CN114035406A - Novel ultraviolet parallel light source device and implementation method - Google Patents

Novel ultraviolet parallel light source device and implementation method Download PDF

Info

Publication number
CN114035406A
CN114035406A CN202111274081.0A CN202111274081A CN114035406A CN 114035406 A CN114035406 A CN 114035406A CN 202111274081 A CN202111274081 A CN 202111274081A CN 114035406 A CN114035406 A CN 114035406A
Authority
CN
China
Prior art keywords
light source
ultraviolet
reflector
parabolic reflector
parabolic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111274081.0A
Other languages
Chinese (zh)
Inventor
董翊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing Berkeley New Materials Technology Co ltd
Original Assignee
Nanjing Berkeley New Materials Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Berkeley New Materials Technology Co ltd filed Critical Nanjing Berkeley New Materials Technology Co ltd
Priority to CN202111274081.0A priority Critical patent/CN114035406A/en
Publication of CN114035406A publication Critical patent/CN114035406A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/106Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264Arrangements for irradiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/7015Details of optical elements
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/702Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Liquid Crystal (AREA)

Abstract

The embodiment of the application provides a novel ultraviolet parallel light source device and an implementation method, which are used for an ultraviolet exposure machine and a 3D printer and comprise an ultraviolet light source, a parabolic reflector and a screen board, wherein the parabolic reflector is positioned under the screen board, the horizontal projection area of the parabolic reflector is superposed with the horizontal projection area of the screen board, the ultraviolet light source is superposed with the focus of the parabolic reflector, and at least one group of the ultraviolet light source and the parabolic reflector is arranged; the light emitted by the ultraviolet light source irradiates on the parabolic reflector, and the light is reflected by the parabolic reflector to become vertically upward parallel light which vertically irradiates on the screen panel. Make all light all be vertical irradiation exposure board or LCD screen in this application, the illuminance is even and do not have the stray light because of multiple lens causes, has satisfied the three requirement to ultraviolet source simultaneously, and the cost of reflector will be less than lens far away moreover.

