CN116288661B - Thermal field control system for crystal pulling furnace and crystal pulling furnace - Google Patents
Thermal field control system for crystal pulling furnace and crystal pulling furnace Download PDFInfo
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- CN116288661B CN116288661B CN202310358354.2A CN202310358354A CN116288661B CN 116288661 B CN116288661 B CN 116288661B CN 202310358354 A CN202310358354 A CN 202310358354A CN 116288661 B CN116288661 B CN 116288661B
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- 239000013078 crystal Substances 0.000 title claims abstract description 48
- 238000009413 insulation Methods 0.000 claims abstract description 56
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 46
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 45
- 239000010703 silicon Substances 0.000 claims abstract description 45
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 30
- 238000004321 preservation Methods 0.000 claims abstract description 22
- 238000001816 cooling Methods 0.000 claims description 61
- 239000007788 liquid Substances 0.000 claims description 39
- 230000017525 heat dissipation Effects 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
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- 238000010521 absorption reaction Methods 0.000 claims description 3
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- 239000007789 gas Substances 0.000 description 11
- 239000002994 raw material Substances 0.000 description 8
- 238000010408 sweeping Methods 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 7
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- 239000002826 coolant Substances 0.000 description 5
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- 238000010586 diagram Methods 0.000 description 3
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- 230000001681 protective effect Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000000110 cooling liquid Substances 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
The invention discloses a thermal field control system for a crystal pulling furnace and the crystal pulling furnace, comprising: the silicon melting furnace comprises a furnace body and a silicon melting body, wherein a crucible is arranged at the lower part in the furnace body, and molten silicon melting body is arranged in the crucible; the guide cylinder is arranged above the crucible along the axis of the furnace body; a heat insulation cylinder is arranged between the silicon melt and a monocrystalline silicon rod pulled from the silicon melt, and the heat insulation cylinder and the guide cylinder form a heat shield; the heat preservation cylinder is arranged in the furnace body and extends along the axis of the furnace body. The invention aims to provide a thermal field control system for a crystal pulling furnace and the crystal pulling furnace, which have simple structures and are convenient to adjust.
Description
Technical Field
The invention relates to the technical field of crystal pulling furnaces, in particular to a thermal field control system for a crystal pulling furnace and the crystal pulling furnace.
Background
The crystal puller is an apparatus for preparing silicon crystals by the Czochralski method (CZ method for short). When the crystal pulling furnace pulls the monocrystalline silicon rod, the raw materials such as the polycrystalline silicon block and the like are placed into a graphite crucible, heated and melted in protective atmosphere, after the process temperature is regulated and controlled, the seed crystal is inserted into molten silicon solution through a guide cylinder, and reversely rotates with the crucible and is lifted upwards, so that the silicon solution is crystallized and solidified into the monocrystalline silicon rod according to the silicon atom arrangement sequence of the seed crystal. In the manufacturing process of semiconductor silicon wafers, the quality of the monocrystalline silicon rod determines the quality of the silicon wafers, and precise control of the temperature of the thermal field in the crystal pulling process is very important for improving the quality of the silicon wafers.
For example, patent CN114277434a (application number 202111632073.9) discloses a thermal field adjusting device and method for single crystal growth, in which the distance between the bottom of the guide cylinder and the liquid surface of the molten silicon is always consistent, and diversified thermal field control is realized by the movement of the independently moving heater and the heat insulation cylinder, so that the lifting speed is increased and the oxygen concentration is reduced easily, the crystal bar is cooled faster, and the growth is faster.
However, the thermal field adjusting device and method for single crystal growth disclosed in patent CN114277434a drive the heat insulation cylinder to drive the guide cylinder to move up and down along the vertical direction, so that the distance between the guide cylinder and the liquid surface of the molten silicon is kept consistent, and as the molten silicon is consumed, the distance between the pulled single crystal silicon rod and the top end of the guide cylinder is larger and larger, the temperature variation range of the thermal field around the single crystal silicon rod is large, the control accuracy of the thermal field around the single crystal silicon rod is low, and the thermal field is inconvenient to control.
Disclosure of Invention
Therefore, the invention aims to solve the problems of low control accuracy of the thermal field around the monocrystalline silicon rod and inconvenient control of the thermal field in the prior art.
Therefore, the invention provides a thermal field control system for a crystal pulling furnace and the crystal pulling furnace, comprising: the silicon melting furnace comprises a furnace body and a silicon melting body, wherein a crucible is arranged at the lower part in the furnace body, and molten silicon melting body is arranged in the crucible;
The guide cylinder is arranged above the crucible along the axis of the furnace body;
A heat insulation cylinder is arranged between the silicon melt and a monocrystalline silicon rod pulled from the silicon melt, and the heat insulation cylinder and the guide cylinder form a heat shield;
the heat preservation cylinder is arranged in the furnace body and extends along the axis of the furnace body.
