CN111399347A - Illumination area continuously adjustable uniform illumination system - Google Patents
Illumination area continuously adjustable uniform illumination system Download PDFInfo
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- CN111399347A CN111399347A CN202010414867.7A CN202010414867A CN111399347A CN 111399347 A CN111399347 A CN 111399347A CN 202010414867 A CN202010414867 A CN 202010414867A CN 111399347 A CN111399347 A CN 111399347A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V14/00—Controlling the distribution of the light emitted by adjustment of elements
- F21V14/06—Controlling the distribution of the light emitted by adjustment of elements by movement of refractors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention provides a uniform illumination system with continuously adjustable illumination area, which comprises: follow laser light source, facula regulation mirror group, the group of lens that assembles that the optical axis set up in proper order, wherein, the facula regulation mirror group includes: the laser device comprises a first lens and a second lens which are arranged in sequence, wherein the light incident surface of the first lens faces a laser light source; the light emitting surface of the first lens is far away from the laser light source; the light incident surface of the second lens faces the light emergent surface of the first lens; the light emitting surface of the second lens faces the light incident surface of the light spot adjusting lens group; the light-emitting surface of the second lens faces the converging lens group; the second lens moves along the direction of the optical axis; the converging lens group comprises: the light source comprises a third lens, a fourth lens and a fifth lens which are arranged in series, wherein the light incident surface of the third lens faces the light emergent surface of the second lens, the light emergent surface of the third lens faces the light incident surface of the fourth lens, and the light emergent surface of the fourth lens faces the light incident surface of the fifth lens. By applying the embodiment of the invention, the structure is simpler.
Description
Technical Field
The invention relates to the technical field of laser lithography, in particular to a uniform illumination system with a continuously adjustable illumination area.
Background
With the development of modern PCB technology, photolithography technology is more and more widely used, and with the higher and higher requirement of PCB exposure machine on productivity, the requirement on the utilization rate of light source is higher and higher, the illumination area of the traditional illumination system is usually fixed, and the illumination area needs to be matched with a receiver, the illumination area is a little bit larger, the utilization rate of energy is reduced, and the illumination area is a little bit smaller, which causes poor uniformity or image loss. It is therefore critical how to balance uniformity and energy utilization. Therefore, how to obtain the illumination area, i.e., the illumination system with continuously adjustable spot size, is a technical problem to be solved urgently.
The utility model discloses an application number is 201720288170.3's utility model discloses an L ED lamp, L ED lamp includes actuating mechanism, the lamp holder subassembly, heat dissipation mechanism, first L ED module, protection mechanism, first rotary mechanism and second rotary mechanism, the lamp holder subassembly sets up in actuating mechanism's one side heat dissipation mechanism sets up in actuating mechanism's opposite side, heat dissipation mechanism is located one side of lamp holder subassembly first L ED module sets up in heat dissipation mechanism, first L ED module is located one side of actuating mechanism, protection mechanism sets up in heat dissipation mechanism's both sides, protection mechanism connects actuating mechanism's opposite side, protection mechanism is located one side of first L ED module, first rotary mechanism and second rotary mechanism set up in heat dissipation mechanism, first rotary mechanism and second rotary mechanism are located between the protection mechanism, second rotary mechanism is located one side of first rotary mechanism.
However, the prior art can only be applied to the field of general illumination, and the illumination area is adjusted by adjusting the rotation angles of the first rotating mechanism and the second rotating mechanism, so that the structure is complex.
Disclosure of Invention
The invention aims to solve the technical problem of how to simplify the adjusting mechanism.
The invention solves the technical problems through the following technical means:
the embodiment of the invention provides a uniform illumination system with continuously adjustable illumination area, which comprises: a laser light source, a facula adjusting lens group and a converging lens group which are arranged along an optical axis in sequence, wherein,
the facula adjusting mirror group comprises: the laser device comprises a first lens and a second lens which are arranged in sequence, wherein the light incident surface of the first lens faces to a laser light source, and is non-concave; the light emitting surface of the first lens is far away from the laser light source, and the side surface is a convex surface; the light incident surface of the second lens faces the light emergent surface of the first lens, and the light incident surface is convex; the light-emitting surface of the second lens faces the light-entering surface of the light spot adjusting lens group, and the light-emitting surface is non-concave; the light-emitting surface of the second lens faces the converging lens group; and the second lens moves along the optical axis direction, wherein the non-concave surface includes: convex or planar;
the converging lens group comprises: the third lens, the fourth lens and the fifth lens that establish ties and set up, wherein, the income plain noodles of third lens orientation the play plain noodles of second lens, the play plain noodles of third lens orientation the income plain noodles of fourth lens, the play plain noodles of fourth lens sets up towards the income plain noodles of fifth lens.
