CN112060116A - 一种搬运机器人 - Google Patents
一种搬运机器人 Download PDFInfo
- Publication number
- CN112060116A CN112060116A CN202010911621.0A CN202010911621A CN112060116A CN 112060116 A CN112060116 A CN 112060116A CN 202010911621 A CN202010911621 A CN 202010911621A CN 112060116 A CN112060116 A CN 112060116A
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- wafer
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- sliding
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- 230000005540 biological transmission Effects 0.000 claims abstract description 22
- 239000012528 membrane Substances 0.000 claims abstract description 11
- 230000007246 mechanism Effects 0.000 claims description 68
- 238000001179 sorption measurement Methods 0.000 claims description 13
- 230000001360 synchronised effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 12
- 238000005299 abrasion Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 52
- 238000001125 extrusion Methods 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002146 bilateral effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
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Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010911621.0A CN112060116B (zh) | 2020-09-02 | 2020-09-02 | 一种搬运机器人 |
Applications Claiming Priority (1)
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CN202010911621.0A CN112060116B (zh) | 2020-09-02 | 2020-09-02 | 一种搬运机器人 |
Publications (2)
Publication Number | Publication Date |
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CN112060116A true CN112060116A (zh) | 2020-12-11 |
CN112060116B CN112060116B (zh) | 2021-08-24 |
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CN202010911621.0A Active CN112060116B (zh) | 2020-09-02 | 2020-09-02 | 一种搬运机器人 |
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CN (1) | CN112060116B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113829102A (zh) * | 2021-11-25 | 2021-12-24 | 常州卡斯特铝精密铸造科技有限公司 | 飞轮壳加工柔性自动化生产装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110061181A (ko) * | 2009-12-01 | 2011-06-09 | 주식회사 엘지실트론 | 웨이퍼 이송 장치 |
CN103917337A (zh) * | 2011-09-16 | 2014-07-09 | 柿子技术公司 | 低多变性机器人 |
US9757865B1 (en) * | 2017-03-03 | 2017-09-12 | Well Thin Technology, Ltd. | Carrier plate assembly for a wafer |
CN107251211A (zh) * | 2015-02-13 | 2017-10-13 | 川崎重工业株式会社 | 衬底搬送机械手及其运转方法 |
CN109244022A (zh) * | 2018-09-07 | 2019-01-18 | 宁波润华全芯微电子设备有限公司 | 一种机械手末端执行器 |
CN109727900A (zh) * | 2014-07-03 | 2019-05-07 | 应用材料公司 | 基板传送机械手终端受动器 |
WO2019152360A1 (en) * | 2018-01-30 | 2019-08-08 | Brooks Automation, Inc. | Automatic wafer centering method and apparatus |
-
2020
- 2020-09-02 CN CN202010911621.0A patent/CN112060116B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110061181A (ko) * | 2009-12-01 | 2011-06-09 | 주식회사 엘지실트론 | 웨이퍼 이송 장치 |
CN103917337A (zh) * | 2011-09-16 | 2014-07-09 | 柿子技术公司 | 低多变性机器人 |
CN109727900A (zh) * | 2014-07-03 | 2019-05-07 | 应用材料公司 | 基板传送机械手终端受动器 |
CN107251211A (zh) * | 2015-02-13 | 2017-10-13 | 川崎重工业株式会社 | 衬底搬送机械手及其运转方法 |
US9757865B1 (en) * | 2017-03-03 | 2017-09-12 | Well Thin Technology, Ltd. | Carrier plate assembly for a wafer |
WO2019152360A1 (en) * | 2018-01-30 | 2019-08-08 | Brooks Automation, Inc. | Automatic wafer centering method and apparatus |
CN109244022A (zh) * | 2018-09-07 | 2019-01-18 | 宁波润华全芯微电子设备有限公司 | 一种机械手末端执行器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113829102A (zh) * | 2021-11-25 | 2021-12-24 | 常州卡斯特铝精密铸造科技有限公司 | 飞轮壳加工柔性自动化生产装置 |
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CN112060116B (zh) | 2021-08-24 |
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Effective date of registration: 20210809 Address after: 518000 Room 601, building 2, Han's laser Industrial Park, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Han's fortune Technology Co.,Ltd. Address before: 730000 room 702, block a, Longxing building, 116 Feiyan street, Gaoxin, Chengguan District, Lanzhou City, Gansu Province Applicant before: Hu Kunyu |
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Address after: 518000 workshop 501, building 3, intelligent manufacturing center park, No. 12, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's lithium battery intelligent equipment Co.,Ltd. Address before: 518000 Room 601, building 2, Han's laser Industrial Park, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Han's fortune Technology Co.,Ltd. |
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Effective date of registration: 20230620 Address after: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee after: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Patentee after: Shenzhen Han's Beijin Equipment Co.,Ltd. Address before: 518000 workshop 501, building 3, intelligent manufacturing center park, No. 12, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Han's lithium battery intelligent equipment Co.,Ltd. |
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Effective date of registration: 20231101 Address after: 518000 workshop 501, building 3, intelligent manufacturing center park, No. 12, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Beijin Equipment Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Patentee before: Shenzhen Han's Beijin Equipment Co.,Ltd. |