Preferably, a heat-insulating cylinder driver is arranged above the guide cylinder, and drives the heat-insulating cylinder to move so as to change the distance between the bottom of the heat shield and the liquid level of the silicon melt.
Preferably, a heating component is arranged between the heat preservation cylinder and the crucible.
Preferably, the bottom end of the furnace body is provided with a crucible shaft in the vertical direction, the top end of the crucible shaft is provided with a supporting plate, and the crucible is placed on the top end of the supporting plate.
Preferably, the cross section of the side wall of the guide cylinder is trapezoid, and the size of the heat insulation cylinder is smaller than that of the guide cylinder.
Preferably, the top end of the guide cylinder is detachably connected with the top end of the heat preservation cylinder through a heat preservation cover plate.
Preferably, a liquid level sensor is arranged at the bottom end of the guide cylinder, a temperature sensor and a gas flow sensor are arranged on the inner wall of the guide cylinder, a position sensor is arranged on the heat insulation cylinder, a controller is arranged on the furnace body, and the controller is respectively and electrically connected with the heat insulation cylinder driver, the liquid level sensor, the temperature sensor, the gas flow sensor and the position sensor.
Preferably, a heat insulation layer is arranged in the guide cylinder.
Preferably, the distance between the heat insulation cylinder and the guide cylinder is 20-25 mm.
The invention provides a crystal pulling furnace comprising a thermal field control system as described in any one of the preceding claims.
The technical scheme of the invention has the following advantages:
According to the invention, the heat shield arranged between the silicon melt and the monocrystalline silicon rod is formed by the guide cylinder and the heat insulation cylinder, the position of the heat insulation cylinder is adjusted by the heat insulation cylinder driver, so that the distance between the heat shield and the liquid level of the silicon melt is adjusted, the heat insulation cylinder can move along with the drawing of the monocrystalline silicon rod, the heat around the monocrystalline silicon rod is adjusted in real time, the adjustment of the thermal field of the crystal pulling furnace is realized, the control and adjustment precision of the thermal field is high, and the control effect is good; the heat dissipation of the crucible and the silicon melt is reduced through the heat preservation cylinder, the energy utilization rate is improved, the overlarge temperature change amplitude of the monocrystalline silicon rod when moving in the heat shield is prevented, and the axial temperature gradient requirement of the monocrystalline silicon rod is met; the thermal field control is realized by only adjusting the position of the heat insulation cylinder through the heat insulation cylinder driver, so that the operation is simple and the adjustment is convenient.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a prior art diagram of the present invention;
FIG. 3 is a schematic view of a cooling device according to the present invention;
fig. 4 is a diagram showing a radiating pipe arrangement of the present invention;
FIG. 5 is a schematic view of the structure of the feeding device of the present invention;
FIG. 6 is an enlarged view of the charging device A of the present invention;
Wherein 1-furnace body, 2-silicon melt, 3-crucible, 4-guide cylinder, 5-heat insulation cylinder, 6-monocrystalline silicon rod, 7-heat insulation cylinder, 8-heat insulation cylinder driver, 9-heating component, 10-crucible shaft, 11-supporting plate, 12-heat insulation cover plate, 13-liquid level sensor, 14-temperature sensor, 15-gas flow sensor, 16-position sensor, 17-controller, 18-heat insulation layer, 19-cooling tube, 20-cooling box, 21-heat radiation plate, 22-heat radiation tube, 23-storage tank, 24-driving pump, 25-heat radiation port, 26-filter screen, 27-chute body, 28-double output shaft motor, 29-rotating plate, 30-fan blade, 31-slide block, 32-elliptic plate, 33-slide groove, 34-convex block, 35-air plate, 36-sweeping brush, 37-limiting block, 38-first moving rod, 39-roller, 40-cylinder, 41-piston, 42-piston rod, 43-liquid storage tank, 44-liquid inlet pipe, 45-liquid inlet check valve, 46-liquid outlet pipe, 47-liquid outlet check valve, 48-transmission box, 49-hydraulic cylinder, 50-liquid storage tank, 51-moving box, 52-crystal pulling furnace auxiliary chamber, 53-opening, 54-discharge port, 55-sealing ring, 56-fixed block, 57-Z-type slide block, 58-mounting rod, 59-through groove, 60-L-type swing rod, 61-first connecting rod, 62-slide plate, 63-second moving rod, 64-second connecting rod, 65-third connecting rod, 66-fourth connecting rod, 67-spring, 68-shower nozzle.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more apparent, preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustrating and explaining the present invention only and are not limiting the present invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The embodiment of the invention provides a thermal field control system for a crystal pulling furnace and the crystal pulling furnace, as shown in figures 1-2, comprising: the silicon melting furnace comprises a furnace body 1 and a silicon melt 2, wherein a crucible 3 is arranged at the lower part in the furnace body 1, and the silicon melt 2 in a molten state is arranged in the crucible 3;
The guide cylinder 4 is arranged above the crucible 3 along the axis of the furnace body 1;
a heat insulation cylinder 5 is arranged between the silicon melt 3 and a monocrystalline silicon rod 6 pulled from the silicon melt 3, and the heat insulation cylinder 5 and the guide cylinder 4 form a heat shield;
The heat preservation cylinder 7 is arranged in the furnace body 1, and the heat preservation cylinder 7 extending along the axis of the furnace body 1 is arranged in the furnace body;
A heat insulation cylinder driver 8 is arranged above the guide cylinder 4, and the heat insulation cylinder driver 8 drives the heat insulation cylinder 5 to move so as to change the distance between the bottom of the heat shield and the liquid level of the silicon melt 2;
a heating component 9 is arranged between the heat preservation cylinder 7 and the crucible 3.
