CN109062012A - LED condensation light source and the exposure light source system for using LED condensation light source - Google Patents
LED condensation light source and the exposure light source system for using LED condensation light source Download PDFInfo
- Publication number
- CN109062012A CN109062012A CN201811016219.5A CN201811016219A CN109062012A CN 109062012 A CN109062012 A CN 109062012A CN 201811016219 A CN201811016219 A CN 201811016219A CN 109062012 A CN109062012 A CN 109062012A
- Authority
- CN
- China
- Prior art keywords
- light source
- led
- led lamp
- lamp bead
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009833 condensation Methods 0.000 title claims abstract description 55
- 230000005494 condensation Effects 0.000 title claims abstract description 55
- 239000011324 bead Substances 0.000 claims abstract description 69
- 230000005540 biological transmission Effects 0.000 claims abstract description 3
- 238000009434 installation Methods 0.000 claims description 8
- 230000007717 exclusion Effects 0.000 claims description 4
- 238000009826 distribution Methods 0.000 abstract description 5
- 238000005286 illumination Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Abstract
The present invention relates to LED condensation light sources, LED condensation light source device main body has front end mounting plate, driving plate and shell, multiple LED lamp beads are installed, LED lamp bead is electrically connected driving plate, and multiple LED lamp beads in design focus superposition assemble the hot spot of condensation light source after lighting on the mounting plate of front end.Using in the exposure light source system of LED condensation light source, hot spot is by the integral distribution of fly lens group, form uniform multi-point source, Cold Mirrors absorbs the multi-point source of fly lens group transmission, it is reflected on spherical mirror, spherical mirror absorbs multi-point source reflection integral and forms area source, projects and carries out exposure operation on workbench.The present invention assembles the hot spot of condensation light source using the luminous point superposition of multiple LED, reach the intensity of illumination that exposure requires, solves the problems, such as exposure operation caused by lamp bead decaying inconsistent or some LED light failure, obtain uniform exposure light source, exposure efficiency is promoted, flexibility fine-line production is suitble to.
Description
Technical field
The present invention relates to exposure sources technical fields, in particular for the light-source structure of the exposure sources of flexible base board.
Background technique
LED lamp is small in size, light-weight at present, and epoxy resin encapsulation can bear high-strength mechanical impact and vibration, be not easy
It is broken.Average life span was up to 100,000 hours.LED lamp service life was up to 5 ~ 10 years；LED light reaction speed is fast simultaneously, can be in height
Frequency operates, and in the case where same illuminating effect, power consumption is a ten thousandth of incandescent lamp bulb, the half of fluorescent tube, by
There are environmental protection and energy saving in LED light source, occur many mercury lamps for using LED light source to replace highly energy-consuming in the market as exposure light source.Mesh
Preceding LED exposure light source use LED light lattice arrangement, when scanning mode is exposed operation, due to each LED light illumination angle by
Lamp front butterfly mirror influences, and when lamp bead decaying inconsistent or some LED light failure in LED dot matrix, all exists between dot matrix and exposes
The light source uniformity difference defect inconsistent with parallel half-angle, can not make fine electronic circuit, cause product quality consistency
Difference, capacity efficiency are low.
Summary of the invention
It is an object of the invention to overcome the deficiencies of existing technologies, a kind of LED condensation light source is provided, utilizes multiple LED's
Luminous point carries out superposition around the center of circle and forms hot spot, and hot spot reaches the intensity of illumination that exposure requires.
Still a further object of the present invention is to provide a kind of exposure light source system using LED condensation light source, using environmental protection and energy saving
LED condensation light source replace traditional mercury lamp light source, absorbed by the optical frames specially designed and conversion, realize that temperature is low, uniform
Property the good and consistent directional light exposure light source of parallel half-angle, be more suitable for flexible fine-line and make.
To reach above-mentioned first purpose, the present invention adopts the following technical scheme:
A kind of LED condensation light source, including LED condensation light source device main body, the LED condensation light source device main body are installed with front end
Plate, driving plate and shell, shell provide the installation position of front end mounting plate and driving plate, install multiple LED light on the mounting plate of front end
Pearl, LED lamp bead are electrically connected driving plate, and multiple LED lamp beads in design focus superposition assemble the hot spot of condensation light source after lighting.
Above scheme is further: the shell is equipped with fan, and fan is electrically connected driving plate, and fan, which is given, to be excluded
LED lamp bead lights the heat generated when work.
Above scheme is further: two groups up and down that the interior of shell forms subregion are behave affectedly, and driving plate is mounted on
Group behave affectedly and connects power supply by power connector, and front end mounting plate is mounted on the following group and behave affectedly, and fan is distributed under shell and assembles
The periphery of chamber.
Above scheme is further: the quantity of LED lamp bead is 10-100 on the front end mounting plate, all LED lamp beads
It is distributed by multi-layer discs shape, the LED lamp bead for occupying the center of circle is arranged vertically, and the relatively tilting angle of other LED lamp beads.
To reach above-mentioned second purpose, the present invention adopts the following technical scheme:
A kind of exposure light source system using LED condensation light source, the exposure light source system have LED condensation light source device main body,
Fly lens group, Cold Mirrors and spherical mirror, LED condensation light source device main body have front end mounting plate, driving plate and shell, and shell mentions
For the installation position of front end mounting plate and driving plate, multiple LED lamp beads are installed on the mounting plate of front end, LED lamp bead is electrically connected driving
Plate, multiple LED lamp beads in design focus superposition assemble the hot spot of condensation light source after lighting；The hot spot is by fly lens group product
Distribution, forms uniform multi-point source, and Cold Mirrors absorbs the multi-point source of fly lens group transmission, is reflected on spherical mirror, spherical surface
Mirror absorbs multi-point source reflection integral and forms area source, is incident upon on following workbench.
Above scheme is further: the LED condensation light source device main body, fly lens group and Cold Mirrors setting are the same as always
On line, fly lens group is located on the position for designing focus superposition set after multiple LED lamp beads are lighted.
Above scheme is further: the shell is equipped with fan, and fan is electrically connected driving plate, and fan, which is given, to be excluded
LED lamp bead lights the heat generated when work.
Above scheme is further: two groups up and down that the interior of shell forms subregion are behave affectedly, and driving plate is mounted on
Group behave affectedly and connects power supply by power connector, and front end mounting plate is mounted on the following group and behave affectedly, and fan is distributed under shell and assembles
The periphery of chamber.
Above scheme is further: the quantity of LED lamp bead is 10-100 on the front end mounting plate, all LED lamp beads
By discoid distribution, the LED lamp bead for occupying the center of circle is arranged vertically, and the relatively tilting angle of other LED lamp beads.
The present invention assembles the hot spot of condensation light source using the luminous point of multiple LED in design focus superposition, reaches exposure
It is required that intensity of illumination, solve the problems, such as exposure operation caused by lamp bead decaying inconsistent or some LED light failure, obtain equal
Even exposure light source promotes exposure efficiency.
Further advantage of the present invention is to provide a kind of exposure light source system using LED condensation light source, using environmental protection and energy saving
LED condensation light source replaces traditional mercury lamp light source, absorbs by the optical frames specially designed and conversion, realizes that temperature is low, uniformity
Well with the consistent directional light exposure light source of parallel half-angle, it is more suitable for flexible fine-line production.
Detailed description of the invention:
Attached drawing 1 is LED condensation light source structural schematic diagram of the invention；
Attached drawing 2 is the exposure light source system provided by the invention combined using LED condensation light source
Specific embodiment:
It is described further below with reference to technical effect of the attached drawing to design of the invention, specific structure and generation, with abundant
Ground understands the purpose of the present invention, feature and effect.
As shown in fig.1, the present invention is in relation to a kind of LED condensation light source, including LED condensation light source device main body 1, the LED
Condensation light source device main body 1 has front end mounting plate 11, driving plate 13 and shell 14, and shell 14 provides front end mounting plate 11 and drives
The installation position of movable plate 13 installs multiple LED lamp beads 12 on front end mounting plate 11, and LED lamp bead 12 is electrically connected driving plate 13, multiple
LED lamp bead 12 in design focus superposition assembles the hot spot of condensation light source after lighting.Hot spot reaches the intensity of illumination that exposure requires,
It solves the problems, such as exposure operation caused by lamp bead decaying inconsistent or some LED light failure, obtains uniform exposure light source, mention
Rise exposure efficiency.
Shown in Fig. 1, in the present embodiment, the shell 14 is equipped with fan 16, and fan 16 is electrically connected driving plate 13, fan
16, which give exclusion LED lamp bead 12, lights the heat generated when work, and the work of 12 constant temperature of effective protection LED lamp bead reduces temperature pair
The influence of LED lamp bead emission wavelength.Further, two groups up and down for subregion being formed inside the shell 14 are behave affectedly, driving plate
13 are mounted on over-assemble chamber and connect power supply by power connector 15, and front end mounting plate 11 is mounted on the following group and behave affectedly, fan 16
It is distributed in the periphery that 14 the following group of shell is behave affectedly.Since driving plate 13 is far from front end mounting plate 11, thus reduces LED lamp bead 12 and light
Influence of the heat generated when work to driving plate 13, constant 13 guarantee of power LED condensation light source of driving plate use safer
And long service life.
Shown in Fig. 1, this quantity for implementing LED lamp bead 12 on preferred front end mounting plate 11 is 10-100, all LED light
Pearl 12 is distributed by multi-layer discs shape, and the LED lamp bead 12 for occupying the center of circle is arranged vertically, and other LED lamp beads 12 relatively tilting one
Angle, the light of the LED lamp bead 12 after lighting assemble the hot spot of condensation light source in design focus superposition, obtain preferably exposure
Intensity.Driving plate 13 controls the switch of LED lamp bead 12 and brightness and the control operation heat dissipation of high-power fan 16, guarantees and optimize LED
The luminous work of lamp bead 12.
As shown in fig.2, the present invention also provides a kind of exposure light source system combined using LED condensation light source, the exposure
Light-source system has LED condensation light source device main body 1, fly lens group 2, Cold Mirrors 3 and spherical mirror 4, LED condensation light source device master
Body 1 has front end mounting plate 11, driving plate 13 and shell 14, and shell 14 provides the installation of front end mounting plate 11 and driving plate 13
, multiple LED lamp beads 12 are installed, LED lamp bead 12 is electrically connected driving plate 13,12 points of multiple LED lamp beads on front end mounting plate 11
The hot spot of condensation light source is assembled after bright in design focus superposition；The hot spot is formed uniform by the integral distribution of fly lens group 2
Multi-point source, Cold Mirrors 3 absorb the multi-point source that fly lens group 2 transmits, are reflected on spherical mirror 4, and spherical mirror 4 absorbs multiple spot light
Source reflection integral forms area source, is incident upon on following workbench 5, is exposed operation.
Shown in Fig. 2, in the present embodiment, the LED condensation light source device main body 1, fly lens group 2 and the setting of Cold Mirrors 3 exist
On same straight line, fly lens group 2 is located on the position for designing focus superposition set after multiple LED lamp beads 12 are lighted.Fly's eye is saturating
Microscope group 2 is distributed by integrating to hot spot, forms uniform multi-point source, and acquisition temperature is low, uniformity is good consistent with parallel half-angle
Directional light exposure light source is more suitable for flexible fine-line production.
Shown in Fig. 1, in the present embodiment, the shell 14 is equipped with fan 16, and fan 16 is electrically connected driving plate 13, fan
16, which give exclusion LED lamp bead 12, lights the heat generated when work.Two assemblings up and down of subregion are formed inside the shell 14
Chamber, driving plate 13 are mounted on over-assemble chamber and connect power supply by power connector 15, and front end mounting plate 11 is mounted on lower assembling
Chamber, fan 16 are distributed in the periphery that 14 the following group of shell is behave affectedly.The structure makes driving plate 13 far from front end mounting plate 11, thus reduces
LED lamp bead 12 lights influence of the heat generated when work to driving plate 13, constant 13 guarantee of power LED optically focused light of driving plate
Source uses safer and long service life.
Use safer and long service life.The quantity of LED lamp bead 12 is 10-100 on the front end mounting plate 11, institute
There is LED lamp bead 12 to be distributed by multi-layer discs shape, the LED lamp bead 12 for occupying the center of circle is arranged vertically, and other LED lamp beads 12 are opposite
A tilting angle, the light of the LED lamp bead 12 after lighting assemble the hot spot of condensation light source in design focus superposition, obtain preferable
Exposure intensity.Driving plate 13 control LED lamp bead 12 switch and brightness and control high-power fan 16 operation heat dissipation, guarantee and
Optimize the luminous work of LED lamp bead 12.
LED lamp bead 12 in this example presses the evenly distributed installation of angle design around central tendency, issues fixed wave length
Ultraviolet light, the focus of collocation design convex lens realizes that multiple 12 lights of LED lamp bead exist at hot spot in LED lamp bead 12
Design focus superposition assembles the hot spot of condensation light source, obtains preferable exposure intensity.Fly lens group 2 is poly- for receiving LED
The hot spot of the aggregation of radiant 1 simultaneously carries out optical integration distribution, forms uniform multi-point source；Cold Mirrors 3 receives fly lens group 2 and transmits
Multi-point source out is reflected to change the propagation angle of multi-point source by Cold Mirrors 3, realizes the steering of optical path direction；Work as ball
Face mirror 4 receives the multi-point source that Cold Mirrors 3 reflects, and forms uniform area light source by the reflection integral of spherical mirror 4, projects exposure
On station 5, exposure operation is realized.Traditional mercury lamp light source is replaced using the LED condensation light source of environmental protection and energy saving, and by special design
Optical frames absorb and conversion, obtain that temperature is low, uniformity is good with the consistent directional light exposure light source of parallel half-angle, be more suitable for soft
Property fine-line production.
Certainly, the above combination embodiment elaborates the present invention, only technical concept to illustrate the invention and
Feature, its object is to allow person skilled in the art to understand the contents of the present invention and to be implemented, therefore, it is all according to the present invention
The equivalent change or modification that Spirit Essence is done, should be covered by the scope of protection of the present invention.
Claims (9)
1.LED condensation light source, including LED condensation light source device main body (1), it is characterised in that: the LED condensation light source device main body
(1) there is front end mounting plate (11), driving plate (13) and shell (14), shell (14) provides front end mounting plate (11) and driving plate
(13) installation position is installed multiple LED lamp beads (12) on front end mounting plate (11), and LED lamp bead (12) is electrically connected driving plate
(13), the hot spot of condensation light source is assembled after multiple LED lamp beads (12) are lighted in design focus superposition.
2. LED condensation light source according to claim 1, it is characterised in that: the shell (14) is equipped with fan (16), wind
It fans (16) and is electrically connected driving plate (13), fan (16) gives exclusion LED lamp bead (12) and lights the heat generated when work.
3. LED condensation light source according to claim 1 or 2, it is characterised in that: form subregion inside the shell (14)
Upper and lower two groups are behave affectedly, and driving plate (13) is mounted on over-assemble chamber and connects power supply, front end installation by power connector (15)
Plate (11) is mounted on the following group and behave affectedly, and fan (16) is distributed in the periphery that shell (14) the following group is behave affectedly.
4. LED condensation light source according to claim 1, it is characterised in that: LED lamp bead on the front end mounting plate (11)
(12) quantity is 10-100, and all LED lamp beads (12) are distributed by multi-layer discs shape, and the LED lamp bead (12) for occupying the center of circle is hung down
Straight arrangement, and other LED lamp bead (12) relatively tilting angles.
5. using the exposure light source system of LED condensation light source, it is characterised in that: the exposure light source system has LED condensation light source
Device main body (1), fly lens group (2), Cold Mirrors (3) and spherical mirror (4), LED condensation light source device main body (1) are pacified with front end
Loading board (11), driving plate (13) and shell (14), shell (14) provide the installation position of front end mounting plate (11) and driving plate (13),
It is installed on front end mounting plate (11) multiple LED lamp beads (12), LED lamp bead (12) is electrically connected driving plate (13), multiple LED lamp beads
(12) hot spot of condensation light source is assembled after lighting in design focus superposition；The hot spot is distributed by fly lens group (2) integral,
Uniform multi-point source is formed, Cold Mirrors (3) absorbs the multi-point source of fly lens group (2) transmission, is reflected on spherical mirror (4), ball
Face mirror (4) absorbs multi-point source reflection integral and forms area source, is incident upon on following workbench (5).
