CN110952078B - 半导体装置的制造方法、存储介质和基板处理装置 - Google Patents

半导体装置的制造方法、存储介质和基板处理装置 Download PDF

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CN110952078B
CN110952078B CN201910865389.9A CN201910865389A CN110952078B CN 110952078 B CN110952078 B CN 110952078B CN 201910865389 A CN201910865389 A CN 201910865389A CN 110952078 B CN110952078 B CN 110952078B
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gas
raw material
nozzle
gas supply
processing chamber
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CN110952078A (zh
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竹林雄二
高木康祐
平野敦士
中川隆一
矶边纪之
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Kokusai Electric Corp
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