Description

Novel ultraviolet parallel light source device and implementation method
Technical Field
The invention relates to the technical field of ultraviolet parallel light sources, in particular to a novel ultraviolet parallel light source device and an implementation method.
Background
The ultraviolet light source is a core component in photoetching and photocuring equipment, is widely applied to exposure machines, photocuring machines and 3D printers, and utilizes the principle that photosensitive glue, photosensitive ink and photosensitive resin can be denatured or cured under the irradiation of ultraviolet rays. The light source that adopts at present is ultraviolet laser, mercury lamp and ultraviolet LED, and large-scale industry 3D printer generally adopts ultraviolet laser, and exposure machine and small-size 3D printer adopt mercury lamp or ultraviolet LED, and is replacing traditional mercury lamp, especially on small-size 3D printer as energy-conserving green's ultraviolet LED gradually.
No matter the exposure machine or the 3D printer, in order to reach high resolution and high precision, there are three requirements to the ultraviolet ray irradiating to the exposure panel or the liquid crystal screen: firstly, vertical incidence, secondly intensity is even, thirdly there is not stray light, mainly adopts following mode at present: 1. in an exposure machine using mercury lamp tubes, mercury lamps are placed in a huge reflector and are placed on a panel to be exposed, the bottom of the panel is irradiated upwards, so that the illumination is approximately uniform, but the light emitted by the lamp tubes capable of emitting light in 360 degrees is not completely vertically irradiated on the panel, therefore, the general method is to filter the light by using a special glass panel, the special glass panel only allows approximately vertically incident light to pass through, and incident light at other angles is blocked, but a large part of light energy is lost, and the special glass panel is extremely expensive; 2. the ultraviolet LED is used as a light source in a small 3D printer, the LED is a point light source, and the point light source light cannot vertically and uniformly irradiate a liquid crystal screen with a certain area in a close range, so that two methods are adopted at present: firstly, a plurality of ultraviolet LEDs are uniformly arranged into an array with the same size as a liquid crystal screen and are arranged under the liquid crystal screen, a convex lens is arranged on each LED, light rays are changed into parallel light to be irradiated on the liquid crystal screen to form a light spot array, so that the vertical incidence of the light rays is ensured, but the seamless connection of each light spot is a big problem, a black slit is formed when the connection is not carried out, the light intensity of an overlapped area is doubled when the connection is not carried out, the light intensity of each LED is different, the brightness and darkness of the light spots are different, namely the vertical problem is solved, but the brightness is not uniform; secondly, a plurality of ultraviolet LED chips are gathered together to form a large LED (called COB), the large LED can be approximately regarded as a point light source, then a free-form surface lens is adopted to uniformly disperse light intensity on the whole LED screen, as long as the lens is smaller than the liquid crystal screen, light cannot vertically irradiate the whole liquid crystal screen, one lens is difficult to achieve uniform and vertical incidence, a plurality of lenses are adopted, and the size of the last lens is the same as that of the liquid crystal screen, even if the inherent edge aberration of the large-size optical lens cannot ensure that the incident light is vertical, namely, the uniformity problem is solved, but the verticality is poor, the sizes of the light source are enlarged by a plurality of lenses, a lot of stray light is generated, and the large-size 3D printer cannot adopt.
Therefore, none of the current methods can simultaneously satisfy the above three requirements, and the small 3D printer size and cost constraints do not allow the use of too many overly complex secondary optics. Therefore, these problems are currently consistent with those of the exposure machine and the small 3D printer, and it is difficult to improve the accuracy and resolution and to make the screen larger and more difficult.
Disclosure of Invention
In view of the above problems, embodiments of the present invention are proposed to provide a novel uv parallel light source apparatus and an implementation method that overcome or at least partially solve the above problems.
The embodiment of the invention discloses a novel ultraviolet parallel light source device, which is used for an ultraviolet exposure machine and a 3D printer and comprises an ultraviolet light source, a parabolic reflector and a screen board, wherein the parabolic reflector is positioned under the screen board, the horizontal projection area of the parabolic reflector is superposed with the horizontal projection area of the screen board, the ultraviolet light source is superposed with the focus of the parabolic reflector, and at least one group of the ultraviolet light source and the parabolic reflector is arranged;
the light emitted by the ultraviolet light source irradiates the parabolic reflector, and the light is reflected by the parabolic reflector to become vertically upward parallel light and vertically irradiates the screen board.
Preferably, the device further comprises a plane reflector, the focus of the ultraviolet light source and the focus of the parabolic reflector are symmetrical relative to the plane reflector, wherein at least one plane reflector is correspondingly arranged on each group of the ultraviolet light source and the parabolic reflector;
the light emitted by the ultraviolet light source is reflected by the plane reflector and then irradiates the parabolic reflector, and the light is reflected by the parabolic reflector and then becomes vertically upward parallel light which vertically irradiates the screen plate.
Preferably, the ultraviolet light source comprises a radiator, a lens barrel, a high-power ultraviolet COB light source, a condensing lens and a diaphragm arranged at a light outlet of the lens barrel;
the high-power ultraviolet COB light source and the condensing lens are sequentially arranged in the lens barrel along the light emergent direction of the lens barrel, and the high-power ultraviolet COB light source is positioned within one-time focal length of a main optical axis of the condensing lens; the high-power ultraviolet COB light source is formed by densely arranging a plurality of ultraviolet LED chips in an array manner;
the lens cone is attached to the radiator.
Preferably, the chip peak wavelength range of the high-power ultraviolet COB light source is 250 nm-405 nm, and the input electric power of the high-power ultraviolet COB light source is 10W-2000W.
Preferably, the parabolic reflector is made of metal or plastic, and the paraboloid of the parabolic reflector is plated with a mirror surface aluminum reflecting layer.
Preferably, the planar reflector is made of metal or plastic, and the surface of the planar reflector is plated with mirror aluminum.
A method for realizing a novel ultraviolet parallel light source device comprises the following steps;
the parabolic reflector is arranged right below the screen board; wherein a horizontal projection area of the parabolic mirror coincides with a horizontal projection area of the screen panel;
and moving the ultraviolet light source to enable the ultraviolet light source to coincide with the focus of the parabolic reflector, specifically, the ultraviolet light source emits light rays to the parabolic reflector, and the parabolic reflector reflects the light rays into parallel light which is vertically upward and vertically irradiates the screen board.
A method for realizing a novel ultraviolet parallel light source device comprises the following steps;
the parabolic reflector is arranged right below the screen board; wherein a horizontal projection area of the parabolic mirror coincides with a horizontal projection area of the screen panel;
the plane reflector is arranged on one side of the screen board, so that light rays reflected by the plane reflector irradiate the paraboloid reflector;
moving the ultraviolet light source to enable a virtual image of the ultraviolet light source in the plane reflector to coincide with the focus of the parabolic reflector; specifically, the ultraviolet light source emits light to the planar reflector, the planar reflector reflects the light and irradiates the parabolic reflector, and the parabolic reflector reflects the light into vertically upward parallel light and vertically irradiates the screen plate.
Preferably, the steps further comprise:
determining the focus position of the parabolic reflector, specifically, determining the focus position of the parabolic reflector according to the virtual image position of the ultraviolet light source in the planar reflector;
determining the shape of the parabolic mirror comprises establishing an xyz three-dimensional vertical coordinate system based on the focal position, the origin of the coordinate system being located at the lowest point of the parabolic mirror, and determining the coordinates of the focal point F as (0, m, h) and the coordinates of the vertex of the parabolic mirror as (0, m, z)0) (ii) a Wherein z is0Is an unknown number;
and determining the vertex coordinate value of the paraboloid according to a paraboloid calculation equation, and determining the shape of the paraboloid reflector according to the coordinate value.
Preferably, the step of providing the planar mirror includes:
determining the inclination angle of the plane reflector, specifically, determining the center of the light path according to the positions of the ultraviolet light source and the plane reflector;
forming a right-angled triangle according to the positions of the light center, the parabolic reflector and the ultraviolet light source; the included angle formed by the right-angled triangle at the plane reflector is twice of the inclination angle;
and determining the inclination angle of the plane reflector according to the trigonometric function and the length of the three sides of the right triangle.
The present application specifically includes the following advantages:
in an embodiment of the application, the parabolic reflector is positioned right below the screen panel, a horizontal projection area of the parabolic reflector is overlapped with a horizontal projection area of the screen panel, the ultraviolet light source is overlapped with a focus of the parabolic reflector, and at least one group of the ultraviolet light source and the parabolic reflector is arranged; the light emitted by the ultraviolet light source irradiates the parabolic reflector, and the light is reflected by the parabolic reflector to become vertically upward parallel light and vertically irradiates the screen board. Make all light all be vertical irradiation exposure board or LCD screen in this application, the illuminance is even and do not have the stray light because of multiple lens causes, has satisfied the three requirement to ultraviolet source simultaneously, and the cost of reflector will be less than lens far away moreover.
Drawings
In order to more clearly illustrate the technical solutions of the present application, the drawings needed to be used in the description of the present application will be briefly introduced below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive labor.
FIG. 1 is a schematic view of an UV collimated light source of a parabolic reflector of a novel UV collimated light source device according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a novel ultraviolet parallel light source device according to an embodiment of the present invention;
FIG. 3 is a diagram of an arrangement and light path of the UV parallel light source of the novel UV parallel light source device according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a novel UV parallel light source device for use in a compact 3D printer according to an embodiment of the present invention;
FIG. 5 is a cross-sectional view of a novel UV parallel light source device for use in a compact 3D printer according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a coordinate system established by a parabolic reflector of a novel UV parallel light source device according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a novel ultraviolet parallel light source device for determining an angle of a plane mirror according to an embodiment of the present invention.
1. An ultraviolet light source; 2. a parabolic reflector; 3. a screen panel; 4. a planar mirror; 5. a heat sink; 6. a housing; 7. a photosensitive resin pool; 8. lifting a pull rod; 11. a diaphragm; 12. a condenser lens; 13. a lens barrel; 14. and an LED chip.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, the present application is described in further detail with reference to the accompanying drawings and the detailed description. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The embodiment of the application discloses a novel ultraviolet parallel light source device, which is used for an ultraviolet exposure machine and a 3D printer and comprises an ultraviolet light source 1, a parabolic reflector 2 and a screen plate 3, wherein the parabolic reflector 2 is positioned under the screen plate 3, the horizontal projection area of the parabolic reflector 2 is superposed with the horizontal projection area of the screen plate, the ultraviolet light source 1 is superposed with the focus of the parabolic reflector 2, and at least one group of the ultraviolet light source 1 and the parabolic reflector 2 is arranged; the light emitted by the ultraviolet light source 1 irradiates the parabolic reflector 2, and the light is reflected by the parabolic reflector 2 to become vertically upward parallel light and vertically irradiates the screen panel 3.
Make all light all be the vertical irradiation screen panel 3 (on exposure board or the LCD screen) in this application, the illuminance is even and do not have the stray light because of multiple lens causes, has satisfied the three requirement to ultraviolet source simultaneously, and the cost of reflector will be less than lens far away moreover, has reduced the cost of device.
Next, the novel ultraviolet parallel light source device in the present exemplary embodiment will be further described.
In an embodiment of the present application, referring to fig. 1-2, a novel ultraviolet parallel light source device according to an embodiment of the present invention is shown, which may specifically include the following structure: the screen panel comprises an ultraviolet light source 1, a parabolic reflector 2 and a screen panel 3, wherein the parabolic reflector 2 is positioned right below the screen panel 3, a horizontal projection area of the parabolic reflector 2 is overlapped with a horizontal projection area of the screen panel, the ultraviolet light source 1 is overlapped with a focus of the parabolic reflector 2, and at least one group of the ultraviolet light source 1 and the parabolic reflector 2 is arranged; the light emitted by the ultraviolet light source 1 irradiates the parabolic reflector 2, and the light is reflected by the parabolic reflector 2 to become vertically upward parallel light and vertically irradiates the screen panel 3.
Make all light all be the vertical irradiation screen panel 3 (on exposure board or the LCD screen) in this application, the illuminance is even and do not have the stray light because of multiple lens causes, has satisfied the three requirement to ultraviolet source simultaneously, and the cost of reflector will be less than lens far away moreover, has reduced the cost of device.
In an embodiment of the present application, a novel ultraviolet parallel light source device further includes a planar reflective mirror 4, the focal points of the ultraviolet light source 1 and the parabolic reflective mirror 2 are symmetrical with respect to the planar reflective mirror 4, wherein each group of the ultraviolet light source 1 and the parabolic reflective mirror 2 is provided with at least one planar reflective mirror 4 correspondingly; the light emitted by the ultraviolet light source 1 is reflected by the plane reflector 4 and then irradiates the parabolic reflector 2, and the light is reflected by the parabolic reflector 2 and then becomes vertically upward parallel light and vertically irradiates the screen panel 3.
In an embodiment of the present application, referring to fig. 3 to 5, the ultraviolet light source 1 includes a heat sink 5, a lens barrel 13, a high-power ultraviolet COB light source, a condensing lens 12, and a diaphragm 11 disposed at a light exit of the lens barrel 13; the high-power ultraviolet COB light source and the condensing lens are sequentially arranged in the lens barrel along the light emergent direction of the lens barrel, and the high-power ultraviolet COB light source is positioned within one-time focal length of a main optical axis of the condensing lens; the high-power ultraviolet COB light source is formed by arraying and densely arranging a plurality of ultraviolet LED chips 14; the lens barrel 13 is attached to the heat sink 5.
As an example, the example on a small 3D printer (not limited to this) illustrates the specific structure and implementation of the application; the shell 6 is the shell 6 of whole light source box, for plastics or aluminum alloy material, and the screen panel 3 in the middle of the upper surface of shell 1 is the LCD screen, and the top of LCD screen is equipped with photosensitive resin pond 7 as the container of loading photosensitive resin, and this is the required material of 3D printing, has a lifting rod 8 in the container, and the part that will print layer upon layer constantly promotes. The inside of the shell 6 is the whole ultraviolet parallel light source device, two sets are symmetrically arranged left and right, each set is composed of a plane reflector 4, an ultraviolet light source 1 and a paraboloid reflector 2, wherein the ultraviolet light source 1 part comprises a high-power ultraviolet COB light source formed by arraying and densely arranging a plurality of ultraviolet LED chips 14, a condensing lens 12, a lens cone 13, a diaphragm 11 and a radiator 5.
In fig. 3-5, the optical path diagram of the left ultraviolet light source 1 is marked, and the light from the ultraviolet light source 1 is converged by a condenser lens 12 to a certain angle and then emitted to the right plane mirror 4, wherein, there is a diaphragm 11 at the exit of the lens barrel 13 to limit the light to only irradiate the plane mirror 4. The light is reflected by the plane reflector 4 and then irradiates the parabolic reflector 2 at the bottom of the right side, and all the reflected light becomes parallel light and vertically irradiates the right half part of the screen panel 3 (liquid crystal screen) at the upper part. Similarly, the light emitted from the right-side uv light source 1 is finally vertically irradiated to the left half of the liquid crystal panel.
In an embodiment of the present application, a chip peak wavelength range of the high-power ultraviolet COB light source is 250nm to 405nm, and an input electric power of the high-power ultraviolet COB light source is 10W to 2000W.
As an example, the size of the liquid crystal screen is 135mmx84mm, two sets of ultraviolet parallel light source devices respectively irradiate the left half part and the right half part, the area of each half part is 67.5mmx84mm, and the distance from the liquid crystal screen to the bottom of the lamp box is 110 mm; each high-power ultraviolet COB light source comprises COB light sources with 9 ultraviolet LED chips 14 densely arranged in a 3x3 array, the size of the chip is 55mil, the total power of the 9 chips is 30W, and the peak wavelength is 395 nm; in this example, the converging lens 12 has a diameter of 30mm and a focal length of 30mm, and the high-power ultraviolet COB light source is located within one focal length of the converging lens 12.
In a specific implementation, the ultraviolet light source 1 is tightly fixed on the radiator 5, the radiator 5 is an aluminum section with fins, and a fan cools and radiates heat; the fan on the radiator 5 accelerates the heat dissipation, and particularly when the power of the ultraviolet light source 1 is high, the fan cools the heat dissipation to effectively ensure the work of the equipment;
the radiator 5 can also be a liquid-cooled circulating radiator 5, which further improves the heat dissipation efficiency.
In an embodiment of the present application, the parabolic reflector 2 is made of metal or plastic, and a mirror aluminum reflective layer is plated on a parabolic surface of the parabolic reflector.
In one embodiment, as shown in fig. 4-5, the dotted line in the first drawing indicates the equivalent light source position, which is also the focus of the paraboloid, and the shape of the paraboloid can be calculated according to the focus position and the distance and included angle between the focus position and the paraboloid, and the paraboloid reflector can be manufactured by processing; the parabolic reflectors 2 are made of stainless steel through CNC processing and mirror surface aluminum plating, or are manufactured through mold injection molding, mirror surface aluminum plating is carried out on the parabolic reflectors and fixed at the bottom of the lamp box of the shell 6, the vertical projection area of each parabolic reflector 2 is the same as one half of the screen plate 3 (liquid crystal screen), and when the two parabolic reflectors 2 are placed, the vertical projection of the two parabolic reflectors completely coincides with the projection of the whole liquid crystal screen at the bottom of the lamp box, so that all reflected light of the two parabolic reflectors 2 is vertically irradiated on the whole liquid crystal screen; in this example, it was determined that: the error of the vertical light irradiated on the liquid crystal screen is less than 3 degrees, and the uniformity of the illumination is more than 95 percent.
