CN111399347B - Illumination area continuously adjustable uniform illumination system - Google Patents
Illumination area continuously adjustable uniform illumination system Download PDFInfo
- Publication number
- CN111399347B CN111399347B CN202010414867.7A CN202010414867A CN111399347B CN 111399347 B CN111399347 B CN 111399347B CN 202010414867 A CN202010414867 A CN 202010414867A CN 111399347 B CN111399347 B CN 111399347B
- Authority
- CN
- China
- Prior art keywords
- lens
- light
- incident surface
- light incident
- faces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V14/00—Controlling the distribution of the light emitted by adjustment of elements
- F21V14/06—Controlling the distribution of the light emitted by adjustment of elements by movement of refractors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
Abstract
The invention provides a uniform illumination system with continuously adjustable illumination area, which comprises: follow laser light source, facula regulation mirror group, the group of lens that assembles that the optical axis set up in proper order, wherein, the facula regulation mirror group includes: the laser device comprises a first lens and a second lens which are arranged in sequence, wherein the light incident surface of the first lens faces a laser light source; the light emitting surface of the first lens is far away from the laser light source; the light incident surface of the second lens faces the light emergent surface of the first lens; the light emitting surface of the second lens faces the light incident surface of the light spot adjusting lens group; the light-emitting surface of the second lens faces the converging lens group; the second lens moves along the direction of the optical axis; the converging lens group comprises: the light source comprises a third lens, a fourth lens and a fifth lens which are arranged in series, wherein the light incident surface of the third lens faces the light emergent surface of the second lens, the light emergent surface of the third lens faces the light incident surface of the fourth lens, and the light emergent surface of the fourth lens faces the light incident surface of the fifth lens. By applying the embodiment of the invention, the structure is simpler.
Description
Technical Field
The invention relates to the technical field of laser lithography, in particular to a uniform illumination system with a continuously adjustable illumination area.
Background
With the development of modern PCB technology, photolithography technology is more and more widely used, and with the higher and higher requirement of PCB exposure machine on productivity, the requirement on the utilization rate of light source is higher and higher, the illumination area of the traditional illumination system is usually fixed, and the illumination area needs to be matched with a receiver, the illumination area is a little bit larger, the utilization rate of energy is reduced, and the illumination area is a little bit smaller, which causes poor uniformity or image loss. It is therefore critical how to balance uniformity and energy utilization. Therefore, how to obtain the illumination area, i.e., the illumination system with continuously adjustable spot size, is a technical problem to be solved urgently.
The utility model discloses a utility model patent application of application number 201720288170.3 discloses a LED lamp among the prior art, and the LED lamp includes actuating mechanism, lamp holder subassembly, heat dissipation mechanism, first LED module, protection mechanism, first rotary mechanism and second rotary mechanism. The lamp holder assembly is arranged on one side of the driving mechanism. The heat dissipation mechanism is arranged on the other side of the driving mechanism and is positioned on one side of the lamp holder assembly. The first LED module is arranged on the heat dissipation mechanism and is positioned on one side of the driving mechanism. The protection mechanisms are arranged on two sides of the heat dissipation mechanism, connected with the other side of the driving mechanism and located on one side of the first LED module. The first rotating mechanism and the second rotating mechanism are arranged on the heat dissipation mechanism, the first rotating mechanism and the second rotating mechanism are located between the protection mechanisms, and the second rotating mechanism is located on one side of the first rotating mechanism. The utility model discloses improved the structure of LED lamp, the luminous angle and the illumination area of LED lamp are adjustable for the LED lamp is all mountable in less space and is used, and the light source utilization ratio of LED lamp is high, reduces energy resource consumption.
However, the prior art can only be applied to the field of general illumination, and the illumination area is adjusted by adjusting the rotation angles of the first rotating mechanism and the second rotating mechanism, so that the structure is complex.
Disclosure of Invention
The invention aims to solve the technical problem of how to simplify the adjusting mechanism.