The working principle and the beneficial effects of the technical scheme are as follows: the guide cylinder 4 is fixedly arranged in the heat preservation cylinder 7 of the furnace body 1, inert protective gas flows into the liquid level of the silicon melt 2 in the crucible 3 through the guide cylinder 4, when the monocrystalline silicon rod 6 is pulled, the heat insulation cylinder driver 8 is started to drive the heat insulation cylinder 5 to move up and down, so that the distance between the heat shield formed by the guide cylinder 4 and the heat insulation cylinder 5 and the liquid level of the silicon melt 2 at the bottom is changed, when the distance between the heat shield and the liquid level of the silicon melt 2 is increased, the heat of the silicon melt 2 radiating to the monocrystalline silicon rod 6 is increased, and when the distance between the heat shield and the liquid level of the silicon melt 2 is reduced, the heat of the silicon melt 2 radiating to the monocrystalline silicon rod 6 is reduced, the adjustment of the heat of the silicon melt 2 radiating to the monocrystalline silicon rod 6 is realized, and the axial temperature of the monocrystalline silicon rod 6 is adjusted; the heating component 9 is used for heating the raw materials to keep a molten state all the time in the drawing process of the monocrystalline silicon rod 6; the heat preservation cylinder 7 plays a role in protection and heat preservation, reduces heat dissipation of the silicon melt 2, and improves heating efficiency of the heating component 9.
According to the invention, the heat shield arranged between the silicon melt and the monocrystalline silicon rod is formed by the guide cylinder and the heat insulation cylinder, the position of the heat insulation cylinder is adjusted by the heat insulation cylinder driver, so that the distance between the heat shield and the liquid level of the silicon melt is adjusted, the heat insulation cylinder can move along with the drawing of the monocrystalline silicon rod, the heat around the monocrystalline silicon rod is adjusted in real time, the adjustment of the thermal field of the crystal pulling furnace is realized, the control and adjustment precision of the thermal field is high, and the control effect is good; the heat dissipation of the crucible and the silicon melt is reduced through the heat preservation cylinder, the energy utilization rate is improved, the overlarge temperature change amplitude of the monocrystalline silicon rod when moving in the heat shield is prevented, and the axial temperature gradient requirement of the monocrystalline silicon rod is met; the thermal field control is realized by only adjusting the position of the heat insulation cylinder through the heat insulation cylinder driver, so that the operation is simple and the adjustment is convenient.
In one embodiment, a crucible shaft 10 is arranged at the bottom end of the furnace body 1 in the vertical direction, a supporting plate 11 is arranged at the top end of the crucible shaft 10, and the crucible 3 is placed at the top end of the supporting plate 11.
The working principle and the beneficial effects of the technical scheme are as follows: the supporting plate 11 and the crucible shaft 10 are used for placing and supporting the crucible 3, so that the crucible 3 is ensured to be placed stably, and the monocrystalline silicon rod 6 is pulled conveniently.
In one embodiment, the cross section of the side wall of the guide cylinder 4 is trapezoid, and the size of the heat insulation cylinder 5 is smaller than that of the guide cylinder 4;
A thermal insulation layer 18 is arranged in the guide cylinder 4.
The working principle and the beneficial effects of the technical scheme are as follows: the heat insulation layer 18 is filled in the guide cylinder 4 with the trapezoid structure, so that heat exchange between the guide cylinder 4 and the heat insulation cylinder 7 is blocked, heat loss is reduced, and the heat insulation performance of a thermal field is improved; the size of the heat insulation cylinder 5 is smaller than that of the guide cylinder 4, so that the contact area of the heat insulation cylinder 5 and inert protective gas in the guide cylinder 4 is reduced, and the heat insulation cylinder driver 8 conveniently drives the heat insulation cylinder 5 to move.
