CN110577077B - Material conveying equipment with buffer area, material conveying system and assembling method thereof - Google Patents

Material conveying equipment with buffer area, material conveying system and assembling method thereof Download PDF

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Publication number
CN110577077B
CN110577077B CN201810589246.5A CN201810589246A CN110577077B CN 110577077 B CN110577077 B CN 110577077B CN 201810589246 A CN201810589246 A CN 201810589246A CN 110577077 B CN110577077 B CN 110577077B
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Prior art keywords
conveying
machine
buffer
material conveying
buffer area
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CN201810589246.5A
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CN110577077A (en
Inventor
杨应俊
李海东
刘子敏
王胜利
杨波
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Silicon Electric Semiconductor Equipment Shenzhen Co ltd
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Silicon Electric Semiconductor Equipment Shenzhen Co ltd
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Priority to CN201810589246.5A priority Critical patent/CN110577077B/en
Publication of CN110577077A publication Critical patent/CN110577077A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/68Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor
    • B65G47/69Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor the articles being accumulated temporarily
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automatic Assembly (AREA)

Abstract

The invention discloses a material conveying device with a buffer area, a material conveying system and an assembly method thereof, which solve the problem of higher transformation cost when common original machine equipment is transformed into industrial 4.0, and the technical scheme is characterized by comprising the following steps: a machine table; the conveying device is arranged on the machine table, at least two buffer areas for temporarily storing products are arranged on the machine table, the buffer areas are arranged on one side or two sides of the machine table, and the conveying device can extend out of the length of at least one buffer area of the machine table; and the manipulator device is arranged on the conveying device in a sliding manner and driven by the conveying device to convey products, so that the aims of low transformation cost, flexible line assembly and great cost reduction are fulfilled.

Description

Material conveying equipment with buffer area, material conveying system and assembling method thereof
Technical Field
The invention relates to the technical field of automatic equipment, in particular to material conveying equipment with a buffer area, a material conveying system and an assembly method thereof.
Background
With the rapid development of semiconductor integrated circuits, industry 4.0 reformation is imperative in the semiconductor device industry. When the machine is modified, the modification points are mainly concentrated at the position of feeding and discharging, but due to the particularity of the semiconductor equipment industry, when the original machine is modified by 4.0, the machine is required to be low in modification cost, reliable in movement, efficient in operation, flexible in line assembly and high in cost in the existing modification scheme, so that a preferable scheme for solving the problems faced by a single line of the semiconductor equipment is required to be provided.
Disclosure of Invention
The invention aims to provide material conveying equipment with a buffer area, which has the advantages of low reconstruction cost of a single machine and flexible line assembly of a plurality of reconstructed machines.
The technical aim of the invention is realized by the following technical scheme: a material transfer apparatus having a buffer zone, comprising: a machine table; the conveying device is arranged on the machine, at least two buffer areas for temporarily storing products are arranged on the machine, the buffer areas are arranged on one side or two sides of the machine, which are close to the conveying device, and the conveying device can extend out of the length of at least one buffer area of the machine; and the manipulator device is arranged on the conveying device in a sliding manner and driven by the conveying device to convey products.
Through adopting above-mentioned technical scheme, when carrying out the transformation of single material transfer apparatus, set up two at least buffer areas that are used for temporarily storing the product on the board, when the manipulator device slides on conveyer and carries the product to the buffer area, because the conveyer of every board extends the length of at least buffer area of board self, so the manipulator device of adjacent board can reach the buffer area of preceding board, thereby realize carrying the product of the buffer area on the board to adjacent board, under the circumstances of not carrying out too big transformation to original board, realize the group line of a plurality of boards, transformation cost is low, the group line is comparatively nimble, the cost has been reduced greatly.
Further, the present invention provides a transfer device, comprising: the track is arranged on the machine table and is arranged along the length direction of the machine table for the manipulator device to slide; and the conveying mechanism is arranged on the machine table and used for driving the manipulator device to slide on the track.
By adopting the technical scheme, the conveying mechanism can drive the manipulator device to move on the track, so that the conveying of products on the machine and the conveying of the products to the adjacent machine are realized.
Further, the present invention provides that the conveying mechanism includes: a driving wheel and a driven wheel arranged on the track; the motor is used for driving the driving wheel to rotate; and the conveying belt is sleeved on the driving wheel and the driven wheel and is fixed with the manipulator device.
Through adopting above-mentioned technical scheme, motor drive action wheel rotates to drive the conveyer belt and remove, drive manipulator device and remove in order to realize the transportation of product.
According to a further aspect of the present invention, the manipulator device includes: the sliding seat is arranged on the track in a sliding manner and is fixed with the conveyor belt; the frame body is arranged at one end of the sliding seat close to the buffer area; the driving piece is arranged on the sliding seat and used for driving the frame body to lift; and a plurality of suckers arranged on one surface of the frame body facing the cache area.
Through adopting above-mentioned technical scheme, the conveyer belt removes and drives the sliding seat and remove, and the sliding seat slides to the buffer zone on the track, and the drive piece drives the support body and goes up and down, makes the sucking disc with the product actuation on the buffer zone to realize the transfer of product.
According to a further aspect of the present invention, the manipulator device includes: a sub-rail slidably disposed on the rail and fixed to the conveyor belt; the sliding seat is arranged on the auxiliary rail in a sliding manner; the auxiliary conveying mechanism is arranged on the auxiliary rail and used for driving the sliding seat to slide on the auxiliary rail; the frame body is arranged at one end of the sliding seat close to the buffer area; the driving piece is arranged on the sliding seat and used for driving the frame body to lift; and a plurality of suckers arranged on one surface of the frame body facing the cache area.
By adopting the technical scheme, the conveyor belt moves to drive the auxiliary rail to move, so that the positions of the sliding seat and the sucker are adjusted, and the auxiliary conveying mechanism drives the sliding seat to move, so that the position of the sucker can be adjusted; because the auxiliary rail is arranged in a sliding mode, the auxiliary rail is convenient when the conveying device and the manipulator device are required to be integrally disassembled; the sliding seat slides to the buffer area, and the driving piece drives the frame body to lift, so that the sucking disc sucks the product on the buffer area, and the transfer of the product is realized.
In a further arrangement of the invention, the driving member is a cylinder.
By adopting the technical scheme, the sucker is convenient to drive and upgrade so as to realize the conveying of products.
The second object of the present invention is to provide a material conveying system, which comprises at least two material conveying apparatuses with buffer areas as described above, wherein the conveying devices of the material conveying apparatuses with buffer areas are staggered to form an overlapping area for the manipulator device to convey the product from one material conveying apparatus with buffer area to the buffer area of the material conveying apparatus with buffer area.
Through adopting above-mentioned technical scheme, because the conveyer of two adjacent machines is formed with the overlap area, so the manipulator device of two adjacent machines can reach the overlap area to on the realization was carried the product of a machine upper buffer memory district to the adjacent machine, under the circumstances of not carrying out too big transformation to original machine, realized the group line of a plurality of machines, transformation cost is low, and the group line is comparatively nimble, has reduced the cost greatly.
According to the invention, the conveying devices of the material conveying equipment with the buffer areas are staggered up and down or staggered front and back.
By adopting the technical scheme, the staggered mode of the adjacent conveying devices can be flexibly arranged, so that the line assembly is more flexible.
An object of the present invention is to provide an assembly method for assembling a material handling system as described above, comprising the steps of: assembling the conveying device to a preset position of each machine table, and enabling the buffer area to be positioned on one side or two sides of the machine table close to the conveying device; and butting the machine tables in pairs and staggering the conveying devices to form an overlapping area for the manipulator device to convey products from one material conveying device with a buffer area to the buffer area of the material conveying device adjacent to the material conveying device with the buffer area.
Through adopting above-mentioned technical scheme, when carrying out the equipment of many boards, because the conveyer of two adjacent boards is formed with the overlap area, so the manipulator device of two adjacent boards can reach the overlap area to on the realization was carried the product of buffer memory district on a board to the adjacent board, under the circumstances of not carrying out too big transformation to original board, realized the group line of a plurality of boards, transformation cost is low, and the group line is comparatively nimble, has greatly reduced the cost.
In summary, the invention has the following beneficial effects:
1. Because the conveying device of each machine station extends out of the length of at least one cache area of the machine station, the manipulator device of the adjacent machine station can reach the cache area of the previous machine station, so that products in the cache area on one machine station can be conveyed to the adjacent machine station, the line assembly of a plurality of machine stations is realized under the condition that the original machine station is not excessively modified, the modification cost is low, the line assembly is flexible, and the cost is greatly reduced;
2. the adjacent tracks can be staggered up and down or front and back, and the staggered mode of the adjacent tracks can be flexibly arranged, so that the line assembly is more flexible.
Drawings
FIG. 1 is a schematic view showing the structure of a material conveying system in embodiment 1;
FIG. 2 is a schematic diagram of a material conveying apparatus with a buffer area in embodiment 1;
FIG. 3 is a schematic view of the conveyor of embodiment 1 extending out of the machine;
FIG. 4 is a schematic diagram of the connection relationship between the conveyors on two adjacent machines in the embodiment 1;
fig. 5 is a schematic diagram showing the connection relationship between the transfer device and the robot device in embodiment 1;
FIG. 6 is a schematic diagram of the connection relationship between the conveying devices on two adjacent machine stations (before the robot device moves) in embodiment 2;
fig. 7 is a schematic diagram of the connection relationship between the conveying devices on two adjacent machine stations in embodiment 2 (after the robot device is moved);
fig. 8 is a schematic diagram showing the connection relationship between the transfer device and the robot device in example 2.
Reference numerals: 1. a machine table; 2. a transfer device; 21. a track; 22. a conveying mechanism; 221. a driving wheel; 222. driven wheel; 223. a conveyor belt; 3. a buffer area; 4. a manipulator device; 41. a sliding seat; 42. a frame body; 43. a driving member; 44. a suction cup; 45. a secondary track; 46. an auxiliary conveying mechanism; 5. an overlap region; 6. a work area.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Example 1: a material conveying system is shown in figure 1, and comprises at least two material conveying devices with buffer areas, wherein the material conveying devices with buffer areas can be used for production, processing or detection in the semiconductor field, and can also be applied to other fields, and the assembly of two or more material conveying devices with buffer areas into the material conveying system can be realized through the parallel line of the material conveying devices with buffer areas, so that various products can be produced, processed or detected.
As shown in fig. 2, the material transfer apparatus having the buffer area includes: the machine table 1, the conveying device 2 and the manipulator device 4 are arranged on the machine table 1, and the manipulator device 4 is arranged on the conveying device 2 in a sliding mode and is driven by the conveying device 2 to convey products.
The machine 1 is provided with a working area 6 for producing, processing or detecting products, the machine 1 is provided with at least two buffer areas 3 for temporarily storing the products, the buffer areas 3 are arranged on one side or two sides of the machine 1 close to the conveying device 2, in this embodiment, the buffer areas 3 are arranged on two sides of the machine 1 and are positioned on the same side of the conveying device 2 with the working area 6, and in combination with fig. 3, the conveying device 2 extends out of the length of at least one buffer area 3 of the machine 1, and because the conveying device 2 of each machine 1 extends out of the length of at least one buffer area 3 of the machine 1, the manipulator device 2 of the adjacent machine 1 can reach the buffer area 3 of the previous machine 1, thereby realizing the purpose of conveying the products of the buffer areas 3 on the machine 1 to the adjacent machine 1.
As shown in fig. 2 and 4, the conveying devices 2 of the adjacent material conveying apparatuses with buffer areas are staggered to form an overlapping area 5 for the manipulator device 4 to convey the product from the material conveying apparatus with buffer area to the buffer area 3 of the adjacent material conveying apparatus with buffer area, and the manipulator device 4 of the adjacent two machines 1 can reach the overlapping area 5 because the conveying devices 2 of the adjacent two machines 1 are formed with the overlapping area 5, so that the product of the buffer area 3 on one machine 1 is conveyed to the adjacent machine 1.
The adjacent tracks 21 are staggered up and down or staggered back and forth, and in the embodiment, the arm length of the manipulator device is only required to be changed, so that the staggered mode of the adjacent tracks 21 can be flexibly arranged, and the assembly is more flexible.
As shown in fig. 5, the transfer device 2 includes: a rail 21 provided on the machine 1 and provided along the longitudinal direction of the machine 1 for sliding of the robot device 4; and a conveying mechanism 22 arranged on the machine table 1 and used for driving the manipulator device 4 to slide on the track 21, wherein the conveying mechanism 22 can drive the manipulator device 4 to move on the track 21, so that the conveying of products on the machine table 1 and the conveying of products to the adjacent machine table 1 are realized.
The conveying mechanism 22 includes: a driving wheel 221 and a plurality of driven wheels 222 arranged on the track 21; a motor for driving the driving wheel 221 to rotate; and a conveyor belt 223 sleeved on the driving wheel 221 and the driven wheel 222 and fixed with the manipulator device 4, wherein the motor drives the driving wheel 221 to rotate, so as to drive the conveyor belt 223 to move and drive the manipulator device 4 to move so as to realize the conveying of products.