The invention solves the technical problems through the following technical means:
the embodiment of the invention provides a uniform illumination system with continuously adjustable illumination area, which comprises: a laser light source, a light bar, a facula adjusting lens group and a converging lens group which are arranged along an optical axis in sequence, wherein,
the optical rod is a cuboid, and the central axis of the optical rod is superposed with the optical axis;
the facula adjusting mirror group comprises: the light bar comprises a first lens and a second lens which are arranged in sequence, wherein the light incident surface of the first lens faces the light emergent surface of the light bar, and is convex or planar; the light emitting surface of the first lens is far away from the laser light source, and the side surface is a convex surface; the light incident surface of the second lens faces the light emergent surface of the first lens, and the light incident surface is convex; the light-emitting surface of the second lens faces the light-entering surface of the light spot adjusting lens group, and the light-emitting surface is convex; the light-emitting surface of the second lens faces the converging lens group; and the second lens moves along the direction of the optical axis;
the converging lens group comprises: the light source comprises a third lens, a fourth lens and a fifth lens which are arranged in series, wherein the light incident surface of the third lens faces the light emergent surface of the second lens, the light emergent surface of the third lens faces the light incident surface of the fourth lens, and the light emergent surface of the fourth lens faces the light incident surface of the fifth lens; the light incident surface and the light emitting surface of the third lens are both concave surfaces, and the light incident surface and the light emitting surface of the fourth lens and the light incident surface and the light emitting surface of the fifth lens are both convex surfaces;
the light incident surface of the sixth lens is a concave surface, and the light emergent surface of the sixth lens is a convex surface;
the first lens is a positive lens, the second lens is a positive lens, the third lens is a negative lens, the fourth lens is a positive lens, the fifth lens is a positive lens, and the sixth lens is a positive lens;
the light source further comprises a first reflector with a light incident surface facing the light emergent surface of the sixth lens, and a non-zero included angle exists between the normal of the reflecting surface of the first reflector and the optical axis.
By applying the embodiment of the invention, the enlargement and reduction of the light spot can be realized only by adjusting the movement direction and the movement distance of the second lens on the optical axis, compared with the prior art, only one optical component needs to be adjusted in the embodiment of the invention, the number of the adjusted optical components is less, the movement mode of the optical component moves along the optical axis direction, and compared with the rotation movement in the prior art, the movement mode is simpler, so that the embodiment of the invention can more simply realize the adjustment of the size of the light spot.
Optionally, the system further comprises a second mirror disposed between any two lenses.
The invention has the advantages that:
by applying the embodiment of the invention, the enlargement and reduction of the light spot can be realized only by adjusting the movement direction and the movement distance of the second lens on the optical axis, compared with the prior art, only one optical component needs to be adjusted in the embodiment of the invention, the number of the adjusted optical components is less, the movement mode of the optical component moves along the optical axis direction, and compared with the rotation movement in the prior art, the movement mode is simpler, so that the embodiment of the invention can more simply realize the adjustment of the size of the light spot.
Drawings
Fig. 1 is a schematic flow chart of a uniform illumination system with a continuously adjustable illumination area according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a test result of the illumination light spot provided in embodiment 1 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An even illumination system with continuously adjustable illumination area can be widely applied to the fields of PCB photoetching, 3D printing and the like.
A continuously adjustable uniform illumination system for an illumination area, comprising: the light source 10, the light bar 40, the first lens 201, the second lens 202, the first lens 201 and the second lens 202 are sequentially arranged along the optical axis 1 from the left light source to the receiving surface to form a light spot adjusting mirror group 20; a converging lens group is formed by the third lens 301, the fourth lens 302, the fifth lens 303, the third lens 301, the fourth lens 302 and the fifth lens 303; and a sixth lens 50.
The optical rod 40 is a cuboid, and the central axis of the optical rod 40 coincides with the optical axis 1 of the system.
The light incident surface of the first lens 201 faces the light emergent surface of the light bar 40, and the light incident surface is non-concave, i.e. can be adjusted to be a plane or a convex surface according to actual requirements; the light-emitting surface of the first lens 201 is far away from the laser light source 10, and the side surface is a convex surface; the light incident surface of the second lens 202 faces the light emergent surface of the first lens 201, and the light incident surface is convex; the light-emitting surface of the second lens element 202 is disposed facing the light-incident surface of the light spot adjusting lens assembly 20, and the light-emitting surface is convex;
the light-emitting surface of the second lens element 202 faces the converging lens group 30; and the second lens 202 can move along the optical axis direction, and the moving direction is close to the first lens 201 or far away from the first lens 201.
The light incident surface of the third lens 301 faces the light emergent surface of the second lens 202, the light emergent surface of the third lens 301 faces the light incident surface of the fourth lens, and the light incident surface of the third lens is a concave surface; the light-emitting surface of the third lens is a concave surface; the light emitting surface of the fourth lens 302 faces the light entering surface of the fifth lens 303, light emitted from the light emitting surface of the fifth lens 303 is irradiated onto a target, and the light entering surface and the light emitting surface of the fourth lens 302 and the light emitting surface of the fifth lens 303 are both convex surfaces.
