CN112192019A - Laser processing drilling system - Google Patents
Laser processing drilling system Download PDFInfo
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- CN112192019A CN112192019A CN202011092663.2A CN202011092663A CN112192019A CN 112192019 A CN112192019 A CN 112192019A CN 202011092663 A CN202011092663 A CN 202011092663A CN 112192019 A CN112192019 A CN 112192019A
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- laser
- scanning mirror
- laser beam
- drilling system
- optical element
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
Abstract
The invention provides a laser processing drilling system, which comprises a high-power laser, a beam expander, a beam shaper, a diffractive optical element, a two-dimensional galvanometer, an F-theta scanning mirror and a workpiece table, wherein the beam shaper is arranged on the high-power laser; after laser beams emitted by the high-power laser pass through the beam expander, the laser beams irradiate the beam shaper and the diffractive optical element, are bent and rotated onto the F-theta scanning mirror through the two-dimensional vibrating mirror, and finally form annular focusing light spots with the size of 10 times of a micron on a focal plane of the F-theta scanning mirror; the two-dimensional galvanometer and the F-theta scanning mirror set the motion locus according to the use requirement and drive the annular focusing light spot to complete the path scanning of the preset locus. The laser processing drilling system has the advantages of simple structure, easy adjustment of an optical path, convenient system integration, small conicity in the depth direction of the hole, larger depth-diameter ratio value of the hole, no broken edge around the hole, good hole shape and high processing efficiency.
Description
Technical Field
The invention relates to the field of laser processing, in particular to a laser drilling system for laser fine micromachining (fine: the minimum hole diameter of drilled holes can reach 10um magnitude).
Background
As a multidisciplinary technology related to optical, mechanical, electrical, computational and materials, the laser fine micromachining technology is widely applied to the semiconductor industry, and especially focuses on integrated circuits. The main current technology of the existing laser drilling is to adopt a rotating motor to drive a double-optical wedge to rotate, and to obtain an annular light spot on a focal plane of a focusing system, wherein the annular light spot is not formed at one time and is determined by the rotating speed of the rotating motor, and meanwhile, the scanning of a using path is realized by using a galvanometer, so the generation of the annular light spot has time delay and space delay.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the technical defects and provide a laser processing drilling system, which solves the problems of low processing efficiency, complex system, large volume and the like of the existing laser drilling system.
In order to solve the problems in the prior art, the invention provides a laser processing drilling system which comprises a laser, a beam expander, a beam shaper, a diffractive optical element, a two-dimensional galvanometer, an F-theta scanning mirror and a workpiece table, wherein the beam expander is arranged on the beam shaper;
the laser provides a pulse laser beam for a subsequent light path;
the beam expander expands laser beam spots emitted by the laser, and reduces the divergence angle of the laser beam;
the laser beam shaper integrates the laser beam with Gaussian light intensity distribution into a laser beam with flat top and uniform distribution again, the laser beam only changes the distribution situation of the light energy of the laser beam through the laser beam shaper without changing the shape of a light spot of the laser beam, so the shaped laser beam is still a round light spot and a round light spot with clear edge contour, and in addition, the propagation direction of the laser beam is still kept horizontal to the optical axis of the system;
the diffraction optical element changes the spatial distribution of the laser beams, and converts the laser beams which are evenly distributed on the flat top into the laser beams which form a specific angle with the optical axis of the laser beams, namely the laser beams passing through the diffraction optical element take the optical axis as a rotating axis and are emitted out in the direction of the deflected optical axis, and the value of the deflected angle is the field angle of the F-theta scanning mirror;
the two-dimensional galvanometer presets a motion track according to use requirements, and simultaneously guides a laser beam emitted along a specific angle direction to the F-theta scanning mirror;
the two-dimensional galvanometer and the F-theta scanning mirror jointly act to enable the annular light spot focused under the F-theta scanning mirror to complete path scanning according to a preset track;
the workpiece table is used for placing a workpiece to be machined on, and the workpiece table is a reference surface of the laser fine micromachining drilling system;
the performance parameters of the diffractive optical element and the F-theta scanning mirror satisfy the following relations:
in the formula
The diameter of the annular focusing light spot;
is the focal length of the F-theta scanning mirror;
and deflecting the laser beam by the diffractive optical element to emit the laser beam in the direction of the optical axis, wherein the angle value is formed between the laser beam and the optical axis.
As a further improvement of the invention, the laser is a nanosecond laser, or a picosecond laser.
As a further improvement of the invention, the beam expander is a zoom system.
As a further improvement of the invention, the F-theta scanning mirror is an image-side telecentric optical system.
As a further improvement of the invention, the workpiece table is a precise two-dimensional moving platform and is used for realizing large-format laser processing, and the positioning precision of the workpiece table is controlled in the um magnitude.
