CN112106208B - 退火材料和用退火材料使光伏器件退火的方法 - Google Patents

退火材料和用退火材料使光伏器件退火的方法 Download PDF

Info

Publication number
CN112106208B
CN112106208B CN201980032088.6A CN201980032088A CN112106208B CN 112106208 B CN112106208 B CN 112106208B CN 201980032088 A CN201980032088 A CN 201980032088A CN 112106208 B CN112106208 B CN 112106208B
Authority
CN
China
Prior art keywords
annealing
gel
absorber layer
layer
thickener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980032088.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN112106208A (zh
Inventor
J·布鲁巴克
J·金
B·米利伦
J·诺尔曼
J·罗宾逊
J·图姆布什
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
First Solar Inc
Original Assignee
First Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Inc filed Critical First Solar Inc
Publication of CN112106208A publication Critical patent/CN112106208A/zh
Application granted granted Critical
Publication of CN112106208B publication Critical patent/CN112106208B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/162Photovoltaic cells having only PN heterojunction potential barriers comprising only Group II-VI materials, e.g. CdS/CdTe photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • H10F71/1253The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe comprising at least three elements, e.g. HgCdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • H10F71/1257The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe comprising growth substrates not made of Group II-VI materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/128Annealing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/26Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
    • H10P14/265Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using solutions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901Materials
    • H10P14/2922Materials being non-crystalline insulating materials, e.g. glass or polymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202Materials thereof
    • H10P14/3234Materials thereof being oxide semiconducting materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202Materials thereof
    • H10P14/3238Materials thereof being insulating materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3242Structure
    • H10P14/3244Layer structure
    • H10P14/3251Layer structure consisting of three or more layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3424Deposited materials, e.g. layers characterised by the chemical composition being Group IIB-VIA materials
    • H10P14/3432Tellurides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202Materials thereof
    • H10P14/3224Materials thereof being Group IIB-VIA semiconductors
    • H10P14/3228Sulfides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/543Solar cells from Group II-VI materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Recrystallisation Techniques (AREA)
CN201980032088.6A 2018-03-13 2019-03-12 退火材料和用退火材料使光伏器件退火的方法 Active CN112106208B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862642192P 2018-03-13 2018-03-13
US62/642192 2018-03-13
PCT/US2019/021759 WO2019178029A1 (en) 2018-03-13 2019-03-12 Annealing materials and methods for annealing photovoltaic devices with annealing materials

Publications (2)

Publication Number Publication Date
CN112106208A CN112106208A (zh) 2020-12-18
CN112106208B true CN112106208B (zh) 2024-03-19

Family

ID=65911281

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980032088.6A Active CN112106208B (zh) 2018-03-13 2019-03-12 退火材料和用退火材料使光伏器件退火的方法

Country Status (6)

Country Link
US (1) US11929447B2 (enExample)
EP (1) EP3750193B1 (enExample)
JP (2) JP2021510011A (enExample)
CN (1) CN112106208B (enExample)
MY (1) MY205480A (enExample)
WO (1) WO2019178029A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4020603A1 (en) 2017-12-07 2022-06-29 First Solar, Inc Method for forming a photovoltaic device with group v dopants
EP3857611B1 (en) 2018-10-24 2023-07-05 First Solar, Inc. Buffer layers for photovoltaic devices with group v doping
US11257977B2 (en) * 2020-03-03 2022-02-22 The Board Of Trustees Of The University Of Alabama Diffusion based ex-situ group V (P, As, Sb, Bi) doping in polycrystalline CdTe thin film solar cells
CN115161773B (zh) * 2022-07-15 2024-07-02 中南大学 一种大尺寸CdZnTe单晶的无损伤缺陷控制技术

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH104205A (ja) * 1996-06-14 1998-01-06 Matsushita Denchi Kogyo Kk 化合物半導体太陽電池の製造法
CN104502228A (zh) * 2014-12-15 2015-04-08 中国航空工业集团公司北京长城航空测控技术研究所 用于油液粘度在线检测传感器的测量系统和测量方法