In an embodiment of the present application, the planar reflective mirror 4 is made of metal or plastic, and the surface of the planar reflective mirror is plated with mirror aluminum.
In a specific embodiment, the two plane reflective mirrors 4 are provided, and the two plane reflective mirrors 4 are plastic plates with mirror-surface-plated aluminum, and are respectively fixed at the upper left corner and the upper right corner, and the angles are adjusted so that the reflected light irradiates the whole parabolic mirror 2 at the same side.
For the device embodiment, since it is basically similar to the method embodiment, the description is simple, and for the relevant points, refer to the partial description of the method embodiment.
The embodiment of the application discloses a method for realizing a novel ultraviolet parallel light source device, which comprises the following steps:
the parabolic reflector 2 is arranged right below the screen plate 3; wherein the horizontal projection area of the parabolic mirror 2 coincides with the horizontal projection area of the screen panel 3;
moving the ultraviolet light source 1 to enable the ultraviolet light source 1 to coincide with the focus of the parabolic reflector 2; specifically, the ultraviolet light source 1 emits light to the parabolic reflector 2, and the parabolic reflector 2 reflects the light as parallel light vertically upward to vertically irradiate the screen panel 3.
In a specific embodiment, a method for implementing a novel ultraviolet parallel light source device is disclosed, which comprises the following steps:
the parabolic reflector 2 is arranged right below the screen board; wherein the horizontal projection area of the parabolic mirror 2 coincides with the horizontal projection area of the screen panel 3;
the plane reflector 4 is arranged at one side of the screen board 3, so that the light reflected by the plane reflector 4 irradiates the paraboloid reflector 2;
moving the ultraviolet light source 1 to enable a virtual image of the ultraviolet light source 1 in the plane reflector 4 to coincide with the focus of the paraboloid reflector 2; specifically, the ultraviolet light source 1 emits light to the planar reflector 4, the planar reflector 4 reflects the light and irradiates the parabolic reflector 2, and the parabolic reflector 2 reflects the light as parallel light which is vertically upward and vertically irradiates the screen panel 3.
As an example, the screen panel 3 may be an exposure panel or a liquid crystal screen, a parabolic reflector 2 having the same area as the horizontal projection area of the exposure panel or the liquid crystal screen is placed right below the exposure panel or the liquid crystal screen, the equivalent light source position of the ultraviolet light source 1 is located at the focus of the paraboloid of the parabolic reflector 2, and the parabolic reflector 2 is irradiated to obtain parallel reflected light, so that the reflected light can be completely vertically irradiated onto the exposure panel or the liquid crystal screen; one or more plane reflectors 4 are used for prolonging the optical path from the light source to the parabolic reflector 2, so that the field angle of the light source to a target is reduced, and the uniformity of illumination is improved; the converging lens 12 is used for converging light rays emitted by the high-power ultraviolet light source 1 consisting of the ultraviolet LED chips 14 into light beams with a certain divergence angle, and the light beams are reflected to the whole surface of the parabolic reflector 2 through the planar reflector 4, so that the light loss is reduced to the maximum extent. The diaphragm is used for preventing ultraviolet LED light rays from directly irradiating an exposure plate or a liquid crystal screen without being reflected, and stray light is eliminated;
when an exposure plate or a liquid crystal screen with a larger area is used as the screen plate 3, two or more paraboloidal reflectors 2 are spliced and respectively correspond to the corresponding independent ultraviolet light source 1 and the plane reflector 4, a larger irradiation surface is divided into two or more irradiation surfaces, the field angle of light of the light source is reduced, the power and the size of the single ultraviolet light source 1 are reduced, and therefore the uniform illumination and the stable intensity are ensured.
Compared with the prior art, the device and the method provided by the application enable all light rays to vertically irradiate the exposure plate or the liquid crystal screen, the illumination is uniform, stray light caused by multiple lenses is avoided, three requirements on an ultraviolet light source are met, and the cost of the reflector is far lower than that of the lenses.
Referring to fig. 6, in an embodiment of the present application, the steps further include:
determining the focus position of the parabolic reflector 2, specifically, determining the focus of the parabolic reflector according to the virtual image position of the ultraviolet light source 1 in the planar reflector 4;
determining the shape of the parabolic mirror 2 comprises establishing an xyz three-dimensional vertical coordinate system, depending on the focal position, the coordinate systemThe origin is located at the lowest point of the parabolic reflector, and coordinates of the focal point F and the vertex of the parabolic surface are determined as (0, m, h, 0, m, z)0) (ii) a Wherein z is0Is an unknown number;
according to the paraboloid calculation equation, the vertex coordinate value of the paraboloid is determined, and the shape of the paraboloid reflector 2, namely the paraboloid equation, is determined according to the coordinate value.
Referring to fig. 7, in an embodiment of the present application, the step of disposing the planar mirror 4 includes:
determining the inclination angle of the plane reflective mirror 4, specifically, determining the center of the light path according to the positions of the ultraviolet light source 1 and the plane reflective mirror 4; forming a right-angled triangle according to the positions of the light center, the parabolic reflector 2 and the ultraviolet light source 1; wherein the included angle formed by the right triangle at the plane mirror 4 is twice of the inclination angle;
and determining the inclination angle of the plane reflector according to the trigonometric function and the length of the three sides of the right triangle.
