CN208593787U - Material conveying equipment and its materiel delivery system with buffer area - Google Patents
Material conveying equipment and its materiel delivery system with buffer area Download PDFInfo
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- CN208593787U CN208593787U CN201820894961.5U CN201820894961U CN208593787U CN 208593787 U CN208593787 U CN 208593787U CN 201820894961 U CN201820894961 U CN 201820894961U CN 208593787 U CN208593787 U CN 208593787U
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- buffer area
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- material conveying
- transmission device
- conveying equipment
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Abstract
The utility model discloses material conveying equipments and its materiel delivery system with buffer area, when solving common progress 4.0 transformation of industry to original machine platform equipment, the higher problem of improvement cost, its key points of the technical solution are that, comprising: board；Transmission device on the board, the board are equipped at least two for keeping in the buffer area of product, and the buffer area is set to the one or both sides of the board, and the transmission device can be extended out the length of at least one buffer area of board；And slidingtype is set on the transmission device, is driven by the transmission device with the robot device of conveying products, reaches that improvement cost is low, and group line is more flexible, the purpose significantly reduced costs.
Description
Technical field
The utility model relates to technical field of automation equipment, in particular to buffer area material conveying equipment and its
Materiel delivery system.
Background technique
With the rapid development of semiconductor integrated circuit, it is imperative that 4.0 transformation of industry is carried out in semiconductor equipment industry.
When being transformed, transformation point mainly embodies a concentrated reflection of the position of loading and unloading, but due to the particularity of semiconductor equipment industry, right
When original machine platform equipment carries out industrial 4.0 transformation, it is desired to which improvement cost is low, and movement is reliable, and operation is efficient, and group line is flexible, existing
Modification scheme higher cost, it is therefore desirable to provide it is a kind of solve semiconductor equipment single fighter line problem faced preferred side
Case.
Utility model content
The purpose of this utility model one is to provide a kind of material conveying equipment with buffer area, changing with single board
It makes at low cost, the more flexible advantage of group line is being carried out to multiple improved boards.
The above-mentioned technical purpose of the utility model has the technical scheme that a kind of with buffer area
Material conveying equipment, comprising: board；Transmission device on the board, the board are equipped at least two for temporary
The buffer area of product is deposited, the buffer area is set to the board close to the one or both sides of transmission device, the transmission device
It can be extended out the length of at least one buffer area of board；And slidingtype is set on the transmission device, by the biography
Device is sent to drive with the robot device of conveying products.
By using above-mentioned technical proposal, when carrying out the transformation of single material conveying equipment, it is arranged at least two on board
A buffer area for being used to keep in product, when robot device slides on transmission device, and product is delivered to buffer area, because every
The transmission device of a board extends the length of at least one buffer area of board itself, so the robot device of adjacent board can
The buffer area of previous board is reached, the product of buffer area on a board is delivered on adjacent board to realize, not to original
In the case where thering is board to carry out excessive transformation, the group line of multiple boards is realized, improvement cost is low, and group line is more flexible, significantly
It reduces costs.
The further setting of the utility model, the transmission device include: on the board, along the board length
Direction is arranged, for the track of robot device sliding；And on the board, for driving the manipulator to fill
Set the conveying mechanism slided on the track.
By using above-mentioned technical proposal, conveying mechanism can driving manipulator device move in orbit, realize product exist
Conveying on board and the work to the conveying of adjacent board.
The further setting of the utility model, the conveying mechanism include: driving wheel on the track and driven
Wheel；Motor for driving driving wheel to rotate；And it is sheathed on the driving wheel and driven wheel and robot device fixation
Conveyer belt.
By using above-mentioned technical proposal, the rotation of motor driven driving wheel drives manipulator to drive conveyer belt mobile
The mobile conveying to realize product of device.
The further setting of the utility model, the robot device include: that slidingtype is set on the track and institute
State the fixed sliding seat of conveyer belt；Set on sliding seat close to the frame body of buffer area one end；Set on the sliding seat, it is used for bogie
The actuator of body lifting；And it is multiple set on sucker of the frame body towards buffer area one side.
By using above-mentioned technical proposal, conveyer belt is mobile to drive sliding seat mobile, and sliding seat slides into slow in orbit
When depositing area, actuator drives frame body lifting, is attracted sucker by the product on buffer area, to realize the transfer of product.
The further setting of the utility model, the robot device include: that slidingtype is set on the track and institute
State the fixed secondary track of conveyer belt；Slidingtype is set to the sliding seat on the secondary track；On the secondary track, for driving
Move the secondary conveying mechanism that the sliding seat slides on the secondary track；Set on sliding seat close to the frame body of buffer area one end；If
In the sliding seat, the actuator for driving frame body to go up and down；And it is multiple set on suction of the frame body towards buffer area one side
Disk.
By using above-mentioned technical proposal, conveyer belt is mobile to drive secondary track mobile, realizes and adjusts sliding seat and sucker
Position, secondary conveying mechanism driving sliding seat is mobile, is also able to achieve the position for adjusting sucker；Since secondary track is slidingtype setting,
It is more convenient when needing integral demounting transmission device and robot device；When sliding seat slides into buffer area, actuator driving
Frame body lifting, is attracted sucker by the product on buffer area, to realize the transfer of product.
The further setting of the utility model, the actuator are cylinder.
By using above-mentioned technical proposal, the conveying of product is realized convenient for the upgrading of driving sucker.
The purpose of this utility model two is to provide a kind of materiel delivery system, including at least two it is as described above have it is slow
The material conveying equipment in area is deposited, the transmission device of the adjacent material conveying equipment with buffer area is staggered to form confession
Product is delivered to adjacent described with buffer area by the robot device from the material conveying equipment described in one with buffer area
Material conveying equipment buffer area overlay region.
By using above-mentioned technical proposal, because the transmission device of adjacent two board is formed with overlay region, so adjacent two machine
The robot device of platform reaches overlay region, and the product of buffer area on a board is delivered on adjacent board to realize,
In the case where not carrying out excessive transformation to original board, the group line of multiple boards is realized, improvement cost is low, and group line is more flexible,
Significantly reduce costs.
The transmission device of the further setting of the utility model, the adjacent material conveying equipment with buffer area is upper
Under be staggered or front and back is staggered.
It, can be in such a way that the adjacent transmission device of flexible setting be staggered, to organize line more by using above-mentioned technical proposal
Flexibly.
In conclusion the utility model has the following beneficial effects:
1, because the transmission device of each board extends the length of at least one buffer area of board itself, so adjacent board
Robot device reach the buffer area of previous board, the product of buffer area on a board is delivered to adjacent machine to realize
On platform, not to original board carry out excessive transformation in the case where, realize the group line of multiple boards, improvement cost is low, group line compared with
To be flexible, significantly reduce costs；
2, adjacent orbit can be staggered or front and back is staggered up and down, can in such a way that flexible setting adjacent orbit is staggered, from
And it is more flexible to organize line.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of materiel delivery system in embodiment 1；
Fig. 2 is the structural schematic diagram of the material conveying equipment in embodiment 1 with buffer area；
Fig. 3 is the schematic diagram that transmission device extends board in embodiment 1；
Fig. 4 is the connection relationship diagram between the transmission device in embodiment 1 on adjacent two board；
Fig. 5 is the connection relationship diagram of transmission device and robot device in embodiment 1；
Fig. 6 is connection relationship diagram (the robot device work between the transmission device in embodiment 2 on adjacent two board
Before dynamic)；
Fig. 7 is connection relationship diagram (the robot device work between the transmission device in embodiment 2 on adjacent two board
After dynamic)；
Fig. 8 is the connection relationship diagram of transmission device and robot device in embodiment 2.
Appended drawing reference: 1, board；2, transmission device；21, track；22, conveying mechanism；221, driving wheel；222, driven wheel；
223, conveyer belt；3, buffer area；4, robot device；41, sliding seat；42, frame body；43, actuator；44, sucker；45, secondary rail
Road；46, secondary conveying mechanism；5, overlay region；6, workspace.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing.
Embodiment 1: a kind of materiel delivery system, as shown in Figure 1, including that at least two material transmissions with buffer area are set
Standby, the material conveying equipment with buffer area can be used for the production, processing or detection of semiconductor field, can also be applied to other each
In field, having two or more can be realized by the doubling two-by-two of the material conveying equipment with buffer area
The material conveying equipment of buffer area is assembled into materiel delivery system, to realize production, processing or detection various product.
As shown in Fig. 2, with buffer area material conveying equipment include: board 1, the transmission device 2 on board 1 and
Robot device 4,4 slidingtype of robot device are set on transmission device 2, are driven by transmission device 2 with conveying products.
It is provided on board 1 for producing, processing or the workspace 6 of testing product, board 1 is equipped at least two and is used for
The buffer area 3 of temporary product, buffer area 3 are set to board 1 close to the one or both sides of transmission device 2, delay in the present embodiment
It deposits area 3 and is set as two, buffer area 3 is set to 1 two sides of board and is in the same side of transmission device 2 with workspace 6, in conjunction with figure
3, transmission device 2 extends the length of at least one buffer area 3 of board 1, because the transmission device 2 of each board 1 extends board 1
The length of itself at least one buffer area 3, so the robot device 2 of adjacent board 1 reaches the buffer area 3 of previous board 1,
The product of buffer area 3 on a board 1 is delivered on adjacent board 1 to realize.
As shown in Figure 2 and Figure 4, the transmission device 2 of the adjacent material conveying equipment with buffer area is staggered to be formed
Product is delivered to the adjacent material transmission with buffer area from a material conveying equipment with buffer area for robot device 4
The overlay region 5 of the buffer area 3 of equipment, because the transmission device 2 of adjacent two board 1 is formed with overlay region 5, so adjacent two board 1
Robot device 4 reach overlay region 5, thus realize the product of buffer area 3 on a board 1 is delivered on adjacent board 1.
Adjacent orbit 21 is to be staggered or front and back is staggered up and down, is staggered in this embodiment for front and back, it is only necessary to change manipulator
The brachium of device, so as to the mode that flexible setting adjacent orbit 21 is staggered, so that it is more flexible to organize line.
As shown in figure 5, transmission device 2 includes: to be arranged, on board 1, along 1 length direction of board for robot device 4
The track 21 of sliding；And the conveying mechanism 22 slided on track 21 on board 1, for driving manipulator device 4,
Conveying mechanism 22 can driving manipulator device 4 moved on track 21, realize conveying of the product on board 1 and to adjacent board
The work of 1 conveying.
Conveying mechanism 22 includes: driving wheel 221 and multiple driven wheels 222 on track 21；For driving driving wheel
The motor of 221 rotations；And it is sheathed on conveyer belt 223 fixed with robot device 4 on driving wheel 221 and driven wheel 222,
Motor driven driving wheel 221 rotates, to drive conveyer belt 223 mobile, drives robot device 4 mobile to realize the defeated of product
It send.
Robot device 4 includes: the sliding seat 41 that slidingtype is set on track 21, fixes with conveyer belt 223；In conjunction with figure
1, set on sliding seat 41 close to the frame body 42 of 3 one end of buffer area；Set on sliding seat 41, the actuator for driving frame body 42 to go up and down
43, actuator 43 is cylinder；And it is multiple set on sucker 44 of the frame body 42 towards 3 one side of buffer area, the mobile band of conveyer belt 223
Dynamic sliding seat 41 is mobile, and for sliding seat 41 when sliding into workspace 6 and buffer area 3 on track 21, actuator 43 drives frame body 42
Lifting is attracted sucker 44 by the product on workspace 6 and buffer area 3, to realize the transfer of product.
The course of work: the product of storing area is delivered to buffer area 3 by the robot device 4 on the board 1 of storing area
On, the product on the buffer area 3 of previous board 1 is delivered to the buffer area 3 of current board 1 by the robot device 4 of adjacent board 1
On, then the product on the buffer area 3 of previous board 1 is delivered on current board 1 by the robot device 4 of latter board 1 again,
Successively realize the conveying of product；The machine when buffer area 3 of every board 1, which is all kept in, product, on the board 1 of storing area
The product of storing area is delivered to workspace 6 by tool arm device 4, and the robot device 4 of adjacent board 1 is by the caching of previous board 1
Product in area 3 is delivered on the workspace 6 of current board 1, and then the robot device 4 of latter board 1 is again by previous board 1
Buffer area 3 on product be delivered on the workspace 6 of current board 1, successively realize product conveying；To product production,
After the completion of processing or detection process, passes sequentially through mode same as feeding process and complete blanking.
It needs to be illustrated, the robot device 4 of every material conveying equipment with buffer area is involved in up and down
The process of material, can be used tandem, i.e., the robot device 4 on one material conveying equipment with buffer area conveys product
When extremely close to the buffer area 3 of the adjacent material conveying equipment with buffer area, then the adjacent material transmission with buffer area is set
Product on the previous material conveying equipment with buffer area is delivered to the current object with buffer area by standby robot device 4
Expect on transmission equipment, or in such a way that the robot device 4 of every material conveying equipment with buffer area is synchronous, i.e., it is previous
Product on material conveying equipment with buffer area is delivered to the current material transmission with buffer area by robot device 4
While in equipment, product is delivered to by robot device 4 on the current material conveying equipment with buffer area next to be had
On the material conveying equipment of buffer area, the synchronous transport of the product on multiple material conveying equipments with buffer area is realized, or
By the way of 4 sync of tandem and multiple robot devices, when writing software, only there need to be buffer area to more
Material conveying equipment on the driving of motor, the control of cylinder make the adjustment in timing.
Concrete principle illustrates: when carrying out the transformation of single material conveying equipment, setting at least two is for temporary on board 1
The buffer area 3 for depositing product, when robot device 4 slides on transmission device 2, and product is delivered to buffer area 3, because of each machine
The transmission device 2 of platform 1 extends the length of at least one buffer area 3 of board 1 itself, when carrying out group line, adjacent two board 1
Transmission device 2 is formed with overlay region 5, so the robot device 4 of adjacent two board 1 reaches overlay region 5, to realize one
The product of buffer area 3 is delivered on adjacent board 1 on board 1, real in the case where not carrying out excessive transformation to original board 1
The group line of existing multiple material conveying equipments with buffer area, improvement cost is low, and group line is more flexible, significantly reduces into
This.
Embodiment 2: a kind of materiel delivery system, difference from Example 1 are, as shown in fig. 6, robot device 4
It include: the secondary track 45 that slidingtype is set on track 21, fixes with conveyer belt 223；Slidingtype is set on secondary track 45
Sliding seat 41；On secondary track 45, the secondary conveying mechanism 46 for driving sliding seat 41 to slide on secondary track 45；Set on cunning
Frame body 42 of the dynamic seat 41 close to 3 one end of buffer area；Set on sliding seat 41, the actuator 43 for driving frame body 42 to go up and down；And
It is multiple to be set to sucker 44 of the frame body 42 towards 3 one side of buffer area.
Secondary conveying mechanism 46 is using the same structure of conveying mechanism 22 in example 1 is such as applied, in conjunction with Fig. 7 and Fig. 8, transmission device 2
It can be extended out the length of at least one buffer area 3 of board 1, conveyer belt 223 is mobile to drive secondary track 45 mobile, realizes and adjusts sliding
The position of seat 41 and sucker 44, can make secondary track 45 extend the length of at least one buffer area 3 of board 1, can also make secondary track
45 are contracted in board 1, and secondary conveying mechanism 46 drives sliding seat 41 mobile, are also able to achieve the position for adjusting sucker 44；Due to pair
Track 45 is slidingtype setting, more convenient when needing integral demounting transmission device 2 and robot device 4；Sliding seat 41 is sliding
When moving to buffer area 3, actuator 43 drives frame body 42 to go up and down, and is attracted sucker 44 by the product on buffer area 3, to realize production
The transfer of product.
This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability
Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but
As long as all by the protection of Patent Law in the scope of the claims of the utility model.
Claims (8)
1. a kind of material conveying equipment with buffer area characterized by comprising
Board (1)；
Transmission device (2) on the board (1), the board (1) are equipped at least two for keeping in the slow of product
It deposits area (3), the buffer area (3) is set to the one or both sides of the board (1) close to transmission device (2), the transmission dress
Setting (2) can be extended out the length of at least one buffer area (3) of the board (1)；
And
Slidingtype is set on the transmission device (2), is driven by the transmission device (2) with the robot device of conveying products
(4)。
2. the material conveying equipment according to claim 1 with buffer area, which is characterized in that the transmission device (2)
Include:
It is arranged on the board (1), along the board (1) length direction, for the track of the robot device (4) sliding
(21)；And
On the board (1), the conveying mechanism for driving the robot device (4) to slide on the track (21)
(22)。
3. the material conveying equipment according to claim 2 with buffer area, which is characterized in that the conveying mechanism (22)
Include:
Driving wheel (221) and driven wheel (222) on the track (21)；
Motor for driving driving wheel (221) to rotate；And
It is sheathed on conveyer belt (223) fixed with robot device (4) on the driving wheel (221) and driven wheel (222).
4. the material conveying equipment according to claim 3 with buffer area, which is characterized in that the robot device
(4) include:
The sliding seat (41) that slidingtype is set on the track (21), fixes with the conveyer belt (223)；
Set on sliding seat (41) close to the frame body (42) of buffer area (3) one end；
Set on the sliding seat (41), the actuator (43) for driving frame body (42) to go up and down；And
It is multiple to be set to the sucker (44) of the frame body (42) towards buffer area (3) one side.
5. the material conveying equipment according to claim 4 with buffer area, which is characterized in that the robot device
(4) include:
The secondary track (45) that slidingtype is set on the track (21), fixes with the conveyer belt (223)；
Slidingtype is set to the sliding seat (41) on the secondary track (45)；
On the secondary track (45), the secondary conveying for driving the sliding seat (41) to slide on the secondary track (45)
Mechanism (46)；
Set on sliding seat (41) close to the frame body (42) of buffer area (3) one end；
Set on the sliding seat (41), the actuator (43) for driving frame body (42) to go up and down；And
It is multiple to be set to the sucker (44) of the frame body (42) towards buffer area (3) one side.
6. the material conveying equipment according to claim 5 with buffer area, which is characterized in that
The actuator (43) is cylinder.
7. a kind of materiel delivery system, which is characterized in that have including at least two as of any of claims 1-6
The material conveying equipment of buffer area, the transmission device (2) of the adjacent material conveying equipment with buffer area be staggered with
It is formed and product is delivered to the adjacent tool from the material conveying equipment described in one with buffer area for the robot device (4)
There is the overlay region (5) of the buffer area (3) of the material conveying equipment of buffer area.
8. materiel delivery system according to claim 7, which is characterized in that the adjacent material transmission with buffer area
The transmission device (2) of equipment is to be staggered or front and back is staggered up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820894961.5U CN208593787U (en) | 2018-06-08 | 2018-06-08 | Material conveying equipment and its materiel delivery system with buffer area |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820894961.5U CN208593787U (en) | 2018-06-08 | 2018-06-08 | Material conveying equipment and its materiel delivery system with buffer area |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208593787U true CN208593787U (en) | 2019-03-12 |
Family
ID=65601173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820894961.5U Active CN208593787U (en) | 2018-06-08 | 2018-06-08 | Material conveying equipment and its materiel delivery system with buffer area |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208593787U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110116890A (en) * | 2019-05-14 | 2019-08-13 | 东莞和利诚智能科技有限公司 | A kind of flexible circuit board and wire type and single step form automatic testing equipment |
| CN110577077A (en) * | 2018-06-08 | 2019-12-17 | 深圳市矽电半导体设备有限公司 | Material conveying equipment with buffer area, material conveying system and assembling method thereof |
-
2018
- 2018-06-08 CN CN201820894961.5U patent/CN208593787U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110577077A (en) * | 2018-06-08 | 2019-12-17 | 深圳市矽电半导体设备有限公司 | Material conveying equipment with buffer area, material conveying system and assembling method thereof |
| CN110577077B (en) * | 2018-06-08 | 2024-05-17 | 矽电半导体设备(深圳)股份有限公司 | Material conveying equipment with buffer area, material conveying system and assembling method thereof |
| CN110116890A (en) * | 2019-05-14 | 2019-08-13 | 东莞和利诚智能科技有限公司 | A kind of flexible circuit board and wire type and single step form automatic testing equipment |
| CN110116890B (en) * | 2019-05-14 | 2024-02-20 | 东莞和利诚智能科技有限公司 | Automatic testing device for parallel wires and single-station type flexible circuit board |
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Address after: Longgang District of Shenzhen City, Guangdong province 518172 city street in the center city City Industrial Park Road No. 3 building E Tefalongfei business building two floor Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd Address before: Longgang District of Shenzhen City, Guangdong province 518172 city street in the center city City Industrial Park Road No. 3 building E Tefalongfei business building two floor Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |