CN110864536B - Rotary pulling-up type wafer drying machine - Google Patents
Rotary pulling-up type wafer drying machine Download PDFInfo
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- CN110864536B CN110864536B CN201911092079.4A CN201911092079A CN110864536B CN 110864536 B CN110864536 B CN 110864536B CN 201911092079 A CN201911092079 A CN 201911092079A CN 110864536 B CN110864536 B CN 110864536B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/18—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of materials being carried by endless belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/02—Applications of driving mechanisms, not covered by another subclass
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/14—Chambers, containers, receptacles of simple construction
- F26B25/18—Chambers, containers, receptacles of simple construction mainly open, e.g. dish, tray, pan, rack
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention relates to the technical field of dryers, in particular to a rotary pulling-up type wafer dryer, which comprises a base, a vertical plate, a chain wheel assembly, a driving piece and a chain, wherein the vertical plate is arranged on the base; the fixing mechanism comprises a rotating arm, a rotating disc and a fixing seat; the fixed seat is fixedly connected with the chain; the vertical plate is provided with a rotation stopping plate at the top of the chain; the vertical plate is provided with a rotary guide plate at the bottom of the chain; the base is provided with a water tank; and an air injection mechanism is arranged in the water tank. According to the invention, by changing the nozzle configuration, the airflow parameters can be conveniently adjusted, and the drying effect is ensured; the rotary table drives the hanger mechanism to rotate in the cleaning process, so that the stirring effect of the hanger mechanism on water flow can be utilized, and the cleaning effect is improved; in the wafer lifting process, the circumferential position of the hanger mechanism can be covered by airflow along with the rotation of the hanger mechanism, so that the drying dead angle and water accumulation point are avoided, and the drying effect is improved.
Description
Background
In the production process of semiconductor integrated circuits, wafer cleaning and drying are the most frequent production processes, and the cleaning and drying quality directly affects the yield of final chips. At present, the most advanced mode for cleaning and drying the wafer is the Marangoni drying method, which is to spray a high-temperature IPA vapor and nitrogen mixed gas to a meniscus of the wafer in contact with deionized water to induce the water and the surface of the wafer to generate the Marangoni effect when the wafer is pulled out of the ion water surface, so as to dry the wafer. In the existing scheme for drying the wafer by adopting the Marangley effect principle, the wafer is cleaned and dried in an intermittent production mode, the efficiency is low, and the requirement on industrial production efficiency cannot be met. In the cleaning process, the wafer is in a static state in water, and the contact interface between the water and the wafer has no fluidity, so that the cleaning effect is not ideal. The distance and the angle between the wafer and the air injection device are fixed in the lifting and drying process, and air flow easily forms dead angles at certain positions to influence the drying effect.
Disclosure of Invention
The present invention is directed to overcoming the above-mentioned shortcomings of the prior art and providing a rotary lift type wafer dryer.
The purpose of the invention is realized by the following technical scheme: a rotary pulling-up type wafer drying machine comprises a base, a vertical plate connected with the base, a chain wheel assembly rotatably connected to the vertical plate, a driving piece used for driving the chain wheel assembly to rotate and a chain sleeved on the chain wheel assembly;
a plurality of hanging tool mechanisms are arranged on the chain; a fixing mechanism is arranged between the hanger mechanism and the chain;
the fixing mechanism comprises a rotating arm clamped on the hanger mechanism, a rotary table fixedly connected with the rotating arm and a fixed seat rotatably connected with the rotary table; the fixed seat is fixedly connected with the chain;
the vertical plate is provided with a rotation stopping plate at the top of the chain; the rotation stopping plate is used for abutting against the rotating arm; the vertical plate is provided with a rotary guide plate at the bottom of the chain; the rotary guide plate is used for abutting against the rotary disc;
the base is provided with a water tank; an air injection mechanism is arranged in the water tank; the hanger mechanism enters the water tank through the rotary guide plate.
The invention is further provided that the chain wheel assembly comprises an upper driving wheel, an upper driven wheel, a lower driving wheel and a lower driven wheel; the driving piece is a first motor; the output end of the first motor is connected with the upper driving wheel; the chain is sleeved on the upper driving wheel, the upper driven wheel, the lower driving wheel and the lower driven wheel.
The invention is further provided that the fixed seat is connected with a joint; the joint is fixedly connected with the chain through a pin shaft.
The invention further provides that the hanger mechanism comprises a frame; a plurality of grabbing components are arranged in the frame; the grabbing component comprises a first movable groove arranged in the frame, a second movable groove arranged in the frame, a piston movably arranged in the first movable groove, a clamping jaw movably extending in the second movable groove and a lever rotatably connected with the frame; two ends of the lever are respectively connected with the piston and the clamping jaw;
an air groove is formed outside the frame; the first movable groove is provided with a clamping jaw air hole communicated with the air groove; the hanger mechanism further comprises a cover plate connected with the frame; the cover plate is provided with a cover plate air hole communicated with the air groove; the rotating arm is provided with a rotating arm air hole communicated with the cover plate air hole and an air passage communicated with the rotating arm air hole; the fixing seat is provided with an air inlet communicated with the air passage.
The invention is further provided that the grabbing components are an upper grabbing component and a lower grabbing component which are arranged at the upper end and the lower end of the frame, and a left grabbing component and a right grabbing component which are arranged at the left end and the right end of the frame; the air grooves comprise a first air groove arranged on one side of the frame and a second air groove arranged on the other side of the frame; the cover plate comprises a first cover plate arranged on one side of the frame and a second cover plate arranged on the other side of the frame; the first cover plate is provided with a first cover plate air hole communicated with the first air groove; the second cover plate is provided with a second cover plate air hole communicated with the second air groove; the rotating arm air holes comprise a first rotating arm air hole communicated with the first cover plate air hole and a second rotating arm air hole communicated with the second cover plate air hole; the air passage comprises a first air passage communicated with the first rotating arm air hole and a second air passage communicated with the second rotating arm air hole; the air inlet holes comprise a first air inlet hole communicated with the first air passage and a second air inlet hole communicated with the second air passage; the clamping jaw air hole of the upper grabbing component and the clamping jaw air hole of the lower grabbing component are respectively communicated with the first air groove; the clamping jaw air hole of the left grabbing component and the clamping jaw air hole of the right grabbing component are communicated with the second air groove respectively.
The invention is further provided that the air injection mechanism comprises an outer pipe fixed on the water tank, an inner pipe sleeved in the outer pipe and a second motor used for driving the inner pipe to rotate; the second motor is fixed on the water tank; the outer pipe is provided with a slit air outlet; the inner tube is provided with a plurality of air outlet holes.
The invention is further provided that the air outlet holes comprise a plurality of air outlet groups with different shapes; the air outlet group is arranged on the inner pipe along the length direction of the inner pipe.
The invention has the beneficial effects that: 1. by changing the nozzle configuration, the air flow parameters can be conveniently adjusted, and the drying effect is ensured; 2. the rotary table drives the hanger mechanism to rotate in the cleaning process, so that the stirring effect of the hanger mechanism on water flow can be utilized, and the cleaning effect is improved; 3. in the wafer lifting process, the circumferential position of the hanger mechanism can be covered by airflow along with the rotation of the hanger mechanism, so that the drying dead angle and water accumulation point are avoided, and the drying effect is improved.
Description of the drawings
The invention is further illustrated by means of the attached drawings, but the embodiments in the drawings do not constitute any limitation to the invention, and for a person skilled in the art, other drawings can be derived on the basis of the following drawings without inventive effort.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a partial enlarged view of portion A of FIG. 1;
FIG. 3 is a schematic view of the engagement of the hanger mechanism with the securing mechanism of the present invention;
FIG. 4 is an exploded view of the hanger mechanism of the present invention in cooperation with the securing mechanism;
FIG. 5 is a schematic structural view of the hanger mechanism of the present invention with the first cover plate hidden;
FIG. 6 is a schematic structural view of the hanger mechanism of the present invention with the second cover plate hidden;
FIG. 7 is a cross-sectional view of the hanger mechanism of the present invention;
FIG. 8 is a schematic view of the structure of the air injection mechanism of the present invention;
FIG. 9 is a schematic view of the outer tube hidden by the jet mechanism of the present invention;
wherein: 11-a base; 12-standing plates; 13-rotation stopping plate; 14-a rotating guide plate; 2-a chain; 21-a drive member; 22-upper driving wheel; 23-an upper driven wheel; 24-lower driving wheel; 25-lower driven wheel; 31-a swivel arm; 32-a turntable; 33-a fixed seat; 34-a linker; 35-a pin shaft; 4-a water tank; 5-an air injection mechanism; 51-an outer tube; 52-inner tube; 53-a second electric machine; 54-slit air outlet; 55-air outlet holes; 6-frame; 61-an upper gripper assembly; 62-a lower gripper assembly; 63-left grasping assembly; 64-a right grasping assembly; 65-first gas tank; 66-a second gas tank; 71-a first active slot; 72-a second active slot; 73-a piston; 74-a jaw; 75-lever; 76-clamping jaw air hole; 8-cover plate; 81-cover plate air holes; 82-rotating arm air holes; 83-air inlet hole.