In one embodiment, referring to fig. 6-7, the parabolic mirror 2 position is determined; in order to vertically irradiate the parallel reflected light of the parabolic mirror 2 onto the screen panel (LCD screen or exposure panel), the parabolic mirror 2 should be positioned on the bottom plate directly below the LED screen or exposure panel with the reflected light directed vertically upward. The parallel light cannot be diffused or contracted due to the increase of the optical path, so that the parabolic reflector 2 is placed on the bottom plate which is as far as possible away from the LED screen or the exposure plate right above so as to reserve more space and longer optical path for the plane reflector and the ultraviolet LED light source;
the position of the planar mirror 2 is determined. As shown in fig. 7, point B is the central point of the plane mirror 4, the fixing shaft passes through point B perpendicular to the paper surface, the plane mirror 4 can rotate around the fixing shaft at a certain angle to adjust the reflection angle, the fixing position of the fixing shaft is as close as possible to the top plate of the light box of the housing 6, but it is ensured that the plane mirror 4 does not block the parallel light and does not touch the top plate, and thus the position of the plane mirror 4 is determined;
the tilt angle of the planar mirror 2 is determined. And a vertical line from the point B to the lamp box bottom plate is intersected with the point D, and the point A is the central point of the bottom of the parabolic reflector 2. The central ray of the ultraviolet light source 1 is irradiated to the point B of the plane mirror 4 along the straight line BD, and the reflected light is along the straight line AB. Because the positions of A, B and D are known, the side length of the right triangle ABD can be calculated, the value of the angle a can also be calculated according to the trigonometric function tan (a) ═ AD/BD, and the included angle between the plane mirror 1 and the horizontal plane is a/2;
determining the position of an ultraviolet light source 1; the center of the ultraviolet light source 1 is positioned on a straight line BD, the direction is vertical upwards, and the ultraviolet light source 1 is communicated with the radiator 5 and fixed on a bottom plate of the shell 6 together, so that the position of the ultraviolet light source 1 is also determined;
determining the position of a focal point of the paraboloid; since the uv light source 1 has a converging lens 12, it can be calculated that the equivalent light source is located at point C on line segment BD for the flat mirror 4. For the parabolic reflector 2, the equivalent light source is located at point F on the extension line of the line segment AB, and BF is BC, and point F is also the focus of the parabolic surface, so that the focus position is determined;
determining the shape of a paraboloid; to describe the shape of the paraboloid, an equation is needed, as shown in fig. 6, to establish an xyz three-dimensional vertical coordinate system, where the origin of the coordinate is located at the lowest point in the right center of the paraboloid, the z-axis is along the direction of parallel reflected light, the symmetry axis of the paraboloid is also parallel to the z-axis, and the opening direction is upward. Since the position of the focal point F has been determined, in this coordinate system the coordinates (0, m, h) of the point F are also known, the vertex coordinates of the paraboloid being (0, m, z)0) Wherein z is0Is an unknown number. This allows to write the general equation for a paraboloid: x is the number of2+(y-m)2=2p(z-z0) Wherein p and z0Is unknown, but p and z can be calculated from known conditions0To determine the parabolic equation, the process is as follows:
since the paraboloid passes through the origin of coordinates (0, 0, 0), the coordinate values are put into the equation to obtain: 02+(0-m)2=2p(0-z0) Namely: m is2=-2pz0
According to the formula of the focal length of the paraboloid, the method comprises the following steps:p/2=h-z0i.e. p ═ 2 (h-z)0) And, bring into: m is2=-2pz0Obtaining: m is2=-4(h-z0)z0Arranged to give a value relating to z0A one-dimensional quadratic equation of (a): 4z0 2-4hz0-m2Solve this equation and take into account z0Negative values give: z is a radical of0=[h-(h2+m2)1/2]2, carried over to the equation p/2 h-z0Then, the following can be obtained: p ═ h + (h)2+m2)1/2Thus far, the equation for the paraboloid has been determined, and the coordinates and thus the shape of any point on the paraboloid can be determined.
In one embodiment of the present application, as shown in fig. 5, the parabolic reflector 2 is placed on the bottom plate directly below the liquid crystal screen; determining the position of the plane mirror 4, i.e. determining the center point B of the plane mirror 4, so that it can rotate around the axis passing through point B and perpendicular to the plane of fig. 5; determining the position and the angle of the ultraviolet light source 1, wherein the ultraviolet light source 1 and the radiator are installed at the lower left corner, the central light ray (optical axis) is aligned to the point B, the angle and the position are determined, and the point C is also an equivalent light source point for the plane reflector 4; adjusting the angle of the plane mirror 4 to make the reflected light of the incident light CB aim at the central point A at the bottom of the parabolic mirror 2, and because the positions of the three points A, B, C are determined, the side length of the triangle ABC can be calculated, the angle a can be calculated, and the deflection angle of the plane mirror 4 can be calculated; for the parabolic reflector 2, as in the previous example, the equivalent light source point is at point F on the extension line of the line segment DB, and BF equals BC, and point F is also the focus of the paraboloid, so that the focus position is determined; finally, the determination process of the paraboloid equation is exactly the same as the previous example.
In an embodiment of the present application, a point B is determined first; determining the position of the ultraviolet light source 1, and aligning the central line (optical axis) of emergent light thereof with a point B, so that the angle is determined; adjusting the angle of the plane reflector to enable the reflected light of the point B to be aligned to the point C at the center of the bottom of the parabolic reflector on the bottom plate, so that three vertexes of the triangle ABC are determined; the remaining steps are the same as in the above example.
All the embodiments in the present specification are described in a progressive manner, the embodiments are mainly described in a manner different from other embodiments, and similar parts between the embodiments may be referred to each other.
While preferred embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the embodiments of the invention.
Finally, it should also be noted that in this document, relational terms such as parabolic, second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or terminal apparatus that comprises the element.
The novel ultraviolet parallel light source device and the implementation method provided by the invention are described in detail, a specific example is applied in the text to explain the principle and the implementation mode of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims (10)

