 keeps unanimous, it is even to realize deposition temperature, make to generate heat evenly, the deposition temperature of cutter cutting edge different positions keeps unanimous, the cutter cutting edge is heated evenly, avoid the handle of a knife blackening phenomenon to appear, the yields is greatly improved.
In this embodiment, heat source component 28 still includes a plurality of liquid cooling electrode bars 30, and the equal insulating installation in vacuum cover 21 diapire of a plurality of liquid cooling electrode bars 30, heater rack 31 sets up inside vacuum cover 21 and bears on a plurality of liquid cooling electrode bars 30, liquid cooling electrode bar 30 and heater rack 31 electric connection, heater rack 31 and a plurality of heater 32 electric connection, liquid cooling electrode bar 30 is used for supplying power to heater 32, liquid cooling electrode bar 30 is hollow structure, the leading-in liquid cooling electrode bar 30 of coolant is inside in order to realize the cooling. Specifically, liquid cooling electrode bar 30 is hollow structure, and the during operation to the leading-in mobile coolant liquid of liquid cooling electrode bar 30, the mobile coolant liquid is to liquid cooling electrode bar 30 deep cooling, realizes the cooling of self when cutting in the electric current, avoids liquid cooling electrode bar 30 to burn out, increase of service life greatly, reduction in production cost.
In this embodiment, the vacuum cover 21 includes a vacuum cover body 40, an air exhaust sealing flange 41 arranged on the vacuum cover body 40, a temperature detector 42 arranged inside the vacuum cover body 40 and a sealing shutter 43 rotatably arranged on the vacuum cover body 40, the temperature detector 42 is used for detecting the internal temperature of the vacuum cover 21, the vacuum cover body 40 and the sealing shutter 43 are both provided with interlayer liquid cooling cavities 44, the interlayer liquid cooling cavities 44 introduce cooling liquid to cool the vacuum cover 21, the air exhaust sealing flange 41 is provided with a dust baffle 45, and the air exhaust sealing flange 41 is used for being connected with an external vacuum pumping system in a sealing manner. Specifically, the temperature detector 42 is used to monitor the deposition temperature in real time; the interlayer liquid cooling cavity 44 introduces flowing cooling liquid, so that high-temperature burning loss of the vacuum cover 21 is prevented, the service life is prolonged, and the production cost is reduced; the dust guard plate 45 is used for preventing dust, and the yield of the cutter coating is improved.
In this embodiment, the hot wire rack 31 includes an anode rack bar 33 and a cathode rack bar 34, two ends of the anode rack bar 33 are respectively fixedly connected to the two liquid-cooled electrode bars 30, two ends of the cathode rack bar 34 are respectively fixedly connected to the two liquid-cooled electrode bars 30, one end of the hot wire 32 is fixed to the anode rack bar 33, and the other end of the hot wire 32 is fixed to the anode rack bar 33. Specifically, the positive pole frame bar 33 is connected to the positive pole, and the negative pole frame bar 34 is connected to the negative pole, so that the heating wire 32 is conducted and generates heat.
In this embodiment, the positive pole frame rod 33 is sleeved with a plurality of positive pole winding positioning components 35, the negative pole frame rod 34 is sleeved with a plurality of negative pole winding positioning components 36, a positive pole winding gap 37 is arranged between two adjacent positive pole winding positioning components 35, a negative pole winding gap 38 is arranged between two adjacent negative pole winding positioning components 36, one end of the heating wire 32 is fixed and limited in the positive pole winding gap 37, and one end of the heating wire 32 is fixed and limited in the negative pole winding gap 38. Specifically, through the distance between the tight control a plurality of negative pole wire winding locating component 36 and the distance between a plurality of positive pole wire winding locating component 35, make a plurality of heater 32 strict evenly arrange, because heater 32's even arrangement has decided the complicated shape diamond film coating cutter in-process of preparing in batches, cutter cutting edge different positions surface base member temperature strictly keeps unanimous, guarantee the homogeneity of diamond film deposition thickness and quality between cutter different positions and the cutter in batches, effectively avoid the handle of a knife blackening phenomenon to appear, improve the yields greatly.
In this embodiment, the heater tensioning member 39 includes a tensioning member frame 46 and a plurality of elastic components 47, the tensioning member frame 46 is fixedly installed on the heater net rack 31, the elastic components 47 are linearly arranged, one ends of the elastic components 47 are respectively fixed to the tensioning member frame 46, the other ends of the elastic components 47 are respectively connected with the heating wires 32, the pulling direction of the elastic components 47 is crosswise arranged with the plane where the heater net rack 31 is located, the crossing angle between the elastic components 47 and the plane where the heater net rack 31 is located is adjusted to an optimal angle, and the heating wires 32 are effectively tensioned in a labor-saving manner. Preferably, the elastic component 47 is a high-temperature resistant spring; tensioning is carried out to the heater 32 through elastomeric element 47, and the rate of tension of controlling a plurality of heaters 32 keeps unanimous, prevents that heater 32 is not hard up, realizes that deposition temperature is even for it is even to generate heat, and the deposition temperature of the different positions of cutter cutting edge keeps unanimous, and the cutter cutting edge is heated evenly, avoids the handle of a knife blackening phenomenon to appear, improves the yields greatly.
All the technical features in the embodiment can be freely combined according to actual needs.
The above-mentioned embodiment is the utility model discloses the implementation scheme of preferred, in addition, the utility model discloses can also realize by other modes, any obvious replacement is all within the protection scope of the utility model under the prerequisite that does not deviate from this technical scheme design.

