CN110960931B - 真空配管阱装置、真空配管阱系统以及配管清理方法 - Google Patents

真空配管阱装置、真空配管阱系统以及配管清理方法 Download PDF

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Publication number
CN110960931B
CN110960931B CN201910857270.7A CN201910857270A CN110960931B CN 110960931 B CN110960931 B CN 110960931B CN 201910857270 A CN201910857270 A CN 201910857270A CN 110960931 B CN110960931 B CN 110960931B
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vacuum
piping
trap
vacuum piping
cylinder
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CN110960931A (zh
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堀冈佑吉
初春
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Henan Yilun Electronic Technology Co ltd
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Henan Yilun Electronic Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/66—Regeneration of the filtering material or filter elements inside the filter
    • B01D46/70—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0091—Including arrangements for environmental or personal protection
    • B01D46/0093—Including arrangements for environmental or personal protection against fire or explosion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B01D46/26—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/66—Regeneration of the filtering material or filter elements inside the filter
    • B01D46/79—Regeneration of the filtering material or filter elements inside the filter by liquid process

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
CN201910857270.7A 2018-10-01 2019-09-11 真空配管阱装置、真空配管阱系统以及配管清理方法 Active CN110960931B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-186869 2018-10-01
JP2018186869A JP6562329B1 (ja) 2018-10-01 2018-10-01 真空配管トラップ装置、真空配管トラップシステム及び配管清掃方法

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CN110960931A CN110960931A (zh) 2020-04-07
CN110960931B true CN110960931B (zh) 2021-11-23

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CN (1) CN110960931B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111013284A (zh) * 2019-12-31 2020-04-17 索罗贝格过滤消声器制造(苏州)有限公司 一种便于清洁的油雾过滤分离系统
CN111172598B (zh) * 2020-01-10 2022-08-19 郑州合晶硅材料有限公司 掺磷单晶硅生产中防尘爆的抽真空方法及应用其的掺磷单晶硅生产方法
CN115582317A (zh) * 2022-09-02 2023-01-10 宝之川电气设备有限公司 一种高低压电器外壳辅助加工用夹持工装
CN116657100B (zh) * 2023-06-12 2024-01-23 扬州吉山津田光电科技有限公司 一种立式真空蒸镀机

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TW457300B (en) * 1996-11-13 2001-10-01 Tokyo Electron Ltd Trap apparatus
JP2004033855A (ja) * 2002-07-01 2004-02-05 Electric Power Dev Co Ltd ガス集塵フィルタとその製造方法及び排ガス処理方法
CN1658939A (zh) * 2002-04-11 2005-08-24 摩必斯技术公司 用于从研磨的聚氨酯颗粒和多元醇液体的混合物中连续除去空气的设备和方法
CN1918369A (zh) * 2004-02-07 2007-02-21 金泰洙 使用离心式叶轮的湿型空气净化装置
EP1867267A2 (en) * 2006-06-14 2007-12-19 Toshiba Tec Kabushiki Kaisha Vaccum cleaner having a filter capable of collecting dust
CN106139786A (zh) * 2015-03-16 2016-11-23 青海聚能钛业有限公司 一种深冷真空过滤设备
CN106669301A (zh) * 2016-09-13 2017-05-17 沈阳隆基电磁科技股份有限公司 一种用于单晶生长炉的真空除尘设备

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FR2620049B2 (fr) * 1986-11-28 1989-11-24 Commissariat Energie Atomique Procede de traitement, stockage et/ou transfert d'un objet dans une atmosphere de haute proprete, et conteneur pour la mise en oeuvre de ce procede
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム
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JP2000114185A (ja) * 1998-10-05 2000-04-21 Mitsubishi Electric Corp 未反応昇華性ガストラップ装置およびその洗浄方法
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JP2000260739A (ja) * 1999-03-11 2000-09-22 Kokusai Electric Co Ltd 基板処理装置および基板処理方法
US6635114B2 (en) * 1999-12-17 2003-10-21 Applied Material, Inc. High temperature filter for CVD apparatus
JP4893990B2 (ja) * 2006-06-21 2012-03-07 常広 武田 ヘリウム精製器
JP4915727B2 (ja) * 2006-07-24 2012-04-11 東京理化器械株式会社 冷却トラップ装置
JP5460982B2 (ja) * 2008-07-30 2014-04-02 東京エレクトロン株式会社 弁体、粒子進入阻止機構、排気制御装置及び基板処理装置
JP2010036054A (ja) * 2008-07-31 2010-02-18 Sumco Corp サイクロン集塵装置及び単結晶引き上げシステム
CN201551929U (zh) * 2009-11-26 2010-08-18 北京有色金属研究总院 一种用于直拉硅单晶炉的尾气自净化过滤装置
WO2013011582A1 (ja) * 2011-07-20 2013-01-24 Ｆｔｂ研究所株式会社 シリコン単結晶成長装置の真空配管トラップシステム及びそのシステムを利用した配管清掃方法
JP6331747B2 (ja) * 2014-06-18 2018-05-30 富士通株式会社 電子機器
CN204816042U (zh) * 2015-08-14 2015-12-02 麦斯克电子材料有限公司 单晶炉真空系统用自动清洁过滤器
CN105498380A (zh) * 2016-01-22 2016-04-20 青岛赛瑞达电子科技有限公司 一种真空过滤器
KR101852435B1 (ko) * 2016-05-03 2018-04-26 엘지전자 주식회사 진공 청소기
CN206897058U (zh) * 2017-06-08 2018-01-19 浙江晶盛机电股份有限公司 一种自动除尘过滤装置
CN108159793A (zh) * 2017-12-29 2018-06-15 浙江安吉铭瑞汽车销售有限公司 一种空气滤芯的干燥防尘方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816046A (en) * 1987-04-22 1989-03-28 Nihon Shinku Gijutsu Kabushiki Kaisha Fine particle collector trap for vacuum evacuating system
TW457300B (en) * 1996-11-13 2001-10-01 Tokyo Electron Ltd Trap apparatus
CN1658939A (zh) * 2002-04-11 2005-08-24 摩必斯技术公司 用于从研磨的聚氨酯颗粒和多元醇液体的混合物中连续除去空气的设备和方法
JP2004033855A (ja) * 2002-07-01 2004-02-05 Electric Power Dev Co Ltd ガス集塵フィルタとその製造方法及び排ガス処理方法
CN1918369A (zh) * 2004-02-07 2007-02-21 金泰洙 使用离心式叶轮的湿型空气净化装置
EP1867267A2 (en) * 2006-06-14 2007-12-19 Toshiba Tec Kabushiki Kaisha Vaccum cleaner having a filter capable of collecting dust
CN106139786A (zh) * 2015-03-16 2016-11-23 青海聚能钛业有限公司 一种深冷真空过滤设备
CN106669301A (zh) * 2016-09-13 2017-05-17 沈阳隆基电磁科技股份有限公司 一种用于单晶生长炉的真空除尘设备

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JP6562329B1 (ja) 2019-08-21
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