CN111261564A - Transfer apparatus for carrier device and transfer system for carrier device having the same - Google Patents
Transfer apparatus for carrier device and transfer system for carrier device having the same Download PDFInfo
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- CN111261564A CN111261564A CN201911153911.7A CN201911153911A CN111261564A CN 111261564 A CN111261564 A CN 111261564A CN 201911153911 A CN201911153911 A CN 201911153911A CN 111261564 A CN111261564 A CN 111261564A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a transfer device of a bearing device and a transfer system of the bearing device, wherein the inner side wheel and the outer side wheel which form a guide wheel are in a concave-convex structure. The transfer apparatus of the carrier device includes: a driving wheel moving on a pair of rails provided on a ceiling; a drive control unit for controlling the drive wheels provided on both side surfaces; a main body part which is combined with the lower part of the drive control part and grabs and transfers the bearing device for accommodating the wafer; and a guide wheel having an inner magnetic core and an outer layer member, wherein the inner magnetic core is coupled to a lower surface of the drive control unit in a direction perpendicular to the drive wheel, and is formed in a wheel shape, and at least one of a concave portion and a convex portion is formed on an outer peripheral surface of the inner magnetic core; and the inner side surface of the outer layer part is occluded with the peripheral surface shape of the inner side magnetic core.
Description
Technical Field
The present invention relates to an apparatus for transferring a carrier device and a system having the same. And more particularly, to an apparatus for transferring a carrier device in a manufacturing line for manufacturing semiconductor devices and a system having the same.
Background
Wafers (wafers) are manufactured through a variety of processes in clean rooms (clean rooms) with production lines. At this time, the wafer is received in a carrier (carrier) and transferred to equipment for performing each process by an OHT (Overhead home Transport) apparatus disposed on the ceiling of the clean room.
Documents of the prior art
[ patent document ]
Korean laid-open patent No. 10-2018 0061542 (published Japanese; 2018.06.08.)
Disclosure of the invention
Technical problem to be solved by the invention
The OHT apparatus has guide wheels (guide wheels) for preventing slipping off the rails when transporting the carriers receiving the wafers to equipment performing the respective processes.
The guide wheel is composed of an inner side wheel made of metal materials and an outer side wheel made of rubber materials. However, when the OHT device passes through the branch point on the rail, the outer wheel is separated from the inner wheel due to an excessive load or an offset load applied to the guide wheel.
In the present invention, a transfer apparatus for a carrier device and a transfer system for a carrier device including the same are provided, in which inner wheels and outer wheels constituting guide wheels are formed in a concave-convex structure.
The problems of the present invention are not limited to the problems described above, and those having no description or other problems will be clearly understood by those skilled in the art from the following description.
Means for solving the problems
An aspect (aspect) of a transfer device of a carrier apparatus according to the present invention for achieving the above object includes: a driving wheel moving on a pair of rails provided on a ceiling; a drive control unit that controls the drive wheels provided on both side surfaces; a main body part which is combined with the lower part of the driving control part and picks up (grapping) the bearing device for accommodating the wafer and transfers the wafer; and a guide wheel having an inner magnetic core and an outer layer member, wherein the inner magnetic core is coupled to a lower surface of the drive control unit in a direction perpendicular to the drive wheel, and is formed in a wheel shape, and at least one of a concave portion and a convex portion is formed on an outer peripheral surface of the inner magnetic core; and an outer layer member having an inner side surface thereof engaged with the outer peripheral surface of the inner core.
In the case where the concave portion is formed on the outer peripheral surface of the inner core, the concave portion is formed in the center of the outer peripheral surface of the inner core, or formed on the outer peripheral surface side of the inner core.
In the case where the concave portion is formed on the outer peripheral surface side of the inner core, the guide wheel is coupled to the drive control portion with the concave portion facing upward.
In the case where the concave portions and the convex portions are formed together on the outer peripheral surface of the inner core, the concave portions and the convex portions are alternately formed on the outer peripheral surface of the inner core.
