KR20210082960A - Power unit and vehicle having the same - Google Patents

Abstract

According to the invention, a power unit provides power for operating a hand unit for fixing an object in a vehicle. The power unit comprises: a battery installed in the hand unit and providing power to a gripper for fixing the object in the hand unit; and a charging unit for wirelessly charging the battery.

Description

Power unit and vehicle having the same

The present invention relates to a power supply unit and a vehicle having the same, and more particularly, to a power supply unit for operating a hand unit that grips an object in the vehicle and a vehicle having the same.

In general, semiconductor processing apparatuses for manufacturing a semiconductor device are sequentially arranged to perform various processes on a semiconductor substrate. The object for performing the semiconductor device manufacturing process may be provided to each semiconductor processing apparatus in a state accommodated in the object, or may be recovered from each semiconductor processing apparatus using the object.

The object is transported by OHT (Overhead Hoist Transport). The OHT includes a traveling rail provided along a ceiling of a space in which the semiconductor processing devices are provided, and a vehicle that grips the object and travels along the traveling rail.

The vehicle includes a hand unit for fixing the object and a hoist unit for elevating the hand unit.

Power for operating the hand unit using metal wires provided inside the belt of the hoist unit, and a slip ring provided to be in contact with a pulley for winding and unwinding the belt and electrically connected to the metal wires provides

However, the metal wires may be disconnected due to the load of the hand unit. In addition, since the shaft of the pulley provided with the slip ring is made of a plastic material, the shaft may be easily damaged. Accordingly, power may not be stably supplied to the hand unit.

The present invention provides a power supply unit that provides power for operating the hand unit.

The present invention also provides a vehicle having the above power supply unit.

In the vehicle according to the present invention, a power unit providing power for operating a hand unit for fixing an object in the vehicle includes a battery provided in the hand unit and providing the power to a gripper for fixing the object in the hand unit; It may include a charging unit for wirelessly charging the battery.

According to one embodiment of the present invention, the charging unit is provided in a hoist unit that elevates the hand unit, and includes a first charging module having a transmitting coil that generates a magnetic field according to a supplied current and the battery in the hand unit. and a second charging module provided to be electrically connected to and having a receiving coil for charging the battery by generating a current according to electromagnetic induction with the transmitting coil.

According to one embodiment of the present invention, when the hand unit rises toward the hoist unit and is located at the origin, the electromagnetic induction is made between the transmitting coil and the receiving coil to charge the battery.

A vehicle according to the present invention includes a traveling unit traveling in an X-axis direction along a traveling rail of a ceiling, a slide unit provided under the traveling unit and fixed to the traveling unit, and a Y-axis direction with respect to the slide unit. a hoist unit provided at the lower part of the slide unit so as to be movable to a hoist unit for lifting and lowering the belts by winding or unwinding the belts, a hand unit fixed to the lower end of the belt and fixing an object, and a hand unit for operating the hand unit a power supply unit providing power, the power unit being provided in the hand unit, a battery providing the power to a gripper for fixing the object in the hand unit, and a charging unit for wirelessly charging the battery can do.

According to embodiments of the present invention, the hoist unit has the belts have a wire shape, and one pulley is arranged such that a rotation shaft is perpendicular to the upper surface of the hoist unit, so that the belts can be simultaneously wound and unwound.

The power unit according to the present invention operates by supplying power to the hand unit using the battery. Therefore, there is no need to use a slip ring or a metal wire provided on the belt of the hoist unit, so that the power can be stably supplied to the hand unit.

In addition, when the hand unit is located at the origin, the battery charging unit may charge the battery through wireless charging. Accordingly, it is possible to prevent the battery from being discharged.

The vehicle according to the present invention can stably transmit the power to the hand unit. Therefore, the hand unit in the vehicle can stably load and unload the object.

1 is a side view illustrating a vehicle according to an embodiment of the present invention.
FIG. 2 is a side view for explaining the hoist unit, the hand unit, and the power supply unit shown in FIG. 1 .
3 is a side view for explaining a state in which the hoist unit and the hand unit shown in FIG. 2 are spaced apart.
4 is a cross-sectional view for explaining the alignment unit shown in FIG.
5 is a cross-sectional view for explaining another example of the alignment unit shown in FIG.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. Since the present invention can have various changes and can have various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention. In describing each figure, like reference numerals have been used for like elements. In the accompanying drawings, the dimensions of the structures are enlarged than the actual size for clarity of the present invention.

Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present application, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, but one or more other features It is to be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

1 is a side view for explaining a vehicle according to an embodiment of the present invention, FIG. 2 is a side view for explaining a hoist unit, a hand unit, and a power unit shown in FIG. 1, and FIG. 3 is shown in FIG. It is a side view for explaining a state in which the hoist unit and the hand unit are separated.

1 to 3 , the vehicle 100 is for transporting an object 20 along a traveling rail 10 provided on the ceiling, and includes a traveling unit 110 , a frame unit 120 , and a slide unit. 130 , a hoist unit 140 , a hand unit 150 , a power unit 160 , and an alignment unit 170 .

The traveling unit 110 moves the vehicle 100 along the traveling rail 10 . Driving rollers 112 are provided on both sides of the traveling unit 110 . The traveling roller 112 is rotated by a separate driving unit. Accordingly, the vehicle 100 travels along the traveling rail 10 . For example, the vehicle 100 may move along the X-axis direction.

On the other hand, the driving unit 110 is provided with a steering roller (not shown) on the upper surface. The steering roller may selectively contact a steering rail (not shown) provided above the traveling rail 10 . A traveling direction of the vehicle 100 may be adjusted at a branch point of the traveling rail 10 .

The frame unit 120 is fixed to the lower surface of the traveling unit 110 . The frame unit 120 has an empty inside to accommodate the object 20 . In addition, the frame unit 120 may have a lower surface and one or both sides of the frame unit 120 open in the Y-axis direction so that the object 20 can move in the Y-axis direction and the Z-axis direction.

The slide unit 130 is provided on the inner upper surface of the frame unit 120 . The slide unit 130 may horizontally move the hoist unit 140 in the Y-axis direction. In this case, the hoist unit 140 may move horizontally through one or both sides of the frame unit 120 open.

Specifically, the slide unit 130 may include a guide rail, a moving block, a first fixing bracket, and a second fixing bracket.

The guide rail is disposed along the Y-axis direction. The moving block is provided on one side of the guide rail to be movable along the Y-axis direction. Accordingly, the moving block may move along the guide rail in the Y-axis direction. For example, the guide rail and the moving block may be an LM guide.

The first fixing bracket is fixed to the inner upper surface of the frame unit 120 . Although not shown in detail, the first fixing bracket may be fixed by the frame unit 120 and a screw (not shown). In addition, the first fixing bracket fixes the guide rail.

The second fixing bracket is fixed to the upper surface of the hoist unit 140 . Although not shown in detail, the second fixing bracket may be fixed by the hoist unit 140 and a screw (not shown). In addition, the second fixing bracket is coupled to the moving block.

The hoist unit 140 is provided on the lower surface of the slide unit 130 to be horizontally movable in the Y-axis direction.

The hoist unit 140 may be raised and lowered along the Z-axis direction by fixing the hand unit 150 . For example, the hoist unit 140 fixes the hand unit 150 with a plurality of belts 142 . The hoist unit 140 may take up or unwind the belts 142 with a pulley (not shown) to elevate the hoist unit 140 .

Since a metal wire is not provided in the belts 142 , the thickness of the belts 142 may be reduced. Accordingly, the diameter of the pulley can be reduced.

On the other hand, although not shown, one of the pulleys may be arranged such that the rotation shaft is perpendicular to the upper surface of the hoist unit 140 . The belts 142 may be wound around the single pulley in a wire shape. In addition, a separate driving unit for rotating the pulley may be provided, and the driving unit and the pulley may be connected to each other by a belt, a gear, or the like.

Since the diameter of the pulley is reduced or the pulley is arranged to be laid down, it is possible to reduce the overall thickness of the hoist unit 140 . As the thickness of the hoist unit 140 is reduced, the size of the vehicle 100 may be reduced.

The hand unit 150 is fixed to an end of the belt 142 and fixes the object 20 .

Specifically, the hand unit 150 may include grippers 152 for gripping the object 20 and a sensor 154 for sensing the object 20 .

The object 20 is moved in the horizontal direction by the slide unit 130 , and can be raised and lowered by the hoist unit 140 .

The power unit 160 provides power for operating the hand unit 150 , and may include a battery 161 and a charging unit 163 .

The battery 161 is provided in the hand unit 150 , and may provide power to a motor (not shown) and the sensor 154 for operating the grippers 152 . Although not shown in detail, the battery 161 may provide power to a control board (not shown) for controlling the operations of the grippers 152 and the sensor 154 . The battery 161 may be a rechargeable battery.

The charging unit 163 is for charging the battery 161 , and may include a first charging module 165 and a second charging module 167 .