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203383A (ja) * 1986-03-03 1987-09-08 Matsushita Electric Ind Co Ltd 光起電力素子の製造方法
JPS6420672A (en) * 1987-07-15 1989-01-24 Matsushita Electric Industrial Co Ltd Manufacture of photosensor
JPH07147421A (ja) * 1993-11-25 1995-06-06 Sumitomo Metal Mining Co Ltd 焼結膜の製造方法
US5612092A (en) * 1994-10-06 1997-03-18 Minnesota Mining And Manufacturing Company Knife coating method using ascension of the fluid by its tension
WO1997021252A1 (en) * 1995-12-07 1997-06-12 Japan Energy Corporation Method of producing photoelectric conversion device
US5994642A (en) 1996-05-28 1999-11-30 Matsushita Battery Industrial Co., Ltd. Method for preparing CdTe film and solar cell using the same
JPH10303445A (ja) * 1997-04-28 1998-11-13 Matsushita Denchi Kogyo Kk CdTe膜の製造方法とそれを用いた太陽電池
JPH10303441A (ja) * 1997-04-28 1998-11-13 Matsushita Denchi Kogyo Kk 太陽電池及びその製造方法
JPH1131826A (ja) * 1997-07-11 1999-02-02 Matsushita Denchi Kogyo Kk 硫化カドミウム膜の形成法および光電変換素子の製造法
JPH11251607A (ja) * 1998-03-03 1999-09-17 Mitsubishi Chemical Corp 絶縁基板の製造方法
JP2005148239A (ja) 2003-11-12 2005-06-09 Ricoh Co Ltd 定着装置、および画像形成装置
JP2007263622A (ja) 2006-03-27 2007-10-11 Kyocera Mita Corp 電子写真感光体用塗布液の検査方法、管理方法および電子写真感光体の製造方法
KR101503557B1 (ko) * 2007-09-25 2015-03-17 퍼스트 솔라, 인코포레이티드 계면 층을 포함한 광기전 장치
US20100300352A1 (en) 2007-10-17 2010-12-02 Yann Roussillon Solution deposition assembly
EP2268855A1 (en) * 2008-03-18 2011-01-05 Solexant Corp. Improved back contact in thin solar cells
US8334455B2 (en) * 2008-07-24 2012-12-18 First Solar, Inc. Photovoltaic devices including Mg-doped semiconductor films
US8084682B2 (en) * 2009-01-21 2011-12-27 Yung-Tin Chen Multiple band gapped cadmium telluride photovoltaic devices and process for making the same
US8748214B2 (en) * 2009-12-16 2014-06-10 First Solar, Inc. Method of p-type doping of cadmium telluride
US20110315221A1 (en) * 2009-12-21 2011-12-29 Alion, Inc. Methods for making thin film polycrystalline photovoltaic devices using additional chemical element and products thereof
US8720370B2 (en) * 2011-04-07 2014-05-13 Dynamic Micro System Semiconductor Equipment GmbH Methods and apparatuses for roll-on coating
EP2728623B1 (en) * 2011-06-30 2019-05-01 Kaneka Corporation Thin film solar cell and method for manufacturing same
MY174619A (en) * 2011-11-18 2020-05-02 First Solar Inc Method and apparatus providing single step cadmium chloride vapour treatment for photovoltaic modules
US9147792B2 (en) * 2012-05-21 2015-09-29 First Solar, Inc. Method of providing chloride treatment for a photovoltaic device and a chloride treated photovoltaic device
US20140051237A1 (en) * 2012-08-16 2014-02-20 Nthdegree Technologies Worldwide Inc. Semiconductor Ink Composition
US9117956B2 (en) * 2012-08-31 2015-08-25 First Solar, Inc. Method of controlling the amount of Cu doping when forming a back contact of a photovoltaic cell
JP2014067745A (ja) * 2012-09-24 2014-04-17 Kyocera Corp 光電変換装置の製造方法
US8697480B1 (en) 2012-11-21 2014-04-15 First Solar, Inc. Method for treating a semiconductor
JP6198407B2 (ja) * 2013-02-27 2017-09-20 大阪瓦斯株式会社 光電変換素子用ペースト組成物、並びにそれを用いた光電変換素子用電極及び光電変換素子
JP5828592B2 (ja) 2013-06-24 2015-12-09 株式会社ニケ・ウィング 太陽電池モジュール
US8999746B2 (en) * 2013-08-08 2015-04-07 Tokyo Ohka Kogyo Co., Ltd. Method of forming metal chalcogenide dispersion, metal chalcogenide dispersion, method of producing light absorbing layer of solar cell, method of producing solar cell
EP3122693A4 (en) * 2014-03-25 2017-11-22 Seungyeol Han Low-temperature curable energy transmission enhancement coatings having tunable properties including optical,hydrophobicity and abrasion resistance
US9399720B2 (en) * 2014-07-14 2016-07-26 Enki Technology, Inc. High gain durable anti-reflective coating
JP2016149505A (ja) * 2015-02-13 2016-08-18 三菱化学株式会社 組成物、光電変換素子、太陽電池及び太陽電池モジュール
WO2017100393A2 (en) 2015-12-09 2017-06-15 First Solar, Inc. Photovoltaic devices and method of manufacturing
FR3046602B1 (fr) 2016-01-12 2022-08-05 Centre Nat Rech Scient Solution d'ions tungstates et dispositif photovoltaique hybride
CN107492584A (zh) * 2017-09-07 2017-12-19 北京大学深圳研究生院 一种碲化镉太阳能电池制备方法及碲化镉太阳能电池