Detailed Description
The invention is further described with reference to the following examples.
As shown in fig. 1 to 9, the rotary pull-up type wafer drying machine of the present embodiment includes a base 11, a vertical plate 12 connected to the base 11, a chain wheel assembly rotatably connected to the vertical plate 12, a driving member 21 for driving the chain wheel assembly to rotate, and a chain 2 sleeved on the chain wheel assembly;
a plurality of hanging tool mechanisms are arranged on the chain 2; a fixing mechanism is arranged between the hanger mechanism and the chain 2;
the fixing mechanism comprises a rotating arm 31 clamped on the hanger mechanism, a rotating disc 32 fixedly connected with the rotating arm 31 and a fixed seat 33 rotatably connected with the rotating disc 32; the fixed seat 33 is fixedly connected with the chain 2;
the vertical plate 12 is provided with a rotation stopping plate 13 at the top of the chain 2; the rotation stopping plate 13 is used for abutting against the rotating arm 31; the vertical plate 12 is provided with a rotary guide plate 14 at the bottom of the chain 2; the rotating guide plate 14 is used for abutting against the turntable 32;
the base 11 is provided with a water tank 4; an air injection mechanism 5 is arranged in the water tank 4; the hanger mechanism enters the water tank 4 through the rotating guide plate 14.
Specifically, in the rotary pull-up type wafer dryer of the embodiment, the wafer is suspended on the chain 2 through the hanger mechanism, the hanger mechanism is arranged on the chain 2 through the fixing mechanism, and the hanger mechanism and the rotating arm 31 cannot rotate; when the hanger mechanism is arranged at the top end of the chain 2, the plane of the rotating arm 31 is tightly attached to the rotation stopping plate 13 at the top of the vertical plate 12, the hanger mechanism is in a vertical state, at the moment, the wafer is clamped on the hanger mechanism through an external mechanical arm, the wafer moves downwards along with the hanger mechanism along with the operation of the chain 2, and when the elastic rotating disc 32 on the hanger mechanism is in contact with the rotating guide plate 14, the rotating disc 32 drives the hanger mechanism to rotate. Then the wafer is conveyed into a water tank 4, cleaned and then circularly ascended along with the chain 2 in a rotating way, and a gas injection mechanism 5 arranged at the liquid level at the top of the water tank 4 injects high-temperature nitrogen to induce the meniscus at the contact part of the surface of the wafer and the liquid level to generate the Marangley effect so as to dry the wafer. The wafer continuously moves upwards after running out of the drying area along with the chain 2, the hanger mechanism is oriented in the direction parallel to the chain 2 under the action of the rotation stopping guide plate, and the wafer in the hanger mechanism is taken out by the mechanical arm after reaching the material discharging position.
In the rotary lifting type wafer dryer of the present embodiment, the sprocket assembly includes an upper driving wheel 22, an upper driven wheel 23, a lower driving wheel 24, and a lower driven wheel 25; the driving part 21 is a first motor; the output end of the first motor is connected with an upper driving wheel 22; the chain 2 is sleeved on the upper driving wheel 22, the upper driven wheel 23, the lower driving wheel 24 and the lower driven wheel 25. Every chain link both ends of chain 2 all are provided with the chain link gyro wheel, and the joint of chain link gyro wheel is in the guide rail of chain 2 to increase the operation precision and the stability of chain 2. The above arrangement makes the structure of the chain 2 stable.
In the rotary pull-up type wafer dryer of this embodiment, the fixing seat 33 is connected to a joint 34; the joint 34 is fixedly connected with the chain 2 through a pin shaft 35. The arrangement facilitates the fixing of the hanger mechanism on the chain 2.
In the rotary lifting type wafer dryer of the present embodiment, the hanger mechanism includes a frame 6; a plurality of grabbing components are arranged in the frame 6; the grabbing component comprises a first movable groove 71 arranged in the frame 6, a second movable groove 72 arranged in the frame 6, a piston 73 movably arranged in the first movable groove 71, a clamping jaw 74 movably extending in the second movable groove 72 and a lever 75 rotatably connected with the frame 6; the two ends of the lever 75 are respectively connected with the piston 73 and the clamping jaw 74;
an air groove is formed outside the frame 6; the first movable groove 71 is provided with a clamping jaw air hole 76 communicated with the air groove; the hanger mechanism further comprises a cover plate 8 connected with the frame 6; the cover plate 8 is provided with a cover plate air hole 81 communicated with the air groove; the rotating arm 31 is provided with a rotating arm air hole 82 communicated with the cover plate air hole 81 and an air passage communicated with the rotating arm air hole 82; the fixed seat 33 is provided with an air inlet 83 communicated with the air passage.
In the rotary lifting type wafer drying machine of the embodiment, the grabbing components include an upper grabbing component 61 and a lower grabbing component 62 which are arranged at the upper end and the lower end of the frame 6, and a left grabbing component 63 and a right grabbing component 64 which are arranged at the left end and the right end of the frame 6; the air grooves comprise a first air groove 65 arranged on one side of the frame 6 and a second air groove 66 arranged on the other side of the frame 6; the cover plate 8 comprises a first cover plate 8 arranged on one side of the frame 6 and a second cover plate 8 arranged on the other side of the frame 6; the first cover plate 8 is provided with a first cover plate air hole 81 communicated with the first air groove 65; the second cover plate 8 is provided with a second cover plate air hole 81 communicated with the second air groove 66; the swing arm air holes 82 include a first swing arm air hole 82 communicating with the first cover air hole 81 and a second swing arm air hole 82 communicating with the second cover air hole 81; the air passages include a first air passage in communication with the first rotating arm air hole 82 and a second air passage in communication with the second rotating arm air hole 82; the air inlet holes 83 comprise a first air inlet hole 83 communicated with the first air passage and a second air inlet hole 83 communicated with the second air passage; the clamping jaw air hole 76 of the upper grabbing component 61 and the clamping jaw air hole 76 of the lower grabbing component 62 are respectively communicated with the first air groove 65; the clamping jaw air hole 76 of the left grabbing assembly 63 and the clamping jaw air hole 76 of the right grabbing assembly 64 are respectively communicated with the second air groove 66.
Specifically, taking the left grabbing assembly 63 and the right grabbing assembly 64 as an example, when the clamping jaws 74 of the left grabbing assembly 63 and the clamping jaws 74 of the right grabbing assembly 64 are required to extend, firstly, air is introduced into the second air inlet holes 83 of the fixing seat 33, the air enters the second air passage of the rotating arm 31 from the second air inlet holes 83, and enters the second air groove 66 through the second rotating arm air holes 82 and the first cover plate air holes 81 of the second air passage, and then enters the first movable groove 71 of the left grabbing assembly 63 and the first movable groove 71 of the right grabbing assembly 64 from the clamping jaw air holes 76 of the left grabbing assembly 63 and the clamping jaw air holes 76 of the right grabbing assembly 64 respectively through the second air groove 66, so that the clamping jaws 74 are pushed out through the piston 73 and the lever 75; in addition, the principle of the upper and lower gripper assemblies 61 and 62 controlled through the first intake holes 83 is identical to that of the left and right gripper assemblies 63 and 64, and thus, a description thereof will not be repeated.
The grabbing component controls the opening and closing of the clamping jaws 74 in a pneumatic mode to alternately clamp the wafer, so that the cleaning and drying dead angle is avoided in the wafer cleaning and drying process, and the product yield is improved. When the wafer is loaded, the four clamping jaws 74 simultaneously clamp and position the wafer, when the wafer is washed in water, the wafer is kept in a four-way clamping state, when water is discharged and dried, the upper grabbing component 61 and the lower grabbing component 62 clamp the wafer, the left grabbing component 63 and the right grabbing component 64 open, after the left grabbing component 63 and the right grabbing component 64 discharge water and dry, the left grabbing component 63 and the right grabbing component 64 clamp the wafer, the upper grabbing component 61 and the lower grabbing component 62 loosen the wafer, after the upper grabbing component 61 and the lower grabbing component 62 discharge water and dry, the upper grabbing component 61 and the lower grabbing component 62 clamp the wafer, the left grabbing component 63 and the right grabbing component 64 loosen the wafer until the wafer completely discharges water, and by the alternative clamping mode, the drying defect at the contact part of the clamping jaws 74 and the side wall of the wafer can be avoided.
In the rotary lifting type wafer dryer of the present embodiment, the air injection mechanism 5 includes an outer tube 51 fixed to the water tank 4, an inner tube 52 sleeved in the outer tube 51, and a second motor 53 for driving the inner tube 52 to rotate; the second motor 53 is fixed on the water tank 4; the outer tube 51 is provided with a slit air outlet 54; the inner tube 52 is provided with a plurality of air outlet holes 55.
In the rotary pull-up wafer dryer of this embodiment, the air outlet 55 includes a plurality of air outlet groups with different shapes; the gas outlet group is arranged on the inner pipe 52 along the length direction of the inner pipe 52.
The air injection mechanism 5 is composed of an inner layer of sleeve and an outer layer of sleeve, a plurality of air outlet groups with various configurations are uniformly distributed on the inner pipe 52, and the type of the air outlet group can be rotated by rotating the position of the second motor 53, so that the dispersion characteristic, the flow rate, the air flow direction and other parameters of the air flow are controlled.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the protection scope of the present invention, although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (7)
1. The utility model provides a rotation pulling-up formula wafer desiccator which characterized in that: comprises a base (11), a vertical plate (12) connected with the base (11), a chain wheel component rotationally connected with the vertical plate (12), a driving piece (21) used for driving the chain wheel component to rotate and a chain (2) sleeved on the chain wheel component;
a plurality of hanging tool mechanisms are arranged on the chain (2); a fixing mechanism is arranged between the hanger mechanism and the chain (2);
the fixing mechanism comprises a rotating arm (31) clamped on the hanger mechanism, a rotary disc (32) fixedly connected with the rotating arm (31) and a fixed seat (33) rotatably connected with the rotary disc (32); the fixed seat (33) is fixedly connected with the chain (2);
the vertical plate (12) is provided with a rotation stopping plate (13) at the top of the chain (2); the rotation stopping plate (13) is used for abutting against the rotating arm (31); the vertical plate (12) is provided with a rotary guide plate (14) at the bottom of the chain (2); the rotating guide plate (14) is used for abutting against a turntable (32);
the base (11) is provided with a water tank (4); an air injection mechanism (5) is arranged in the water tank (4); the hanger mechanism enters the water tank (4) through the rotating guide plate (14).
2. A rotary pull-up wafer dryer as claimed in claim 1, wherein: the chain wheel assembly comprises an upper driving wheel (22), an upper driven wheel (23), a lower driving wheel (24) and a lower driven wheel (25); the driving piece (21) is a first motor; the output end of the first motor is connected with an upper driving wheel (22); the chain (2) is sleeved on the upper driving wheel (22), the upper driven wheel (23), the lower driving wheel (24) and the lower driven wheel (25).
3. A rotary pull-up wafer dryer as claimed in claim 1, wherein: the fixed seat (33) is connected with a joint (34); the joint (34) is fixedly connected with the chain (2) through a pin shaft (35).
4. A rotary pull-up wafer dryer as claimed in claim 1, wherein: the hanger mechanism comprises a frame (6); a plurality of grabbing components are arranged in the frame (6); the grabbing assembly comprises a first movable groove (71) arranged in the frame (6), a second movable groove (72) arranged in the frame (6), a piston (73) movably arranged in the first movable groove (71), a clamping jaw (74) movably extending in the second movable groove (72) and a lever (75) rotatably connected with the frame (6); two ends of the lever (75) are respectively connected with the piston (73) and the clamping jaw (74);
an air groove is formed outside the frame (6); the first movable groove (71) is provided with a clamping jaw air hole (76) communicated with the air groove; the hanger mechanism also comprises a cover plate (8) connected with the frame (6); the cover plate (8) is provided with a cover plate air hole (81) communicated with the air groove; the rotating arm (31) is provided with a rotating arm air hole (82) communicated with the cover plate air hole (81) and an air passage communicated with the rotating arm air hole (82); the fixed seat (33) is provided with an air inlet (83) communicated with the air passage.
5. A rotary pull-up wafer dryer as claimed in claim 4, wherein: the grabbing components comprise an upper grabbing component (61) and a lower grabbing component (62) which are arranged at the upper end and the lower end of the frame (6), and a left grabbing component (63) and a right grabbing component (64) which are arranged at the left end and the right end of the frame (6); the air grooves comprise a first air groove (65) arranged on one side of the frame (6) and a second air groove (66) arranged on the other side of the frame (6); the cover plate (8) comprises a first cover plate (8) arranged on one side of the frame (6) and a second cover plate (8) arranged on the other side of the frame (6); the first cover plate (8) is provided with a first cover plate air hole (81) communicated with the first air groove (65); the second cover plate (8) is provided with a second cover plate air hole (81) communicated with the second air groove (66); the rotating arm air holes (82) comprise first rotating arm air holes (82) communicated with the first cover plate air holes (81) and second rotating arm air holes (82) communicated with the second cover plate air holes (81); the air passage comprises a first air passage communicated with the first rotating arm air hole (82) and a second air passage communicated with the second rotating arm air hole (82); the air inlet holes (83) comprise first air inlet holes (83) communicated with the first air passage and second air inlet holes (83) communicated with the second air passage; the clamping jaw air hole (76) of the upper grabbing component (61) and the clamping jaw air hole (76) of the lower grabbing component (62) are respectively communicated with the first air groove (65); and the clamping jaw air hole (76) of the left grabbing assembly (63) and the clamping jaw air hole (76) of the right grabbing assembly (64) are respectively communicated with the second air groove (66).
6. A rotary pull-up wafer dryer as claimed in claim 1, wherein: the air injection mechanism (5) comprises an outer pipe (51) fixed on the water tank (4), an inner pipe (52) sleeved in the outer pipe (51) and a second motor (53) used for driving the inner pipe (52) to rotate; the second motor (53) is fixed on the water tank (4); the outer pipe (51) is provided with a slit air outlet (54); the inner tube (52) is provided with a plurality of air outlet holes (55).
7. A rotary pull-up wafer dryer as claimed in claim 6, wherein: the air outlet holes (55) comprise a plurality of air outlet groups with different shapes; the air outlet group is arranged on the inner pipe (52) along the length direction of the inner pipe (52).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011113392.4A CN112484467A (en) | 2019-11-11 | 2019-11-11 | Rotary pulling-up type wafer drying machine with joint |
| CN201911092079.4A CN110864536B (en) | 2019-11-11 | 2019-11-11 | Rotary pulling-up type wafer drying machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911092079.4A CN110864536B (en) | 2019-11-11 | 2019-11-11 | Rotary pulling-up type wafer drying machine |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011113392.4A Division CN112484467A (en) | 2019-11-11 | 2019-11-11 | Rotary pulling-up type wafer drying machine with joint |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110864536A CN110864536A (en) | 2020-03-06 |
| CN110864536B true CN110864536B (en) | 2020-11-10 |
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ID=69654838
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011113392.4A Withdrawn CN112484467A (en) | 2019-11-11 | 2019-11-11 | Rotary pulling-up type wafer drying machine with joint |
| CN201911092079.4A Active CN110864536B (en) | 2019-11-11 | 2019-11-11 | Rotary pulling-up type wafer drying machine |
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| CN110849127B (en) * | 2019-11-11 | 2021-01-08 | 唐山国芯晶源电子有限公司 | Rotary pulling-up wafer drying method |
| CN116213346A (en) * | 2021-12-03 | 2023-06-06 | 张家港市金邦铝业股份有限公司 | Aluminum profile cleaning equipment |
| CN114353479B (en) * | 2022-03-10 | 2022-07-19 | 智程半导体设备科技(昆山)有限公司 | Wafer drying device |
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| JPH11155413A (en) * | 1997-12-02 | 1999-06-15 | Kyowa Kikai Kk | Egg-treating machine |
| CN1220193A (en) * | 1997-12-19 | 1999-06-23 | 南亚科技股份有限公司 | No-watermark generating method and its device |
| US9275852B2 (en) * | 2012-05-31 | 2016-03-01 | Semes Co., Ltd. | Substrate treating apparatus and substrate treating method |
| CN203817002U (en) * | 2014-05-12 | 2014-09-10 | 湖北韩泰智能设备有限公司 | Multi-station double-chain stepping type piston pin cleaning and rust protection device |
| CN203865413U (en) * | 2014-05-14 | 2014-10-08 | 科峤工业股份有限公司 | Bidirectional positioning device of conveyor |
| CN108687025A (en) * | 2018-05-16 | 2018-10-23 | 安徽宏实自动化装备有限公司 | A kind of piece leaf formula wafer cleaning machine |
| CN209255435U (en) * | 2018-12-06 | 2019-08-16 | 杭州雅妍化妆品有限公司 | A kind of novel spray and drying bottle washing machine |
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