The first charging module 165 is provided in the hoist unit 140 and is connected to an external power source. The first charging module 165 may include a transmitting coil, and the transmitting coil may generate a magnetic field according to a current supplied from the external power source.

The second charging module 167 is provided in the hand unit 150 and is electrically connected to the battery 161 . The second charging module 167 includes a receiving coil. The receiving coil may generate a current according to electromagnetic induction with the transmitting coil, and the current may be supplied to the battery 161 to charge the battery 161 .

Electromagnetic induction between the transmitting coil and the receiving coil may occur when the first charging module 165 and the second charging module 167 are adjacent to each other as the hand unit 150 moves up and down.

As shown in FIG. 3 , when the hand unit 150 descends and is spaced apart from the hoist unit 140 , the first charging module 165 and the second charging module 167 are spaced apart from each other. Accordingly, electromagnetic induction between the transmitting coil and the receiving coil does not occur and the battery 161 is not charged.

2, when the hand unit 150 rises toward the hoist unit 140 and the hand unit 150 is located at the origin, the first charging module 165 and the second charging module 167 these are adjacent to each other Accordingly, electromagnetic induction is generated between the transmitting coil and the receiving coil to charge the battery 161 .

Since the hand unit 150 is located at the origin while the vehicle 100 is driving, the battery 161 can be sufficiently charged. Accordingly, it is possible to prevent the battery 161 from being discharged.

Meanwhile, although not shown, the charging unit 163 may charge the battery 161 by using resonance induction between the first charging module 165 and the second charging module 167 .

Since the battery 161 is charged in a wireless charging method, there is no need to provide a slip ring in the hoist unit 140 or a metal wire in the belt 142 unlike the prior art. Accordingly, it is possible to stably provide the power to the hand unit 150 and to stably operate the hand unit 150 .

The alignment unit 170 is provided in the hoist unit 140 and the hand unit 150 , and aligns the hoist unit 140 and the hand unit 150 .

4 is a cross-sectional view for explaining the alignment unit shown in FIG.

Referring to FIG. 4 , the vehicle 100 may further include an alignment unit 170 .

The alignment unit 170 includes alignment pins 172 , holders 174 and magnetic bodies 176 .

The alignment pins 172 are provided on any one of the lower surface of the hoist unit 140 and the upper surface of the hand unit 150, and the holders 174 are the lower surface of the hoist unit 140 and It is provided on the other one of the upper surfaces of the hand unit 150 .

Specifically, the alignment pins 172 may be provided on the lower surface of the hoist unit 140 , and the holders 174 may be provided on the upper surface of the hand unit 150 . Also, although not shown, the alignment pins 172 may be provided on the upper surface of the hand unit 150 , and the holders 174 may be provided on the lower surface of the hoist unit 140 .

Hereinafter, it will be described on the basis that the alignment pins 172 are provided on the upper surface of the hand unit 150 , and the holders 174 are provided on the lower surface of the hoist unit 140 .

The alignment pins 172 are provided to protrude from the upper surface of the hand unit 150 .

The holders 174 are embedded in the hoist unit 140 so as to be exposed to the lower surface of the hoist unit 140 . The holders 174 each have a groove 175 for receiving the alignment pins 172 .

As the hand unit 150 rises, the alignment pins 172 are inserted into the grooves 175 of the holders 174 so that the hoist unit 140 and the hand unit 150 are aligned.

The groove 175 has a tapered shape such that an entrance into which the alignment pins 172 are inserted gradually widens. Accordingly, even if the alignment pins 172 and the holders 174 are slightly misaligned, they may be inserted into the groove 175 along the inlet of the groove 175 . Since the alignment pins 172 can prevent the holders 172 from colliding, it is possible to prevent the alignment pins 172 from being damaged.

In a state in which the alignment pins 172 are inserted into the grooves 175 of the holders 174 , the alignment pins 175 and the holders 174 may be spaced apart from each other by a predetermined interval. The distance may be about 0.2 to 0.3 mm.

When the gap is less than about 0.2 mm, the gap is relatively narrow, so that the alignment pins 175 are highly likely to come into contact while being inserted into the holders 174 . Accordingly, the possibility of generating the particles or noise may increase.

When the distance exceeds about 0.3 mm, the distance is relatively wide and the alignment pins 175 may swing inside the holders 174 . Therefore, it is difficult to suppress the shaking or vibration of the hand unit 150 .

The magnetic bodies 176 apply magnetism to the alignment pins 172 and the holders 174 so that a repulsive force acts between the alignment pins 172 and the holders 174 .

