CN111656499A - 膜状粘接剂及其制造方法、以及半导体装置及其制造方法 - Google Patents
膜状粘接剂及其制造方法、以及半导体装置及其制造方法 Download PDFInfo
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- CN111656499A CN111656499A CN201880087615.9A CN201880087615A CN111656499A CN 111656499 A CN111656499 A CN 111656499A CN 201880087615 A CN201880087615 A CN 201880087615A CN 111656499 A CN111656499 A CN 111656499A
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PCT/JP2018/003022 WO2019150445A1 (ja) | 2018-01-30 | 2018-01-30 | フィルム状接着剤及びその製造方法、並びに半導体装置及びその製造方法 |
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WO2022176585A1 (ja) * | 2021-02-16 | 2022-08-25 | 株式会社巴川製紙所 | 半導体装置製造用接着シート及びそれを用いた半導体装置の製造方法 |
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JP2016216562A (ja) * | 2015-05-18 | 2016-12-22 | 日東電工株式会社 | 接着フィルム、ダイシングテープ一体型接着フィルム、複層フィルム、半導体装置の製造方法および半導体装置 |
US20170186719A1 (en) * | 2015-12-28 | 2017-06-29 | Fujitsu Limited | Semiconductor device, method of manufacturing same, and electronic apparatus |
JP6191799B1 (ja) * | 2017-04-19 | 2017-09-06 | 日立化成株式会社 | 半導体装置、半導体装置の製造方法及びフィルム状接着剤 |
JP6222395B1 (ja) * | 2017-08-07 | 2017-11-01 | 日立化成株式会社 | フィルム状接着剤及びダイシングダイボンディング一体型接着シート |
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