CN110846721A - Monocrystalline silicon texturing additive formula containing polyalcohol and PEG - Google Patents

Monocrystalline silicon texturing additive formula containing polyalcohol and PEG Download PDF

Info

Publication number
CN110846721A
CN110846721A CN201910965957.2A CN201910965957A CN110846721A CN 110846721 A CN110846721 A CN 110846721A CN 201910965957 A CN201910965957 A CN 201910965957A CN 110846721 A CN110846721 A CN 110846721A
Authority
CN
China
Prior art keywords
additive
monocrystalline silicon
water
sodium
peg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910965957.2A
Other languages
Chinese (zh)
Inventor
张丽
陈婉君
卢建红
阎建辉
杨海华
邓小梅
陈文明
刘襄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Institute of Science and Technology
Original Assignee
Hunan Institute of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan Institute of Science and Technology filed Critical Hunan Institute of Science and Technology
Priority to CN201910965957.2A priority Critical patent/CN110846721A/en
Publication of CN110846721A publication Critical patent/CN110846721A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)

Abstract

The invention relates to an additive formula of monocrystalline silicon texturing solution containing polyalcohol and PEG, which comprises the following components: polyol, PEG, organic acid sodium salt, inorganic salt and deionized water. Wherein the polyhydric alcohol is one or a mixture of more of MPD, ethylene glycol, 1, 2-propylene glycol, glycerol and 1, 4-butanediol, and the weight ratio of the polyhydric alcohol to the water is 0.5-2.5: 100; the PEG comprises one or more of PEG200, PEG400, PEG600, PEG800 and PEG1000, and the weight ratio of the PEG to water is 1.0-3.0: 100; the organic sodium salt is one or a mixture of more of sodium succinate, sodium oxalate, sodium benzoate and sodium isophthalate, and the weight ratio of the organic sodium salt to water is 0.1-1.0: 100; the inorganic salt is NaCl, KCl, Na2SO4、K2SO4、Na2SiO3The weight ratio of one or more of the above components to water is 0.1-1.0: 100. The formula of the single crystal silicon surface texturing agent is as follows: adding heavy metal into 1L of deionized water20.0-40.0mL of NaOH solution with the weight percentage concentration of 30 percent, and 8.0-18.0mL of the additive.

Description

Monocrystalline silicon texturing additive formula containing polyalcohol and PEG
Technical Field
The invention belongs to the technical field of solar cell monocrystalline silicon wafers, and particularly relates to a method for influencing texture surface making of a monocrystalline silicon wafer by using the type and content of polyalcohol and polymer thereof.
Background
Renewable resources are those that can be utilized by humans for a long period of time, solar energy being one of the most important, the energy of which is permanent to the earth. It follows that if humans can obtain solar energy in large quantities, efficiently, and at low cost, depending on technology, the energy sources owned by humans are unlimited. At present, the human beings have many ways of utilizing solar energy, but the total amount is very little, wherein the most important way is to carry out photoelectric conversion, and the corresponding core technology is a single crystal silicon solar cell.
The single crystal silicon solar cell mainly absorbs visible light part with the wavelength of 400-700 nm. The main material adopts 3-5 mm of P-type monocrystalline silicon. When light waves irradiate the surface of the cell, photons pass through the antireflection film and enter silicon, and photo-generated electron-hole pairs are excited. Photogenerated carriers contribute to the emission voltage if they can cross the depletion region before recombination. When a load is connected to two ends of the photovoltaic cell, the photovoltaic cell flows from the P area to the N area through the load, and power is output in the load. And then transmitted to each device capable of converting the electric energy through a lead, and the electric energy is converted into other forms of energy. And thus is ultimately utilized by humans.
Texturing on the surface of monocrystalline silicon is an important means for improving the photoelectric conversion efficiency of the silicon solar cell. Texturing is to use the anisotropic etching property of silicon to etch a pyramid-like or honeycomb-like structure on the surface. The purpose is two points: firstly, the area of a PN junction is increased; and secondly, the reflectivity of the monocrystalline silicon solar cell to light is reduced.
Monocrystalline silicon wafers can be etched by a certain concentration of alkali and are anisotropic, i.e. the etch rates on different crystal planes are different, which provides us with texturing possibilities. By using the principle, the monocrystalline silicon piece with the specific crystal orientation is put into the alkaline solution for corrosion, and the texturing operation can be completed. The reaction equation of the silicon wafer surface is as follows:
Si + H2O + 2OH-= SiO3 2-+ 2H2
because factors such as the alkali corrosion rate, the infiltration of the silicon surface, the escape of hydrogen and the like have important influence on the effect of the texturing process, the addition of the additive into the texturing solution is important for the whole texturing system, and the additive can directly influence the photoelectric conversion efficiency of the solar cell. The property can be utilized to select proper additives, so that the texture-making quality is improved, and the product is more complete. For example, when a small amount of surfactant is added into the texturing agent, the surface tension of the texturing solution can be effectively reduced, so that the reaction can be smoothly carried out, and the phenomenon that hydrogen bubbles can not be separated from the surface of the monocrystalline silicon wafer can not occur. A certain amount of acid substances are added into the texturing solution to reduce the concentration of hydroxide ions in the system, so that the reaction of silicon and hydroxide is slowed down, the texturing reaction rate is inhibited, the prepared textured surface is more uniform, and white spots and the like cannot be generated. On the contrary, if the reaction does not proceed sufficiently for a certain period of time, it is optional to add an appropriate amount of alkali to the texturing solution to allow the reaction to proceed smoothly.
At present, the common wool making liquid in industrial production is prepared from NaOH and Na2SiO3Isopropanol, deionized water and the like. The texture-making effect of the texture-making liquid is not ideal, and the size of the obtained pyramid is larger, generally 10-15 μm; the corrosion amount of the silicon chip is relatively large; the texturing stability is poor; the silicon wafer surface after texturing has poor uniformity, and obvious problems of black spots, white spots and the like can be seen. Therefore, if the texturing additive is added into the texturing solution, the problem can be well solved, and the method has important significance.
The invention mainly researches the influence of the types and contents of the polyhydric alcohols and the polymer polyhydric alcohols and other additives on the texturing effect of the monocrystalline silicon surface. Polyhydric alcohols, i.e. alcohols containing two or more hydroxyl groups in the molecule and having the general formula CnH2n+2-x(OH)x(x≥3). The polyhydric alcohol is generally dissolved in water, and most of the polyhydric alcohol is viscous liquid or crystalline solid with the characteristics of high boiling point, strong dissolving capacity for polar substances, low toxicity and volatility and the like. The boiling point, viscosity, relative density, melting point, etc. increase with increasing molecular weight. The polyol can be used for producing industrial products such as alkyd resin, varnish, polyester resin, explosive and the like and used as important intermediates for synthesizing drying oil, adhesive, plasticizer and surfactant. Polyethylene glycol (PEG) is a main representative of polymer polyols, and has the advantages of no toxicity, no irritation, good water solubility, and good compatibility with many organic matter components. They have excellent lubricity, moisture retention and dispersibility, can be used as adhesives, antistatic agents, softeners and the like, and are widely applied to industries such as cosmetics, pharmacy, chemical fibers, rubber, plastics, papermaking, paint, electroplating, pesticides, metal processing, food processing and the like.
Disclosure of Invention
The invention provides an additive of a monocrystalline silicon piece texturing solution, which is characterized in that when the monocrystalline silicon piece for a solar cell is subjected to surface texturing, the additive is added into an alkaline texturing solution, so that an excellent texturing effect is achieved. The size of the suede pyramid is small after the texturing, the distribution is narrow, the reflection of light can be effectively reduced, and therefore the photoelectric conversion efficiency of the assembled solar cell can be improved.
The invention provides an additive formula for monocrystalline silicon piece texturing solution, which comprises the following components: polyol, polymer polyol (polyethylene glycol), organic acid sodium salt, inorganic salt and the balance of deionized water.
On the basis of the scheme, the polyhydric alcohol in the additive is one or a mixture of more of MPD (3-methyl-1, 5-pentanediol), ethylene glycol, 1, 2-propanediol, glycerol and 1, 4-butanediol, and the weight ratio of the polyhydric alcohol to water is 0.5-2.5: 100.
On the basis of the scheme, the polymer polyol in the additive is PEG, the polymer polyol mainly comprises one or a mixture of more of PEG200, PEG400, PEG600, PEG800 and PEG1000, and the weight ratio of the PEG to water is 1.0-3.0: 100.
On the basis of the scheme, the organic sodium salt in the additive is one or a mixture of more of sodium succinate, sodium oxalate, sodium benzoate, sodium phenylacetate and sodium isophthalate, and the weight ratio of the organic sodium salt to water is 0.1-1.0: 100.
On the basis of the scheme, the inorganic salt in the additive is NaCl, KCl and Na2SO4、K2SO4、Na2SiO3One or more of the above components, and the weight ratio of inorganic salt to water is 0.1-1.0: 100.
The invention also provides a formula of the monocrystalline silicon piece surface texture surface making agent, which comprises the following components in percentage by weight: 20.0-40.0mL of NaOH solution with the weight percentage concentration of 30% is added into 1L of deionized water, and 8.0-18.0mL of the additive is added to obtain the alkaline wool making solution.
The surface texturing process of the monocrystalline silicon wafer comprises the following steps: (1) cleaning the cut monocrystalline silicon wafer in a pre-cleaning solution, cleaning the monocrystalline silicon wafer with deionized water, and immersing the monocrystalline silicon wafer in an alkaline wool making solution for wool making, wherein the wool making temperature is 75-90 ℃, and the wool making time is 7-15 min; (2) soaking the textured monocrystalline silicon wafer obtained in the step (1) in deionized water at room temperature for cleaning, and then carrying out mixed acid cleaning; (3) and soaking the acid-washed monocrystalline silicon piece into deionized water, cleaning, soaking the monocrystalline silicon piece into deionized water at 85 ℃, slowly pulling the monocrystalline silicon piece out, and drying the monocrystalline silicon piece in a drying box to obtain the texture-making monocrystalline silicon piece product.
When the alkaline texturing solution prepared by the additive is used for texturing, the size of pyramids formed on the surface of a monocrystalline silicon wafer is smaller than 4 mu m on average, the color of the whole surface of the silicon wafer is uniform, the average reflectivity is lower than 10%, and the etched silicon wafer amount is smaller than 4.5%.
The invention has the advantages that: after the additive is adopted, the texturing time can be shortened, and the texturing effect is obviously improved. The size of the textured pyramid is smaller, the distribution is more uniform, and the reflectivity of the silicon wafer is obviously reduced. The method also has beneficial effects on the finally obtained battery piece, and the yield of the battery piece is improved. In addition, the additive of the invention has no toxicity, no corrosiveness, no irritation, no combustion and explosion hazard, and no harm to human body and environment.
Drawings
FIG. 1 is a scanning electron microscope image of a textured surface of a single crystal silicon wafer obtained by an optimal additive formulation.
FIG. 2 is a scanning electron micrograph of a side of a single crystal silicon wafer obtained with the best additive formulation.
FIG. 3 is a partial enlarged view of a scanning electron microscope of a textured surface of a single crystal silicon wafer obtained by an optimal additive formulation.
FIG. 4 is a partial magnified view of a single crystal silicon wafer side taken by a scanning electron microscope of the best additive formulation.
FIG. 5 is a reflection spectrum of a textured surface of a single crystal silicon wafer obtained by an optimal additive formulation.
Detailed Description
The present invention is further illustrated by the following examples, which are intended to be illustrative only and are not to be construed as limiting the invention.
Example 1
The method comprises the following steps of: 1) preparing an additive: taking 1L of deionized water as a solvent, adding 8.0g of MPD, 40015.0g of PEG, 1.0g of sodium phenylacetate and 3.0g of NaCl for full dissolution; 2) preparing a texturing solution: adding 35.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 14.0mL of additive to obtain alkaline wool making solution; 3) placing the cut monocrystalline silicon piece in a precleaning solution at 65 ℃ for 5min, cleaning the monocrystalline silicon piece with deionized water, and immersing the monocrystalline silicon piece in a texturing solution, wherein the texturing solution temperature is 78 ℃, and the texturing time is 15 min; 4) soaking the textured monocrystalline silicon wafer in deionized water for cleaning for 1.5 min, and then cleaning for 6min by using mixed acid; 5) soaking the monocrystalline silicon wafer after acid washing in deionized water for washing for 1.5 min, then soaking in deionized water at 85 ℃ for slowly pulling out, placing the finished product in a drying box at 65 ℃ for drying for 3h, and obtaining the textured monocrystalline silicon wafer with the pyramid size of 1-4 mu m, the whole surface of the silicon wafer is uniform in color, the minimum reflectivity is 8.5%, and the corrosion silicon amount is 4.3%.
Example 2
The method comprises the following steps of: 1) preparing an additive: taking 1L of deionized water as a solvent, adding 12.0g of 1, 2-propylene glycol, 20.0g of PEG600, 2.0g of sodium isophthalate and 2.0g of KCl, and fully dissolving; 2) preparing a texturing solution: adding 38.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 12.0mL of additive to obtain alkaline wool making solution; 3) placing the cut monocrystalline silicon piece in a precleaning solution at 65 ℃ for 5min, cleaning the monocrystalline silicon piece with deionized water, and immersing the monocrystalline silicon piece in a texturing solution, wherein the temperature of the texturing solution is 82 ℃, and the texturing time is 13 min; 4) soaking the textured monocrystalline silicon wafer in deionized water for cleaning for 1.5 min, and then cleaning for 8min by using mixed acid; 5) and soaking the monocrystalline silicon wafer after acid washing in deionized water, washing for 1.5 min, soaking in deionized water at 85 ℃, slowly pulling out, and drying the finished product in a drying box at 65 ℃ for 3h to obtain the textured monocrystalline silicon wafer.
Example 3
The method comprises the following steps of: 1) preparing an additive: 1L deionized water is taken as a solvent, and 15.0g of 1, 4-butanediol, 20.0g of PEG800, 3.0g of sodium benzoate and Na are added2SO42.0g are fully dissolved; 2) preparing a texturing solution: adding 40.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 16.0mL of additive to obtain alkaline wool making solution; 3) placing the cut monocrystalline silicon piece in a precleaning solution at 65 ℃ for 5min, cleaning the monocrystalline silicon piece with deionized water, and immersing the monocrystalline silicon piece in a texturing solution, wherein the temperature of the texturing solution is 85 ℃, and the texturing time is 14 min; 4) soaking the textured monocrystalline silicon wafer in deionized water for cleaning for 1.5 min, and then cleaning for 6min by using mixed acid; 5) and soaking the monocrystalline silicon wafer after acid washing in deionized water, washing for 1.5 min, soaking in deionized water at 85 ℃, slowly pulling out, and drying the finished product in a drying box at 65 ℃ for 3h to obtain the textured monocrystalline silicon wafer.

Claims (7)

1. An additive for a monocrystalline silicon piece texturing solution is characterized by comprising the following components: polyol, polymer polyol (polyethylene glycol), organic acid sodium salt, inorganic salt and deionized water.
2. The additive of claim 1, wherein the polyol is one or more of MPD, ethylene glycol, 1, 2-propylene glycol, trimethylene glycol and 1, 4-butanediol, and the weight ratio of the polyol to water is 0.5-2.5: 100.
3. The additive of claim 1, wherein the polymer polyol is PEG, and mainly comprises one or more of PEG200, PEG400, PEG600, PEG800 and PEG1000, and the weight ratio of PEG to water is 1.0-3.0: 100.
4. The additive of claim 1, wherein the organic sodium salt is one or a mixture of sodium succinate, sodium oxalate, sodium benzoate and sodium isophthalate, and the weight ratio of the organic sodium salt to water is 0.1-1.0: 100.
5. The additive of claim 1, wherein the inorganic salt is NaCl, KCl, Na2SO4、K2SO4、Na2SiO3One or more of the above components, and the weight ratio of inorganic salt to water is 0.1-1.0: 100.
6. A preparation method of a texturing solution for the surface of a monocrystalline silicon wafer is characterized in that 20.0-40.0mL of NaOH solution with the weight percentage concentration of 30% is added into 1L of deionized water, and 10.0-20.0mL of additive is added to obtain an alkaline texturing solution.
7. Based on the claims 1-6, the texture etching solution prepared by the additive has the advantages that the size of pyramids formed on the surface of a monocrystalline silicon wafer is averagely less than 4 μm, the color of the whole surface of the silicon wafer is relatively uniform, the average reflectivity is less than 10 percent, and the etched silicon wafer amount is less than 4 percent.
CN201910965957.2A 2019-10-12 2019-10-12 Monocrystalline silicon texturing additive formula containing polyalcohol and PEG Pending CN110846721A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910965957.2A CN110846721A (en) 2019-10-12 2019-10-12 Monocrystalline silicon texturing additive formula containing polyalcohol and PEG

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910965957.2A CN110846721A (en) 2019-10-12 2019-10-12 Monocrystalline silicon texturing additive formula containing polyalcohol and PEG

Publications (1)

Publication Number Publication Date
CN110846721A true CN110846721A (en) 2020-02-28

Family

ID=69597330

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910965957.2A Pending CN110846721A (en) 2019-10-12 2019-10-12 Monocrystalline silicon texturing additive formula containing polyalcohol and PEG

Country Status (1)

Country Link
CN (1) CN110846721A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111139531A (en) * 2020-03-18 2020-05-12 常州时创能源股份有限公司 Texturing additive for monocrystalline silicon wafer and application thereof
CN111593413A (en) * 2020-06-30 2020-08-28 常州时创能源股份有限公司 Additive for monocrystalline silicon wafer chain type machine texturing and application thereof

Citations (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102479698A (en) * 2010-11-24 2012-05-30 气体产品与化学公司 Compositions and methods for texturing of silicon wafers
CN103132079A (en) * 2013-02-07 2013-06-05 睿纳能源科技(上海)有限公司 Additive for acid texturing of diamond-wire-cutting polycrystalline silicon slices and application method thereof
CN103266355A (en) * 2013-04-27 2013-08-28 竺峰 Etching agent for polycrystalline silicon wafer and etching method using etching agent
CN103290484A (en) * 2012-02-28 2013-09-11 靖江市精益化学品有限公司 Fourth generation alcohol-free additive not additionally added in suede preparation of monocrystalline silicon
CN103710705A (en) * 2013-12-23 2014-04-09 北京合德丰材料科技有限公司 Additive for acidic texturing liquid of polycrystalline silicon wafers and application thereof
CN103890139A (en) * 2011-10-19 2014-06-25 东友精细化工有限公司 Texture etching solution composition and texture etching method of crystalline silicon wafers
CN104120495A (en) * 2014-07-10 2014-10-29 上海应用技术学院 A texturing liquid used for monocrystalline silicon surface texturing and a preparing method thereof
CN104576831A (en) * 2014-12-31 2015-04-29 江苏顺风光电科技有限公司 Monocrystalline silicon wafer alcohol-free texturing process and texturing additive
CN105133033A (en) * 2015-08-27 2015-12-09 安徽祈艾特电子科技有限公司 Green environmental-friendly silicon wafer texturing agent and preparation method therefor
CN105133031A (en) * 2015-08-25 2015-12-09 合肥中南光电有限公司 Bamboo extraction solution silicon wafer texture-etchant and preparation method therefor
CN105556681A (en) * 2013-10-04 2016-05-04 旭化成株式会社 Solar cell, solar cell manufacturing method, semiconductor element, and semiconductor element manufacturing method
CN105838267A (en) * 2016-05-19 2016-08-10 太仓善融信息服务有限公司 Environment-friendly thermoplastic resin water-based adhesive
CN106012028A (en) * 2016-07-08 2016-10-12 合肥中南光电有限公司 Single crystalline silicon solar cell piece surface texture solution containing peach gum and preparation method thereof
CN106222756A (en) * 2016-09-30 2016-12-14 杭州飞鹿新能源科技有限公司 Additive and application process thereof for diamond wire cutting fine-hair maring using monocrystalline silicon slice
CN106860429A (en) * 2017-02-27 2017-06-20 上海宁竹新材料科技有限公司 A kind of nano drug-carrying transhipment material based on polyurethane and containing amino active material and preparation method thereof
CN107287597A (en) * 2016-03-30 2017-10-24 杭州聚力氢能科技有限公司 Wool-making agent of monocrystalline silicon surface processing and preparation method thereof and application method
CN107400926A (en) * 2017-08-14 2017-11-28 通威太阳能(安徽)有限公司 A kind of battery slice etching corrosive liquid and its preparation technology
CN107623053A (en) * 2017-09-11 2018-01-23 中节能太阳能科技(镇江)有限公司 Diamond wire silicon chip based on chain-type texture-etching equipment receives micro- matte preparation method
CN107658221A (en) * 2017-09-19 2018-02-02 南京纳鑫新材料有限公司 A kind of etching method of Buddha's warrior attendant wire cutting polysilicon chip
CN107880854A (en) * 2017-12-19 2018-04-06 大连理工大学 A kind of composite phase-change cool storage material and preparation method thereof
CN108130598A (en) * 2017-12-03 2018-06-08 宁波道乐新材料科技有限公司 The special alkali flocking additive of Buddha's warrior attendant wire cutting monocrystalline silicon piece and its application method
CN108193281A (en) * 2018-03-09 2018-06-22 常州时创能源科技有限公司 The black silicon process for etching of polycrystalline
CN108447942A (en) * 2018-03-09 2018-08-24 常州时创能源科技有限公司 The polishing process for etching of the black silicon PERC batteries of polycrystalline
CN110295395A (en) * 2019-07-16 2019-10-01 中国科学院上海硅酸盐研究所 A kind of monocrystalline silicon flocking additive and its application for adding graphene oxide quantum dot
CN110295396A (en) * 2019-07-16 2019-10-01 中国科学院上海硅酸盐研究所 A kind of compound flocking additive and its application

Patent Citations (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102479698A (en) * 2010-11-24 2012-05-30 气体产品与化学公司 Compositions and methods for texturing of silicon wafers
CN103890139A (en) * 2011-10-19 2014-06-25 东友精细化工有限公司 Texture etching solution composition and texture etching method of crystalline silicon wafers
CN103290484A (en) * 2012-02-28 2013-09-11 靖江市精益化学品有限公司 Fourth generation alcohol-free additive not additionally added in suede preparation of monocrystalline silicon
CN103132079A (en) * 2013-02-07 2013-06-05 睿纳能源科技(上海)有限公司 Additive for acid texturing of diamond-wire-cutting polycrystalline silicon slices and application method thereof
CN103266355A (en) * 2013-04-27 2013-08-28 竺峰 Etching agent for polycrystalline silicon wafer and etching method using etching agent
CN105556681A (en) * 2013-10-04 2016-05-04 旭化成株式会社 Solar cell, solar cell manufacturing method, semiconductor element, and semiconductor element manufacturing method
CN103710705A (en) * 2013-12-23 2014-04-09 北京合德丰材料科技有限公司 Additive for acidic texturing liquid of polycrystalline silicon wafers and application thereof
CN104120495A (en) * 2014-07-10 2014-10-29 上海应用技术学院 A texturing liquid used for monocrystalline silicon surface texturing and a preparing method thereof
CN104576831A (en) * 2014-12-31 2015-04-29 江苏顺风光电科技有限公司 Monocrystalline silicon wafer alcohol-free texturing process and texturing additive
CN105133031A (en) * 2015-08-25 2015-12-09 合肥中南光电有限公司 Bamboo extraction solution silicon wafer texture-etchant and preparation method therefor
CN105133033A (en) * 2015-08-27 2015-12-09 安徽祈艾特电子科技有限公司 Green environmental-friendly silicon wafer texturing agent and preparation method therefor
CN107287597A (en) * 2016-03-30 2017-10-24 杭州聚力氢能科技有限公司 Wool-making agent of monocrystalline silicon surface processing and preparation method thereof and application method
CN105838267A (en) * 2016-05-19 2016-08-10 太仓善融信息服务有限公司 Environment-friendly thermoplastic resin water-based adhesive
CN106012028A (en) * 2016-07-08 2016-10-12 合肥中南光电有限公司 Single crystalline silicon solar cell piece surface texture solution containing peach gum and preparation method thereof
CN106222756A (en) * 2016-09-30 2016-12-14 杭州飞鹿新能源科技有限公司 Additive and application process thereof for diamond wire cutting fine-hair maring using monocrystalline silicon slice
CN106860429A (en) * 2017-02-27 2017-06-20 上海宁竹新材料科技有限公司 A kind of nano drug-carrying transhipment material based on polyurethane and containing amino active material and preparation method thereof
CN107400926A (en) * 2017-08-14 2017-11-28 通威太阳能(安徽)有限公司 A kind of battery slice etching corrosive liquid and its preparation technology
CN107623053A (en) * 2017-09-11 2018-01-23 中节能太阳能科技(镇江)有限公司 Diamond wire silicon chip based on chain-type texture-etching equipment receives micro- matte preparation method
CN107658221A (en) * 2017-09-19 2018-02-02 南京纳鑫新材料有限公司 A kind of etching method of Buddha's warrior attendant wire cutting polysilicon chip
CN108130598A (en) * 2017-12-03 2018-06-08 宁波道乐新材料科技有限公司 The special alkali flocking additive of Buddha's warrior attendant wire cutting monocrystalline silicon piece and its application method
CN107880854A (en) * 2017-12-19 2018-04-06 大连理工大学 A kind of composite phase-change cool storage material and preparation method thereof
CN108193281A (en) * 2018-03-09 2018-06-22 常州时创能源科技有限公司 The black silicon process for etching of polycrystalline
CN108447942A (en) * 2018-03-09 2018-08-24 常州时创能源科技有限公司 The polishing process for etching of the black silicon PERC batteries of polycrystalline
CN110295395A (en) * 2019-07-16 2019-10-01 中国科学院上海硅酸盐研究所 A kind of monocrystalline silicon flocking additive and its application for adding graphene oxide quantum dot
CN110295396A (en) * 2019-07-16 2019-10-01 中国科学院上海硅酸盐研究所 A kind of compound flocking additive and its application

