CN111257225A - Transverse differential dark field confocal microscopic measurement device and method thereof - Google Patents
Transverse differential dark field confocal microscopic measurement device and method thereof Download PDFInfo
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Abstract
The invention discloses a transverse differential dark field confocal microscopic measuring device and a method thereof, wherein the device comprises an annular light illuminating module, an annular light scanning module and a differential confocal detection module; through the shaping of the illuminating light beam and the shielding detection of the complementary aperture, the reflected signal and the scattered signal of the sample are effectively separated, and the three-dimensional distribution information of the defects such as nano-scale subsurface cracks, bubbles and the like is obtained; through differential confocal detection, the transverse sensitivity, linearity and signal-to-noise ratio of the measurement system are improved, and common-mode noise caused by environment state difference, light source light intensity fluctuation, detector electrical drift and the like can be remarkably inhibited.
Description
Technical Field
The invention relates to the technical field of optical precision measurement, in particular to a transverse differential dark field confocal microscopic measurement device and a method thereof.
Background
High-performance optical elements and micro-electromechanical elements are core components of modern high-end equipment, and surface appearance measurement and subsurface defect detection are required for guaranteeing the processing quality and service reliability of the high-performance optical elements and the micro-electromechanical elements, and no equipment can simultaneously realize the functions at home and abroad at present.
The existing surface topography nondestructive measurement technology at home and abroad mainly comprises the following steps: confocal microscopy, white light interference microscopy and zoom microscopy. Compared with the other two technologies, the confocal microscopic measurement technology has the characteristics of wide applicability of measurement samples and capability of measuring complex sample structures, and is widely applied to the field of industrial detection. The sub-surface defect nondestructive detection technology mainly comprises the following steps: laser modulation scattering technology, total internal reflection microscopy, optical coherence tomography, high frequency scanning acoustic microscopy, and X-ray microscopy. The method has the defects of low depth positioning precision, low signal-to-noise ratio, low detection efficiency, limited detection samples and the like.
Therefore, how to provide a transverse differential dark field confocal microscopy device with high measurement accuracy and a method thereof are problems to be solved urgently by those skilled in the art.
Disclosure of Invention
In view of the above, the present invention provides a transverse differential dark field confocal microscopy measurement apparatus and method thereof, which can simultaneously obtain three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, sub-surface cracks, bubbles, etc., and has a surface and sub-surface defect integrated detection function, thereby solving the defects of the measurement techniques in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a transverse differential dark-field confocal microscopy measurement apparatus comprising: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illuminating module sequentially comprises the following components in the light propagation direction: the device comprises a laser, a beam expander, a polarizer I, a polarization beam splitting film, a quarter wave plate, a cone lens and a plane reflector;
the annular light scanning module sequentially comprises according to the light propagation direction: the device comprises a semi-reflecting and semi-permeable membrane I, a two-dimensional scanning galvanometer, a scanning lens, a tube lens and an objective lens;
the differential confocal detection module comprises: a semi-reflecting and semi-permeable membrane II and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises the following components according to the light propagation direction: the device comprises a diaphragm I, a polaroid II, a focusing lens I, a pinhole I and a camera I; the reflection light path unit sequentially comprises the following components according to the light propagation direction: a diaphragm II, a polarizing plate III, a focusing lens II, a pinhole II and a camera II;
the polarization light splitting film is arranged corresponding to the first semi-reflective and semi-transparent film, and the first semi-reflective and semi-transparent film is arranged corresponding to the second semi-reflective and semi-transparent film;
the light beam reflected from the polarization splitting film is reflected and transmitted through the first semi-reflecting and semi-transmitting film; and the light beam transmitted by the first semi-reflective and semi-transparent film is reflected and transmitted by the second semi-reflective and semi-transparent film again.
Preferably, the combination of the cone lens and the plane mirror shapes the gaussian beam into annular light with adjustable inner and outer diameters, the beam expander placed at the front end of the light path of the cone lens is used for adjusting the inner diameter of the annular light, and the larger the diameter of the output light spot of the beam expander is, the larger the thickness of the annular light is, and the smaller the inner diameter is; the size of the outer diameter of the annular light depends on the distance between the cone lens and the plane reflector, and the longer the relative distance is, the larger the outer diameter is; and the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens.
Preferably, the working surface of the scanning lens is arranged at the front focal plane of the tube mirror.