6. the exposure light source system according to claim 5 using LED condensation light source, it is characterised in that: the LED optically focused
On the same line, fly lens group (2) is located at multiple for light source device main body (1), fly lens group (2) and Cold Mirrors (3) setting
After LED lamp bead (12) is lighted on the position of design focus superposition set.
7. the exposure light source system according to claim 5 using LED condensation light source, it is characterised in that: the shell
(14) fan (16) are equipped with, fan (16) is electrically connected driving plate (13), and fan (16) is given exclusion LED lamp bead (12) and lighted
The heat generated when work.
8. the exposure light source system according to claim 5 using LED condensation light source, it is characterised in that: the shell
(14) internal two groups up and down for forming subregion are behave affectedly, and driving plate (13) is mounted on over-assemble chamber and by power connector (15)
Power supply is connected, front end mounting plate (11) is mounted on the following group and behave affectedly, and fan (16) is distributed in the periphery that shell (14) the following group is behave affectedly.
9. the exposure light source system according to claim 5 using LED condensation light source, it is characterised in that: the front end peace
The quantity of LED lamp bead (12) is 10-100 in loading board (11), and all LED lamp beads (12) are distributed by multi-layer discs shape, occupies circle
The LED lamp bead (12) of the heart is arranged vertically, and other LED lamp bead (12) relatively tilting angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811016219.5A CN109062012A (en) | 2018-09-02 | 2018-09-02 | LED condensation light source and the exposure light source system for using LED condensation light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811016219.5A CN109062012A (en) | 2018-09-02 | 2018-09-02 | LED condensation light source and the exposure light source system for using LED condensation light source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109062012A true CN109062012A (en) | 2018-12-21 |
Family
ID=64759041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811016219.5A Pending CN109062012A (en) | 2018-09-02 | 2018-09-02 | LED condensation light source and the exposure light source system for using LED condensation light source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109062012A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113798205A (en) * | 2021-09-24 | 2021-12-17 | 深圳市华腾半导体设备有限公司 | Alignment detection device and chip sorting device with same |
| CN116224729A (en) * | 2023-05-08 | 2023-06-06 | 广东科视光学技术股份有限公司 | Adjustable device of mixed light source of photoetching machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102449552A (en) * | 2010-02-24 | 2012-05-09 | 恩斯克科技有限公司 | Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate |
| CN202581108U (en) * | 2012-06-05 | 2012-12-05 | 成都市锦华实用电器研究所有限公司 | Obstruction lamp capable of ejecting medium-light-intensity white flash in ring-shaped and 360-degree mode |
| CN104483813A (en) * | 2014-12-01 | 2015-04-01 | 东莞科视自动化科技有限公司 | Exposure machine light source transformation method and UVLED light source mechanism |
| CN208969425U (en) * | 2018-09-02 | 2019-06-11 | 东莞市友辉光电科技有限公司 | LED condensation light source and the exposure light source system for using LED condensation light source |
-
2018
- 2018-09-02 CN CN201811016219.5A patent/CN109062012A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102449552A (en) * | 2010-02-24 | 2012-05-09 | 恩斯克科技有限公司 | Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate |
| CN202581108U (en) * | 2012-06-05 | 2012-12-05 | 成都市锦华实用电器研究所有限公司 | Obstruction lamp capable of ejecting medium-light-intensity white flash in ring-shaped and 360-degree mode |
| CN104483813A (en) * | 2014-12-01 | 2015-04-01 | 东莞科视自动化科技有限公司 | Exposure machine light source transformation method and UVLED light source mechanism |
| CN208969425U (en) * | 2018-09-02 | 2019-06-11 | 东莞市友辉光电科技有限公司 | LED condensation light source and the exposure light source system for using LED condensation light source |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113798205A (en) * | 2021-09-24 | 2021-12-17 | 深圳市华腾半导体设备有限公司 | Alignment detection device and chip sorting device with same |
| CN116224729A (en) * | 2023-05-08 | 2023-06-06 | 广东科视光学技术股份有限公司 | Adjustable device of mixed light source of photoetching machine |
| CN116224729B (en) * | 2023-05-08 | 2023-07-04 | 广东科视光学技术股份有限公司 | Adjustable device of mixed light source of photoetching machine |
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