By applying the embodiment of the invention, the enlargement and reduction of the light spot can be realized only by adjusting the movement direction and the movement distance of the second lens on the optical axis, compared with the prior art, only one optical component needs to be adjusted in the embodiment of the invention, the number of the adjusted optical components is less, the movement mode of the optical component moves along the optical axis direction, and compared with the rotation movement in the prior art, the movement mode is simpler, so that the embodiment of the invention can more simply realize the adjustment of the size of the light spot.
Optionally, the system further includes: the optical rod is a cuboid, and the central axis of the optical rod coincides with the optical axis of the system.
Optionally, the light incident surface of the third lens is a plane, a convex surface or a concave surface;
the light-emitting surface of the third lens is a plane or a convex surface.
Optionally, the system further includes: the sixth lens is a biconvex lens, wherein the light incident surface of the sixth lens is a convex surface and faces the light emergent surface of the fifth lens;
the light-emitting surface of the sixth lens is a convex surface.
Optionally, the system further includes: the light incident surface of the first reflector faces the light emergent surface of the sixth lens, and a non-zero included angle exists between the normal line of the reflecting surface of the first reflector and the optical axis.
Optionally, the first lens is a positive lens, the second lens is a positive lens, the third lens is a negative lens, the fourth lens is a positive lens, the fifth lens is a positive lens, and the sixth lens is a positive lens.
Optionally, the first lens, the second lens, the third lens, the fourth lens, the fifth lens, and the sixth lens satisfy the following conditional expressions:
1.2≤F12/F3≤2
2≤F45/F3≤3
150≤F6≤300
2≤F34/F12≤3
wherein
F12 is the combined focal length of the first and second lenses in millimeters; f3 is the focal length of the third lens 301 in millimeters; f45 is the combined focal length of the converging lens group, and the unit is millimeter; f6 is the focal length of the third lens in millimeters; f34 is the combined focal length of the third and fourth lenses.
The radius of curvature of the light incident surface of the first lens is as follows: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the first lens is as follows: r is more than or equal to 8mm and less than or equal to 20 mm;
the curvature radius of the light incident surface of the second lens is as follows: r is more than or equal to 10mm and less than or equal to 25mm, and the curvature radius of the light-emitting surface of the second lens is as follows: r is more than or equal to 20mm and less than or equal to infinity;
the curvature radius of the light incident surface of the third lens is as follows: r is more than or equal to 8mm and less than or equal to 20mm, and the curvature radius of the light-emitting surface of the third lens is as follows: r is more than or equal to 10mm and less than or equal to 30 mm;
the curvature radius of the light incident surface of the fourth lens is as follows: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the fourth lens is as follows: r is more than or equal to 15mm and less than or equal to 50 mm;
the curvature radius of the light incident surface of the fifth lens is as follows: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the fifth lens is as follows: r is more than or equal to 20mm and less than or equal to 100 mm;
the curvature radius of the light incident surface of the sixth lens is as follows: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the sixth lens is as follows: r is more than or equal to 80mm and less than or equal to infinity, wherein R is the curvature radius.
Optionally, the first lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the second lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the third lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the fourth lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the fifth lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the sixth lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72; wherein Nd is the optical refractive index, and Vd is the Abbe constant.
Optionally, the system further comprises a second mirror disposed between any two lenses.
The invention has the advantages that:
by applying the embodiment of the invention, the enlargement and reduction of the light spot can be realized only by adjusting the movement direction and the movement distance of the second lens on the optical axis, compared with the prior art, only one optical component needs to be adjusted in the embodiment of the invention, the number of the adjusted optical components is less, the movement mode of the optical component moves along the optical axis direction, and compared with the rotation movement in the prior art, the movement mode is simpler, so that the embodiment of the invention can more simply realize the adjustment of the size of the light spot.