Further, in the illumination system with continuously adjustable illumination area and uniformity, the first lens 201 is a positive lens, the second lens 202 is a positive lens, the third lens 301 is a negative lens, the fourth lens 302 is a positive lens, the fifth lens 303 is a positive lens, and the sixth lens 50 is a positive lens.
In practical applications, the first lens 201, the second lens 202, the third lens 301, the fourth lens 302, the fifth lens 303 and the sixth lens 50 of the illumination area continuously adjustable and uniform illumination system are all glass spherical lenses.
When the second lens 202 moves left and right, the illumination area can be continuously increased or decreased, and the total optical length of the system is kept constant. In the embodiment of the invention, the illumination area can be continuously adjusted only by moving the second lens 202, and the total optical length of the illumination system is always kept unchanged when the second lens 202 is moved.
Illumination area can be adjusted in succession, solves the problem that current digital exposure machine energy utilization and homogeneity can not match well, in the use, can adjust illumination area as required, with energy utilization maximize, has increased the productivity of equipment indirectly.
Further, the system further comprises: the light incident surface of the first reflector 60 faces the light emergent surface of the sixth lens 50, and a non-zero included angle exists between the normal of the reflection surface of the first reflector 60 and the optical axis.
In addition, a second mirror can be added between any two elements of the uniform illumination system to perform optical path turning to further reduce the volume, for example, between the first lens 201 and the second lens 202, between the second lens 202 and the third lens 301, between the third lens 301 and the fourth lens 302, between the fourth lens 302 and the fifth lens 303, and so on.
Example 1
Table 1 is a summary table of parameters of each lens provided in example 1 of the present invention, as shown in table 1:
it should be noted that S1 is a light emitting surface of the light bar, S2 is a light incident surface of the first lens, and S3 is a light emitting surface of the first lens; s4 is the light incident surface of the second lens, S5 is the light emergent surface of the second lens; s6 is the light incident surface of the third lens, and S7 is the light emergent surface of the third lens; s8 is the light incident surface of the fourth lens, and S9 is the light emergent surface of the fourth lens; s10 is the light incident surface of the fifth lens, and S11 is the light emergent surface of the fifth lens; s12 is the light incident surface of the sixth lens element, and S13 is the light emitting surface of the sixth lens element.
Fig. 2 is a schematic diagram showing a test result of the illumination light spot provided in embodiment 1 of the present invention, and fig. 2 shows that the square light-colored portion in fig. 2 is an effective light spot, the light spot is square, the size of the light spot is 24 × 14 square millimeters, and the light intensity of the light spot is greater than or equal to 9.5 × 109W/m2。
Example 2
Table 2 is a summary table of parameters of each lens provided in example 1 of the present invention, as shown in table 2:
the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (2)
1. A uniform illumination system with continuously adjustable illumination area, the system comprising: a laser light source, a light bar, a facula adjusting lens group and a converging lens group which are arranged along an optical axis in sequence, wherein,
the optical rod is a cuboid, and the central axis of the optical rod is superposed with the optical axis;
the facula adjusting mirror group comprises: the light bar comprises a first lens and a second lens which are arranged in sequence, wherein the light incident surface of the first lens faces the light emergent surface of the light bar, and is convex or planar; the light-emitting surface of the first lens is far away from the laser light source and is a convex surface; the light incident surface of the second lens faces the light emergent surface of the first lens, and the light incident surface is convex; the light-emitting surface of the second lens faces the light-entering surface of the light spot adjusting lens group, and the light-emitting surface is convex; the light-emitting surface of the second lens faces the converging lens group; and the second lens moves along the direction of the optical axis;
the converging lens group comprises: the light source comprises a third lens, a fourth lens and a fifth lens which are arranged in series, wherein the light incident surface of the third lens faces the light emergent surface of the second lens, the light emergent surface of the third lens faces the light incident surface of the fourth lens, the light emergent surface of the fourth lens faces the light incident surface of the fifth lens, the light incident surface and the light emergent surface of the third lens are both concave surfaces, and the light incident surface and the light emergent surface of the fourth lens and the light incident surface and the light emergent surface of the fifth lens are both convex surfaces;
the light incident surface of the sixth lens is a concave surface, and the light emergent surface of the sixth lens is a convex surface;
the first lens is a positive lens, the second lens is a positive lens, the third lens is a negative lens, the fourth lens is a positive lens, the fifth lens is a positive lens, and the sixth lens is a positive lens;
the number of the lenses with diopters in the lighting system is 6;
the light source further comprises a first reflector with a light incident surface facing the light emergent surface of the sixth lens, and a non-zero included angle exists between the normal of the reflecting surface of the first reflector and the optical axis.