1. A novel ultraviolet parallel light source device is used for an ultraviolet exposure machine and a 3D printer and is characterized by comprising an ultraviolet light source, a parabolic reflector and a screen board, wherein the parabolic reflector is positioned under the screen board, the horizontal projection area of the parabolic reflector is superposed with the horizontal projection area of the screen board, the ultraviolet light source is superposed with the focus of the parabolic reflector, and at least one group of the ultraviolet light source and the parabolic reflector is arranged;
the light emitted by the ultraviolet light source irradiates the parabolic reflector, and the light is reflected by the parabolic reflector to become vertically upward parallel light and vertically irradiates the screen board.
2. The novel ultraviolet parallel light source device according to claim 1, further comprising a plane reflector, wherein the focus of the ultraviolet light source and the focus of the parabolic reflector are symmetrical relative to the plane reflector, wherein at least one plane reflector is arranged corresponding to each group of the ultraviolet light source and the parabolic reflector;
the light emitted by the ultraviolet light source is reflected by the plane reflector and then irradiates the parabolic reflector, and the light is reflected by the parabolic reflector and then becomes vertically upward parallel light which vertically irradiates the screen plate.
3. The novel ultraviolet parallel light source device according to claim 1 or 2, wherein the ultraviolet light source comprises a radiator, a lens barrel, a high-power ultraviolet COB light source, a condensing lens and a diaphragm arranged at a light outlet of the lens barrel;
the high-power ultraviolet COB light source and the condensing lens are sequentially arranged in the lens barrel along the light emergent direction of the lens barrel, and the high-power ultraviolet COB light source is positioned within one-time focal length of a main optical axis of the condensing lens; the high-power ultraviolet COB light source is formed by densely arranging a plurality of ultraviolet LED chips in an array manner;
the lens cone is attached to the radiator.
4. The novel ultraviolet parallel light source device as claimed in claim 3, wherein the chip peak wavelength range of the high-power ultraviolet COB light source is 250 nm-405 nm, and the input electric power of the high-power ultraviolet COB light source is 10W-2000W.
5. The novel ultraviolet parallel light source device as claimed in claim 3, wherein the parabolic reflector is made of metal or plastic, and the paraboloid of the parabolic reflector is plated with a mirror surface aluminum reflection layer.
6. The novel ultraviolet parallel light source device as claimed in claim 3, wherein the planar reflector is made of metal or plastic and is coated with mirror aluminum.
7. The method for realizing the novel ultraviolet parallel light source device as claimed in claims 1-6, characterized by comprising the following steps:
the parabolic reflector is arranged right below the screen board; wherein a horizontal projection area of the parabolic mirror coincides with a horizontal projection area of the screen panel;
moving the ultraviolet light source to enable the ultraviolet light source to be superposed with the focus of the parabolic reflector; specifically, the ultraviolet light source emits light to the parabolic reflector, and the parabolic reflector reflects the light into parallel light which is vertically upward and vertically irradiates the screen panel.
8. The method for realizing the novel ultraviolet parallel light source device as claimed in claims 1-6, characterized by comprising the following steps:
the parabolic reflector is arranged right below the screen board; wherein a horizontal projection area of the parabolic mirror coincides with a horizontal projection area of the screen panel;
the plane reflector is arranged on one side of the screen board, so that light rays reflected by the plane reflector irradiate the paraboloid reflector;
moving the ultraviolet light source to enable a virtual image of the ultraviolet light source in the plane reflector to coincide with the focus of the parabolic reflector; specifically, the ultraviolet light source emits light to the planar reflector, the planar reflector reflects the light and irradiates the parabolic reflector, and the parabolic reflector reflects the light into vertically upward parallel light and vertically irradiates the screen plate.
9. The method of claim 8, wherein the steps further comprise:
determining the focus position of the parabolic reflector, specifically, determining the focus position of the parabolic reflector according to the virtual image position of the ultraviolet light source in the planar reflector;
determining the shape of the parabolic mirror comprises establishing an xyz three-dimensional vertical coordinate system based on the focal position, the origin of the coordinate system being located at the lowest point of the parabolic mirror, and determining the coordinates of the focal point F as (0, m, h) and the coordinates of the vertex of the parabolic mirror as (0, m, z)0) (ii) a Wherein z is0Is an unknown number;
and determining the vertex coordinate value of the paraboloid according to a paraboloid calculation equation, and determining the shape of the paraboloid reflector according to the coordinate value.
10. The method of claim 8, wherein the step of providing a planar mirror comprises:
determining the inclination angle of the plane reflector, specifically, determining the center of the light path according to the positions of the ultraviolet light source and the plane reflector;
forming a right-angled triangle according to the positions of the light center, the parabolic reflector and the ultraviolet light source; the included angle formed by the right-angled triangle at the plane reflector is twice of the inclination angle;
and determining the inclination angle of the plane reflector according to the trigonometric function and the length of the three sides of the right triangle.
CN202111274081.0A 2021-10-29 2021-10-29 Novel ultraviolet parallel light source device and implementation method Pending CN114035406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111274081.0A CN114035406A (en) 2021-10-29 2021-10-29 Novel ultraviolet parallel light source device and implementation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111274081.0A CN114035406A (en) 2021-10-29 2021-10-29 Novel ultraviolet parallel light source device and implementation method