Drawings
Fig. 1 is a schematic flow chart of a uniform illumination system with a continuously adjustable illumination area according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a test result of the illumination light spot provided in embodiment 1 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An even illumination system with continuously adjustable illumination area can be widely applied to the fields of PCB photoetching, 3D printing and the like.
A continuously adjustable uniform illumination system for an illumination area, comprising: the light source 10, the light bar 40, the first lens 201, the second lens 202, the first lens 201 and the second lens 202 are sequentially arranged along the optical axis 1 from the left light source to the receiving surface to form a light spot adjusting mirror group 20; a converging lens group is formed by the third lens 301, the fourth lens 302, the fifth lens 303, the third lens 301, the fourth lens 302 and the fifth lens 303; and a sixth lens 50.
The optical rod 40 is a cuboid, and the central axis of the optical rod 40 coincides with the optical axis 1 of the system.
The light incident surface of the first lens 201 faces the laser light source 10, and the light incident surface is non-concave, that is, can be adjusted to be a plane or a convex surface according to actual requirements; the light-emitting surface of the first lens 201 is far away from the laser light source 10, and the side surface is a convex surface; the light incident surface of the second lens 202 faces the light emergent surface of the first lens 201, and the light incident surface is convex; the light-emitting surface of the second lens element 202 is disposed facing the light-incident surface of the light spot adjusting lens group 20, and the light-emitting surface is non-concave, i.e. can be adjusted to be a plane or a convex surface according to actual requirements; the light-emitting surface of the second lens element 202 faces the converging lens group 30; and the second lens 202 can move along the optical axis direction, and the moving direction is close to the first lens 201 or far away from the first lens 201.
The light incident surface of the third lens 301 faces the light emergent surface of the second lens 202, the light emergent surface of the third lens 301 faces the light incident surface of the fourth lens, and the light incident surface of the third lens is a plane, a convex surface or a concave surface; the light-emitting surface of the third lens is a plane or a convex surface; the light emitting surface of the fourth lens 302 faces the light incident surface of the fifth lens 303, and light emitted from the light emitting surface of the fifth lens 303 is irradiated onto a target.
The first lens element 201 is a positive lens element, the second lens element 202 is a positive lens element, the third lens element 301 is a negative lens element, the fourth lens element 302 is a positive lens element, the fifth lens element 303 is a positive lens element, and the sixth lens element 50 is a positive lens element, wherein the first lens element 201, the second lens element 202, the third lens element 301, the fourth lens element 302, the fifth lens element 303, and the sixth lens element 50 satisfy the following conditional expressions:
1.2≤F12/F3≤2
2≤F45/F3≤3
150≤F6≤300
2≤F34/F12≤3
wherein the content of the first and second substances,
f12 is the combined focal length of the first lens 201 and the second lens 202, in millimeters;
f3 is the focal length of the third lens 301 in millimeters;
f45 is the combined focal length of fourth lens 302 and fifth lens 303, in millimeters;
f6 is the focal length of sixth lens 50 in millimeters;
f34 is the combined focal length of third lens 301 and fourth lens 302 in millimeters.
Further, in the illumination system with continuously adjustable illumination area and uniformity, the first lens 201 is a positive lens, the second lens 202 is a positive lens, the third lens 301 is a negative lens, the fourth lens 302 is a positive lens, the fifth lens 303 is a positive lens, and the sixth lens 50 is a positive lens.
Furthermore, the glass material of the uniform illumination system with the continuously adjustable illumination area meets the following conditions:
the first lens 201 satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the second lens 202 satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the third lens 301 satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the fourth lens 302 satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the fifth lens 303 satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the sixth lens 50 satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72; wherein Nd is the optical refractive index, and Vd is the Abbe constant.
Further, the radius of curvature of the light incident surface of the first lens 201 is: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the first lens 201 is as follows: r is more than or equal to 8mm and less than or equal to 20 mm;
the curvature radius of the light incident surface of the second lens 202 is as follows: r is more than or equal to 10mm and less than or equal to 25mm, and the curvature radius of the light-emitting surface of the second lens 202 is as follows: r is more than or equal to 20mm and less than or equal to infinity;
the radius of curvature of the light incident surface of the third lens 301 is as follows: r is more than or equal to 8mm and less than or equal to 20mm, and the curvature radius of the light-emitting surface of the third lens 301 is as follows: r is more than or equal to 10mm and less than or equal to 30 mm;
the radius of curvature of the light incident surface of the fourth lens 302 is: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the fourth lens 302 is as follows: r is more than or equal to 15mm and less than or equal to 50 mm;
the curvature radius of the light incident surface of the fifth lens 303 is as follows: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the fifth lens 303 is as follows: r is more than or equal to 20mm and less than or equal to 100 mm;
the curvature radius of the light incident surface of the sixth lens 50 is: r is more than or equal to 80mm and less than or equal to infinity, and the curvature radius of the light-emitting surface of the sixth lens 50 is as follows: r is more than or equal to 80mm and less than or equal to infinity, wherein R is the curvature radius.
