CN110753973B - 闪烁体板、放射线成像装置和闪烁体板的制造方法 - Google Patents

闪烁体板、放射线成像装置和闪烁体板的制造方法 Download PDF

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Publication number
CN110753973B
CN110753973B CN201880038366.4A CN201880038366A CN110753973B CN 110753973 B CN110753973 B CN 110753973B CN 201880038366 A CN201880038366 A CN 201880038366A CN 110753973 B CN110753973 B CN 110753973B
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Prior art keywords
scintillator
face
substrate
needle
vapor deposition
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Chinese (zh)
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CN110753973A (zh
Inventor
大池智之
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Canon Inc
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Canon Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • G01T1/2023—Selection of materials
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/61—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing fluorine, chlorine, bromine, iodine or unspecified halogen elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0694—Halides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
  • Measurement Of Radiation (AREA)
  • Luminescent Compositions (AREA)
CN201880038366.4A 2017-06-15 2018-04-27 闪烁体板、放射线成像装置和闪烁体板的制造方法 Active CN110753973B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-117886 2017-06-15
JP2017117886A JP6985824B2 (ja) 2017-06-15 2017-06-15 シンチレータプレート、放射線撮像装置およびシンチレータプレートの製造方法
PCT/JP2018/017223 WO2018230182A1 (ja) 2017-06-15 2018-04-27 シンチレータプレート、放射線撮像装置およびシンチレータプレートの製造方法

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Publication Number Publication Date
CN110753973A CN110753973A (zh) 2020-02-04
CN110753973B true CN110753973B (zh) 2023-10-27

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US (1) US11181650B2 (enExample)
JP (1) JP6985824B2 (enExample)
CN (1) CN110753973B (enExample)
WO (1) WO2018230182A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6985824B2 (ja) 2017-06-15 2021-12-22 キヤノン株式会社 シンチレータプレート、放射線撮像装置およびシンチレータプレートの製造方法
JP7504779B2 (ja) 2020-11-19 2024-06-24 キヤノン株式会社 シンチレータプレート、シンチレータプレートの製造方法、および放射線検出装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636715A (ja) * 1992-07-17 1994-02-10 Toshiba Corp Ｘ線イメージ管
JP2000073053A (ja) * 1998-09-01 2000-03-07 Hitachi Ltd 蛍光体及びこの蛍光体を用いた陰極線管
CN1372324A (zh) * 2001-02-07 2002-10-02 佳能株式会社 闪烁器面板、制造闪烁器面板方法、辐射探测装置及辐射探测系统
CN1790053A (zh) * 1999-04-16 2006-06-21 浜松光子学株式会社 闪烁器面板和放射线图象传感器
WO2009028325A1 (ja) * 2007-08-24 2009-03-05 Konica Minolta Medical & Graphic, Inc. シンチレータパネル
CN105572714A (zh) * 2014-11-05 2016-05-11 柯尼卡美能达株式会社 闪烁体面板及放射线检测器
JP2016095189A (ja) * 2014-11-13 2016-05-26 コニカミノルタ株式会社 シンチレータパネル及び放射線検出器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006152395A (ja) * 2004-11-30 2006-06-15 Fuji Photo Film Co Ltd 真空蒸着方法および真空蒸着装置
US7482602B2 (en) 2005-11-16 2009-01-27 Konica Minolta Medical & Graphic, Inc. Scintillator plate for radiation and production method of the same
JP5300345B2 (ja) 2007-08-10 2013-09-25 キヤノン株式会社 発光膜、発光素子およびその製造方法
JP6030068B2 (ja) 2011-12-16 2016-11-24 東芝電子管デバイス株式会社 放射線検出パネルの製造装置
JP6102599B2 (ja) * 2013-07-22 2017-03-29 コニカミノルタ株式会社 放射線画像検出器
JP6507564B2 (ja) * 2014-10-28 2019-05-08 コニカミノルタ株式会社 シンチレータパネルおよび放射線検出器
JP6985824B2 (ja) 2017-06-15 2021-12-22 キヤノン株式会社 シンチレータプレート、放射線撮像装置およびシンチレータプレートの製造方法
US11073626B2 (en) 2017-11-10 2021-07-27 Canon Kabushiki Kaisha Scintillator, method of forming the same, and radiation detection apparatus

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636715A (ja) * 1992-07-17 1994-02-10 Toshiba Corp Ｘ線イメージ管
JP2000073053A (ja) * 1998-09-01 2000-03-07 Hitachi Ltd 蛍光体及びこの蛍光体を用いた陰極線管
CN1790053A (zh) * 1999-04-16 2006-06-21 浜松光子学株式会社 闪烁器面板和放射线图象传感器
CN1372324A (zh) * 2001-02-07 2002-10-02 佳能株式会社 闪烁器面板、制造闪烁器面板方法、辐射探测装置及辐射探测系统
WO2009028325A1 (ja) * 2007-08-24 2009-03-05 Konica Minolta Medical & Graphic, Inc. シンチレータパネル
CN105572714A (zh) * 2014-11-05 2016-05-11 柯尼卡美能达株式会社 闪烁体面板及放射线检测器
JP2016095189A (ja) * 2014-11-13 2016-05-26 コニカミノルタ株式会社 シンチレータパネル及び放射線検出器

Also Published As

Publication number Publication date
CN110753973A (zh) 2020-02-04
WO2018230182A1 (ja) 2018-12-20
JP6985824B2 (ja) 2021-12-22
JP2019002801A (ja) 2019-01-10
US11181650B2 (en) 2021-11-23
US20200081141A1 (en) 2020-03-12

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