In one embodiment, the top end of the guide cylinder 4 is detachably connected with the top end of the heat preservation cylinder 7 through a heat preservation cover plate 12.
The working principle and the beneficial effects of the technical scheme are as follows: the heat preservation cover plate 12 is used for fixedly mounting the guide cylinder 4 on the heat preservation cylinder 7, and the heat preservation cover plate 12 plays a role in protection and heat preservation, so that heat loss of the heat preservation cylinder 7 is reduced.
In one embodiment, a liquid level sensor 13 is arranged at the bottom end of the guide cylinder 4, a temperature sensor 14 and a gas flow sensor 15 are arranged on the inner wall of the guide cylinder 4, a position sensor 16 is arranged on the heat insulation cylinder 5, a controller 17 is arranged on the furnace body 1, and the controller 17 is respectively and electrically connected with the heat insulation cylinder driver 8, the liquid level sensor 13, the temperature sensor 14, the gas flow sensor 15 and the position sensor 16.
The working principle and the beneficial effects of the technical scheme are as follows: the liquid level sensor 13 is used for detecting the residual amount of the silicon melt 2 in the crucible 3, the temperature sensor 14 is used for detecting the temperature in the guide cylinder 4, the gas flow sensor 15 is used for detecting the flow rate of inert shielding gas in the guide cylinder 4, the position sensor 16 is used for detecting the position of the heat insulation cylinder 5, and the controller 17 is used for controlling the operation of all devices.
In one embodiment, the distance between the heat insulation cylinder 5 and the guide cylinder 4 is 20-25 mm, so that inert shielding gas can conveniently flow through the heat insulation cylinder 5, and the influence of the inert shielding gas on the heat insulation cylinder 5 is reduced.
In one embodiment, as shown in fig. 3 to 4, a cooling device is provided in the furnace body 1, and the cooling device includes: a cooling pipe 19, a cooling box 20, a heat dissipation plate 21, a heat dissipation pipe 22,
The cooling box 20 is arranged on the outer wall of one side of the furnace body 1, the cooling plate 21 is arranged on the inner wall of one side, close to the furnace body 1, of the cooling box 20, S-shaped radiating pipes 22 are arranged on the cooling plate 21, a storage tank 23 is arranged in the cooling box 20, one end of each radiating pipe 22 is communicated with the storage tank 23, a spiral cooling pipe 19 is arranged on the inner wall of the guide cylinder 4, one end of each cooling pipe 19 is communicated with the storage tank 23, the other end of each cooling pipe 19 is communicated with the other end of each radiating pipe 22, a driving pump 24 is arranged at the joint of each cooling pipe 19 and the storage tank 23, a heat absorption layer is arranged on the surface of each cooling pipe 19, and a heat release layer is arranged on the surface of each radiating pipe 22;
a cooling opening 25 is formed in one side wall, far away from the cooling plate 21, of the cooling box 20, a filter screen 26 is arranged on the cooling opening 25, a chute body 27 in the vertical direction is arranged on the inner wall of the bottom end of the cooling box 20, a double-output-shaft motor 28 is arranged in the chute body 27 in a sliding mode, a rotating plate 29 is arranged on one end output shaft of the double-output-shaft motor 28, a plurality of fan blades 30 are arranged on the circumferential outer wall of the rotating plate 29 at intervals, a sliding block 31 is arranged on the other end output shaft, an elliptical plate 32 is arranged on one side, far away from the cooling plate 21, of the chute body 27, a chute 33 extending along the axial direction is arranged on the elliptical plate 32, the sliding block 31 can reciprocate in the chute body 27, a protruding block 34 is arranged on the inner wall of the cooling box 20 below the elliptical plate 32, the elliptical plate 32 can slide on the protruding block 34, one end of the air plate 35 is connected with the sliding block 31, and a sweeping brush 36 in contact with the filter screen 26 is arranged on the other end;
A limiting block 37 is arranged on one side wall, close to the filter screen 26, of the top end of the sliding groove body 27, a first moving rod 38 in the vertical direction is arranged in the limiting block 37 in a sliding mode, a roller 39 is connected to the bottom end of the first moving rod 38 in a rotating mode, the roller 39 is in contact with the top end of the elliptical plate 32, a cylinder body 40 is arranged on the top end of the sliding groove body 27, a piston 41 and a piston rod 42 are arranged in the sliding mode in the cylinder body 40 in a sliding mode, one end of the piston rod 42 is connected with the piston 41, the other end of the piston rod 42 extends out of the cylinder body 40 to be connected with the top end of the first moving rod 38, a liquid storage tank 43 is arranged in the cooling tank 20, one end of a liquid inlet pipe 44 is communicated with the liquid storage tank 43, the other end of the liquid inlet pipe 44 is communicated with the cylinder body 40, one end of a liquid outlet pipe 46 is communicated with the cylinder body 40, a spray head 68 facing the cooling plate 21 is arranged on the other end of the liquid outlet pipe 46.
The working principle and the beneficial effects of the technical scheme are as follows: when the monocrystalline silicon rod 6 is required to be cooled or the furnace body 1 is cooled after crystal pulling is completed, a driving pump 24 is started, the driving pump 24 pumps low-temperature cooling medium in a storage tank 23 into a spiral cooling pipe 19, the cooling medium absorbs heat in a thermal field through a heat absorption layer on the surface of the cooling pipe 19, the heat-absorbed cooling medium is pumped to a heat dissipation pipe 22 by the driving pump 24 to dissipate heat through a heat dissipation layer and the heat dissipation plate 21, the cooled cooling medium flows into the storage tank 23, the driving pump 24 drives the cooling medium to circulate in the cooling pipe 19 to cool the thermal field, a double-output-shaft motor 28 is started, a rotating plate 29 and a fan blade 30 are driven to rotate, a sliding block 31 is driven to rotate, an elliptical plate 32 is driven to rotate, the elliptical plate 32 moves along the convex blocks 34, when the elliptical plate 32 drives the sliding block 31 to rotate to the highest point, the sliding block 31 moves downwards along the sliding grooves 33, then the sliding block 31 and the elliptical plate 32 continue to rotate together, through the superposition of the movement, the sliding block 31 rotates one side to intermittently reciprocate along the sliding grooves 33, the double-output-shaft motor 28 is driven to intermittently reciprocate along the sliding groove body 27, the rotating plate 29 and the fan blade 30 are driven to rotate one side to intermittently reciprocate along the groove body 27, the rotating plate 29 and the fan blade 30 blow air flow, the heat dissipation plate 21 is blown to cool, the heat dissipation efficiency of the heat dissipation plate 21 is improved, the cooling rate of cooling mediums in the cooling pipe 19 is accelerated, and the cooling efficiency of the cooling pipe 19 is improved; the sliding block 31 drives the air plate 35 and the sweeping brush 36 to rotate along the sliding groove 33 to intermittently reciprocate, the sweeping brush 36 intermittently scans the filter screen 26, dust accumulated on the filter screen 26 is swept off, the filter screen 26 is kept smooth, the sweeping range is large, the sweeping efficiency is high, the air plate 35 blows air flow, the dust swept off by the sweeping brush 36 is blown out of the cooling box 20, meanwhile, the filter screen 26 is blown and cooled, the air exchange rate inside and outside the cooling box 20 is improved by the air plate 35 and the sweeping brush 36, and the heat dissipation efficiency of the heat dissipation plate 21 is improved; the elliptical plate 32 rotates to drive the first moving rod 38 and the roller 39 to reciprocate up and down along the limiting block 37, and drive the piston 41 and the piston rod 42 to reciprocate up and down in the cylinder 40, so that the cooling liquid of the liquid storage tank 43 is intermittently sprayed out from the spray head 68, the spray head 68 sprays the cooling liquid on the surfaces of the cooling plate 21 and the storage tank 23, the cooling plate 21 and the storage tank 23 are cooled, the heat dissipation efficiency of the cooling plate 21 and the storage tank 23 is improved, and the cooling effect of the cooling pipe 19 is further improved.