The robot device 4 includes: a slide seat 41 slidably provided on the rail 21 and fixed to the conveyor belt 223; referring to fig. 1, a frame 42 is disposed at one end of the sliding seat 41 near the buffer area 3; a driving member 43 provided on the slide seat 41 for driving the frame 42 to move up and down, the driving member 43 being an air cylinder; and a plurality of sucking discs 44 arranged on one surface of the frame body 42 facing the buffer area 3, the conveyor belt 223 moves to drive the sliding seat 41 to move, and when the sliding seat 41 slides to the working area 6 and the buffer area 3 on the track 21, the driving piece 43 drives the frame body 42 to lift, so that the sucking discs 44 suck products on the working area 6 and the buffer area 3, thereby realizing the transfer of the products.
An assembly method for assembling a material transfer system, comprising the steps of: assembling the conveying device 2 to a preset position of each machine 1, and positioning the buffer zone 3 on one side or two sides of the machine 1 close to the conveying device 2; and, butt-jointing the machine tables 1 in pairs and staggering the conveying devices 2 to form an overlapped area 5 for the manipulator device 4 to convey products from a material conveying device with a buffer area to the buffer area 3 of the material conveying device adjacent to the material conveying device with the buffer area.
When assembling a plurality of machine stations 1, because the overlapping area 5 is formed on the conveying device 2 of the two adjacent machine stations 1, the mechanical arm device 4 of the two adjacent machine stations 1 can reach the overlapping area 5, so that products in the buffer area 3 on one machine station 1 are conveyed to the adjacent machine stations 1, the assembly of the plurality of machine stations 1 is realized under the condition that the original machine stations 1 are not excessively modified, the modification cost is low, the assembly is flexible, and the cost is greatly reduced.
The working process comprises the following steps: the mechanical arm device 4 on the machine 1 close to the storage area conveys the products in the storage area to the buffer area 3, the mechanical arm device 4 of the adjacent machine 1 conveys the products in the buffer area 3 of the previous machine 1 to the buffer area 3 of the current machine 1, then the mechanical arm device 4 of the next machine 1 conveys the products in the buffer area 3 of the previous machine 1 to the current machine 1, and the conveying of the products is sequentially realized; when the buffer area 3 of each machine 1 temporarily stores products, the mechanical arm device 4 on the machine 1 close to the storage area conveys the products of the storage area to the working area 6, the mechanical arm device 4 of the adjacent machine 1 conveys the products on the buffer area 3 of the previous machine 1 to the working area 6 of the current machine 1, and then the mechanical arm device 4 of the subsequent machine 1 conveys the products on the buffer area 3 of the previous machine 1 to the working area 6 of the current machine 1, so that the conveying of the products is sequentially realized; after the production, processing or detection process of the product is finished, the blanking is finished in the same way as the feeding process.
It should be noted that, the manipulator device 4 of each material conveying apparatus having a buffer zone participates in the feeding and discharging process, when the manipulator device 4 on the material conveying apparatus having a buffer zone conveys the product to the buffer zone 3 of the material conveying apparatus having a buffer zone adjacent thereto, then the manipulator device 4 of the material conveying apparatus having a buffer zone adjacent thereto conveys the product on the material conveying apparatus having a buffer zone previous thereto, or the manipulator device 4 of each material conveying apparatus having a buffer zone is synchronized, that is, when the manipulator device 4 conveys the product on the material conveying apparatus having a buffer zone previous thereto, the manipulator device 4 on the material conveying apparatus having a buffer zone currently conveys the product to the material conveying apparatus having a buffer zone next thereto, the manipulator device 4 on the material conveying apparatus having a buffer zone simultaneously conveys the product to the material conveying apparatus having a buffer zone next thereto, or the manipulator device 4 and the manipulator device 4 are combined synchronously, the manipulator device 4 and the manipulator device are serially connected, and the manipulator device is synchronized, and the driving time sequence of the plurality of the material conveying apparatuses on the material conveying apparatus is controlled by the motors.
Specific principle is explained: when a single material conveying device is reformed, at least two buffer areas 3 for temporarily storing products are arranged on the machine 1, when the manipulator device 4 slides on the conveying device 2 to convey the products to the buffer areas 3, as the conveying device 2 of each machine 1 extends out of the length of at least one buffer area 3 of the machine 1, when line assembly is carried out, the overlapping areas 5 are formed on the conveying devices 2 of the adjacent two machines 1, so that the manipulator device 4 of the adjacent two machines 1 can reach the overlapping areas 5, the purpose of conveying the products of the buffer areas 3 on one machine 1 to the adjacent machine 1 is achieved, the line assembly of a plurality of material conveying devices with the buffer areas is achieved under the condition that the original machine 1 is not greatly reformed, the line assembly cost is low, the line assembly is flexible, and the cost is greatly reduced.
Example 2: a material transfer system is different from embodiment 1 in that, as shown in fig. 6, a robot apparatus 4 includes: a sub rail 45 slidably provided on the rail 21 and fixed to the conveyor belt 223; a slide seat 41 slidably disposed on the sub rail 45; a sub-conveying mechanism 46 provided on the sub-rail 45 for driving the slide block 41 to slide on the sub-rail 45; a frame 42 arranged at one end of the sliding seat 41 close to the buffer area 3; a driving member 43 provided in the slide seat 41 for driving the frame 42 to move up and down; and a plurality of suckers 44 provided on one surface of the frame 42 facing the buffer area 3.
The auxiliary conveying mechanism 46 adopts the same structure as the conveying mechanism 22 in the embodiment 1, and with reference to fig. 7 and 8, the conveying device 2 can extend out of the length of at least one buffer zone 3 of the machine 1, the conveyor belt 223 moves to drive the auxiliary rail 45 to move, so as to realize the adjustment of the positions of the sliding seat 41 and the sucker 44, the auxiliary rail 45 can extend out of the length of at least one buffer zone 3 of the machine 1, the auxiliary rail 45 can also be contracted into the machine 1, the auxiliary conveying mechanism 46 drives the sliding seat 41 to move, and the adjustment of the position of the sucker 44 can also be realized; because the auxiliary rail 45 is arranged in a sliding way, the assembly and disassembly of the conveying device 2 and the manipulator device 4 are convenient when the whole assembly and disassembly is needed; when the sliding seat 41 slides to the buffer zone 3, the driving piece 43 drives the frame body 42 to lift, so that the sucking disc 44 sucks the product on the buffer zone 3, and the product is transferred.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention.