In practical applications, the first lens 201, the second lens 202, the third lens 301, the fourth lens 302, the fifth lens 303 and the sixth lens 50 of the illumination area continuously adjustable and uniform illumination system are all glass spherical lenses.
When the second lens 202 moves left and right, the illumination area can be continuously increased or decreased, and the total optical length of the system is kept constant. In the embodiment of the invention, the illumination area can be continuously adjusted only by moving the second lens 202, and the total optical length of the illumination system is always kept unchanged when the second lens 202 is moved.
Illumination area can be adjusted in succession, solves the problem that current digital exposure machine energy utilization and homogeneity can not match well, in the use, can adjust illumination area as required, with energy utilization maximize, has increased the productivity of equipment indirectly.
Further, the system further comprises: the light incident surface of the first reflector 60 faces the light emergent surface of the sixth lens 50, and a non-zero included angle exists between the normal of the reflection surface of the first reflector 60 and the optical axis.
In addition, a second mirror can be added between any two elements of the uniform illumination system to perform optical path turning to further reduce the volume, for example, between the first lens 201 and the second lens 202, between the second lens 202 and the third lens 301, between the third lens 301 and the fourth lens 302, between the fourth lens 302 and the fifth lens 303, and so on.
Example 1
Table 1 is a summary table of parameters of each lens provided in example 1 of the present invention, as shown in table 1:
it should be noted that S1 is the light incident surface of the first lens, and S2 is the light emitting surface of the first lens; s3 is the light incident surface of the second lens, S4 is the light emergent surface of the second lens; s5 is the light incident surface of the third lens, and S6 is the light emergent surface of the third lens; s7 is the light incident surface of the fourth lens, and S8 is the light emergent surface of the fourth lens; s9 is the light incident surface of the fifth lens, and S10 is the light emergent surface of the fifth lens; s11 denotes a reflecting surface of the first reflecting mirror.
FIG. 2 is a schematic diagram showing the test results of the illumination spots provided in embodiment 1 of the present invention, and FIG. 2 shows the light square colors in FIG. 2The part is effective light spot, the light spot is square, the size is 24 × 14 square millimeters, and the light intensity is more than or equal to 9.5 × 109W/m2；
Example 2
Table 2 is a summary table of parameters of each lens provided in example 1 of the present invention, as shown in table 2:
example 3
Table 3 is a summary table of parameters of each lens provided in example 1 of the present invention, as shown in table 3:
the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A uniform illumination system with continuously adjustable illumination area, the system comprising: a laser light source, a facula adjusting lens group and a converging lens group which are arranged along an optical axis in sequence, wherein,
the facula adjusting mirror group comprises: the laser device comprises a first lens and a second lens which are arranged in sequence, wherein the light incident surface of the first lens faces to a laser light source, and is non-concave; the light emitting surface of the first lens is far away from the laser light source, and the side surface is a convex surface; the light incident surface of the second lens faces the light emergent surface of the first lens, and the light incident surface is convex; the light-emitting surface of the second lens faces the light-entering surface of the light spot adjusting lens group, and the light-emitting surface is non-concave; the light-emitting surface of the second lens faces the converging lens group; and the second lens moves along the optical axis direction, wherein the non-concave surface includes: convex or planar;
the converging lens group comprises: the light source comprises a third lens, a fourth lens and a fifth lens which are arranged in series, wherein the light incident surface of the third lens faces the light emergent surface of the second lens, the light emergent surface of the third lens faces the light incident surface of the fourth lens, the light emergent surface of the fourth lens faces the light incident surface of the fifth lens, and the light emitted from the light emergent surface of the fifth lens irradiates a target.
2. The system of claim 1, further comprising: the optical rod is a cuboid, and the central axis of the optical rod coincides with the optical axis of the system.
