CN112095146B - 一种用于黑磷晶体放大制备的反应器及其应用 - Google Patents
一种用于黑磷晶体放大制备的反应器及其应用 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
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- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/12—Production of homogeneous polycrystalline material with defined structure directly from the gas state
- C30B28/14—Production of homogeneous polycrystalline material with defined structure directly from the gas state by chemical reaction of reactive gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
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CN113668053B (zh) * | 2021-10-25 | 2022-01-07 | 中国科学院苏州纳米技术与纳米仿生研究所 | 黑磷薄膜反应装置、黑磷薄膜制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108128761A (zh) * | 2018-01-30 | 2018-06-08 | 昆明理工大学 | 一种黑磷的连续化制备方法 |
CN110331442A (zh) * | 2019-08-07 | 2019-10-15 | 深圳市中科墨磷科技有限公司 | 一种辅助二维黑磷晶体生长的外加温场装置及其应用 |
CN110467165A (zh) * | 2019-08-29 | 2019-11-19 | 昆明理工大学 | 一种采用固定床催化制备高纯黑磷的方法 |
CN110878425A (zh) * | 2019-12-06 | 2020-03-13 | 深圳市中科墨磷科技有限公司 | 一种晶种诱导快速制备高质量二维黑磷晶体的方法 |
CN110938867A (zh) * | 2019-12-06 | 2020-03-31 | 深圳市中科墨磷科技有限公司 | 一种高效制备二维黑磷晶体的方法 |
CN111020697A (zh) * | 2019-12-06 | 2020-04-17 | 深圳市中科墨磷科技有限公司 | 一种以Sn4P3为催化剂高效制备二维黑磷晶体的方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108128761A (zh) * | 2018-01-30 | 2018-06-08 | 昆明理工大学 | 一种黑磷的连续化制备方法 |
CN110331442A (zh) * | 2019-08-07 | 2019-10-15 | 深圳市中科墨磷科技有限公司 | 一种辅助二维黑磷晶体生长的外加温场装置及其应用 |
CN110467165A (zh) * | 2019-08-29 | 2019-11-19 | 昆明理工大学 | 一种采用固定床催化制备高纯黑磷的方法 |
CN110878425A (zh) * | 2019-12-06 | 2020-03-13 | 深圳市中科墨磷科技有限公司 | 一种晶种诱导快速制备高质量二维黑磷晶体的方法 |
CN110938867A (zh) * | 2019-12-06 | 2020-03-31 | 深圳市中科墨磷科技有限公司 | 一种高效制备二维黑磷晶体的方法 |
CN111020697A (zh) * | 2019-12-06 | 2020-04-17 | 深圳市中科墨磷科技有限公司 | 一种以Sn4P3为催化剂高效制备二维黑磷晶体的方法 |
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