The outer member has a convex profile.
The outer layer member is bonded to the outer peripheral surface of the inner core.
One aspect of a transfer system for a carriage device according to the present invention for achieving the above object includes: a rail support part provided at the ceiling; a pair of rails supported by the rail supporting part; and a transfer device for the carrier device, which travels along the rail to transfer the carrier device for receiving the wafer, wherein the transfer device for the carrier device comprises: a drive wheel moving on the track; a drive control unit that controls the drive wheels provided on both side surfaces; a main body coupled to a lower portion of the drive control unit, and configured to grip (grip) the carrier device and transfer the carrier device; and a guide wheel having an inner magnetic core and an outer layer member, wherein the inner magnetic core is provided on a lower surface of the drive control unit in a direction perpendicular to the drive wheel, and is formed in a wheel shape, and at least one of a concave portion and a convex portion is formed on an outer peripheral surface; and the inner side surface of the outer layer part is occluded with the peripheral surface shape of the inner side magnetic core.
Additional embodiments are also described in the detailed description and the drawings.
Drawings
Fig. 1 is a front view schematically showing a transfer system of a carrier of a transfer apparatus having the carrier according to an embodiment of the present invention;
fig. 2 is a perspective view of a guide wheel provided at a transfer apparatus of a carrying device according to a first embodiment of the present invention;
fig. 3 is an exploded perspective view of a guide wheel provided to a transfer apparatus of a carrying device according to a first embodiment of the present invention;
fig. 4 is a sectional view of a guide wheel provided at a transfer device of a carrying means of a first embodiment of the present invention;
fig. 5 is an exploded perspective view of a guide wheel provided at a transfer apparatus of a carrying device according to a second embodiment of the present invention;
fig. 6 is an exploded perspective view of a guide wheel provided at a transfer device of a carrying apparatus according to a third embodiment of the present invention;
fig. 7 is an exploded perspective view of a guide wheel provided to a transfer apparatus of a carrying device according to a fourth embodiment of the present invention;
fig. 8 is a view showing a state where a guide wheel of the fourth embodiment of the present invention is coupled to a transferring apparatus of a carrying device;
fig. 9 is an exploded perspective view of a guide wheel provided in a transfer device of a carrying apparatus according to a fifth embodiment of the present invention;
FIG. 10 is a graph showing the results of a test conducted on the possibility of disengagement of a conventional idler;
fig. 11 is a graph showing the results of a test conducted on the possibility of disengagement of the guide wheel of the present invention.
Description of the reference numerals
100 carrier transfer system 110 track
120 track support 130 carrying means transfer device
140 carrying device 210 main body part
211, a gripping part 212, and an elevating part
220 drive control part 230 drive wheels
240, guide wheel 310, inner magnetic core
320 outer layer member 311 first recess
312 first convex part 321 second concave part
322 the second convex part
Detailed Description
Preferred embodiments of the present invention will be specifically described below with reference to the accompanying drawings. The advantages and features of the present invention and the manner of attaining them will become apparent with reference to the embodiments specifically illustrated in the drawings. However, the present invention is not limited to the embodiments disclosed below, and can be implemented in various forms different from each other, and only the embodiments completely disclose the present invention and are used to provide those skilled in the art with a full disclosure of the scope of the present invention, which is defined only by the scope of the claims. Like reference numerals denote like components throughout the specification.
The term "on" or "overlying" a component or layer with respect to another component or layer includes directly on the other component or layer, as well as intervening layers or other components. And the case where an element is referred to as being "directly on" or "directly on" shows the case where no other element or layer is interposed therebetween.
Spatially relative terms, i.e., "lower", "upper", "lower", etc., are used for ease of describing the relationship between one element or constituent and another element or constituent, as shown in the drawings. Spatially relative terms, when used in reference to an orientation shown in the drawings or when operating, should be understood as encompassing the mutually different orientations of the elements. For example, in the case of turning over an element shown in the drawings, an element described as "lower (below)" or "lower (below)" of another element is placed "upper (above)" of the other element. Accordingly, the term "lower" as used herein includes both lower and upper directions. The elements can also be arranged in other orientations, whereby spatially relative terms are to be interpreted in terms of orientation.