Specifically, the alignment pins 172 and the holders 174 may be formed of a magnetic material. That is, the alignment pins 172 and the holders 174 may be permanent magnets or electromagnets.

Since a repulsive force acts between the alignment pins 172 and the holders 174 , the alignment pins 172 and the holders 174 when the alignment pins 172 are inserted into the holders 174 . contact between them can be avoided. Accordingly, it is possible to prevent the generation of particles or noise due to the contact. In addition, since the alignment pins 172 are fixed to the holders 174 by the repulsive force, shaking or vibration of the hand unit 150 can be suppressed.

Meanwhile, the outer surfaces of the alignment pins 172 and the inner surfaces of the holders 174 may be coated with a material having a low coefficient of friction. Examples of the material include MC nylon (MC Nylon) material or Teflon material. Accordingly, even when the alignment pins 172 and the holders 174 are in contact, friction between the alignment pins 172 and the holders 174 can be minimized. Accordingly, it is possible to minimize the generation of the particles and noise due to the friction.

5 is a cross-sectional view for explaining another example of the alignment unit shown in FIG.

Referring to FIG. 5 , the magnetic bodies 176 may be embedded in the alignment pins 172 and the holders 174 . That is, the alignment pins 172 and the holders 174 may be permanent magnets or electromagnets.

Since a repulsive force acts between the alignment pins 172 and the holders 174 by the magnetic materials 176 , when the alignment pins 172 are inserted into the holders 174 , the alignment pins 172 ) and the holders 174 can be prevented from contacting each other. Accordingly, it is possible to prevent the generation of particles or noise due to the contact. In addition, since the alignment pins 172 are fixed to the holders 174 by the repulsive force, shaking or vibration of the hand unit 150 can be suppressed.

Meanwhile, the alignment pins 172 and the holders 174 may be made of a material having the low friction coefficient. Examples of the material may be the MC nylon material or the Teflon material.

In addition, outer surfaces of the alignment pins 172 and inner surfaces of the holders 174 may be coated with the material having the low friction coefficient. Examples of the material include the MC nylon material or the Teflon material.

Since the alignment pins 172 and the holders 174 are made of the material having the low coefficient of friction or coated with the material having the low coefficient of friction, the alignment pins 172 and the holders 174 are formed between the alignment pins 172 and the holders 174 . Even in contact, friction between the alignment pins 172 and the holders 174 may be minimized. Accordingly, it is possible to minimize the generation of the particles and noise due to the friction.

As described above, according to the present invention, the power unit may operate by supplying power to the hand unit using the battery, and the battery may be charged using the charging unit. Accordingly, it is possible to stably operate the hand unit of the vehicle.

Although the above has been described with reference to the preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the following claims. You will understand that you can.

100: vehicle 110: driving unit
120: frame unit 130: slide unit
140: hoist unit 150: hand unit
160: power unit 170: alignment unit
10: running rail 20: object

Claims (5)

A power unit for providing power for operating a hand unit for fixing an object in a vehicle, the power unit comprising:
a battery provided in the hand unit to provide the power to a gripper for fixing the object in the hand unit; and
Power unit comprising a charging unit for wirelessly charging the battery. According to claim 1, wherein the charging unit,
a first charging module provided in the hoist unit for elevating the hand unit and having a transmitting coil that generates a magnetic field according to the supplied current; and
and a second charging module provided in the hand unit to be electrically connected to the battery and having a receiving coil that generates a current according to electromagnetic induction with the transmitting coil to charge the battery. The power unit according to claim 2, wherein the electromagnetic induction is made between the transmitting coil and the receiving coil to charge the battery when the hand unit rises toward the hoist unit and is located at the origin. a traveling unit traveling in an X-axis direction along a traveling rail of the ceiling;
a slide unit provided under the traveling unit and fixed to the traveling unit;
a hoist unit provided at a lower portion of the slide unit to be movable in the Y-axis direction with respect to the slide unit, and for winding or unwinding the belts to elevate the belts;
a hand unit fixed to the lower end of the belt and fixing an object; and
a power supply unit providing power for operating the hand unit;
The power unit is
a battery provided in the hand unit to provide the power to a gripper for fixing the object in the hand unit; and
A vehicle comprising a charging unit for wirelessly charging the battery. According to claim 4, wherein the hoist unit, the belts have a wire shape,
A vehicle, characterized in that a single pulley is disposed so that the rotation shaft is perpendicular to the upper surface of the hoist unit to simultaneously take up and unwind the belts.

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