CN111399166B - 预调整设备、预调整方法及曝光设备组装方法 - Google Patents
预调整设备、预调整方法及曝光设备组装方法 Download PDFInfo
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- CN111399166B CN111399166B CN202010502706.3A CN202010502706A CN111399166B CN 111399166 B CN111399166 B CN 111399166B CN 202010502706 A CN202010502706 A CN 202010502706A CN 111399166 B CN111399166 B CN 111399166B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification
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- Optics & Photonics (AREA)
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
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Citations (11)
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JP2006284890A (ja) * | 2005-03-31 | 2006-10-19 | Fuji Photo Film Co Ltd | アライメントセンサの位置校正方法、基準パターン校正方法、露光位置補正方法、校正用パターン及びアライメント装置 |
US20110149297A1 (en) * | 2009-12-22 | 2011-06-23 | Samsung Electronics Co., Ltd. | Maskless exposure apparatus and multi-head alignment method thereof |
CN202649580U (zh) * | 2012-05-31 | 2013-01-02 | 合肥芯硕半导体有限公司 | 一种用于直写式光刻机的可调倍率镜头 |
CN104749739A (zh) * | 2015-04-08 | 2015-07-01 | 浙江舜宇光学有限公司 | 一种阵列式镜头的组装方法 |
CN104977811A (zh) * | 2014-04-11 | 2015-10-14 | 优志旺电机株式会社 | 曝光装置及其固定方法 |
CN106066581A (zh) * | 2016-08-02 | 2016-11-02 | 无锡影速半导体科技有限公司 | 一种双台面直写式曝光机的曝光系统和曝光方法 |
CN205910400U (zh) * | 2016-07-22 | 2017-01-25 | 合肥芯碁微电子装备有限公司 | 一种用于镜筒调焦的微调装置 |
CN106462049A (zh) * | 2014-05-08 | 2017-02-22 | 以色列商奥宝科技股份有限公司 | 直接成像系统的校正 |
CN106918889A (zh) * | 2015-12-25 | 2017-07-04 | 吉佳科技股份有限公司 | 摄像头组校正方法 |
CN109270804A (zh) * | 2018-11-14 | 2019-01-25 | 江苏友迪激光科技有限公司 | 倾斜直写曝光机镜头倍率以及偏转角度的标定调整方法 |
CN209433438U (zh) * | 2018-12-28 | 2019-09-24 | 苏州源卓光电科技有限公司 | 一种用于直写式光刻机的曝光镜头的标定装置 |
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2020
- 2020-06-05 CN CN202010502706.3A patent/CN111399166B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006284890A (ja) * | 2005-03-31 | 2006-10-19 | Fuji Photo Film Co Ltd | アライメントセンサの位置校正方法、基準パターン校正方法、露光位置補正方法、校正用パターン及びアライメント装置 |
US20110149297A1 (en) * | 2009-12-22 | 2011-06-23 | Samsung Electronics Co., Ltd. | Maskless exposure apparatus and multi-head alignment method thereof |
CN202649580U (zh) * | 2012-05-31 | 2013-01-02 | 合肥芯硕半导体有限公司 | 一种用于直写式光刻机的可调倍率镜头 |
CN104977811A (zh) * | 2014-04-11 | 2015-10-14 | 优志旺电机株式会社 | 曝光装置及其固定方法 |
CN106462049A (zh) * | 2014-05-08 | 2017-02-22 | 以色列商奥宝科技股份有限公司 | 直接成像系统的校正 |
CN104749739A (zh) * | 2015-04-08 | 2015-07-01 | 浙江舜宇光学有限公司 | 一种阵列式镜头的组装方法 |
CN106918889A (zh) * | 2015-12-25 | 2017-07-04 | 吉佳科技股份有限公司 | 摄像头组校正方法 |
CN205910400U (zh) * | 2016-07-22 | 2017-01-25 | 合肥芯碁微电子装备有限公司 | 一种用于镜筒调焦的微调装置 |
CN106066581A (zh) * | 2016-08-02 | 2016-11-02 | 无锡影速半导体科技有限公司 | 一种双台面直写式曝光机的曝光系统和曝光方法 |
CN109270804A (zh) * | 2018-11-14 | 2019-01-25 | 江苏友迪激光科技有限公司 | 倾斜直写曝光机镜头倍率以及偏转角度的标定调整方法 |
CN209433438U (zh) * | 2018-12-28 | 2019-09-24 | 苏州源卓光电科技有限公司 | 一种用于直写式光刻机的曝光镜头的标定装置 |
Non-Patent Citations (1)
Title |
---|
光刻机镜头的镜头结构设计与装配;李连进;《天津理工学院学报》;20040331;第20卷(第1期);第24、27页 * |
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Denomination of invention: Pre adjustment equipment, pre adjustment method and exposure equipment assembly method Effective date of registration: 20210128 Granted publication date: 20200908 Pledgee: Jiujiang Pohu new city investment and Construction Co.,Ltd. Pledgor: SUZHOU WEIYING LASER TECHNOLOGY Co.,Ltd. Registration number: Y2021980000823 |
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