Preferably, the sample to be measured is arranged in front of the objective lens, and the ring-shaped light is incident to the objective lens and then focused on the sample to be measured.
Preferably, the apertures of the first diaphragm and the second diaphragm are complementarily matched with the inner diameter of the annular light, the first diaphragm and the second diaphragm completely shield the reflected light beam from the sample to be detected, and only the scattered light carrying the information of the sample to be detected is allowed to enter the detection light path.
Preferably, in the transmission light path unit, the transmission light beam is focused at the focal plane and is positioned on the left side of the central position of the focal plane, and the light beam which is shielded and filtered by the first pinhole is collected by the first camera;
in the reflection light path unit, the reflected light beam is focused on the focal plane and is positioned on the right side of the central position of the focal plane, and the light beam which is shielded and filtered by the second pinhole is collected by the second camera.
A transverse differential dark field confocal microscopic measurement method specifically comprises the following steps:
s1, parallel laser beams emitted by a laser are amplified through the beam diameter of a beam expander, then are changed into linearly polarized light through a polarizing film, and are reflected by a plane reflector after passing through a polarization splitting film, a quarter-wave plate and a cone lens in sequence; the reflected light beam is shaped into an annular light beam after passing through the conical lens again, the polarization direction changes by 90 degrees after passing through the quarter-wave plate again, and the annular light beam is reflected to the first semi-reflecting and semi-transmitting film by the polarization splitting film; the annular light beam is reflected by the semi-reflecting and semi-permeable membrane I and the two-dimensional scanning galvanometer, is focused to the front focal plane of the tube lens through the scanning lens, generates annular parallel light beams through the tube lens to be incident on the objective lens, forms a focusing light spot on the sample to be detected, and realizes annular light illumination on the sample to be detected;
s2, controlling the deflection of the two-dimensional scanning galvanometer to enable a focusing light spot to perform two-dimensional scanning on a sample, wherein direct reflected light and scattered light in the surface and the subsurface of the sample to be detected sequentially pass through the objective lens, the tube lens, the scanning lens and the two-dimensional scanning galvanometer and then transmit the semi-reflective and semi-transparent film I, so that annular light scanning of the sample to be detected is realized;
s3, dividing the light beam incident to the semi-reflective and semi-transparent film II from the semi-reflective and semi-transparent film I into two detection light beams:
in a transmission light path, a light beam passes through a first diaphragm, direct reflected light of the sample to be detected is shielded and filtered, scattered light of the sample to be detected is focused on a focal plane through a second polarizing film and a first focusing lens in sequence and is positioned on the left side of the central position of the focal plane, and the light beam shielded and filtered by the first pinhole is collected by a first camera;
in a reflection light path, a light beam passes through a second diaphragm, the direct reflection light of the sample to be detected is shielded and filtered, the scattered light of the sample to be detected is focused on a focal plane through a third polarizing film and a second focusing lens in sequence but is positioned on the right side of the central position of the focal plane, and the light beam shielded and filtered by a second pinhole is collected by a second camera; completing differential confocal detection of the sample to be detected;
and S4, moving the sample to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample to be measured to realize the three-dimensional microscopic measurement of the sample to be measured.
According to the technical scheme, compared with the prior art, the transverse differential dark field confocal microscopic measurement device has the following beneficial effects:
firstly, the device in the invention uses the combination of the cone lens and the plane reflector to shape the Gaussian beam into an annular beam with adjustable inner and outer diameters, utilizes annular light illumination with proper aperture and complementary aperture shielding detection to effectively separate a sample reflection signal and a scattering signal, overcomes the defect of traditional confocal measurement of the subsurface defect of a sample, and realizes the nanometer-level high-precision detection of the subsurface defect of a high-performance optical element and a micro-electro-mechanical element;
secondly, the invention uses two detection light paths which are focused on the left side and the right side of the central position of the focal plane to scan the object to be detected, and differential processing is carried out to carry out differential detection; the transverse sensitivity, linearity and signal-to-noise ratio of the measuring system are improved by the differential confocal light path layout and detection, and common mode noise caused by environment state difference, light source light intensity fluctuation, detector electrical drift and the like can be obviously inhibited.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a transverse differential dark-field confocal microscopy measurement device provided by the invention;
in the figure: the device comprises a laser 1, a beam expander 2, a first polarizer 3, a 4 polarization beam splitting film, a 5 quarter wave plate, a 6 cone lens, a 7 plane reflector, a first semi-reflecting and semi-transmitting film 8, a two-dimensional scanning galvanometer 9, a scanning lens 10, a tube lens 11, an objective lens 12, a 13 sample, a second semi-reflecting and semi-transmitting film 14, a first diaphragm 15, a second polarizer 16, a first focusing lens 17, a first 18 pinhole, a first camera 19, a second diaphragm 20, a third polarizer 21, a second focusing lens 22, a second 23 pinhole and a second camera 24.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a transverse differential dark field confocal microscopic measuring device, which comprises: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module includes according to light propagation direction in proper order: the device comprises a laser 1, a beam expander 2, a polarizer I3, a polarization splitting film 4, a quarter-wave plate 5, a cone lens 6 and a plane reflector 7;
the annular light scanning module includes according to light propagation direction in proper order: the device comprises a semi-reflecting and semi-permeable membrane I8, a two-dimensional scanning galvanometer 9, a scanning lens 10, a tube lens 11 and an objective lens 12;
the differential confocal detection module includes: a second semi-reflecting and semi-permeable membrane 14 and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises according to the light propagation direction: the device comprises a diaphragm I15, a polaroid II 16, a focusing lens I17, a pinhole I18 and a camera I19; the reflection light path unit includes in proper order according to the light propagation direction: a second diaphragm 20, a third polarizing plate 21, a second focusing lens 22, a second pinhole 23 and a second camera 24;
the polarization beam splitting film 4 is arranged corresponding to the first semi-reflective and semi-transparent film 8, and the first semi-reflective and semi-transparent film 8 is arranged corresponding to the second semi-reflective and semi-transparent film 14;
the light beam reflected from the polarization beam splitting film 4 is reflected and transmitted through the semi-reflecting and semi-transmitting film I8; the light beam transmitted by the first transflective film 8 is reflected and transmitted by the second transflective film 14 again.
In order to further implement the technical scheme, the combination of the cone lens 6 and the plane reflector 7 shapes the Gaussian beam into annular light with adjustable inner and outer diameters, the beam expander 2 arranged at the front end of the light path of the cone lens 6 is used for adjusting the inner diameter of the annular light, the larger the diameter of the output light spot of the beam expander 2 is, the larger the thickness of the annular light is, and the smaller the inner diameter is; the size of the outer diameter of the annular light depends on the distance between the conical lens 6 and the plane reflector 7, and the longer the relative distance is, the larger the outer diameter is; the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens 12, and the requirement for observing a sample is met.
In order to further implement the above solution, the working surface of the scan lens 10 is arranged at the front focal plane of the tube mirror 11.
In order to further implement the above technical solution, the sample 13 to be measured is disposed in front of the objective lens 12, and the ring light is incident on the objective lens 12 and then focused on the sample 13 to be measured.
In order to further implement the technical scheme, the aperture of the first diaphragm 15 and the aperture of the second diaphragm 20 are complementarily matched with the inner diameter of the annular light, the first diaphragm 15 and the second diaphragm 20 completely shield the reflected light beam from the sample 13 to be detected, only the scattered light carrying the information of the sample 13 to be detected is allowed to enter a detection light path, and the reflected signal and the scattered signal from the sample are effectively separated.
In order to further implement the technical scheme, in the transmission light path unit, the transmission light beam is focused at the focal plane and is positioned on the left side of the central position of the focal plane, and the light beam which is shielded and filtered by the pinhole I18 is collected by the camera I19;
in the reflection optical path unit, the reflected light beam is focused at the focal plane and is positioned at the right side of the central position of the focal plane, and the light beam after being shielded and filtered by the second pinhole 23 is collected by the second camera 24.
It should be noted that:
the device has an optical path layout for transverse differential detection due to the two optical path units of the reflection optical path and the transmission optical path.