The terms first, second, etc. are used to describe various elements, components, and/or sections, but the elements, components, and/or sections are not limited by these terms. The term is used to distinguish one element, component, or part from another element, component, or part. Therefore, the first element, the first component, or the first portion mentioned below can also be referred to as the second element, the second component, or the second portion within the technical idea of the present invention.
The terms used in the present specification are used for the purpose of illustrating embodiments and do not limit the present invention. In this specification, the singular forms "a", "an" and "the" are not specifically referred to herein, and the plural forms are also included. The terms "comprises," "comprising," "includes" and/or "including" when used in this specification do not preclude the presence or addition of one or more other components, steps, acts and/or elements.
Unless defined otherwise, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Or dictionary definitions, are not expressly defined and are not to be construed in an abnormal or exaggerated manner.
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, and in the description with reference to the drawings, the same or corresponding constituent elements will be given the same reference numerals regardless of the reference numerals, and redundant description thereof will be omitted.
The present invention relates to a transfer device for a carrier device in which inner and outer wheels constituting a guide wheel are formed into a concave-convex structure, and a transfer system for a carrier device provided with the transfer device. The invention can prevent the outer wheel from separating from the inner wheel even if excessive load or partial load is applied to the guide wheel. The present invention will be specifically described below with reference to the accompanying drawings and the like.
Fig. 1 is a front view schematically showing a transfer system of a carrier of a transfer apparatus having a carrier according to an embodiment of the present invention.
Referring to fig. 1, the carrier transfer system 100 includes: a rail (110), a rail support (120) and a transfer device (130) for carrying the device.
The rails 110 provide a path for movement of the carrier's take-off device 130. The rail 110 is disposed at a ceiling (ceiling) of a clean room (clean room) of a manufacturing line having semiconductor elements (e.g., wafers) manufactured thereon.
A rail support 120 is provided at the ceiling of the clean room together with the rail 110. In this case, the rails 110 are coupled to both sides of the rail support part 120 fixed to the ceiling of the clean room to form a pair.
The rail 110 has various types of sections such as a straight section, a curved section, an inclined section, and a branched section according to the layout of the clean room. However, the present embodiment is not limited thereto. The track 110 can also be formed as a single-form section (e.g., a straight section) only.
The rail support part 120 is disposed at a ceiling of the clean room to support the rail 110. the rail support part 120 is formed in a cover (cap) shape, for example, ∩ shape or pi shape.
The carrier transfer apparatus 130 transfers a carrier (carrier; 140) receiving wafers from a clean room to various equipments performing a semiconductor device manufacturing process. The transfer device 130 of the carrier is implemented by an oht (overhead home transport) device.
The carrier transfer apparatus 130 includes: the main body 210 includes a drive control unit 220, a drive wheel (230), and a guide wheel (240).
The main body 210 is transferred to a destination (for example, equipment for performing a next process) after gripping (gripping) the carrier device 140. The main body 210 is disposed below the drive control unit 220, and includes: a grasping unit 211 and an elevating unit 212.
The gripping portion 211 is used to grip the carrier device 140. The grasping unit 211 moves downward by the elevating unit 212 to grasp the carrier 140 positioned below the transfer device 130 of the carrier. The grasping portion 211 is realized by a gripper (hand grip), for example.
The lifting unit 212 moves the grasping unit 211 downward to grasp the carrier device 140, or moves the grasping unit 211 of the carrier device 140 upward. The elevating unit 212 elevates the carrier device 140 to the vicinity of the ceiling of the clean room for transferring the carrier device 140 to a destination, and lowers the carrier device 140 to transport the carrier device 140 when the destination is reached. The lifting unit 212 is implemented by, for example, a lift (home).
The main body 210 may be loaded with the carrier device 140 and transferred to a destination. In this case, the main body portion 210 has a housing portion (not shown) instead of the grasping portion 211.
