CN111424254A - 一种提高AlCrSiN/Mo纳米复合涂层韧性与耐磨性的热处理工艺 - Google Patents
一种提高AlCrSiN/Mo纳米复合涂层韧性与耐磨性的热处理工艺 Download PDFInfo
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- CN111424254A CN111424254A CN202010293373.8A CN202010293373A CN111424254A CN 111424254 A CN111424254 A CN 111424254A CN 202010293373 A CN202010293373 A CN 202010293373A CN 111424254 A CN111424254 A CN 111424254A
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- 238000000576 coating method Methods 0.000 title claims abstract description 148
- 239000011248 coating agent Substances 0.000 title claims abstract description 139
- 238000010438 heat treatment Methods 0.000 title claims abstract description 91
- 239000002114 nanocomposite Substances 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000008569 process Effects 0.000 title claims abstract description 25
- 239000000126 substance Substances 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- 238000004321 preservation Methods 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- 229910015421 Mo2N Inorganic materials 0.000 claims 1
- 239000002131 composite material Substances 0.000 abstract description 14
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 9
- 238000005299 abrasion Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000011159 matrix material Substances 0.000 abstract description 3
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 238000009776 industrial production Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 12
- 239000000523 sample Substances 0.000 description 12
- 239000013078 crystal Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 238000003754 machining Methods 0.000 description 6
- 238000005086 pumping Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 231100000241 scar Toxicity 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910001149 41xx steel Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000002159 nanocrystal Substances 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052961 molybdenite Inorganic materials 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
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- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
沉积压强(Pa) | Al(at.%) | Cr(at.%) | Mo(at.%) | Si(at.%) | N(at.%) |
1.6 | 16.4 | 31.2 | 5.1 | 1.9 | 45.4 |
Claims (6)
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CN202010293373.8A CN111424254B (zh) | 2020-04-15 | 2020-04-15 | 一种提高AlCrSiN/Mo纳米复合涂层韧性与耐磨性的热处理工艺 |
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Cited By (1)
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CN115505886A (zh) * | 2022-09-23 | 2022-12-23 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 高硬度、高耐磨性的AlCrSiN/AlCrMoSiN纳米多层复合涂层及其制备方法 |
Citations (1)
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CN110453190A (zh) * | 2019-09-23 | 2019-11-15 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 一种AlCrSiN/Mo自润滑薄膜的复合磁控溅射制备方法 |
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CN110453190A (zh) * | 2019-09-23 | 2019-11-15 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 一种AlCrSiN/Mo自润滑薄膜的复合磁控溅射制备方法 |
Non-Patent Citations (1)
Title |
---|
钟星等: ""占空比对脉冲电弧离子镀AlCrSiN涂层热稳定性和抗氧化性的影响"", 《中国表面工程》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115505886A (zh) * | 2022-09-23 | 2022-12-23 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 高硬度、高耐磨性的AlCrSiN/AlCrMoSiN纳米多层复合涂层及其制备方法 |
CN115505886B (zh) * | 2022-09-23 | 2023-10-24 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 高硬度、高耐磨性的AlCrSiN/AlCrMoSiN纳米多层复合涂层及其制备方法 |
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Application publication date: 20200717 Assignee: TIANJIN HUIZHU PETROLEUM EQUIPMENT TECHNOLOGY Co.,Ltd. Assignor: TIANJIN University OF TECHNOLOGY AND EDUCATION (CHINA VOCATIONAL TRAINING INSTRUCTOR TRAINING CENTER) Contract record no.: X2024980004373 Denomination of invention: A heat treatment process for improving the toughness and wear resistance of AlCrSiN/Mo nanocomposite coatings Granted publication date: 20220318 License type: Common License Record date: 20240412 |
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