Publications (1)

Publication Number Publication Date
CN114035406A true CN114035406A (en) 2022-02-11

Family

ID=80136005

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111274081.0A Pending CN114035406A (en) 2021-10-29 2021-10-29 Novel ultraviolet parallel light source device and implementation method

Country Status (1)

Country Link
CN (1) CN114035406A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115877674A (en) * 2023-02-22 2023-03-31 广东科视光学技术股份有限公司 LED optical system of DI lithography machine

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101063518A (en) * 2006-04-29 2007-10-31 财团法人工业技术研究院 Reflection type light projector device
CN102759014A (en) * 2011-04-28 2012-10-31 夏普株式会社 Light projection unit and light projection device
CN203849555U (en) * 2014-05-26 2014-09-24 北京京东方显示技术有限公司 Exposure machine
CN105240740A (en) * 2015-10-12 2016-01-13 国网天津市电力公司 Parallel light source
CN105711088A (en) * 2014-12-02 2016-06-29 北京十维科技有限责任公司 Light-cured 3D printer
CN106907583A (en) * 2017-03-22 2017-06-30 深圳市奇普仕科技有限公司 A kind of new 3D silk-screen light sources based on ultraviolet LED
CN108656531A (en) * 2018-07-30 2018-10-16 中南大学 Large-size micro-nano machining and additive manufacturing equipment
CN109633946A (en) * 2019-01-31 2019-04-16 上海天马微电子有限公司 Display device, manufacturing method thereof and 3D printing system
CN111158221A (en) * 2020-03-11 2020-05-15 东莞市中誉光电科技有限公司 LED light source exposure system and exposure machine
CN112506009A (en) * 2020-12-22 2021-03-16 厦门实锐科技股份有限公司 Ultraviolet LED parallel light optical device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101063518A (en) * 2006-04-29 2007-10-31 财团法人工业技术研究院 Reflection type light projector device
CN102759014A (en) * 2011-04-28 2012-10-31 夏普株式会社 Light projection unit and light projection device
CN203849555U (en) * 2014-05-26 2014-09-24 北京京东方显示技术有限公司 Exposure machine
CN105711088A (en) * 2014-12-02 2016-06-29 北京十维科技有限责任公司 Light-cured 3D printer
CN105240740A (en) * 2015-10-12 2016-01-13 国网天津市电力公司 Parallel light source
CN106907583A (en) * 2017-03-22 2017-06-30 深圳市奇普仕科技有限公司 A kind of new 3D silk-screen light sources based on ultraviolet LED
CN108656531A (en) * 2018-07-30 2018-10-16 中南大学 Large-size micro-nano machining and additive manufacturing equipment
CN109633946A (en) * 2019-01-31 2019-04-16 上海天马微电子有限公司 Display device, manufacturing method thereof and 3D printing system
CN111158221A (en) * 2020-03-11 2020-05-15 东莞市中誉光电科技有限公司 LED light source exposure system and exposure machine
CN112506009A (en) * 2020-12-22 2021-03-16 厦门实锐科技股份有限公司 Ultraviolet LED parallel light optical device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115877674A (en) * 2023-02-22 2023-03-31 广东科视光学技术股份有限公司 LED optical system of DI lithography machine

Similar Documents

Publication Publication Date Title
JP6474918B2 (en) Light guiding means and light source device
JP2008288215A (en) Optical system for fresnel lens light, especially for spotlight or floodlight
JPS62178904A (en) Laser-beam irradiator
CN112654492B (en) Three-dimensional printing equipment
JP7244480B2 (en) Ultra Wide Light-Emitting Diode (LED) Lenses for Thin Direct Backlights
CN111158221B (en) LED light source exposure system and exposure machine
CN217098924U (en) Combined matrix optical lens's projection arrangement and 3D printer
CN114035406A (en) Novel ultraviolet parallel light source device and implementation method
CN100578350C (en) Projection display apparatus
US5010465A (en) Optical lighting system
CN211786584U (en) LED light source exposure system and exposure machine
US7177078B2 (en) Projection type display apparatus
CN111399347A (en) Illumination area continuously adjustable uniform illumination system
CN114321833A (en) Car lamp lighting method and system and car lamp
CN221292277U (en) Photo-curing three-dimensional printing device
CN214278635U (en) Exposure lens and exposure device
CN111954386A (en) LD multispectral exposure method and system for solder mask line integral exposure
JP2014203604A (en) Lighting device
CN109188871B (en) Projection type light source device
CN221476177U (en) 3D prints illumination device and 3D printer
US11931960B2 (en) 3D printer assembly and illumination module thereof
CN221485783U (en) Lens assembly and projection system
CN218003850U (en) Light source device and scanning imaging equipment
CN216696836U (en) Laser uniform illumination system and light guide pipe
CN217196980U (en) Projection device with double convex matrix optical lenses and 3D printer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20220211

RJ01 Rejection of invention patent application after publication