Claims (1)

1. An assembly method for assembling a material transfer system comprising at least two material transfer apparatuses having a buffer zone;
the material conveying equipment with the buffer area comprises:
A machine table (1);
The conveying device (2) is arranged on the machine table (1), at least two buffer areas (3) for temporarily storing products are arranged on the machine table (1), the buffer areas (3) are arranged on one side or two sides, close to the conveying device (2), of the machine table (1), and the conveying device (2) can extend out of the length of at least one buffer area (3) of the machine table (1); and
The manipulator device (4) is arranged on the conveying device (2) in a sliding manner and driven by the conveying device (2) to convey products;
the transfer device (2) comprises:
A rail (21) which is arranged on the machine table (1) and is arranged along the length direction of the machine table (1) and is used for the manipulator device (4) to slide; and
A conveying mechanism (22) arranged on the machine table (1) and used for driving the manipulator device (4) to slide on the track (21);
The conveying mechanism (22) comprises:
a driving wheel (221) and a driven wheel (222) arranged on the track (21);
a motor for driving the driving wheel (221) to rotate; and
The conveying belt (223) is sleeved on the driving wheel (221) and the driven wheel (222) and is fixed with the manipulator device (4);
the manipulator device (4) comprises:
A slide seat (41) which is slidably provided on the rail (21) and is fixed to the conveyor belt (223);
A frame body (42) arranged at one end of the sliding seat (41) close to the buffer area (3);
A driving member (43) provided on the slide seat (41) for driving the frame body (42) to rise and fall; and
A plurality of suckers (44) arranged on one surface of the frame body (42) facing the cache area (3);
the driving piece (43) is a cylinder;
The conveying devices (2) of the material conveying equipment with the buffer areas are staggered to form an overlapping area (5) for the manipulator device (4) to convey products from one material conveying equipment with the buffer areas to the buffer areas (3) of the material conveying equipment with the buffer areas, and the conveying devices (2) of the material conveying equipment with the buffer areas are staggered up and down or staggered front and back;
The assembly method comprises the following steps:
Assembling the conveying device (2) to a preset position of each machine (1) and enabling the buffer area (3) to be positioned on one side or two sides of the machine (1) close to the conveying device (2); and
The machine tables (1) are in butt joint in pairs, and the conveying devices (2) are distributed in a staggered mode to form an overlapping area (5) for the manipulator device (4) to convey products from one material conveying device with a buffer area to the buffer area (3) of the material conveying device with the buffer area.
CN201810589246.5A 2018-06-08 2018-06-08 Material conveying equipment with buffer area, material conveying system and assembling method thereof Active CN110577077B (en)

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Application Number Priority Date Filing Date Title
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CN110577077A CN110577077A (en) 2019-12-17
CN110577077B true CN110577077B (en) 2024-05-17

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