2. The system of claim 1, further comprising a second reflector disposed between any two of the lenses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010414867.7A CN111399347B (en) | 2020-05-15 | 2020-05-15 | Illumination area continuously adjustable uniform illumination system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010414867.7A CN111399347B (en) | 2020-05-15 | 2020-05-15 | Illumination area continuously adjustable uniform illumination system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111399347A CN111399347A (en) | 2020-07-10 |
| CN111399347B true CN111399347B (en) | 2021-03-23 |
Family
ID=71433739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010414867.7A Active CN111399347B (en) | 2020-05-15 | 2020-05-15 | Illumination area continuously adjustable uniform illumination system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111399347B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113156777B (en) * | 2021-04-28 | 2023-06-27 | 苏州赛源光学科技有限公司 | A lighting module for maskless exposure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014155468A1 (en) * | 2013-03-25 | 2014-10-02 | 富士フイルム株式会社 | Imaging lens and imaging device provided with imaging lens |
| CN209070213U (en) * | 2018-09-21 | 2019-07-05 | 鹤山市嘉米基光电科技有限公司 | A kind of outdoor projection camera lens |
| CN110441234A (en) * | 2019-08-08 | 2019-11-12 | 上海御微半导体技术有限公司 | A kind of zoom cylinder mirror, defect detecting device and defect inspection method |
-
2020
- 2020-05-15 CN CN202010414867.7A patent/CN111399347B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014155468A1 (en) * | 2013-03-25 | 2014-10-02 | 富士フイルム株式会社 | Imaging lens and imaging device provided with imaging lens |
| CN209070213U (en) * | 2018-09-21 | 2019-07-05 | 鹤山市嘉米基光电科技有限公司 | A kind of outdoor projection camera lens |
| CN110441234A (en) * | 2019-08-08 | 2019-11-12 | 上海御微半导体技术有限公司 | A kind of zoom cylinder mirror, defect detecting device and defect inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111399347A (en) | 2020-07-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8308307B2 (en) | Illuminator and projector | |
| US20140268068A1 (en) | Light source unit, lighting apparatus and image projection apparatus | |
| US20180314141A1 (en) | Light source device and projection type display apparatus | |
| WO2009138228A1 (en) | Illumination apparatus | |
| US10989995B2 (en) | Laser assembly, laser source and laser projection apparatus | |
| WO2011011980A1 (en) | Illumination device for stage lighting with high light-combining efficiency | |
| CN105589302A (en) | Ultraviolet light exposure system capable of emitting light in parallel and exposure machine | |
| CN111399347B (en) | Illumination area continuously adjustable uniform illumination system | |
| US5584558A (en) | Light device having first and second optical systems arranged substantially 90° apart | |
| CN111158221A (en) | LED light source exposure system and exposure machine | |
| KR101282123B1 (en) | Wide area projection exposure apparatus | |
| WO2020052398A1 (en) | Vehicle lamp | |
| CN112305863B (en) | Illumination system, pupil ellipticity compensation method and photoetching machine | |
| CN215117004U (en) | Lighting device and head-mounted display equipment | |
| CN212929894U (en) | Light path refraction structure of pattern lamp | |
| CN103105737A (en) | Photolithography apparatus adopting spliced multiple light sources | |
| WO2020151628A1 (en) | Light source system and lighting apparatus comprising light source system | |
| CN210428067U (en) | Energy-conserving projector of blue purple light LED and projection membrane thereof | |
| CN208969426U (en) | Double-station exposure light source system | |
| CN108490744B (en) | UV-LED optical system and exposure machine | |
| CN102540736A (en) | Uniformity compensation device applied to large field-of-view montage illumination | |
| CN213957766U (en) | Lamp set | |
| CN204153533U (en) | High definition camera lens picture element detection photo engine | |
| CN211786584U (en) | LED light source exposure system and exposure machine | |
| CN213577065U (en) | Light beam homogenizing device and light beam homogenizing stage lamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |