CN110574495B - 有机el显示器的制造方法 - Google Patents
有机el显示器的制造方法 Download PDFInfo
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- CN110574495B CN110574495B CN201880028327.6A CN201880028327A CN110574495B CN 110574495 B CN110574495 B CN 110574495B CN 201880028327 A CN201880028327 A CN 201880028327A CN 110574495 B CN110574495 B CN 110574495B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000012788 optical film Substances 0.000 claims abstract description 578
- 239000007788 liquid Substances 0.000 claims abstract description 355
- 239000000758 substrate Substances 0.000 claims abstract description 151
- 239000011248 coating agent Substances 0.000 claims abstract description 123
- 238000000576 coating method Methods 0.000 claims abstract description 123
- 230000003287 optical effect Effects 0.000 claims abstract description 91
- 238000001035 drying Methods 0.000 claims abstract description 58
- 239000002904 solvent Substances 0.000 claims abstract description 41
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 32
- 239000010408 film Substances 0.000 claims description 455
- 230000001681 protective effect Effects 0.000 claims description 151
- 238000004140 cleaning Methods 0.000 claims description 124
- 238000009501 film coating Methods 0.000 claims description 109
- 238000000059 patterning Methods 0.000 claims description 89
- 229910052751 metal Inorganic materials 0.000 claims description 65
- 239000002184 metal Substances 0.000 claims description 65
- 239000007888 film coating Substances 0.000 claims description 48
- 238000005530 etching Methods 0.000 claims description 12
- 238000000206 photolithography Methods 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 62
- 239000000463 material Substances 0.000 description 23
- 239000011229 interlayer Substances 0.000 description 20
- 239000012044 organic layer Substances 0.000 description 17
- 239000011368 organic material Substances 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 125000000524 functional group Chemical group 0.000 description 12
- 239000003973 paint Substances 0.000 description 12
- 239000000126 substance Substances 0.000 description 12
- 229920001187 thermosetting polymer Polymers 0.000 description 12
- 238000007789 sealing Methods 0.000 description 11
- 238000002834 transmittance Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000007599 discharging Methods 0.000 description 10
- 229920000642 polymer Polymers 0.000 description 10
- 230000009471 action Effects 0.000 description 9
- 230000010287 polarization Effects 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000006482 condensation reaction Methods 0.000 description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 8
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000007605 air drying Methods 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 238000006757 chemical reactions by type Methods 0.000 description 4
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- 239000002320 enamel (paints) Substances 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 230000005525 hole transport Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004976 Lyotropic liquid crystal Substances 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 239000004974 Thermotropic liquid crystal Substances 0.000 description 2
- -1 and the like Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920002677 supramolecular polymer Polymers 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/50—OLEDs integrated with light modulating elements, e.g. with electrochromic elements, photochromic elements or liquid crystal elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/40—OLEDs integrated with touch screens
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Theoretical Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Polarising Elements (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017091471 | 2017-05-01 | ||
JP2017-091471 | 2017-05-01 | ||
PCT/JP2018/015998 WO2018203478A1 (ja) | 2017-05-01 | 2018-04-18 | 有機elディスプレイの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110574495A CN110574495A (zh) | 2019-12-13 |
CN110574495B true CN110574495B (zh) | 2022-04-19 |
Family
ID=64016648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201880028327.6A Active CN110574495B (zh) | 2017-05-01 | 2018-04-18 | 有机el显示器的制造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6749485B2 (ja) |
KR (1) | KR102502812B1 (ja) |
CN (1) | CN110574495B (ja) |
TW (1) | TWI759462B (ja) |
WO (1) | WO2018203478A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7312603B2 (ja) * | 2019-05-10 | 2023-07-21 | 東京エレクトロン株式会社 | 塗布膜形成方法及び塗布膜形成装置 |
KR20210066374A (ko) * | 2019-11-28 | 2021-06-07 | 엘지디스플레이 주식회사 | 편광자, 편광자 제조방법 및 이를 구비한 표시장치 |
EP4210089A4 (en) * | 2020-09-04 | 2024-02-21 | FUJIFILM Corporation | METHOD FOR MANUFACTURING ORGANIC LAYER PATTERN AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1375727A (zh) * | 2001-03-13 | 2002-10-23 | 日本电气株式会社 | 显示装置 |
KR20070030619A (ko) * | 2005-09-13 | 2007-03-16 | 삼성에스디아이 주식회사 | 평판표시장치 및 유기 발광표시장치 |
CN101365970A (zh) * | 2006-01-30 | 2009-02-11 | 日东电工株式会社 | 相位差板的制造方法、相位差板、带相位差板偏光板、液晶面板及液晶显示装置 |
KR20130000310A (ko) * | 2011-06-22 | 2013-01-02 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 |
JP2014049409A (ja) * | 2012-09-04 | 2014-03-17 | Dic Corp | 光学部材及びこれを用いた有機エレクトロルミネッセンス素子 |
KR20140137954A (ko) * | 2013-05-24 | 2014-12-03 | 삼성전자주식회사 | 색 변화 저감용 광학 필름 및 이를 채용한 유기발광 표시장치 |
TW201519042A (zh) * | 2013-11-12 | 2015-05-16 | Tpk Touch Solutions Inc | 有機發光二極體觸控顯示裝置 |
CN104637984A (zh) * | 2013-11-11 | 2015-05-20 | 乐金显示有限公司 | 有机发光显示装置及其制造方法 |
CN104750285A (zh) * | 2013-12-27 | 2015-07-01 | 昆山工研院新型平板显示技术中心有限公司 | 一种触控显示装置及其制备方法 |
CN106298861A (zh) * | 2016-10-24 | 2017-01-04 | 上海天马微电子有限公司 | 有机发光显示面板及其制造方法 |
WO2017043438A1 (ja) * | 2015-09-07 | 2017-03-16 | 富士フイルム株式会社 | 重合性液晶組成物、位相差フィルム、偏光板、液晶表示装置および有機電界発光装置 |
CN106537632A (zh) * | 2014-07-31 | 2017-03-22 | 罗利克有限公司 | 引入抗反射性能的oled显示器的封装结构体 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005062502A (ja) | 2003-08-13 | 2005-03-10 | Nakan Corp | 偏光膜印刷装置 |
KR101117734B1 (ko) * | 2010-01-21 | 2012-02-24 | 삼성모바일디스플레이주식회사 | 유기 발광 장치 |
CN109309114B (zh) * | 2013-11-12 | 2023-05-26 | 宸鸿光电科技股份有限公司 | 有机发光二极管触控显示设备 |
JP6640847B2 (ja) * | 2015-05-29 | 2020-02-05 | 富士フイルム株式会社 | 有機エレクトロルミネッセンス表示装置 |
KR102568775B1 (ko) * | 2015-10-26 | 2023-08-22 | 삼성디스플레이 주식회사 | 플렉서블 디스플레이 장치 |
KR102472607B1 (ko) * | 2016-02-03 | 2022-11-30 | 삼성디스플레이 주식회사 | 표시 장치 |
JP6727064B2 (ja) * | 2016-08-01 | 2020-07-22 | 株式会社ジャパンディスプレイ | 表示装置及び表示装置の製造方法 |
CN106952941B (zh) * | 2017-05-26 | 2020-10-09 | 上海天马有机发光显示技术有限公司 | 一种显示面板、制作方法及电子设备 |
-
2018
- 2018-04-18 WO PCT/JP2018/015998 patent/WO2018203478A1/ja active Application Filing
- 2018-04-18 JP JP2019515695A patent/JP6749485B2/ja active Active
- 2018-04-18 CN CN201880028327.6A patent/CN110574495B/zh active Active
- 2018-04-18 TW TW107113145A patent/TWI759462B/zh active
- 2018-04-18 KR KR1020197034306A patent/KR102502812B1/ko active IP Right Grant
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1375727A (zh) * | 2001-03-13 | 2002-10-23 | 日本电气株式会社 | 显示装置 |
KR20070030619A (ko) * | 2005-09-13 | 2007-03-16 | 삼성에스디아이 주식회사 | 평판표시장치 및 유기 발광표시장치 |
CN101365970A (zh) * | 2006-01-30 | 2009-02-11 | 日东电工株式会社 | 相位差板的制造方法、相位差板、带相位差板偏光板、液晶面板及液晶显示装置 |
KR20130000310A (ko) * | 2011-06-22 | 2013-01-02 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 |
JP2014049409A (ja) * | 2012-09-04 | 2014-03-17 | Dic Corp | 光学部材及びこれを用いた有機エレクトロルミネッセンス素子 |
KR20140137954A (ko) * | 2013-05-24 | 2014-12-03 | 삼성전자주식회사 | 색 변화 저감용 광학 필름 및 이를 채용한 유기발광 표시장치 |
CN104637984A (zh) * | 2013-11-11 | 2015-05-20 | 乐金显示有限公司 | 有机发光显示装置及其制造方法 |
TW201519042A (zh) * | 2013-11-12 | 2015-05-16 | Tpk Touch Solutions Inc | 有機發光二極體觸控顯示裝置 |
CN104750285A (zh) * | 2013-12-27 | 2015-07-01 | 昆山工研院新型平板显示技术中心有限公司 | 一种触控显示装置及其制备方法 |
CN106537632A (zh) * | 2014-07-31 | 2017-03-22 | 罗利克有限公司 | 引入抗反射性能的oled显示器的封装结构体 |
WO2017043438A1 (ja) * | 2015-09-07 | 2017-03-16 | 富士フイルム株式会社 | 重合性液晶組成物、位相差フィルム、偏光板、液晶表示装置および有機電界発光装置 |
CN106298861A (zh) * | 2016-10-24 | 2017-01-04 | 上海天马微电子有限公司 | 有机发光显示面板及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6749485B2 (ja) | 2020-09-02 |
WO2018203478A1 (ja) | 2018-11-08 |
TW201904103A (zh) | 2019-01-16 |
KR20200002948A (ko) | 2020-01-08 |
JPWO2018203478A1 (ja) | 2020-05-14 |
TWI759462B (zh) | 2022-04-01 |
CN110574495A (zh) | 2019-12-13 |
KR102502812B1 (ko) | 2023-02-22 |
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