CN110514165B - Roundness error separating device based on synchronous motion - Google Patents
Roundness error separating device based on synchronous motion Download PDFInfo
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Abstract
The invention relates to a roundness error separation device based on synchronous motion, belonging to the technical field of manufacturing and measuring of precision instruments; the device mainly introduces an error separation rotary table which can rotate along with the rotating main shaft of the ultra-precise roundness error measuring instrument in the same direction, and separates out any one of the roundness error of a measured piece, the radial gyration error of the main shaft of the ultra-precise roundness measuring instrument and the radial gyration error of the error separation rotary table by measuring the circumferential signals containing different system components three times.
Description
The application is a divisional application of the invention patent application 'roundness error separating device and method based on synchronous motion'.
Application date of the original case: 2017-12-17.
Original application No.: 2017113596628.
the name of the original invention is: a roundness error separation device and method based on synchronous motion.
Technical Field
The invention discloses a roundness error separation device based on synchronous motion, belonging to the technical field of manufacturing and measuring of precision instruments.
Background
In recent years, the development of ultra-precision machining field directly results in that machining precision of a plurality of machining devices does not have corresponding detection devices, so that the machining precision cannot be further improved. Taking roundness as an example, the roundness error of a modern astronomical telescope reaches +/-5 nm, the roundness of a gyroscope on a spaceship is required to be less than 10nm, the roundness error of any section of a silicon ball with high-precision density reference reaches within 10nm, the radial gyration error of an instrument main shaft of the existing roundness measuring instrument with highest precision is about +/-10 nm, and the roundness error of ultrahigh-precision parts cannot be measured. It is difficult to improve the accuracy of the roundness measuring instrument only by hard Techniques such as the conventional technique, and an Error Separation Technique (EST) must be used to separate the system Error of the roundness measuring instrument.
Generally, the roundness error separation method used at present is mainly divided into two major methods, a multiple-index method and a multiple-measuring-head method, the multiple-index method is to realize error separation by adding an error separation turntable so that the error separation turntable drives multiple index measurements of a measured piece, and the multiple-measuring-head method is to realize roundness error separation by increasing the number and layout of sensors.
The reverse method belongs to a multi-index method, but the measurement state of a measuring instrument needs to be stopped in the measurement process, and the direction of a measured piece and a sensor needs to be changed by 180 degrees, so that the concentricity of the measured piece and a roundness measuring device needs to be adjusted again, human intervention is increased, the 180 degrees cannot be guaranteed to be changed, the measurement can be carried out only by human eyes, and the automatic measurement is not facilitated.
The most widely used multi-step method in the multi-index method is a total harmonic method developed on the basis of the hard damage of the harmonic suppression problem, and the multi-step method is a full harmonic method which is developed on the basis of the hard damage of the harmonic suppression problem, and is not favorable for high-speed and high-efficiency measurement because all the methods change space in time, increase the index number of measurement, prolong the measurement time and introduce more measurement errors, such as linear drift of a sensor, electrical noise and the like.
The single-transposition method in the patent 'single-transposition roundness error separation method' is further simplified on the basis of the multi-transposition method, the essence of the single-transposition method is consistent with that of the multi-step method, and the obtained result is also consistent with that of the multi-transposition method. In the methods, the acquired signals are analyzed and processed by Fourier transform templates, but singular points are easy to exist, the influence of infinite amplification on values near the singular points is caused, the problem of harmonic suppression is not completely solved, and the harmonic suppression can only be avoided within a certain range.
The multi-head method is a method in which the roundness error separation is realized by increasing the number of sensors (a method of two or more sensors is called a multi-head method) and arranging them reasonably. The two-point method is that two measuring heads are placed at 180 degrees, the three-measuring-head method is that three sensors are placed at a certain angle, the four-measuring-head method is that only one sensor is added on the three measuring heads, the hybrid method is that one displacement sensor in the three-measuring-head method is changed into an angle sensor, the orthogonal hybrid method is that one displacement sensor and one angle sensor are placed at 90 degrees, and the methods are that several signals obtained by sampling are subjected to Fourier transform and inverse transform to obtain the axis error of the roundness measuring instrument and the roundness error of a measured piece. However, the disadvantages are obvious, for example, the increase of the number of the sensors can cause the characteristics of each sensor to be inconsistent, the layout of the sensors is not on the same measuring section, the transfer function has zero points and the like.
The method has the problems that 1, the signal is subjected to Fourier transform to a frequency domain for error separation to obtain the frequency spectrum information of the separated signal, then the inverse Fourier transform is carried out to finally obtain the separated signal, the calculation is complex, and truncation and rounding errors exist; 2. because Fourier transform is used, the problem of harmonic suppression exists in the separation signal, the model has principle errors, and the corresponding improvement method can only solve the problem that no harmonic suppression exists in a certain range and can not realize the full-band no harmonic suppression; 3. the roundness error of a measured piece, the radial gyration error of a main shaft of the ultra-precise roundness measuring instrument and the radial gyration error of the error separation turntable can not be separated simultaneously.
Disclosure of Invention
In order to solve the problems, the invention discloses a roundness error separation device and method based on synchronous motion, which not only separate in a space domain, do not need Fourier transform, have simple calculation and no harmonic suppression in a full wave band, but also have the technical advantages of simultaneously separating three errors (roundness error of a measured piece, radial gyration error of a main shaft of an ultra-precise roundness measuring instrument and radial gyration error of an error separation turntable).
The purpose of the invention is realized as follows:
based on synchronous motion formula circularity error separator, including the rotation main shaft, transverse guide, displacement sensor, error separation revolving stage, workstation and vertical guide, the rotation main shaft is connected with transverse guide is overcentre, displacement sensor is horizontal on transverse guide to the removal, the rotation main shaft, transverse guide and displacement sensor coaxial motion, error separation revolving stage is kept flat on the workstation, error separation revolving stage revolves together with the piece that is surveyed, the workstation drives error separation revolving stage and is surveyed the piece and move from top to bottom along vertical guide together, seek and surveyed the cross section position.
In the roundness error separating device based on the synchronous motion, the rotary main shaft is in a hydraulic, dense-bead or air-floating mode.
According to the roundness error separating device based on the synchronous motion, the error separating rotary table can synchronously and continuously rotate with the rotary main shaft.
The roundness error separation method based on the synchronous motion realized on the roundness error separation device based on the synchronous motion comprises the following steps:
step (ii) ofaPlacing the error separation rotary table on a workbench, and roughly adjusting the error separation rotary table to be concentric with the rotary main shaft;
b, determining a section to be measured of the measured piece, lifting the workbench along the vertical guide rail to enable the section to be measured of the measured piece and the measuring head of the displacement sensor to be on the same section, and adjusting the measured piece to enable the section to be measured of the measured piece to be concentric with the error separation turntable;
step c, regarding the error separation rotary table and the measured piece as a whole, adjusting the error separation rotary table and the measured piece on the error separation rotary table to be concentric with the rotation main shaft of the ultra-precise roundness measuring instrument, wherein the error separation rotary table is mainly adjusted, and the position of the measured piece on the error separation rotary table is kept unchanged;
d, moving the displacement sensor along the transverse guide rail to enable the displacement sensor to be in reliable contact with the measured piece, adjusting the displacement sensor to enable the force of the displacement sensor to be measured at a section with the best linearity, starting a main shaft rotation mode of the ultra-precise roundness measuring instrument, waiting for the main shaft 1 of the ultra-precise roundness measuring instrument to drive the displacement sensor to rotate stably, carrying out sampling measurement by the displacement sensor, wherein signals picked up by the displacement sensor are comprehensive errors A (theta) including a radial gyration error S (theta) of the instrument gyration main shaft and a roundness error R (theta) of the section to be measured of the measured piece, wherein
A(θ)＝S(θ)+R(θ)(1)
E, stopping the rotation of the rotary main shaft of the ultra-precise roundness measuring instrument, starting the rotation mode of the error separation rotary table after the rotation is stopped stably, and dividing the errorsD, rotating the separating rotary table at the same rotating speed as the rotating main shaft of the ultra-precise roundness measuring instrument in the step d, sampling and measuring by using a displacement sensor after the rotating is stable, wherein a signal picked up by the displacement sensor is a comprehensive error B (theta) comprising a roundness error R (theta) of a section to be measured of the measured piece and a radial rotation error E (theta) of the error separating rotary table, wherein the comprehensive error B (theta) comprises a roundness error R (theta) of the section to be measured of the
The initial position of sampling in the step is consistent with the initial position in the step d;
B(θ)＝R(θ)+E(θ) (2)
step f, starting a main shaft rotation mode of the ultra-precise roundness measuring instrument and keeping a rotation mode of the error separation rotary table to be started, after the two shafts rotate stably and the speed keeps consistent with the rotation speed in the step d, sampling measurement is carried out by a displacement sensor, signals picked up by the displacement sensor are comprehensive errors C (theta) including a radial gyration error S (theta) of the instrument gyration main shaft and a radial gyration error E (theta) of the error separation rotary table, wherein the comprehensive errors C (theta) include
In the step, the relative positions of the error separation rotary table and the rotary main shaft are ensured to be consistent with those in the step d;
C(θ)＝S(θ)+E(θ) (3)
step g, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating out a roundness error signal of the specified section of the measured piece,
wherein
Step h, inputting the roundness error signal separated in the step g into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the roundness of the specified section of the measured piece;
step i, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial gyration error signal of a gyration main shaft of the ultra-precision roundness measuring instrument,
wherein
J, inputting the radial gyration error signal of the gyration main shaft of the ultra-precise roundness measuring instrument separated in the step i into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the gyration main shaft of the ultra-precise roundness measuring instrument;
step k, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotation error signal of the error separation turntable,
wherein
And step l, inputting the main shaft radial rotation error signal of the error separation rotary table separated in the step k into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial rotation error roundness of the error separation rotary table.
Has the advantages that:
the first and all the collected signals are only processed in a space domain, Fourier transform is not involved at all, and the step of Fourier transform is omitted, so the method has the technical advantages of less calculation steps, simple calculation and high detection speed.
Secondly, the fourier transform is avoided, so that truncation and rounding errors peculiar to the fourier transform do not occur, and the method has the technical advantages of no signal loss and accurate calculation.
And thirdly, because Fourier transform is not involved, the problem of harmonic suppression does not exist in the separation signal, so that the model principle is error-free, the full-band harmonic suppression-free effect can be realized, and the method also has the technical advantage of accurate calculation.
Fourthly, the method can simultaneously separate out the roundness error of the measured piece, the radial gyration error of the main shaft of the ultra-precise roundness measuring instrument and the radial gyration error of the error separation turntable according to the requirement, thereby having the multifunctional technical advantage of detecting a plurality of parameters by one instrument.
Fifthly, the method can directly separate the radial rotation error of the error separation turntable, so that the method also has a self-calibration function.
Drawings
Fig. 1 is a schematic structural diagram of a roundness error separating device based on synchronous motion according to the present invention.
In the figure: 1 rotary main shaft, 2 transverse guide rails, 3 displacement sensors, 4 measured parts, 5 error separation rotary tables, 6 working tables and 7 vertical guide rails
Detailed Description
The following describes in further detail specific embodiments of the present invention with reference to the accompanying drawings.
Detailed description of the invention
The following examples are based on the simultaneous movement type roundness error separating apparatus of the present invention.
The roundness error separating device based on the synchronous motion is characterized by comprising a rotary main shaft 1, a transverse guide rail 2, a displacement sensor 3, an error separation rotary table 5, a workbench 6 and a vertical guide rail 7, wherein the rotary main shaft 1 is connected with the transverse guide rail 2 in an overcentre mode, the displacement sensor 3 moves on the transverse guide rail 2 in the horizontal direction, the rotary main shaft 1, the transverse guide rail 2 and the displacement sensor 3 move coaxially, the error separation rotary table 5 is flatly arranged on the workbench 6, the error separation rotary table 5 and a measured part 4 rotate together, the workbench 6 drives the error separation rotary table 5 and the measured part 4 to move up and down along the vertical guide rail 7 together, and the measured section position is searched.
The rotary main shaft 1 is in a hydraulic, dense-bead or air-floating mode. In the present embodiment, the main rotation shaft 1 is hydraulic.