Claims (6)

1. The utility model provides a vacuum heat source structure with taut piece of heater, includes the vacuum hood, its characterized in that: the vacuum cover is characterized by further comprising a heating wire tensioning piece and a heat source component arranged in the vacuum cover, wherein the heat source component comprises a heating wire net piece, the heating wire net piece comprises a heating wire net rack and a plurality of heating wires uniformly distributed on the heating wire net rack, the heating wire net rack is arranged inside the vacuum cover, the heating wire tensioning piece is fixedly installed on the heating wire net rack, and the heating wire tensioning piece is used for tensioning the plurality of heating wires.
2. The vacuum heat source structure with the heater tension member as set forth in claim 1, wherein: the heat source component further comprises a plurality of liquid cooling electrode rods, the liquid cooling electrode rods are all installed on the bottom wall of the vacuum cover in an insulating mode, the hot wire net rack is arranged inside the vacuum cover and borne on the liquid cooling electrode rods, the liquid cooling electrode rods are electrically connected with the hot wire net rack, the hot wire net rack is electrically connected with the heating wires, the liquid cooling electrode rods are used for supplying power to the heating wires, the liquid cooling electrode rods are of a hollow structure, and cooling liquid is introduced into the liquid cooling electrode rods to achieve cooling.
3. The vacuum heat source structure with the heater tension member as set forth in claim 1, wherein: the vacuum cover comprises a vacuum cover body, an air exhaust sealing flange arranged on the vacuum cover body, a temperature detector arranged inside the vacuum cover body and a sealing stop door rotatably arranged on the vacuum cover body, wherein the temperature detector is used for detecting the internal temperature of the vacuum cover, the vacuum cover body and the sealing stop door are both provided with interlayer liquid cooling cavities, cooling liquid is introduced into the interlayer liquid cooling cavities to cool the vacuum cover, the air exhaust sealing flange is provided with a dust guard plate, and the air exhaust sealing flange is used for being in sealing connection with an external vacuum pumping system.
4. The vacuum heat source structure with the heater tension member as set forth in claim 1, wherein: the hot wire rack comprises an anode rack rod and a cathode rack rod, the two ends of the anode rack rod are fixedly connected with the two liquid cooling electrode bars respectively, the two ends of the cathode rack rod are fixedly connected with the two liquid cooling electrode bars respectively, one end of a heating wire is fixed on the anode rack rod, and the other end of the heating wire is fixed on the anode rack rod.
5. The vacuum heat source structure with the heater tension member as set forth in claim 4, wherein: the positive pole hack lever cover is equipped with a plurality of anodal wire winding locating component, and negative pole hack lever cover is equipped with a plurality of negative pole wire winding locating component, is equipped with anodal wire winding clearance between two adjacent anodal wire winding locating component, is equipped with negative pole wire winding clearance between two adjacent negative pole wire winding locating component, and the one end of heater is fixed and is spacing in anodal wire winding clearance, and the one end of heater is fixed and is spacing in negative pole wire winding clearance.
6. The vacuum heat source structure with the heater tension member as set forth in claim 1, wherein: the heating wire tensioning piece comprises a tensioning piece frame and a plurality of elastic components, the tensioning piece frame is fixedly installed on the heating wire net rack, the elastic components are linearly arranged, one ends of the elastic components are fixed on the tensioning piece frame respectively, the other ends of the elastic components are connected with the heating wires respectively, and the tension direction of the elastic components and the plane where the heating wire net rack is located are arranged in a crossed mode.
CN202021871963.6U 2020-08-31 2020-08-31 Vacuum heat source structure with heating wire tensioning piece Active CN213388885U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021871963.6U CN213388885U (en) 2020-08-31 2020-08-31 Vacuum heat source structure with heating wire tensioning piece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021871963.6U CN213388885U (en) 2020-08-31 2020-08-31 Vacuum heat source structure with heating wire tensioning piece

Publications (1)

Publication Number Publication Date
CN213388885U true CN213388885U (en) 2021-06-08

Family

ID=76212781

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021871963.6U Active CN213388885U (en) 2020-08-31 2020-08-31 Vacuum heat source structure with heating wire tensioning piece

Country Status (1)

Country Link
CN (1) CN213388885U (en)

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