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH104205A (ja) * 1996-06-14 1998-01-06 Matsushita Denchi Kogyo Kk 化合物半導体太陽電池の製造法
CN104502228A (zh) * 2014-12-15 2015-04-08 中国航空工业集团公司北京长城航空测控技术研究所 用于油液粘度在线检测传感器的测量系统和测量方法

Also Published As

Publication number Publication date
JP2021510011A (ja) 2021-04-08
US20210043794A1 (en) 2021-02-11
JP2023002584A (ja) 2023-01-10
CN112106208A (zh) 2020-12-18
EP3750193B1 (en) 2022-03-09
US11929447B2 (en) 2024-03-12
WO2019178029A1 (en) 2019-09-19
EP3750193A1 (en) 2020-12-16
MY205480A (en) 2024-10-23
JP7642594B2 (ja) 2025-03-10

Similar Documents

Publication Publication Date Title
JP7642594B2 (ja) アニーリング材料およびアニーリング材料を用いて光起電力素子をアニールするための方法
Pecunia et al. Perovskite-inspired lead-free Ag2BiI5 for self-powered NIR-blind visible light photodetection
Scragg et al. Towards sustainable materials for solar energy conversion: preparation and photoelectrochemical characterization of Cu2ZnSnS4
Bush et al. 23.6%-efficient monolithic perovskite/silicon tandem solar cells with improved stability
Orak et al. The surface morphology properties and respond illumination impact of ZnO/n-Si photodiode by prepared atomic layer deposition technique
Zeyada et al. Electrical and photovoltaic characteristics of indium phthalocyanine chloride/p-Si solar cell
Nair et al. Opto-electronic characteristics of chemically deposited cadmium sulphide thin films
US11201257B2 (en) Methods for group V doping of photovoltaic devices
CN115485410A (zh) 通过气相传输沉积进行钙钛矿器件加工的方法
Ghamsari-Yazdel et al. Performance enhancement of CIGS solar cells using ITO as buffer layer
Jagadish et al. Surface texturing of Cu2ZnSnSe4 thin films for enhanced optical absorbance
JP2023551904A (ja) 光起電素子および製作の方法
Kokaj et al. Photocurrent spectroscopy of solution-grown CdS films annealed in CdCl2 vapour
Bai et al. Interfacial Engineering of Selenium‐Based Photodiodes for Extremely Low‐Noise Photodetection and Single‐Pixel Imaging
George et al. Modification of electrical, optical and crystalline properties of chemically deposited CdS films by thermal diffusion of indium and tin
Kale et al. A comparative photo-electrochemical study of compact In2O3/In2S3 multilayer thin films
US20250120219A1 (en) Buffer Layers for Photovoltaic Devices with Group V Doping
Su et al. Overcoming Back Interfacial Barrier Improves Flexible Cu2ZnSn (S, Se) 4 Solar Cell Efficiency via CuO Sacrificial Layers
Khusayfan Fabrication of the solar light sensitive ZnO1-xMgOx/n-Si photodiodes
EP3719854B1 (en) Pn junction and preparation method and use thereof
Boussaada et al. Performance analysis and optimization of methylammonium lead iodide perovskite solar cells with different charge transport layers: a numerical investigation
Nisika et al. A new strategy of defect passivation in kesterite absorber layer to engineer the band tailing for efficient carrier transport
CN108140677A (zh) 用于红外光电子器件的硫化铅的原子层沉积
US20200343402A1 (en) Absorber layers with mercury for photovoltaic devices and methods for forming the same
WO2019126463A1 (en) Absorber layers with mercury for photovoltaic devices and methods for forming the same

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant