CN201935527U - 一种用于硅片清洗后的快速干燥装置 - Google Patents
一种用于硅片清洗后的快速干燥装置 Download PDFInfo
- Publication number
- CN201935527U CN201935527U CN 201020662808 CN201020662808U CN201935527U CN 201935527 U CN201935527 U CN 201935527U CN 201020662808 CN201020662808 CN 201020662808 CN 201020662808 U CN201020662808 U CN 201020662808U CN 201935527 U CN201935527 U CN 201935527U
- Authority
- CN
- China
- Prior art keywords
- valve
- silicon chip
- nitrogen
- pressure atomization
- ipa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201020662808 CN201935527U (zh) | 2010-12-08 | 2010-12-08 | 一种用于硅片清洗后的快速干燥装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201020662808 CN201935527U (zh) | 2010-12-08 | 2010-12-08 | 一种用于硅片清洗后的快速干燥装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201935527U true CN201935527U (zh) | 2011-08-17 |
Family
ID=44447045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201020662808 Expired - Lifetime CN201935527U (zh) | 2010-12-08 | 2010-12-08 | 一种用于硅片清洗后的快速干燥装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201935527U (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102861745A (zh) * | 2012-09-18 | 2013-01-09 | 北京七星华创电子股份有限公司 | 防断电保护的硅片清洗机 |
CN104315832A (zh) * | 2014-08-26 | 2015-01-28 | 江苏新沂沪千人造板制造有限公司 | 一种锅炉烟气热能回收利用装置 |
CN104634087A (zh) * | 2013-11-07 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | 一种快速干燥晶圆表面的吹扫装置 |
CN111578680A (zh) * | 2019-02-15 | 2020-08-25 | 北京北方华创微电子装备有限公司 | 一种晶圆的干燥方法 |
CN113418383A (zh) * | 2021-06-24 | 2021-09-21 | 湖南智信微电子科技有限公司 | 一种铬版湿法清洗工艺干燥用异丙醇蒸汽回流装置 |
-
2010
- 2010-12-08 CN CN 201020662808 patent/CN201935527U/zh not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102861745A (zh) * | 2012-09-18 | 2013-01-09 | 北京七星华创电子股份有限公司 | 防断电保护的硅片清洗机 |
CN102861745B (zh) * | 2012-09-18 | 2014-07-30 | 北京七星华创电子股份有限公司 | 防断电保护的硅片清洗机 |
CN104634087A (zh) * | 2013-11-07 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | 一种快速干燥晶圆表面的吹扫装置 |
CN104315832A (zh) * | 2014-08-26 | 2015-01-28 | 江苏新沂沪千人造板制造有限公司 | 一种锅炉烟气热能回收利用装置 |
CN111578680A (zh) * | 2019-02-15 | 2020-08-25 | 北京北方华创微电子装备有限公司 | 一种晶圆的干燥方法 |
CN113418383A (zh) * | 2021-06-24 | 2021-09-21 | 湖南智信微电子科技有限公司 | 一种铬版湿法清洗工艺干燥用异丙醇蒸汽回流装置 |
CN113418383B (zh) * | 2021-06-24 | 2022-05-17 | 长沙韶光铬版有限公司 | 一种铬版湿法清洗工艺干燥用异丙醇蒸汽回流装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN201935527U (zh) | 一种用于硅片清洗后的快速干燥装置 | |
CN204134760U (zh) | 一种天然气减阻剂雾化装置的喷嘴 | |
WO2019037800A1 (zh) | 一种干燥或预热装置及带该装置的自动喷涂装置 | |
CN104853854A (zh) | 利用高速粒子束的液膜去除方法 | |
CN104258684A (zh) | 一种粘胶短纤生产的cs2回收系统 | |
CN201659045U (zh) | 雾化喷头 | |
CN204179068U (zh) | 用于硅片的湿法刻蚀设备 | |
CN103752025A (zh) | 喷雾干燥机 | |
CN202123018U (zh) | 注醇旋流型雾化喷嘴 | |
CN216213503U (zh) | 一种链式涂源装置及扩散系统 | |
CN216456943U (zh) | 一种小型减压传导式喷雾干燥器 | |
CN206777889U (zh) | 一种用于蒸发罐的全方位喷淋清堵机构 | |
CN203648107U (zh) | 喷雾干燥机 | |
CN87214261U (zh) | 旋流式喷头 | |
CN103715119A (zh) | 加湿装置及加湿气体的方法 | |
CN206587942U (zh) | 一种具有良好雾化效果的喷头 | |
CN112369922A (zh) | 一种雾化喷嘴、蒸汽发生器及蒸汽烹饪设备 | |
CN112146357A (zh) | 一种用于热淋清片的喷雾干燥装置及干燥方法 | |
CN206881162U (zh) | 一种饲料血浆蛋白粉喷雾干燥设备 | |
CN207143342U (zh) | 钢管环氧粉末喷涂前酸洗处理装置 | |
CN207006834U (zh) | 一种节能型转炉 | |
CN104107646A (zh) | 氨水制备装置 | |
CN211561868U (zh) | 一种喷雾干燥器 | |
CN206592159U (zh) | 一种利用蒸汽发电的凤凰玉石熔体水淬制粒装置 | |
CN205122614U (zh) | 一种多晶硅制绒机的纯水喷淋系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Effective date: 20120203 Owner name: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Free format text: FORMER OWNER: GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS Effective date: 20120203 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120203 Address after: 100088, 2, Xinjie street, Beijing Patentee after: GRINM Semiconductor Materials Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Co-patentee before: GRINM Semiconductor Materials Co., Ltd. Patentee before: General Research Institute for Nonferrous Metals |
|
C56 | Change in the name or address of the patentee |
Owner name: GRINM ADVANCED MATERIALS CO., LTD. Free format text: FORMER NAME: GRINM SEMICONDUCTOR MATERIALS CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: 100088, 2, Xinjie street, Beijing Patentee after: YOUYAN NEW MATERIAL CO., LTD. Address before: 100088, 2, Xinjie street, Beijing Patentee before: GRINM Semiconductor Materials Co., Ltd. |
|
ASS | Succession or assignment of patent right |
Owner name: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Free format text: FORMER OWNER: GRINM ADVANCED MATERIALS CO., LTD. Effective date: 20150611 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150611 Address after: 101300 Beijing city Shunyi District Shuanghe Linhe Industrial Development Zone on the south side of the road Patentee after: You Yan Semi Materials Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: YOUYAN NEW MATERIAL CO., LTD. |
|
CX01 | Expiry of patent term |
Granted publication date: 20110817 |
|
CX01 | Expiry of patent term |