CN110780468B - 光调制器、光调制器模块和光发送器模块 - Google Patents

光调制器、光调制器模块和光发送器模块 Download PDF

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Publication number
CN110780468B
CN110780468B CN201910694193.8A CN201910694193A CN110780468B CN 110780468 B CN110780468 B CN 110780468B CN 201910694193 A CN201910694193 A CN 201910694193A CN 110780468 B CN110780468 B CN 110780468B
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optical
ridge
signal electrode
waveguide
buffer layer
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Chinese (zh)
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CN110780468A (zh
Inventor
大森康弘
久保田嘉伸
土居正治
竹内信太郎
吉田宽彦
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Fujitsu Optical Components Ltd
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Fujitsu Optical Components Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/20—LiNbO3, LiTaO3

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
CN201910694193.8A 2018-07-31 2019-07-30 光调制器、光调制器模块和光发送器模块 Active CN110780468B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-144242 2018-07-31
JP2018144242A JP7135546B2 (ja) 2018-07-31 2018-07-31 光変調器、光変調器モジュール、及び光送信モジュール

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CN110780468A CN110780468A (zh) 2020-02-11
CN110780468B true CN110780468B (zh) 2023-01-17

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US (1) US10754179B2 (ja)
JP (1) JP7135546B2 (ja)
CN (1) CN110780468B (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11841562B1 (en) * 2018-08-29 2023-12-12 Eospace Inc. Electro-optic modulation of multiple phase modulator waveguides with a single electrode
US11086048B1 (en) * 2020-02-07 2021-08-10 HyperLight Corporation Lithium niobate devices fabricated using deep ultraviolet radiation
US11899293B2 (en) 2020-02-07 2024-02-13 HyperLight Corporation Electro optical devices fabricated using deep ultraviolet radiation
JP7302516B2 (ja) * 2020-03-27 2023-07-04 Tdk株式会社 光変調器
JP2021173791A (ja) * 2020-04-21 2021-11-01 富士通オプティカルコンポーネンツ株式会社 光導波路デバイスおよび光導波路デバイスの製造方法
JP7480648B2 (ja) * 2020-09-14 2024-05-10 富士通オプティカルコンポーネンツ株式会社 光デバイスおよび光送受信機
JP2022189553A (ja) * 2021-06-11 2022-12-22 富士通オプティカルコンポーネンツ株式会社 光デバイス及び光通信装置
US11438122B2 (en) * 2021-06-14 2022-09-06 Ultralogic 6G, Llc Custom downlink search-spaces for low-complexity 5G/6G messaging
JP2023003869A (ja) * 2021-06-24 2023-01-17 住友大阪セメント株式会社 光導波路素子、光変調器、光変調モジュール、及び光送信装置
WO2023053332A1 (ja) * 2021-09-30 2023-04-06 住友大阪セメント株式会社 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置
CN113900284A (zh) * 2021-10-26 2022-01-07 南京南智先进光电集成技术研究院有限公司 一种铌酸锂薄膜电光调制器及其制备方法
CN116131955A (zh) * 2021-11-15 2023-05-16 宁波环球广电科技有限公司 多通道光发射组件

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6069729A (en) * 1999-01-20 2000-05-30 Northwestern University High speed electro-optic modulator
JP2012078375A (ja) * 2010-09-30 2012-04-19 Sumitomo Osaka Cement Co Ltd 光導波路素子
CN104516128A (zh) * 2013-10-08 2015-04-15 日本碍子株式会社 光学部件

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5276745A (en) * 1992-10-15 1994-01-04 Eastman Kodak Company Integrated optic read/write head for optical data storage incorporating second harmonic generator, electro-optic tracking error actuator, and electro-optic modulator
US6584240B2 (en) * 2001-03-30 2003-06-24 Fujitsu Limited Optical modulator having ridge and associated structure on substrate
US6580843B2 (en) 2001-04-05 2003-06-17 Fujitsu Limited Optical device
JP2003262841A (ja) * 2002-03-07 2003-09-19 Fujitsu Ltd 光変調装置及び設計方法
JP4278586B2 (ja) 2004-08-05 2009-06-17 富士通株式会社 光変調器
JP4589354B2 (ja) 2007-03-30 2010-12-01 住友大阪セメント株式会社 光変調素子
JP5374882B2 (ja) * 2008-02-08 2013-12-25 富士通株式会社 光デバイス
JP5326860B2 (ja) 2009-06-25 2013-10-30 富士通オプティカルコンポーネンツ株式会社 光導波路デバイス
JP2014142411A (ja) 2013-01-22 2014-08-07 Tdk Corp 光変調器
WO2014123230A1 (ja) 2013-02-08 2014-08-14 住友大阪セメント株式会社 光変調器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6069729A (en) * 1999-01-20 2000-05-30 Northwestern University High speed electro-optic modulator
JP2012078375A (ja) * 2010-09-30 2012-04-19 Sumitomo Osaka Cement Co Ltd 光導波路素子
CN104516128A (zh) * 2013-10-08 2015-04-15 日本碍子株式会社 光学部件

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JP2020020953A (ja) 2020-02-06
US20200041824A1 (en) 2020-02-06
US10754179B2 (en) 2020-08-25
JP7135546B2 (ja) 2022-09-13
CN110780468A (zh) 2020-02-11

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