In one embodiment, as shown in fig. 5-6, the top end of the furnace body 1 is provided with a feeding device, and the feeding device comprises: a transmission case 48, a hydraulic cylinder 49, a storage case 50, a moving case 51,
The top end of the furnace body 1 is provided with a crystal pulling furnace auxiliary chamber 52, a transmission case 48 is arranged in the crystal pulling furnace auxiliary chamber 52, the bottom end of the transmission case 48 is provided with an opening 53, a storage case 50 is arranged in the transmission case 48, the bottom end of the storage case 50 is provided with a discharge hole 54 coaxial with the opening 53, a movable case 51 is arranged in the discharge hole 54, the circumferential outer wall of the movable case 51 is provided with a sealing ring 55 matched with the discharge hole 54, the inner walls of the two sides of the movable case 51 are provided with fixed blocks 56 with central symmetry, a Z-shaped sliding block 57 is arranged between the two fixed blocks 56, two ends of the Z-shaped sliding block 57 are respectively in sliding connection with the fixed blocks 56 on the same side, the inner wall of the top end of the storage case 50 is provided with a mounting rod 58 in the vertical direction, the bottom end of the mounting rod 58 extends into the movable case 51, the mounting rod 58 is in sliding connection with the movable case 51, the bottom end of the mounting rod 58 is provided with a through groove 59, and the Z-shaped sliding block 57 can reciprocate in the through groove 59;
the two sides of the storage box 50 are respectively vertically provided with L-shaped swing rods 60 which are rotationally connected with the inner wall of the transmission box 48, the bottom ends of the swing rods 60 are rotationally connected with sliding plates 62 which are slidably arranged on the inner wall of the bottom end of the transmission box 48 through first connecting rods 61, the two sliding plates 62 are used for closing the opening 53, the top ends of the two swing rods 60 are connected through hydraulic cylinders 49, the transmission box 48 is internally provided with second moving rods 63 in the vertical direction, the two side walls of the top end of each second moving rod 63 are respectively provided with a second connecting rod 64, the corners of the L-shaped swing rods 60 are respectively provided with a third connecting rod 65, the second connecting rods 64 are rotationally connected with the third connecting rods 65 through fourth connecting rods 66, the bottom ends of the second moving rods 63 sequentially penetrate through the storage box 50 and the mounting rods 58 to extend into the moving box 51, the second moving rods 63 are respectively slidably connected with the storage box 50 and the mounting rods 58, the Z-shaped sliding blocks 57 penetrate through the second moving rods 63 and can reciprocate in the second moving rods 63, one ends of the springs 67 are connected with the bottom ends of the second moving rods 63, and the other ends of the springs 67 are connected with the inner wall of the bottom ends of the moving box 51.
The working principle and the beneficial effects of the technical scheme are as follows: in the initial state, the piston rods of the hydraulic cylinders 49 extend, the two sliding plates 62 are closed, the piston rods of the hydraulic cylinders 49 are contracted, the distance between the top ends of the two L-shaped swinging rods 60 is reduced, the bottom ends of the L-shaped swinging rods 60 swing outwards to drive the two sliding plates 62 to be far away from each other and expose the opening 53, the L-shaped swinging rods 60 swing to drive the two third connecting rods 65 to swing downwards to drive the two fourth connecting rods 66 to swing upwards to drive the second connecting rods 64 and the second moving rods 63 to move downwards, the second moving rods 63 move downwards to push the Z-shaped sliding blocks 57 to move leftwards in the through grooves 59, the fixed blocks 56 move upwards along the Z-shaped sliding blocks 57 to drive the moving boxes 51 and the sealing rings 55 to move upwards, the springs 67 compress, the discharge holes 54 are opened, and raw materials in the storage boxes 50 fall into the crucible 3 through the discharge holes 54, the openings 53 and the crystal pulling furnace auxiliary chambers 52 to realize that the discharge holes 54 are opened firstly and then the discharge holes 54 are opened for feeding into the crucible 3; when the feeding is completed, the piston rod of the hydraulic cylinder 49 is contracted, the mechanism moves reversely, the discharge hole 54 is closed firstly, raw materials do not flow out of the storage box 50 any more, then the opening 53 is closed, the raw materials are ensured to flow out of the transmission box 4 completely, the raw materials are convenient to add, the temperature rise in the furnace body 1 does not adversely affect the raw materials in the storage box 50, and the raw material storage time is prolonged; the feeding device can continuously feed materials into the crucible 3 under the condition of the furnace body 1, so that the production efficiency and the yield of the crystal pulling furnace are improved.
