CN208969426U - Double-station exposure light source system - Google Patents
Double-station exposure light source system Download PDFInfo
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- CN208969426U CN208969426U CN201821426176.3U CN201821426176U CN208969426U CN 208969426 U CN208969426 U CN 208969426U CN 201821426176 U CN201821426176 U CN 201821426176U CN 208969426 U CN208969426 U CN 208969426U
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Abstract
The utility model relates to double-station exposure light source systems, and with LED condensation light source, fly lens group, light chopper mirror, condensation light source issues the ultraviolet light of fixed wave length, are designing the focus of convex lens into hot spot；Fly lens group is used to receive the hot spot of LED condensation light source aggregation and carries out optical integration distribution, forms uniform multi-point source；Light chopper mirror receives the multi-point source that fly lens group projects, and by switching mirror reflection angle, realizes the alternating reflex of two optical path directions；Multi-point source that first spherical reflector receiving light path transformation glass is reflected towards first direction simultaneously reflects integral and forms uniform area light source, projects on the first exposure station；Multi-point source that second spherical reflector receiving light path transformation glass is reflected towards second direction simultaneously reflects integral and forms uniform area light source, projects on the second exposure station.Simplify device structure, improve graph exposure machining accuracy, while reducing exposure light source occupied area, is conducive to arrangement and implements.
Description
Technical field
The utility model relates to exposure technology technical fields, more particularly, to the exposure light source system of exposure machine.
Background technique
Since LED lamp is small in size, light-weight, epoxy resin encapsulation can bear high-strength mechanical impact and vibration, be not easy
It is broken.Average life span was up to 100,000 hours.LED lamp service life was up to 5 ~ 10 years；LED light reaction speed is fast simultaneously, can be in height
Frequency operates, and in the case where same illuminating effect, power consumption is a ten thousandth of incandescent lamp bulb, the half of fluorescent tube, by
There are environmental protection and energy saving in LED light source, occur many mercury lamps for using LED light source to replace highly energy-consuming in the market as exposure light source.Mesh
Preceding LED exposure light source use LED light lattice arrangement, when scanning mode is exposed operation, due to each LED light illumination angle by
Lamp front butterfly mirror influences, and when lamp bead decaying inconsistent or some LED light failure in LED dot matrix, all exists between dot matrix and exposes
The light source uniformity difference defect inconsistent with parallel half-angle, can not make fine electronic circuit, cause product quality consistency
Difference, capacity efficiency are low.
Summary of the invention
The purpose of this utility model is to provide a kind of double-station exposure light source systems, meet flexible base board double-sided exposure need
It asks, solves double-sided exposure intensity equalization, Double-side line contraposition is accurate, simplifies flexible circuitry and exposes production process, reaches high-precision
Graph exposure processing, while reducing exposure light source occupied area, promote exposure quality and efficiency.
In order to achieve the above objectives, the utility model adopts the following technical solution:
Double-station exposure light source system, includes
LED condensation light source, the condensation light source surround evenly distributed point of center by design inclination angle by multiple LED lamp beads
Cloth issues the ultraviolet light of fixed wave length when work, design convex lens focus at hot spot；
Fly lens group, the fly lens group are used to receive the hot spot of LED condensation light source aggregation and carry out optical integration point
Match, forms uniform multi-point source；
Light chopper mirror receives the multi-point source that fly lens group projects, and by switching mirror reflection angle, realizes two
The alternating reflex of optical path direction；
First spherical reflector, the multi-point source that receiving light path transformation glass is reflected towards first direction, by the first ball
Face mirror reflection integrates to form uniform area light source, projects on the first exposure station；
Second spherical reflector, the multi-point source that receiving light path transformation glass is reflected towards second direction, by the second ball
Face mirror reflection integrates to form uniform area light source, projects on the second exposure station.
Above scheme is further: the LED condensation light source, fly lens group and light chopper mirror are distributed in a straight line
On, the first spherical reflector and the second spherical reflector are arranged symmetrically relative to the straight line.
Above scheme is further: the LED lamp bead in the LED condensation light source is uniform around center by design inclination angle
Arranged distribution assembles the luminous angle of synthesis within 20 °~60 ° between LED lamp bead when work.