The receiving portion provides a space for receiving the carrier device 140. The storage portion is formed in the form of a basket (basket) having one open side. However, the present embodiment is not limited thereto. The storage unit may be formed in a cabinet (cabinet) type having a door formed on one side surface.
The drive control unit 220 controls the drive wheels 230 that move along the rails 110. The drive control unit 220 is coupled to the pair of drive wheels 230 through both side surfaces and coupled to the main body 210 through a lower surface. The drive control unit 220 also functions to support the main body 210 in the lower portion.
The plurality of drive control units 220 are coupled to one main body unit 210. However, the present embodiment is not limited thereto. One drive control unit 220 can also be combined with one main body unit 210.
The drive control unit 220 includes: a drive motor (not shown), a drive shaft (not shown), a speed adjusting unit (not shown), and the like. The driving motor generates a driving force, and the driving shaft transmits the driving force generated by the driving motor to the driving wheels 230. And, the speed adjusting part adjusts the rotation speed of the driving wheel 230. The drive control section 220 supplies a driving force to the driving wheels 230 by driving a motor, a drive shaft, and the like, and controls the rotational speed of the driving wheels 230 by a speed adjustment section and the like.
The driving wheel 230 rotates on the rail 110 by the driving force provided by the driving control part 220. For this purpose, at least one pair of driving wheels 230 is provided on both side surfaces of the drive control unit 220.
The guide wheels 240 prevent the transfer device 130 of the carrier from slipping off the rails 110 while traveling on the rails 110. To this end, at least one pair of guide wheels 240 is provided on both sides of the lower surface of the driving control part 220 in a direction perpendicular to the driving wheel 230.
As shown in fig. 2 to 4, idler 240 includes: an inner core 310 and an outer member 320. Fig. 2 is a perspective view of a guide wheel provided in a transfer device of a carriage according to a first embodiment of the present invention, and fig. 3 is an exploded perspective view of the guide wheel provided in the transfer device of the carriage according to the first embodiment of the present invention. Fig. 4 is a cross-sectional view of a guide wheel provided in a transfer device of a carriage according to a first embodiment of the present invention. The following description refers to fig. 2 to 4.
The inner core 310 is a wheel-shaped core (core) and is formed inside the outer member 320. The inner core 310 is formed of a metal. For example, the inner core 310 is formed of aluminum (Al).
The inner core 310 has a first recess (first recess; 311) formed in the outer peripheral surface. For example, as shown in fig. 3 and 4, the inner core 310 has a first recess 311 formed in the center of the outer peripheral surface. At this time, a second convex portion (second convex portion; 322) coupled to the first concave portion 311 is formed on the inner surface of the outer member 320.
In the case where the outer peripheral surface of the inner core 310 is formed flat (flat), when an excessive load or a biased load is applied to the guide wheel 240 (for example, when the transfer device 130 of the carriage passes a branch point on the rail 110), the outer layer member 320 is separated from the inner core 310. In the present embodiment, in order to solve this problem, a first concave portion 311 is formed on the outer peripheral surface of the inner core 310, and a second convex portion 322 coupled to the first concave portion 311 is formed on the inner surface of the outer member 320.
When the first concave portion 311 is formed on the outer peripheral surface of the inner core 310 and the second convex portion 322 coupled to the first concave portion 311 is formed on the inner surface of the outer layer member 320, even if an excessive load or an uneven load is applied to the guide pulley 240, an effect of preventing the outer layer member 320 from being separated from the inner core 310 can be obtained. Further, by preventing the outer member 320 from being separated from the inner core 310, the inner core 310 is prevented from directly contacting the rail 110, and thus, particles (particles) generated by friction between the inner core 310 and the rail 110 can be reduced.
