CN1119652C - 薄膜晶体管生物/化学传感器 - Google Patents

薄膜晶体管生物/化学传感器 Download PDF

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Publication number
CN1119652C
CN1119652C CN96108769A CN96108769A CN1119652C CN 1119652 C CN1119652 C CN 1119652C CN 96108769 A CN96108769 A CN 96108769A CN 96108769 A CN96108769 A CN 96108769A CN 1119652 C CN1119652 C CN 1119652C
Authority
CN
China
Prior art keywords
layer
semiconductor
conductive material
deposition
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN96108769A
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English (en)
Chinese (zh)
Other versions
CN1156818A (zh
Inventor
杜纳尔德·E·阿克利
查一龙·施
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of CN1156818A publication Critical patent/CN1156818A/zh
Application granted granted Critical
Publication of CN1119652C publication Critical patent/CN1119652C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S436/00—Chemistry: analytical and immunological testing
    • Y10S436/806—Electrical property or magnetic property

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Thin Film Transistor (AREA)
CN96108769A 1995-06-28 1996-06-25 薄膜晶体管生物/化学传感器 Expired - Fee Related CN1119652C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/496,269 US5719033A (en) 1995-06-28 1995-06-28 Thin film transistor bio/chemical sensor
US496269 1995-06-28

Publications (2)

Publication Number Publication Date
CN1156818A CN1156818A (zh) 1997-08-13
CN1119652C true CN1119652C (zh) 2003-08-27

Family

ID=23971935

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96108769A Expired - Fee Related CN1119652C (zh) 1995-06-28 1996-06-25 薄膜晶体管生物/化学传感器

Country Status (6)

Country Link
US (1) US5719033A (enExample)
EP (1) EP0751392A3 (enExample)
JP (1) JPH0915198A (enExample)
KR (1) KR970003739A (enExample)
CN (1) CN1119652C (enExample)
TW (1) TW297952B (enExample)

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US8362559B2 (en) * 2002-02-01 2013-01-29 William Marsh Rice University Hybrid molecular electronic devices containing molecule-functionalized surfaces for switching, memory, and sensor applications and methods for fabricating same
US20080258179A1 (en) * 2004-06-21 2008-10-23 William Marsh Rice University Hybrid molecular electronic device for switching, memory, and sensor applications, and method of fabricating same
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US6852996B2 (en) * 2002-09-25 2005-02-08 Stmicroelectronics, Inc. Organic semiconductor sensor device
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JP4669213B2 (ja) * 2003-08-29 2011-04-13 独立行政法人科学技術振興機構 電界効果トランジスタ及び単一電子トランジスタ並びにそれを用いたセンサ
US7361946B2 (en) 2004-06-28 2008-04-22 Nitronex Corporation Semiconductor device-based sensors
US7470544B2 (en) * 2005-05-26 2008-12-30 Hewlett-Packard Development Company, L.P. Sensor array using sail
KR100659112B1 (ko) * 2005-11-22 2006-12-19 삼성에스디아이 주식회사 유기 박막 트랜지스터 및 이의 제조 방법, 이를 구비한평판 디스플레이 장치
US8384409B2 (en) * 2007-05-03 2013-02-26 The Regents Of The University Of California Ultra-thin organic TFT chemical sensor, making thereof, and sensing method
WO2009017631A2 (en) * 2007-07-26 2009-02-05 The Regents Of The University Of California Peroxide chemical sensor and sensing method
KR100903526B1 (ko) * 2007-10-19 2009-06-19 재단법인대구경북과학기술원 전계효과트랜지스터를 이용한 바이오센서
US8551407B2 (en) * 2007-11-29 2013-10-08 Michigan Technological University Bacteriorhodopsin-based sensors
US9023607B2 (en) * 2010-04-26 2015-05-05 Intellectual Discovery Co., Ltd. Method for early diagnosis of alzheimer'S disease using phototransistor
WO2012003368A2 (en) * 2010-06-30 2012-01-05 Life Technologies Corporation Transistor circuits for detection and measurement of chemical reactions and compounds
US8373206B2 (en) 2010-07-20 2013-02-12 Nth Tech Corporation Biosensor apparatuses and methods thereof
TW201237411A (en) * 2011-03-04 2012-09-16 Univ Nat Chiao Tung Biochemical matter sensor and manufacturing method thereof
GB2489504A (en) * 2011-03-31 2012-10-03 Sapient Sensors A device for identifying the presence of a specific target molecule or biomarker by sensing an electrical property
GB2523173A (en) * 2014-02-17 2015-08-19 Nokia Technologies Oy An apparatus and associated methods
AU2015342795A1 (en) * 2014-11-07 2017-06-01 Proteosense Devices, systems, and methods for the detection of analytes
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EP3657165A1 (en) * 2018-11-23 2020-05-27 Infineon Technologies AG Method for providing calibration data for a gas sensor device, method of calibrating a gas sensor device, and processing device for a gas sensor device

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Also Published As

Publication number Publication date
TW297952B (enExample) 1997-02-11
EP0751392A3 (en) 1997-11-19
CN1156818A (zh) 1997-08-13
KR970003739A (ko) 1997-01-28
JPH0915198A (ja) 1997-01-17
US5719033A (en) 1998-02-17
EP0751392A2 (en) 1997-01-02

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