The embodiment of the invention provides a crystal pulling furnace, which comprises the thermal field control system.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (10)
1. A thermal field control system for a crystal pulling furnace, comprising: the furnace body (1) is characterized in that a crucible (3) is arranged at the lower part in the furnace body (1), and a molten silicon melt (2) is arranged in the crucible (3);
a guide cylinder (4), wherein the guide cylinder (4) is arranged above the crucible (3) along the axis of the furnace body (1);
A heat insulation cylinder (5), wherein the heat insulation cylinder (5) is arranged between the guide cylinder (4) and the monocrystalline silicon rod (6) pulled out of the silicon melt (2), and the heat insulation cylinder (5) and the guide cylinder (4) form a heat shield;
A heat preservation cylinder (7), wherein the heat preservation cylinder (7) extending along the axis of the furnace body (1) is arranged in the furnace body (1);
A cooling device is arranged in the furnace body (1), and the cooling device comprises: a cooling pipe (19), a cooling box (20), a heat dissipation plate (21) and a heat dissipation pipe (22),
A cooling box (20) is arranged on the outer wall of one side of the furnace body (1), a radiating plate (21) is arranged on the inner wall of one side, close to the furnace body (1), of the cooling box (20), radiating pipes (22) distributed in an S shape are arranged on the radiating plate (21), a storage tank (23) is arranged in the cooling box (20), one end of each radiating pipe (22) is communicated with the corresponding storage tank (23), a spiral cooling pipe (19) is arranged on the inner wall of each guide cylinder (4), one end of each cooling pipe (19) is communicated with the corresponding storage tank (23), the other end of each cooling pipe is communicated with the other end of each radiating pipe (22), a driving pump (24) is arranged at the joint of each cooling pipe (19) and the corresponding storage tank (23), a heat absorption layer is arranged on the surface of each cooling pipe (19), and a heat release layer is arranged on the surface of each radiating pipe (22);
A cooling box (20) is provided with a cooling hole (25) on one side wall far away from a cooling plate (21), a filter screen (26) is arranged on the cooling hole (25), a chute body (27) in the vertical direction is arranged on the inner wall of the bottom end of the cooling box (20), a double-output-shaft motor (28) is arranged in the chute body (27), one end output shaft of the double-output-shaft motor (28) is provided with a rotating plate (29), a plurality of fan blades (30) are arranged on the circumferential outer wall of the rotating plate (29) at intervals, the other end output shaft is provided with a sliding block (31), an elliptic plate (32) is arranged on one side, far away from the cooling plate (21), of the chute body (27), a chute (33) extending along the axial direction is arranged on the elliptic plate (32), the sliding block (31) can reciprocate in the chute body (27), a lug (34) is arranged on the inner wall of the cooling box (20) below the elliptic plate (32), one end of the elliptic plate (35) can slide on the lug (34), and the other end of the elliptic plate (35) is connected with the sliding brush (36) contacted with the filter screen (26);
A limiting block (37) is arranged on one side wall, close to the filter screen (26), of the top end of the sliding groove body (27), a first moving rod (38) in the vertical direction is arranged in the limiting block (37), a roller (39) is rotationally connected to the bottom end of the first moving rod (38), the roller (39) is contacted with the top end of the elliptical plate (32), a cylinder body (40) is arranged on the top end of the sliding groove body (27), a piston (41) and a piston rod (42) are arranged in the sliding groove body (40) in a sliding manner, one end of the piston rod (42) is connected with the piston (41), the other end of the piston rod extends out of the cylinder body (40) and is connected with the top end of the first moving rod (38), a liquid storage tank (43) is arranged in the cooling tank (20), one end of a liquid inlet pipe (44) is communicated with the liquid storage tank (43), a liquid inlet one-way valve (45) is arranged on the liquid inlet pipe (44), one end of the liquid outlet pipe (46) is communicated with the cylinder body (40), a spray head (68) facing the heat dissipation plate (21) is arranged on the other end, and a liquid outlet one-way valve (47) is arranged on the liquid outlet pipe (46);
The top of the furnace body (1) is provided with a feeding device, and the feeding device comprises: a transmission case (48), a hydraulic cylinder (49), a storage case (50) and a moving case (51),
The crystal pulling furnace comprises a furnace body (1), wherein a crystal pulling furnace auxiliary chamber (52) is arranged at the top end of the furnace body (1), a transmission box (48) is arranged in the crystal pulling furnace auxiliary chamber (52), an opening (53) is formed in the bottom end of the transmission box (48), a storage box (50) is arranged in the transmission box (48), a discharge hole (54) coaxial with the opening (53) is formed in the bottom end of the storage box (50), a movable box (51) is arranged in the discharge hole (54), sealing rings (55) matched with the discharge hole (54) are arranged on the circumferential outer wall of the movable box (51), centrally symmetrical fixed blocks (56) are arranged on the inner walls of two sides of the movable box (51), Z-shaped sliding blocks (57) are arranged between the two fixed blocks (56), two ends of each Z-shaped sliding block (57) are respectively connected with the fixed blocks (56) on the same side in a sliding mode, a mounting rod (58) in the vertical direction is arranged on the inner wall of the top end of the storage box (50), the bottom end of each mounting rod (58) extends into the movable box (51), the mounting rod (58) is connected with the movable box (51) in a sliding mode, the bottom end of each mounting rod (58) is provided with a through groove (59), and the Z-shaped sliding blocks (57) can move in a reciprocating mode in the groove (59).