In the case where the inner core 310 includes the first concave portion 311 on the outer peripheral surface, the first concave portion 311 is formed in a parallelogram shape as shown in fig. 4. However, the present embodiment is not limited thereto. The first concave portion 311 may be formed in a semicircular shape, a polygonal shape, a trapezoidal shape, or the like. Fig. 5 illustrates a case where the first concave portion 311 is formed in a semicircular shape, and fig. 6 illustrates a case where the first concave portion 311 is formed in a quadrangular shape. Fig. 5 is an exploded perspective view of a guide wheel provided in a transfer device of a carriage according to a second embodiment of the present invention, and fig. 6 is an exploded perspective view of a guide wheel provided in a transfer device of a carriage according to a third embodiment of the present invention.
In the case where first concave portion 311 is formed in outer peripheral surface of inner core 310, inner core 310 is not limited to the case where first concave portion 311 is formed in the center of outer peripheral surface. That is, as shown in fig. 7, the first concave portion 311 of the inner core 310 may be formed obliquely on one side of the outer peripheral surface. Fig. 7 is an exploded perspective view of a guide wheel provided in a transfer device of a carriage according to a fourth embodiment of the present invention.
In the case where the first concave portion 311 of the inner core 310 is formed on the outer peripheral surface side, the guide pulley 240 is provided in the drive control unit 220 with the first concave portion 311 of the inner core 310 facing upward, as shown in fig. 8. In the case where guide wheel 240 is thus provided in drive control unit 220, outer member 320 does not slip in the lower direction even if outer member 320 is disengaged from inner core 310, and thus inner core 310 can be prevented from directly contacting track 110. Fig. 8 is a view showing a state where the guide wheel is coupled to the transfer device of the carrying means according to the fourth embodiment of the present invention.
In addition, in the case where the inner core 310 has the first concave portion 311 formed on the outer peripheral surface, as shown in fig. 3, one first concave portion 311 is formed on the outer peripheral surface of the inner core 310. However, the present embodiment is not limited thereto. A plurality of first recesses 311 may be formed on the outer peripheral surface of the inner core 310.
The inner core 310 may include at least one first convex portion (first convex portion) on the outer peripheral surface. In this case, at least one second concave portion (second concave portion) to which the first convex portion is coupled is formed on the inner surface of the outer member 320.
As shown in fig. 9, the inner core 310 may have a first concave portion 311 and a first convex portion 312 formed on the outer peripheral surface. At this time, second concave portions 321 and second convex portions 322 that engage with the first concave portions 311 and the first convex portions 312 are formed on the inner side surfaces of the outer member 320. Fig. 9 is an exploded perspective view of a guide wheel provided in a transfer device of a carriage according to a fifth embodiment of the present invention.
In the case where the inner core 310 is thus formed with the first concave portions 311 and the first convex portions 312 on the outer peripheral surface, a plurality of first concave portions 311 and first convex portions 312 are alternately formed on the outer peripheral surface of the inner core 310.
In the case where the plurality of first concave portions 311 and the first convex portions 312 are formed on the outer peripheral surface of the inner core 310, the plurality of first concave portions 311 and the first convex portions 312 are formed in a corrugated shape as shown in fig. 9. However, the present embodiment is not limited thereto. The plurality of first concave portions 311 and the first convex portions 312 are formed in a digital signal shape, or formed in a zigzag shape.
This is explained with reference to fig. 2 and 3 again.
The outer member 320 is formed around the inner core 310. The outer layer member 320 has a convex shape and is bonded to the surface of the inner core 310 by bonding or the like.
In the case where the first concave portion 311 is formed in the inner core 310, the second convex portion 322 is formed on the inner surface of the outer member 320 so as to be engaged with the first concave portion 311 of the inner core 310. In the case where the first concave portion 311 and the first convex portion 312 are formed in the inner core 310, the second concave portion 321 and the second convex portion 322 may be formed on the inner surface of the outer member 320 so as to engage with the first concave portion 311 and the first convex portion 312 of the inner core 310.
The outer member 320 is formed of rubber as a material. For example, the outer layer member 320 is formed of polyurethane as a material.
Reference is again made to fig. 1 for explanation.
The carrier transfer system 100 further comprises: a cable fixing portion (not shown).
The cable fixing portion fixes a cable disposed under the rail 110. The cable fixing portion is realized by, for example, a litz wire support member (litz wire support).
The cable fixing portion is configured to be inclined downward from a space in front of the two rails 110 coupled to both sides of the rail support portion 120 toward a direction in which the rail 110 on each side is located.
The transfer apparatus 130 of the carrier further includes: the correction unit (not shown) corrects the position of the carrier device 140 when the carrier device 140 is transferred to a destination.
The correcting unit is disposed between the main body 210 and the drive control unit 220 to correct the position of the carrier device 140. This correction portion includes: a slider (slider) and a rotator (rotator). The slider is attached to a lower surface of the drive control unit 220, and moves the carrier 140 in an upward direction, a downward direction, a left direction, a right direction, and the like. The rotator is installed on the lower surface of the slider to rotate the carrier 140 in a clockwise direction, a counterclockwise direction, etc.
The transfer system 100 of the carrier device is described above with reference to fig. 1 to 8. The transfer system 100 of the carrier apparatus of the present invention includes a guide wheel 240 having an inner core 310 and an outer member 320 formed in a concavo-convex structure. Therefore, the transferring system 100 of the carrying device can reduce the possibility of falling and slipping caused by the detachment of the outer layer member 320 by more than five times compared with the prior art, thereby greatly increasing the quality of the equipment and improving the productivity.
Fig. 10 is a graph showing the results of a test performed on the possibility of disengagement of a conventional guide wheel. Fig. 10 (a) shows a combination of an inner wheel 410 and an outer wheel 420 constituting a conventional stator.
Fig. 11 is a graph showing the results of a test conducted on the possibility of disengagement of the guide wheel of the present invention. In fig. 11, (a) shows a combination of inner core 310 and outer member 320 constituting stator 240 of the present invention.
Fig. 10 (b) and 11 (b) show whether or not the guide roller is slipped when an external force is applied to the outer wheel 420 by setting the load angles to 500N, 1000N, 1500N, 2000N, 5000N, 10000N, etc., and setting the load angles to 1.5deg, 3.0deg, 5.0deg, etc., respectively.
As shown in fig. 10 (b), when a load of 2000N (about 203.8kgf) is applied at an angle of 1.5deg, the conventional guide wheel slips. On the other hand, as shown in fig. 11 (b), the guide roller 240 of the present embodiment does not slip even when a load of 10000N (about 1019.4kgf) is applied thereto at an angle of 3.0 deg. Therefore, the guide wheel 240 of the present embodiment is judged to reduce the possibility of slip by at least 5 times as compared with the conventional guide wheel.
While the embodiments of the present invention have been described above with reference to the drawings, it will be appreciated by those skilled in the art that the embodiments of the present invention can be embodied in other specific forms without departing from the spirit or essential characteristics thereof. Therefore, it should be understood that the embodiments described above are illustrative in all aspects and are not restrictive.
Claims (10)
1. A transfer apparatus for a carrying device, characterized in that,
the method comprises the following steps:
a driving wheel moving on a pair of rails provided on a ceiling;
a drive control unit that controls the drive wheels provided on both side surfaces;
a main body part which is combined with the lower part of the drive control part and grabs and transfers the bearing device for accommodating the wafer; and
a guide wheel having: an inner magnetic core coupled to a lower surface of the drive control unit in a direction perpendicular to the drive wheel, the inner magnetic core having a wheel shape, and at least one of a concave portion and a convex portion formed on an outer peripheral surface of the inner magnetic core; and an outer layer member having an inner side surface thereof engaged with the outer peripheral surface of the inner core.
2. The carrier take-off apparatus of claim 1,
in the case where the concave portion is formed on the outer peripheral surface of the inner core, the concave portion is formed in the center of the outer peripheral surface of the inner core, or formed on the outer peripheral surface side of the inner core.
3. The carrier take-off apparatus of claim 2,
in the case where the concave portion is formed on the outer peripheral surface side of the inner core, the guide wheel is coupled to the drive control portion with the concave portion facing upward.