Above scheme is further: the light chopper mirror is the light for receiving fly lens group and projecting, and passes through rotation axis band
20 °~70 ° angles of positive counter deflexion are moved to realize the alternating reflex of two optical path directions.
The utility model design effectively double-station exposure light source structure issues aggregation hot spot by LED condensation light source and is irradiated to
Fly lens group, fly lens group carry out optical integration distribution, form uniform multi-point source, obtain light intensity equilibrium, angle
Consistent multi-point source, light chopper mirror receives the multi-point source that fly lens group projects, is reflected into the first spherical reflector, more
Point light source forms area source through spherical mirror reflection integral, is incident upon the first exposure position；Light chopper mirror is driven by servo motor
Rotation axis deflects 20 °~70 ° angles, and multi-point source reflects the second spherical reflector, and multi-point source reflects integral through spherical mirror and formed
Area source is incident upon the second exposure position, to obtain double post operation exposure light sources.Since exposure light source uses LED light source, than
Mercury lamp is more environmentally friendly and energy saving, longer life expectancy；Since double post exposure light sources use new light path design, simplify device structure, improves
Graph exposure machining accuracy, while reducing exposure light source occupied area is conducive to arrangement and implements, promoted exposure sources operation ratio and
Operability meets industry utilization.
Detailed description of the invention:
It is attached that FIG. 1 is a schematic structural view of the utility model；
Attached drawing 2 is that Fig. 1 embodiment is applied to the schematic diagram on exposure machine；
Attached drawing 3 is LED condensation light source schematic diagram.
Specific embodiment:
Make furtherly below with reference to technical effect of the attached drawing to the design of the utility model, specific structure and generation
It is bright, to be fully understood from the purpose of this utility model, feature and effect.
It refering to fig. 1, is the preferred embodiment schematic diagram of the utility model, the utility model is in relation to a kind of duplex shown in 2,3
Position exposure light source system, with LED condensation light source 1, fly lens group 2, light chopper mirror 3, the first spherical reflector 4 and the
Two spherical reflectors 6.LED condensation light source 1 is evenly distributed around center by design inclination angle by multiple LED lamp beads 11,
The ultraviolet light that fixed wave length is issued when work, in fixed focus at hot spot；Preferably LED lamp bead 11 has 10 ~ 100.
The aggregation hot spot that fly lens group 2 is used to receive LED condensation light source 1 carries out optical integration distribution, the identical multiple spot of conversion angle
Light source.Light chopper mirror 3 drives positive 20 °~70 ° angles of counter deflexion of rotation axis, preferably 40 ° of angles, to realize two by servo motor
The alternating reflex of a optical path direction: when the first spherical reflector 4 collects the multi-point source that light chopper mirror 3 reflects, through the first ball
The reflection integral of face reflective mirror 4 forms area source, and uniformly projects on the first exposure station 5；When exposure working time timing is complete
At condensation light source 1 is closed；After light chopper mirror 3 drives 40 ° of angles of deflection by rotation axis, condensation light source 1 is opened simultaneously, the
Two spherical reflectors 6 collect the multi-point source that light chopper mirror 3 reflects, and reflect integral forming face light through the second spherical reflector 6
Source, and uniformly project on the second exposure station 7.
Shown in Fig. 1,2,3, the LED condensation light source 1, fly lens group 2 and light chopper mirror 3 of the present embodiment are distributed in always
On line, the first spherical reflector 4 and the second spherical reflector 6 are arranged symmetrically relative to the straight line.Due to the row of each optical frames
Column optimize, meet the optimum condition of the distribution of exposure light source uniform-illumination, parallel half-angle consistency, reach package assembly optimization,
Implement conducive to arrangement.Preferably, the LED lamp bead for having tendency angle evenly distributed around center in the luminescence component 1
11, the luminous angle of synthesis is assembled between LED lamp bead 11 within 20 °~60 °, within preferably 30 °, conducive to light is controlled out,
It obtains ideal hot spot and is mapped to fly lens group 2, fly lens group 2 is preferably by two the same number of compound lens superposition groups
At carrying out optical integration distribution when ultraviolet hot spot falls in first compound lens, form uniform multiple spot in the second face compound lens
Light source.The light chopper mirror 3 is the alternating reflex fly's eye for driving 40 ° of angles of positive counter deflexion to realize both direction by rotation axis
The multi-point source that lens group 2 projects, light chopper mirror 3 can be driven by servo motor and be deflected, accurately and effectively alternating reflex fly's eye
Lens group 2 project multi-point source, through the first spherical reflector 4(or the second spherical reflector 6) reflection integral form area source,
And uniformly project the exposure of the first exposure station 5(or second station 7) on.Meet double-station on an exposure machine to realize
Exposure operation needs.Such implementation exposure light source system obtains light intensity equilibrium, the consistent double-station source of parallel light of angle,
Light intensity is balanced, cooperates with spectrum assignment mechanism, can obtain double-station exposure operation.Since exposure light source uses LED light
Source, more more environmentally friendly than mercury lamp and energy saving, longer life expectancy；Since double-station exposure light source uses new light path design, simplify device structure,
Graph exposure machining accuracy is improved, while reducing exposure light source occupied area, is conducive to arrangement and implements, promote the operation of exposure sources
Rate and operability meet industry utilization.