The two sides of the storage box (50) are respectively vertically provided with L-shaped swing rods (60) which are rotationally connected with the inner wall of the transmission box (48), the bottom ends of the swing rods (60) are rotationally connected with sliding plates (62) which are arranged on the inner wall of the bottom end of the transmission box (48) in a sliding manner through first connecting rods (61), the two sliding plates (62) are used for closing openings (53), the top ends of the two swing rods (60) are connected through hydraulic cylinders (49), second moving rods (63) in the vertical direction are arranged in the transmission box (48), second connecting rods (64) are respectively arranged on the two side walls of the top end of each second moving rod (63), third connecting rods (65) are arranged at the corners of the L-shaped swing rods (60), the second connecting rods (64) are rotationally connected with the third connecting rods (65) through fourth connecting rods (66), the bottom ends of the second moving rods (63) sequentially penetrate through the storage box (50) and mounting rods (58), the second moving rods (63) are respectively connected with the storage box (50) in a sliding manner, the mounting rods (58) in a sliding manner, and the Z-shaped sliding blocks (57) penetrate through the second moving rods (63) and can move in the second connecting rods (63) to the inner wall (63) to the bottom end of the second connecting rods (63).
2. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein a heat shield driver (8) is provided above the guide cylinder (4), the heat shield driver (8) driving the heat shield (5) to move to change the spacing of the bottom of the heat shield from the level of the silicon melt (2).
3. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein a heating assembly (9) is provided between the holding cylinder (7) and the crucible (3).
4. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein a crucible shaft (10) is provided at the bottom end of the furnace body (1) in a vertical direction, a support plate (11) is provided at the top end of the crucible shaft (10), and the crucible (3) is placed at the top end of the support plate (11).
5. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein the cross section of the side wall of the guide shell (4) is trapezoidal, and the size of the insulating shell (5) is smaller than the size of the guide shell (4).
6. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein the top end of the guide cylinder (4) is detachably connected with the top end of the heat-preserving cylinder (7) through a heat-preserving cover plate (12).
7. A thermal field control system for a crystal pulling furnace as defined in claim 2, wherein a liquid level sensor (13) is arranged at the bottom end of the guide cylinder (4), a temperature sensor (14) and a gas flow sensor (15) are arranged on the inner wall of the guide cylinder (4), a position sensor (16) is arranged on the heat insulation cylinder (5), a controller (17) is arranged on the furnace body (1), and the controller (17) is respectively electrically connected with the heat insulation cylinder driver (8), the liquid level sensor (13), the temperature sensor (14), the gas flow sensor (15) and the position sensor (16).
8. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein a thermal barrier (18) is provided within the guide shell (4).
9. A thermal field control system for a crystal pulling furnace as defined in claim 1, wherein the spacing between the insulating cylinder (5) and the guide cylinder (4) is in the range of 20 to 25mm.
10. A crystal pulling furnace, characterized in that the crystal pulling furnace comprises a thermal field control system according to any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310358354.2A CN116288661B (en) | 2023-04-06 | Thermal field control system for crystal pulling furnace and crystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310358354.2A CN116288661B (en) | 2023-04-06 | Thermal field control system for crystal pulling furnace and crystal pulling furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116288661A CN116288661A (en) | 2023-06-23 |
| CN116288661B true CN116288661B (en) | 2024-06-11 |
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| CN112362392A (en) * | 2020-11-09 | 2021-02-12 | 郑州贴玲电子科技有限公司 | No haulage rope deep water area water quality collection system |
| CN113183792A (en) * | 2021-04-28 | 2021-07-30 | 江苏紫龙新能源科技有限公司 | Direct current liquid cooling rifle that charges and liquid cooling system thereof |
| CN213835621U (en) * | 2020-12-03 | 2021-07-30 | 西安奕斯伟硅片技术有限公司 | Crystal pulling furnace for pulling monocrystalline silicon rod |
| CN114752995A (en) * | 2022-05-31 | 2022-07-15 | 西安奕斯伟材料科技有限公司 | Thermal field control device for crystal pulling furnace and crystal pulling furnace |
| CN114822968A (en) * | 2022-04-28 | 2022-07-29 | 海南中坚电缆科技有限公司 | Cable cooling device |
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112362392A (en) * | 2020-11-09 | 2021-02-12 | 郑州贴玲电子科技有限公司 | No haulage rope deep water area water quality collection system |
| CN213835621U (en) * | 2020-12-03 | 2021-07-30 | 西安奕斯伟硅片技术有限公司 | Crystal pulling furnace for pulling monocrystalline silicon rod |
| CN113183792A (en) * | 2021-04-28 | 2021-07-30 | 江苏紫龙新能源科技有限公司 | Direct current liquid cooling rifle that charges and liquid cooling system thereof |
| CN114822968A (en) * | 2022-04-28 | 2022-07-29 | 海南中坚电缆科技有限公司 | Cable cooling device |
| CN114752995A (en) * | 2022-05-31 | 2022-07-15 | 西安奕斯伟材料科技有限公司 | Thermal field control device for crystal pulling furnace and crystal pulling furnace |
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