CN110648891A - 一种等离子刻蚀机用二氧化硅去除组件 - Google Patents
一种等离子刻蚀机用二氧化硅去除组件 Download PDFInfo
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- CN110648891A CN110648891A CN201910895067.9A CN201910895067A CN110648891A CN 110648891 A CN110648891 A CN 110648891A CN 201910895067 A CN201910895067 A CN 201910895067A CN 110648891 A CN110648891 A CN 110648891A
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- Prior art keywords
- pipe
- silicon chip
- silicon dioxide
- silicon
- liquid storage
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32908—Utilities
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Weting (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910895067.9A CN110648891B (zh) | 2019-09-20 | 2019-09-20 | 一种等离子刻蚀机用二氧化硅去除组件 |
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CN201910895067.9A CN110648891B (zh) | 2019-09-20 | 2019-09-20 | 一种等离子刻蚀机用二氧化硅去除组件 |
Publications (2)
Publication Number | Publication Date |
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CN110648891A true CN110648891A (zh) | 2020-01-03 |
CN110648891B CN110648891B (zh) | 2022-02-15 |
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CN201910895067.9A Active CN110648891B (zh) | 2019-09-20 | 2019-09-20 | 一种等离子刻蚀机用二氧化硅去除组件 |
Country Status (1)
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CN (1) | CN110648891B (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713177A (en) * | 1980-06-24 | 1982-01-23 | Toshiba Corp | Etching method |
CN1932075A (zh) * | 2005-09-14 | 2007-03-21 | 东京毅力科创株式会社 | 基板处理装置、cor处理模块和基板升降装置 |
KR20070055739A (ko) * | 2005-11-28 | 2007-05-31 | 삼성전자주식회사 | 산화막 증착 장치의 세정 방법 |
US20150235865A1 (en) * | 2013-03-15 | 2015-08-20 | Applied Materials, Inc. | Processing systems and methods for halide scavenging |
CN104882359A (zh) * | 2014-02-27 | 2015-09-02 | 斯克林集团公司 | 基板处理装置以及基板处理方法 |
CN105244270A (zh) * | 2014-07-01 | 2016-01-13 | 东京毅力科创株式会社 | 蚀刻方法和蚀刻装置 |
CN105990082A (zh) * | 2015-02-15 | 2016-10-05 | 盛美半导体设备(上海)有限公司 | 半导体刻蚀装置 |
US10042196B2 (en) * | 2015-07-01 | 2018-08-07 | Mitsubishi Electric Corporation | Display and method for manufacturing display |
-
2019
- 2019-09-20 CN CN201910895067.9A patent/CN110648891B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713177A (en) * | 1980-06-24 | 1982-01-23 | Toshiba Corp | Etching method |
CN1932075A (zh) * | 2005-09-14 | 2007-03-21 | 东京毅力科创株式会社 | 基板处理装置、cor处理模块和基板升降装置 |
KR20070055739A (ko) * | 2005-11-28 | 2007-05-31 | 삼성전자주식회사 | 산화막 증착 장치의 세정 방법 |
US20150235865A1 (en) * | 2013-03-15 | 2015-08-20 | Applied Materials, Inc. | Processing systems and methods for halide scavenging |
CN104882359A (zh) * | 2014-02-27 | 2015-09-02 | 斯克林集团公司 | 基板处理装置以及基板处理方法 |
CN105244270A (zh) * | 2014-07-01 | 2016-01-13 | 东京毅力科创株式会社 | 蚀刻方法和蚀刻装置 |
CN105990082A (zh) * | 2015-02-15 | 2016-10-05 | 盛美半导体设备(上海)有限公司 | 半导体刻蚀装置 |
US10042196B2 (en) * | 2015-07-01 | 2018-08-07 | Mitsubishi Electric Corporation | Display and method for manufacturing display |
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CN110648891B (zh) | 2022-02-15 |
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Effective date of registration: 20220120 Address after: 435200 beside tangtu Avenue, economic development zone, Yangxin County, Huangshi City, Hubei Province Applicant after: HUBEI ZHONGPEI ELECTRONIC TECHNOLOGY CO.,LTD. Address before: 410300 No.78 Guanzhang West Road, Guandu town, Liuyang City, Changsha City, Hunan Province Applicant before: Wu Jianxiang |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A Plasma Etching Machine for Removing Components with Silicon Dioxide Effective date of registration: 20230519 Granted publication date: 20220215 Pledgee: China Construction Bank Corporation Yangxin sub branch Pledgor: HUBEI ZHONGPEI ELECTRONIC TECHNOLOGY CO.,LTD. Registration number: Y2023420000206 |
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