CN110998096B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN110998096B
CN110998096B CN201880050134.0A CN201880050134A CN110998096B CN 110998096 B CN110998096 B CN 110998096B CN 201880050134 A CN201880050134 A CN 201880050134A CN 110998096 B CN110998096 B CN 110998096B
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CN
China
Prior art keywords
cylindrical member
cylindrical
motor
rotating shaft
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880050134.0A
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English (en)
Chinese (zh)
Other versions
CN110998096A (zh
Inventor
铃木敏生
町家贤二
田中智成
木村康宏
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Ulvac Inc
Original Assignee
Ulvac Inc
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Publication date
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Publication of CN110998096A publication Critical patent/CN110998096A/zh
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Publication of CN110998096B publication Critical patent/CN110998096B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
CN201880050134.0A 2017-08-02 2018-03-29 真空泵 Active CN110998096B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017149624 2017-08-02
JP2017-149624 2017-08-02
PCT/JP2018/013146 WO2019026340A1 (ja) 2017-08-02 2018-03-29 真空ポンプ

Publications (2)

Publication Number Publication Date
CN110998096A CN110998096A (zh) 2020-04-10
CN110998096B true CN110998096B (zh) 2021-03-23

Family

ID=65233720

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880050134.0A Active CN110998096B (zh) 2017-08-02 2018-03-29 真空泵

Country Status (4)

Country Link
JP (1) JP6524364B1 (ja)
CN (1) CN110998096B (ja)
TW (1) TW201910639A (ja)
WO (1) WO2019026340A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI727619B (zh) * 2020-01-20 2021-05-11 銳宸企業有限公司 耐壓馬達
DE102021212109A1 (de) 2021-10-27 2023-04-27 Zf Friedrichshafen Ag Verfahren zur Herstellung eines Spaltrohrs für eine elektrische Maschine
KR102437094B1 (ko) * 2022-04-25 2022-08-30 ㈜글로텍 냉각스크린 및 냉각장치가 구비된 스크류형 진공펌프

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007049866A (ja) * 2005-08-12 2007-02-22 Toshiba Industrial Products Manufacturing Corp キャンドモータ用樹脂製キャン及びその製造方法、射出成形金型、キャンドモータ、キャンドモータポンプ
CN202468326U (zh) * 2012-02-23 2012-10-03 台州市星光真空设备制造有限公司 一种真空泵
CN202851381U (zh) * 2012-10-23 2013-04-03 河北深海电器有限公司 一种直流无刷磁力水泵
JP2014039366A (ja) * 2012-08-13 2014-02-27 Ebara Corp キャンドモータ、真空ポンプ
JP2014039367A (ja) * 2012-08-13 2014-02-27 Ebara Corp キャンドモータ、真空ポンプ、キャンの製造方法
JP2015008591A (ja) * 2013-06-25 2015-01-15 株式会社荏原製作所 キャンドモータ、及び真空ポンプ装置
CN205811779U (zh) * 2016-06-16 2016-12-14 日本电产凯宇汽车电器（江苏）有限公司 一种具有水冷却和水润滑功能的电动水泵

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007049866A (ja) * 2005-08-12 2007-02-22 Toshiba Industrial Products Manufacturing Corp キャンドモータ用樹脂製キャン及びその製造方法、射出成形金型、キャンドモータ、キャンドモータポンプ
CN202468326U (zh) * 2012-02-23 2012-10-03 台州市星光真空设备制造有限公司 一种真空泵
JP2014039366A (ja) * 2012-08-13 2014-02-27 Ebara Corp キャンドモータ、真空ポンプ
JP2014039367A (ja) * 2012-08-13 2014-02-27 Ebara Corp キャンドモータ、真空ポンプ、キャンの製造方法
CN202851381U (zh) * 2012-10-23 2013-04-03 河北深海电器有限公司 一种直流无刷磁力水泵
JP2015008591A (ja) * 2013-06-25 2015-01-15 株式会社荏原製作所 キャンドモータ、及び真空ポンプ装置
CN205811779U (zh) * 2016-06-16 2016-12-14 日本电产凯宇汽车电器（江苏）有限公司 一种具有水冷却和水润滑功能的电动水泵

Also Published As

Publication number Publication date
JP6524364B1 (ja) 2019-06-05
JPWO2019026340A1 (ja) 2019-08-08
TW201910639A (zh) 2019-03-16
WO2019026340A1 (ja) 2019-02-07
CN110998096A (zh) 2020-04-10

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