4. The carrier take-off apparatus of claim 1,
in the case where the concave portions and the convex portions are formed together on the outer peripheral surface of the inner core, the concave portions and the convex portions are alternately formed on the outer peripheral surface of the inner core.
5. The carrier take-off apparatus of claim 1,
the outer member has a convex profile.
6. The carrier take-off apparatus of claim 1,
the outer layer member is bonded to the outer peripheral surface of the inner core.
7. A transfer system of a carrying device is characterized in that,
the method comprises the following steps:
a rail support part provided at the ceiling;
a pair of rails supported by the rail supporting part; and
a transfer device for the carrier device, which travels along the track to transfer the carrier device for receiving the wafer,
the transfer apparatus of the carrier device includes:
a drive wheel moving on the track;
a drive control unit that controls the drive wheels provided on both side surfaces;
a main body part coupled to a lower part of the driving control part, and configured to grasp and transfer the carrier; and
a guide wheel having an inner magnetic core, coupled to a lower surface of the drive control unit in a direction perpendicular to the drive wheel, formed in a wheel shape, and having at least one of a concave portion and a convex portion formed on an outer peripheral surface thereof; and an outer layer member having an inner side surface thereof engaged with the outer peripheral surface of the inner core.
8. The carrier take-off system of claim 7,
in the case where the concave portion is formed on the outer peripheral surface of the inner core, the concave portion is formed in the center of the outer peripheral surface of the inner core, or formed on the outer peripheral surface side of the inner core.
9. The carrier take-off system of claim 8,
in the case where the concave portion is formed on the outer peripheral surface side of the inner core, the guide wheel is coupled to the drive control portion with the concave portion facing upward.
10. The carrier take-off system of claim 7,
in the case where the concave portions and the convex portions are formed together on the outer peripheral surface of the inner core, the concave portions and the convex portions are alternately formed on the outer peripheral surface of the inner core.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020180153826A KR20200067002A (en) | 2018-12-03 | 2018-12-03 | Apparatus for transporting carrier, and system for transporting carrier with the apparatus |
| KR10-2018-0153826 | 2018-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111261564A true CN111261564A (en) | 2020-06-09 |
Family
ID=70923825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911153911.7A Pending CN111261564A (en) | 2018-12-03 | 2019-11-21 | Transfer apparatus for carrier device and transfer system for carrier device having the same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20200067002A (en) |
| CN (1) | CN111261564A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003176661A (en) * | 2001-12-10 | 2003-06-27 | Toyota Auto Body Co Ltd | Guide roller |
| CN1841696A (en) * | 2005-02-07 | 2006-10-04 | 细美事有限公司 | Apparatus for processing substrate |
| CN203481946U (en) * | 2012-11-22 | 2014-03-12 | 株式会社安川电机 | Rotary motor and rotor |
| KR20170045834A (en) * | 2015-10-20 | 2017-04-28 | 세메스 주식회사 | Apparatus for transferring using the integrated circuit device fabricating |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101901029B1 (en) | 2016-11-29 | 2018-09-21 | 세메스 주식회사 | Overhead Hoist transport device |
-
2018
- 2018-12-03 KR KR1020180153826A patent/KR20200067002A/en not_active IP Right Cessation
-
2019
- 2019-11-21 CN CN201911153911.7A patent/CN111261564A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003176661A (en) * | 2001-12-10 | 2003-06-27 | Toyota Auto Body Co Ltd | Guide roller |
| CN1841696A (en) * | 2005-02-07 | 2006-10-04 | 细美事有限公司 | Apparatus for processing substrate |
| CN203481946U (en) * | 2012-11-22 | 2014-03-12 | 株式会社安川电机 | Rotary motor and rotor |
| KR20170045834A (en) * | 2015-10-20 | 2017-04-28 | 세메스 주식회사 | Apparatus for transferring using the integrated circuit device fabricating |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20200067002A (en) | 2020-06-11 |
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