A transverse differential dark field confocal microscopic measurement method specifically comprises the following steps:
s1, parallel laser beams emitted by a laser 1 are amplified in beam diameter through a beam expander 2, then are changed into linearly polarized light through a polarizer I3, and are reflected by a plane reflector 7 after passing through a polarization splitting film 4, a quarter-wave plate 5 and a cone lens 6 in sequence; the reflected light beam is shaped into an annular light beam after passing through the conical lens 6 again, the polarization direction changes by 90 degrees after passing through the quarter-wave plate 5 again, and the annular light beam is reflected to the semi-reflecting and semi-transmitting film I8 by the polarization splitting film 4; the annular light beam is reflected by a half-reflecting and half-transmitting film I8 and a two-dimensional scanning galvanometer 9, is focused to the front focal plane of a tube lens 11 through a scanning lens 10, generates an annular parallel light beam through the tube lens 11 and enters an objective lens 12, and forms a focusing light spot on a sample 13 to be measured, so that annular light illumination on the sample 13 to be measured is realized;
s2, controlling the deflection of the two-dimensional scanning galvanometer 9 to enable a focusing light spot to perform two-dimensional scanning on the sample 13, and transmitting a semi-reflecting and semi-permeable membrane I8 after directly reflected light and scattered light in the surface and the subsurface of the sample 13 to be detected sequentially pass through the objective lens 12, the tube lens 11, the scanning lens 10 and the two-dimensional scanning galvanometer 9 to realize annular light scanning of the sample 13 to be detected;
s3, dividing the light beam incident to the semi-reflective and semi-transparent film II 14 from the semi-reflective and semi-transparent film I8 into two detection light beams:
in a transmission light path, a light beam passes through a first diaphragm 15, direct reflected light of a sample 13 to be detected is shielded and filtered, scattered light of the sample 13 to be detected is focused on a focal plane through a second polarizing film 16 and a first focusing lens 17 in sequence and is positioned on the left side of the central position of the focal plane, and the light beam shielded and filtered by a first pinhole 18 is collected by a first camera 19;
in the reflection light path, the light beam passes through a second diaphragm 20, the direct reflection light of the sample to be detected 13 is shielded and filtered, the scattered light of the sample to be detected 13 is focused on the focal plane through a third polarizing film 21 and a second focusing lens 22 in sequence but is positioned on the right side of the central position of the focal plane, and the light beam shielded and filtered by a second pinhole 23 is collected by a second camera 24; completing differential confocal detection of the sample to be detected 13;
and S4, moving the sample 13 to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample 13 to be measured to realize the three-dimensional microscopic measurement on the sample 13 to be measured.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A transverse differential dark-field confocal microscopy measurement device, comprising: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illuminating module sequentially comprises the following components in the light propagation direction: the device comprises a laser (1), a beam expander (2), a polarizer I (3), a polarization splitting film (4), a quarter-wave plate (5), a cone lens (6) and a plane reflector (7);
the annular light scanning module sequentially comprises according to the light propagation direction: the device comprises a half-reflecting half-transparent film I (8), a two-dimensional scanning galvanometer (9), a scanning lens (10), a tube mirror (11) and an objective lens (12);
the differential confocal detection module comprises: a semi-reflecting and semi-permeable membrane II (14) and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises the following components according to the light propagation direction: the device comprises a diaphragm I (15), a polaroid II (16), a focusing lens I (17), a pinhole I (18) and a camera I (19);
the reflection light path unit sequentially comprises the following components according to the light propagation direction: a diaphragm II (20), a polarizing plate III (21), a focusing lens II (22), a pinhole II (23) and a camera II (24);
the polarization light splitting film (4) and the semi-reflecting and semi-permeable film I (8) are arranged correspondingly, and the semi-reflecting and semi-permeable film I (8) and the semi-reflecting and semi-permeable film II (14) are arranged correspondingly;
the light beam reflected from the polarization splitting film (4) is reflected and transmitted through the semi-reflecting and semi-transmitting film I (8); the light beams transmitted by the first transflective film (8) are reflected and transmitted by the second transflective film (14) again.
2. The transverse differential dark field confocal microscopy device according to claim 1, characterized in that the combination of the cone lens (6) and the plane reflector (7) shapes the Gaussian beam into annular light with adjustable inner and outer diameters, the beam expander (2) placed at the front end of the light path of the cone lens (6) is used for adjusting the inner diameter of the annular light, the larger the diameter of the output light spot of the beam expander (2), the larger the thickness of the annular light and the smaller the inner diameter; the size of the outer diameter of the annular light depends on the distance between the conical lens (6) and the plane reflector (7), and the outer diameter is larger when the relative distance is longer; the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens (12).
3. The transverse differential dark-field confocal microscopy measurement device according to claim 1, characterized in that the scanning lens (10) working surface is arranged at the front focal plane of the tube mirror (11).
4. The confocal microscopy apparatus according to claim 1, wherein the sample (13) is placed in front of the objective (12), and the ring light is incident on the objective (12) and focused on the sample (13).
5. The confocal microscopy apparatus according to claim 4, wherein the aperture of the first diaphragm (15) and the second diaphragm (20) is complementary matched to the inner diameter of the ring-shaped light, and the first diaphragm (15) and the second diaphragm (20) completely block the reflected light beam from the sample (13) to be detected and only allow the scattered light carrying the information of the sample (13) to enter the detection light path.
6. The transverse differential dark-field confocal microscopy measurement device according to claim 1,
in the transmission light path unit, the transmission light beam is focused at a focal plane and is positioned at the left side of the central position of the focal plane, and the light beam which is shielded and filtered by a first pinhole (18) is collected by a first camera (19);
in the reflection light path unit, the reflected light beam is focused at the focal plane and is positioned at the right side of the central position of the focal plane, and the light beam which is shielded and filtered by the second pinhole (23) is collected by the second camera (24).
7. A transverse differential dark-field confocal microscopy measurement method is based on the transverse differential dark-field confocal microscopy measurement device disclosed by any one of claims 1-6, and is characterized by comprising the following steps:
s1, parallel laser beams emitted by a laser (1) are amplified through a beam expander (2), then are changed into linearly polarized light through a polarizer I (3), and are reflected by a plane reflector (7) after passing through a polarization splitting film (4), a quarter-wave plate (5) and a cone lens (6) in sequence; the reflected light beam is shaped into an annular light beam after passing through the conical lens (6) again, the polarization direction changes by 90 degrees after passing through the quarter-wave plate (5) again, and the annular light beam is reflected to a semi-reflecting and semi-transmitting film I (8) by the polarization splitting film (4); the annular light beam is reflected by the semi-reflecting and semi-permeable film I (8) and the two-dimensional scanning galvanometer (9), is focused to the front focal plane of the tube lens (11) through the scanning lens (10), and generates an annular parallel light beam through the tube lens (11) to enter the objective lens (12) to form a focusing light spot on the sample (13) to be measured, so that the annular light illumination of the sample (13) to be measured is realized;
s2, controlling the deflection of the two-dimensional scanning galvanometer (9) to enable a focusing light spot to perform two-dimensional scanning on a sample (13), wherein directly reflected light and scattered light in the surface and the subsurface of the sample (13) to be detected sequentially pass through the objective lens (12), the tube lens (11), the scanning lens (10) and the two-dimensional scanning galvanometer (9) and then transmit the semi-reflecting and semi-transmitting film I (8), so that annular light scanning of the sample (13) to be detected is realized;
s3, dividing the light beam incident to the semi-reflective and semi-transparent film II (14) from the semi-reflective and semi-transparent film I (8) into two detection light beams:
in a transmission light path, a light beam passes through a first diaphragm (15), directly reflected light of the sample (13) to be detected is shielded and filtered, scattered light of the sample (13) to be detected is focused on a focal plane through a second polarizing film (16) and a first focusing lens (17) in sequence and is positioned on the left side of the central position of the focal plane, and the light beam shielded and filtered by a first pinhole (18) is collected by a first camera (19);
in a reflection light path, a light beam passes through a second diaphragm (20), directly reflected light of the sample (13) to be detected is shielded and filtered, scattered light of the sample (13) to be detected is focused on a focal plane but is positioned on the right side of the central position of the focal plane through a third polarizing plate (21) and a second focusing lens (22) in sequence, and the light beam shielded and filtered by a second pinhole (23) is collected by a second camera (24); completing differential confocal detection of the sample (13) to be detected;
and S4, moving the sample (13) to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample (13) to be measured to realize the three-dimensional microscopic measurement of the sample (13) to be measured.
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Cited By (2)
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| CN113125436A (en) * | 2021-04-22 | 2021-07-16 | 华中科技大学 | Detection system and method based on optical dark field microscopy |
| CN113984771A (en) * | 2021-09-24 | 2022-01-28 | 哈尔滨工业大学 | Depth learning dark field confocal microscopic measurement device and method based on vector polarized light |
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| CN113984771B (en) * | 2021-09-24 | 2023-07-28 | 哈尔滨工业大学 | Deep learning dark field confocal microscopic measurement device and method based on vector polarized light |
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| CN111257225B (en) | 2023-08-15 |
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