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
潘卫三等: "《工业药剂学》", 31 August 2015, 中国医药科技出版社 *
马祥志等: "《有机化学》", 31 December 2002, 中国医药科技出版社 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111139531A (en) * 2020-03-18 2020-05-12 常州时创能源股份有限公司 Texturing additive for monocrystalline silicon wafer and application thereof
CN111593413A (en) * 2020-06-30 2020-08-28 常州时创能源股份有限公司 Additive for monocrystalline silicon wafer chain type machine texturing and application thereof

Similar Documents

Publication Publication Date Title
KR101168589B1 (en) Method for texturing of silicon solar cell using surfactant
CN102181935B (en) Method and corrosive liquid for making texture surface of monocrystalline silicon
CN110846721A (en) Monocrystalline silicon texturing additive formula containing polyalcohol and PEG
CN110644053A (en) Formula and using method for preparing corn-shaped monocrystalline silicon suede composite texturing additive
KR100928302B1 (en) Method for manufacturing solar cell of tricrystalline silicon using surfactant and acid solution wet etching method
EP2605289B1 (en) Texture-etchant composition for crystalline silicon wafer and method for texture-etching
CN104562011B (en) The texturing assistant agent and process for etching of polysilicon chip
JP5799099B2 (en) Texture etching solution composition and texture etching method for crystalline silicon wafer
CN114292708A (en) Silicon wafer cleaning agent for cleaning solar cell before texturing and use method
KR101956352B1 (en) Texture etching solution composition and texture etching method of crystalline silicon wafers
CN108660510A (en) A kind of manufacture of novel fine-hair maring using monocrystalline silicon slice additive and simple etching method
CN105977343A (en) Monocrystalline silicon solar cell surface texture liquid having high stability and tannin extract and preparation method thereof
JP6367940B2 (en) Manufacturing method of silicon wafer having composite structure
CN103562344A (en) Texture etching solution composition and texture etching method for crystalline silicon wafer
CN110644056B (en) Formula of composite texturing solution additive for preparing fine and dense pyramid monocrystalline silicon textured surface
CN102282682B (en) Increase the solution of wafer sheet resistance and/or photovoltaic cell power density level
KR20150000118A (en) Texturing Additive Composite for Mono Silicon Wafer
CN102181937B (en) Activating method of corrosive liquid for manufacturing solar polycrystalline silicon wool surface
KR101510709B1 (en) Silicon wafer of mixed structure using wet etching process and preparing thereof
CN106012028A (en) Single crystalline silicon solar cell piece surface texture solution containing peach gum and preparation method thereof
CN102181936A (en) Method and corrosive liquid for manufacturing multicrystalline silicon texture
CN111593413A (en) Additive for monocrystalline silicon wafer chain type machine texturing and application thereof
KR101892624B1 (en) Texture etching solution composition and texture etching method of crystalline silicon wafers
CN115261995B (en) Crystal face micro-structuring auxiliary agent and preparation method thereof
KR102368778B1 (en) The texturing solution for single crystal silicon wafers

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20200228

RJ01 Rejection of invention patent application after publication