3. The illumination system as claimed in claim 1, wherein the light incident surface of the third lens is a plane, a convex surface or a concave surface;
the light-emitting surface of the third lens is a plane or a convex surface.
4. The system of claim 1, further comprising: the sixth lens is a biconvex lens, wherein the light incident surface of the sixth lens is a convex surface and faces the light emergent surface of the fifth lens;
the light-emitting surface of the sixth lens is a convex surface.
5. An illumination area continuously adjustable uniform illumination system as claimed in claim 3 or 4, characterized in that the system further comprises: the light incident surface of the first reflector faces the light emergent surface of the sixth lens, and a non-zero included angle exists between the normal line of the reflecting surface of the first reflector and the optical axis.
6. The system of claim 5, wherein the first lens is a positive lens, the second lens is a positive lens, the third lens is a negative lens, the fourth lens is a positive lens, the fifth lens is a positive lens, and the sixth lens is a positive lens.
7. The illumination system as claimed in claim 6, wherein the first lens, the second lens, the third lens, the fourth lens, the fifth lens and the sixth lens satisfy the following conditional expressions:
1.2≤F12/F3≤2
2≤F45/F3≤3
150≤F6≤300
2≤F34/F12≤3
wherein
F12 is the combined focal length of the first and second lenses in millimeters; f3 is the focal length of the third lens in millimeters; f45 is the combined focal length of the converging lens group, and the unit is millimeter; f6 is the focal length of the third lens in millimeters; f34 is the combined focal length of the third lens and the fourth lens.
8. The illumination system as claimed in claim 6, wherein the light incident surface of the first lens 201 satisfies the following condition: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the first lens 201 is as follows: r is more than or equal to 8mm and less than or equal to 20 mm;
the curvature radius of the light incident surface of the second lens 202 is as follows: r is more than or equal to 10mm and less than or equal to 25mm, and the curvature radius of the light-emitting surface of the second lens 202 is as follows: r is more than or equal to 20mm and less than or equal to infinity;
the radius of curvature of the light incident surface of the third lens 301 is as follows: r is more than or equal to 8mm and less than or equal to 20mm, and the curvature radius of the light-emitting surface of the third lens 301 is as follows: r is more than or equal to 10mm and less than or equal to 30 mm;
the radius of curvature of the light incident surface of the fourth lens 302 is: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the fourth lens 302 is as follows: r is more than or equal to 15mm and less than or equal to 50 mm;
the curvature radius of the light incident surface of the fifth lens 303 is as follows: r is more than or equal to 80mm and less than or equal to infinity, and the radius of curvature of the light-emitting surface of the fifth lens 303 is as follows: r is more than or equal to 20mm and less than or equal to 100 mm;
the curvature radius of the light incident surface of the sixth lens 50 is: r is more than or equal to 80mm and less than or equal to infinity, and the curvature radius of the light-emitting surface of the sixth lens 50 is as follows: r is more than or equal to 80mm and less than or equal to infinity, wherein R is the curvature radius.
9. The illumination area continuously tunable uniform illumination system of claim 5, wherein said first lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the second lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the third lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the fourth lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the fifth lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72;
the third lens satisfies the following condition: nd is more than 1.45 and less than 1.65, Vd is more than 30 and less than 72; wherein Nd is the optical refractive index, and Vd is the Abbe constant.
10. The system of claim 1, further comprising a second reflector disposed between any two of the lenses.
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| CN113156777A (en) * | 2021-04-28 | 2021-07-23 | 苏州赛源光学科技有限公司 | A lighting module for maskless exposure |
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| WO2014155468A1 (en) * | 2013-03-25 | 2014-10-02 | 富士フイルム株式会社 | Imaging lens and imaging device provided with imaging lens |
| CN209070213U (en) * | 2018-09-21 | 2019-07-05 | 鹤山市嘉米基光电科技有限公司 | A kind of outdoor projection camera lens |
| CN110441234A (en) * | 2019-08-08 | 2019-11-12 | 上海御微半导体技术有限公司 | A kind of zoom cylinder mirror, defect detecting device and defect inspection method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113156777A (en) * | 2021-04-28 | 2021-07-23 | 苏州赛源光学科技有限公司 | A lighting module for maskless exposure |
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| CN111399347B (en) | 2021-03-23 |
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