Certainly, the utility model can also have other various embodiments, without departing substantially from the spirit of the present invention and its essence
In the case of, those skilled in the art work as can make various corresponding changes and modification, but these according to the utility model
Corresponding changes and modifications all should belong to the protection scope of the utility model the attached claims.
Claims (4)
1. double-station exposure light source system, it is characterised in that: have
LED condensation light source (1), the condensation light source (1) are uniformly arranged by design inclination angle around center by multiple LED lamp beads (11)
Column distribution issues the ultraviolet light of fixed wave length when work, design convex lens focus at hot spot；
Fly lens group (2), the fly lens group (2) are used to receive the hot spot of LED condensation light source (1) aggregation and carry out optics product
Distribution, forms uniform multi-point source；
Light chopper mirror (3) receives the multi-point source that fly lens group (2) are projected, and by switching mirror reflection angle, realizes two
The alternating reflex of a optical path direction；
First spherical reflector (4), the multi-point source that receiving light path transformation glass (3) is reflected towards first direction, by first
Spherical reflector (4) reflection integral forms uniform area light source, projects on the first exposure station (5)；
Second spherical reflector (6), the multi-point source that receiving light path transformation glass (3) is reflected towards second direction, by second
Spherical reflector (6) reflection integral forms uniform area light source, projects on the second exposure station (7).
2. double-station exposure light source system according to claim 1, it is characterised in that: the LED condensation light source (1), fly
Eyelens group (2) and light chopper mirror (3) are distributed in a straight line, the first spherical reflector (4) and the second spherical reflector (6)
It is arranged symmetrically relative to the straight line.
3. double-station exposure light source system according to claim 1 or 2, it is characterised in that: the LED condensation light source (1)
In LED lamp bead (11) it is evenly distributed around center by design inclination angle, assemble when work between LED lamp bead (11) and close
At luminous angle within 20 °~60 °.
4. double-station exposure light source system according to claim 1 or 2, it is characterised in that: the light chopper mirror (3) is
The light that fly lens group (2) are projected is received, drives 20 °~70 ° angles of positive counter deflexion to realize two optical path directions by rotation axis
Alternating reflex.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821426176.3U CN208969426U (en) | 2018-09-02 | 2018-09-02 | Double-station exposure light source system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821426176.3U CN208969426U (en) | 2018-09-02 | 2018-09-02 | Double-station exposure light source system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208969426U true CN208969426U (en) | 2019-06-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821426176.3U Active CN208969426U (en) | 2018-09-02 | 2018-09-02 | Double-station exposure light source system |
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| Country | Link |
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| CN (1) | CN208969426U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117666298A (en) * | 2024-02-01 | 2024-03-08 | 河南百合特种光学研究院有限公司 | Exposure machine light source with multiple LED spherical surface spliced |
-
2018
- 2018-09-02 CN CN201821426176.3U patent/CN208969426U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117666298A (en) * | 2024-02-01 | 2024-03-08 | 河南百合特种光学研究院有限公司 | Exposure machine light source with multiple LED spherical surface spliced |
| CN117666298B (en) * | 2024-02-01 | 2024-05-17 | 河南百合特种光学研究院有限公司 | Exposure machine light source with multiple LED spherical surface spliced |
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