As a further improvement of the invention, before and after the laser beam is reintegrated, the spot size and the spot shape of the laser beam are unchanged, the edge profile of the spot with the whole energy group is clear, the edge gradient is less than 0.2mm, and the light intensity uniformity of the laser beam is more than 95%.
As a further improvement of the invention, the beam shaper adopts a diffraction optical element or adopts a fly eye lens to realize beam homogenization.
As a further improvement of the present invention, the number of steps of the diffractive optical element is 8 or 16.
As a further improvement of the invention, two reflectors which are arranged in a spatial orthogonal mode are arranged in the two-dimensional galvanometer, no interference exists in the rotating process of the two reflectors, and the two reflectors are driven to rotate by a motor.
As a further improvement of the invention, a communication line of the motor is introduced into a computer, the computer presets a motion track according to the use requirement and is matched with the F-theta scanning mirror, so that the focusing light spots scan along the preset motion track, and each scanning point is a focused annular light spot.
The invention has the beneficial effects that:
the laser processing drilling system has the advantages of simple structure, easy adjustment of an optical path, convenient system integration, small conicity in the depth direction of the hole, larger depth-diameter ratio value of the hole, no broken edge around the hole, good hole shape and high processing efficiency.
Drawings
FIG. 1 is a schematic diagram of a laser fine micro machining drilling system of the present invention;
FIG. 2 is a schematic diagram of the light intensity modulation of a laser beam by a beam shaper according to the present invention;
FIG. 3 is a schematic diagram of the annular focused spot formation process of the present invention;
fig. 4 is a schematic illustration of laser drilling of the present invention.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
A laser processing drilling system comprises a laser 01, a beam expander 02, a beam shaper 03, a diffractive optical element 04, a two-dimensional galvanometer 05, an F-theta scanning mirror 06 and a workpiece table 07;
the laser 01 is a high-power laser, and the power is generally more than 5 watts;
f-theta scanning mirror: the F-theta scanning mirror is a scanning mirror or a scanning field mirror.
The laser 01 provides a light source for a subsequent light path, and is a pulse laser beam with high repetition frequency, high peak power and narrow line width, preferably, the laser is a nanosecond laser or a picosecond laser; (high repetition rate: at least 500 KHZ; high peak pulses: generally above 20 uJ; narrow line width: nanoseconds or picoseconds.)
The beam expander 02 is used for expanding laser beam spots emitted by the laser 01 and reducing the divergence angle of the laser beam, and preferably, the beam expander 02 is a zoom system and is used for obtaining the optimal laser beam spots on a subsequent light path;
the beam shaper 03 is used for reintegrating the laser beams with Gaussian light intensity distribution into laser beams with flat tops and uniform distribution, the laser beams only change the distribution situation of the light energy of the laser beams through the beam shaper 03 and do not change the shape of light spots of the laser beams, so the shaped laser beams are still round light spots and are round light spots with clear edge outlines, and in addition, the propagation direction of the laser beams is still kept horizontal to the optical axis of the system;
the diffraction optical element 04 is used for changing the spatial distribution of the laser beams and converting the laser beams which are evenly distributed on the flat top into the laser beams which form a specific angle with the optical axis of the laser beams, namely the laser beams passing through the diffraction optical element 04 take the optical axis as a rotating axis and are emitted out in the direction of the deflected optical axis, and the value of the deflected angle is the field angle of the F-theta scanning mirror;
the specific angles, here and below, denoted by the letter D, refer to: using formulas
Calculated
Value of wherein
Is the focal length of the F-theta scanning mirror 06.
The two-dimensional galvanometer 05 sets a motion track in advance according to the use requirement, and simultaneously guides the laser beam emitted along a specific angle direction to the F-theta scanning mirror 06;
the F-theta scanning mirror 06 is used for focusing the laser beam emitted along a specific angle direction into an annular light spot, and finally forming an annular focusing light spot with the size of 10 times of a micron on the focal plane; the two-dimensional galvanometer 05 and the F-theta scanning mirror 06 work together to enable the annular light spot focused under the F-theta scanning mirror 06 to complete path scanning according to a preset track, and preferably, the F-theta scanning mirror 06 is an image space telecentric optical system;
the workpiece table 07 is used for placing a workpiece to be machined thereon, the workpiece table 07 is a reference surface of the laser fine micromachining drilling system, preferably, the workpiece table 07 is a precise two-dimensional mobile platform and is used for realizing large-format laser machining, and the positioning precision of the workpiece table is controlled to be in a um magnitude.
The performance parameters of the diffractive optical element 04 and the F-theta scanning mirror 06 satisfy the following relationship:
in the formula
The diameter of the annular focusing light spot;
is the focal length of the F-theta scanning mirror 06;
deflecting the laser beam by the diffractive optical element 04 in the direction of the optical axis to emit the laser beam, and forming an angle value with the optical axis; in order to make the taper of the laser drilling small and the depth-diameter ratio of the hole large, the ratio is more than 10: 1, the diameter of the annular focusing spot is small, less than 10u, and the focal length of the F-theta scan mirror 06 is long, greater than 100mm, so the deflection angle θ of the laser beam passing through the diffractive optical element 04 is small.
As shown in fig. 1, an embodiment of the present invention provides a laser processing drilling system, where the laser 01 outputs a pulse laser beam with a high repetition frequency, a high peak power, and an extremely narrow line width, the pulse laser beam passes through the beam expander 02 to expand a spot of the laser beam, and simultaneously reduces a divergence angle of the laser beam, the laser beam is transmitted to the beam shaper 03, and then the laser beam re-integrated with energy distribution of the spot is irradiated onto the diffractive optical element 04, the diffractive optical element 04 makes the laser beam form a specific angle value with an optical axis direction, the laser beam emitted along the specific angle forms a hollow ring on the diffractive optical element 04, the hollow ring is bent to the F-theta scanning mirror 06 through the two-dimensional galvanometer 05, the F-theta scanning mirror 06 focuses the laser beam of the hollow ring onto the workpiece table 07, and the spot thereof is a focused ring-shaped spot, a work piece is placed on the stage surface of the work piece stage 07, so that a focused laser beam of the laser fine micro machining drilling system is irradiated onto the surface of the work piece.
As shown in fig. 2, the beam shaper 03 is configured to reintegrate the light intensity energy distribution of the laser beam, that is, after the laser beam 11 with the input end having the gaussian light intensity distribution passes through the beam shaper 03, the high energy in the central region is flattened and filled in the edge region of the laser beam, and then the output end is the laser beam 12 with the flat-top light intensity energy uniformly distributed, and the total energy of the laser beam 11 with the gaussian light intensity distribution is the same as the total energy of the laser beam 12 with the flat-top light intensity energy uniformly distributed, regardless of the light intensity loss of the laser beam passing through the beam shaper 03; before and after the energy recombination of the laser beams, the size and the shape of a light spot of the laser beams are unchanged, the edge profile of the light spot after the energy recombination is clear, the edge gradient is less than 0.2mm, and the light intensity uniformity of the laser beams is more than 95%; in addition, the propagation direction of the laser beam is kept horizontal to the optical axis of the system; the main purpose of the beam shaper 03 for achieving light energy recombination is to make the energy distribution on the annular light spot generated by the subsequent light path uniform, which is a prerequisite condition that no broken edge is formed around the punched hole and the hole shape is good; the beam shaper 03 may adopt a diffractive optical element or a fly-eye lens to homogenize the beam.
As shown in fig. 3, since the two-dimensional galvanometer 05 does not affect the performance of the laser beam, only the propagation direction of the laser beam is changed, the two-dimensional galvanometer 05 is not considered in the annular focusing spot forming process; the diffraction optical element 21 changes the spatial distribution of the laser beams, after the laser beams with flat tops and uniformly distributed at the input end pass through the diffraction optical element 21, the laser beams all irradiate the F-theta scanning mirror 22 along the direction forming an angle theta with the optical axis, and the laser beams form hollow divergent annular laser beams behind the diffraction optical element 21, namely, the laser beam spots are enlarged closer to the F-theta scanning mirror 22, and the annular width of the laser beams is unchanged; additionally, the θ angle is equivalent to the field of view of the F-theta scan mirror 22; the annular laser beam is focused by the F-theta scanning mirror 22 to generate an annular focusing light spot on the workpiece stage 23, the light spot size of the light spot distribution shape 25 of the annular laser beam on the coordinate system plane 24 is D, and the performance parameters of the diffractive optical element 21 and the F-theta scanning mirror 22 satisfy the following relations:
Two reflectors which are arranged in a spatial orthogonal mode are arranged in the two-dimensional galvanometer 05, the two reflectors do not interfere in the rotating process, the two reflectors are driven to rotate by a motor, in addition, a communication line of the motor is introduced into a computer, the computer presets a motion track according to use requirements and is matched with the F-theta scanning mirror 06, so that focused light spots scan along the preset motion track, and each scanning point is a focused annular light spot; as shown in fig. 4, the two-dimensional galvanometer 05 is driven and simultaneously scans in cooperation with the F-theta scanning mirror 06, and a scanning path 31 of the two-dimensional galvanometer is formed by a motion track of the annular focusing light spot 32, that is, each scanning point generates one annular focusing light spot 32, and an interval from a previous scanning point to a next scanning point is determined by a specific value of a scanning point interval set by a computer.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (10)
1. A laser machining drilling system, characterized by:
the device comprises a laser (01), a beam expander (02), a beam shaper (03), a diffractive optical element (04), a two-dimensional galvanometer (05), an F-theta scanning mirror (06) and a workpiece table (07);
the laser (01) provides a pulse laser beam for a subsequent light path;
the beam expander (02) expands laser beam spots emitted by the laser (01) and reduces the divergence angle of the laser beam;
the laser beam shaper (03) integrates the laser beam with Gaussian light intensity distribution into a laser beam with flat top and uniform distribution, the laser beam only changes the distribution situation of the light energy of the laser beam through the beam shaper (03) and does not change the shape of a light spot of the laser beam, so that the shaped laser beam is still a round light spot and is a round light spot with clear edge profile, and in addition, the propagation direction of the laser beam is still kept horizontal with the optical axis of the system;
the diffraction optical element (04) changes the spatial distribution of the laser beams, converts the laser beams which are evenly distributed on the flat top into the laser beams which form a specific angle with the optical axis of the laser beams, namely the laser beams which pass through the diffraction optical element (04) take the optical axis as a rotating shaft and are emitted out in the direction of the deflected optical axis, and the value of the deflected angle is the field angle of the F-theta scanning mirror;
the two-dimensional galvanometer (05) presets a motion track according to the use requirement, and simultaneously guides the laser beam emitted along a specific angle direction to the F-theta scanning mirror (06);
the F-theta scanning mirror (06) focuses the laser beam injected along a specific angle direction into an annular light spot, and the two-dimensional galvanometer (05) and the F-theta scanning mirror (06) jointly act to enable the annular light spot focused under the F-theta scanning mirror (06) to complete path scanning according to a preset track;
the workpiece table (07) is used for placing a workpiece to be machined on, and the workpiece table (07) is a reference surface of the laser fine micro-machining drilling system;
the performance parameters of the diffractive optical element (04) and the F-theta scanning mirror (06) satisfy the following relationship:
in the formula
The diameter of the annular focusing light spot;
is the focal length of the F-theta scanning mirror (06);
the laser beam is deflected and emitted in the direction of the optical axis by the diffractive optical element (04), and forms an angle value with the optical axis.
2. A laser machining drilling system according to claim 1, wherein: the laser is a nanosecond laser or a picosecond laser.
3. A laser machining drilling system according to claim 1, wherein: the beam expander (02) is a zoom system.
4. A laser machining drilling system according to claim 1, wherein: the F-theta scanning mirror (06) is an image space telecentric optical system.
5. A laser machining drilling system according to claim 1, wherein: the workpiece table (07) is a precise two-dimensional moving platform and is used for realizing large-format laser processing, and the positioning precision of the workpiece table is controlled in the um magnitude.
6. A laser machining drilling system according to claim 1, wherein: before and after the laser beams are reintegrated, the spot size and the spot shape of the laser beams are unchanged, the edge profile of the spots with the whole energy group is clear, the edge gradient is less than 0.2mm, and the light intensity uniformity of the laser beams is more than 95%.
7. A laser machining drilling system according to claim 1, wherein: the beam shaper (03) adopts a diffractive optical element or a fly eye lens to realize beam homogenization.
8. A laser machining drilling system according to claim 1, wherein: the number of steps of the diffractive optical element (04) is 8 or 16.
9. A laser machining drilling system according to claim 1, wherein: two reflectors which are arranged in a space orthogonal mode are arranged in the two-dimensional galvanometer (05), the two reflectors do not interfere in the rotating process, and the two reflectors are driven to rotate by a motor.
10. A laser machining drilling system according to claim 9, wherein: a communication line of the motor is introduced into a computer, the computer presets a motion track according to the use requirement and is matched with the F-theta scanning mirror (06) to enable the focusing light spots to scan along the preset motion track, and each scanning point is a focused annular light spot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011092663.2A CN112192019B (en) | 2020-10-13 | 2020-10-13 | Laser processing drilling system |
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|---|---|---|---|
| CN202011092663.2A CN112192019B (en) | 2020-10-13 | 2020-10-13 | Laser processing drilling system |
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| CN112192019A true CN112192019A (en) | 2021-01-08 |
| CN112192019B CN112192019B (en) | 2021-06-04 |
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| CN115090904A (en) * | 2022-06-30 | 2022-09-23 | 暨南大学 | Real-time beam shaping laser-induction/micro-forging composite cladding additive manufacturing method and device |
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| CN115090904A (en) * | 2022-06-30 | 2022-09-23 | 暨南大学 | Real-time beam shaping laser-induction/micro-forging composite cladding additive manufacturing method and device |
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