The error separation turntable 5 can continuously rotate synchronously with the rotary main shaft 1.
Detailed description of the invention
The following examples are based on the simultaneous movement type roundness error separation method of the present invention.
The invention relates to a roundness error separation method based on synchronous motion, which comprises the following steps:
step a, placing an error separation rotary table 5 on a workbench 6, and roughly adjusting the error separation rotary table 5 to be concentric with a rotary main shaft 1;
b, determining the section to be measured of the measured piece 4, lifting the workbench 6 along the vertical guide rail 7 to enable the section to be measured of the measured piece 4 and the measuring head of the displacement sensor 3 to be on the same section, and adjusting the measured piece 4 to enable the section to be measured of the measured piece 4 and the error separation rotary table 5 to be concentric;
step c, regarding the error separation rotary table 5 and the measured piece 4 as a whole, adjusting the error separation rotary table 5 and the measured piece 4 on the error separation rotary table to be concentric with the rotation main shaft 1 of the ultra-precision roundness measuring instrument, wherein the error separation rotary table 5 is mainly adjusted, and the position of the measured piece 4 on the error separation rotary table 5 is kept unchanged;
step d, moving the displacement sensor 3 along the transverse guide rail 2 to enable the displacement sensor 3 to be in reliable contact with the measured part 4, adjusting the displacement sensor 3 to enable the force measured by the displacement sensor 3 to be at a section with the best linearity, starting a main shaft rotation mode of the ultra-precise roundness measuring instrument, waiting for the main shaft 1 of the ultra-precise roundness measuring instrument to drive the displacement sensor 3 to rotate stably, carrying out sampling measurement by the displacement sensor 3, wherein signals picked up by the displacement sensor 3 are comprehensive errors A (theta) including a radial gyration error S (theta) of the instrument gyration main shaft 1 and a roundness error R (theta) of a section to be measured of the measured part 4, wherein the comprehensive errors A (theta) include a radial gyration
A(θ)＝S(θ)+R(θ) (1)
E, stopping the rotation of the rotary main shaft 1 of the ultra-precise roundness measuring instrument, starting a rotation mode of the error separation rotary table 5 after the rotation is stopped stably, enabling the error separation rotary table 5 to rotate at the same rotating speed as the rotary main shaft 1 of the ultra-precise roundness measuring instrument in the step d, enabling the displacement sensor 3 to perform sampling measurement after the rotation is stable, and enabling signals picked up by the displacement sensor 3 to be a comprehensive error B (theta) comprising a roundness error R (theta) of a section to be measured of the measured piece 4 and a radial gyration error E (theta) of the error separation rotary table 5, wherein the comprehensive error B (theta) comprises a roundness error R
The initial position of sampling in the step is consistent with the initial position in the step d;
B(θ)＝R(θ)+E(θ) (2)
step f, starting a main shaft rotation mode of the ultra-precise roundness measuring instrument and keeping a rotation mode of the error separation rotary table 5 on, after the two shafts rotate stably and the speed keeps consistent with the rotation speed in the step d, sampling measurement is carried out by the displacement sensor 3, and signals picked up by the displacement sensor 3 are a comprehensive error C (theta) comprising a radial gyration error S (theta) of the instrument gyration main shaft 1 and a radial gyration error E (theta) of the error separation rotary table 5, wherein
In the step, the relative positions of the error separation rotary table 5 and the rotary main shaft 1 are ensured to be consistent with those in the step d;
C(θ)＝S(θ)+E(θ) (3)
step g, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating out a roundness error signal of the specified section of the measured piece 4,
wherein
Step h, inputting the roundness error signal separated in the step g into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the roundness of the specified section of the measured piece 4;
step i, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotation error signal of the rotation main shaft 1 of the ultra-precision roundness measuring instrument,
wherein
J, inputting the radial gyration error signal of the gyration main shaft 1 of the ultra-precise roundness measuring instrument separated in the step i into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the gyration main shaft 1 of the ultra-precise roundness measuring instrument;
step k, performing mathematical operation on the combined error signals of the steps d, e and f, namely separating the radial rotation error signals of the error separation rotary table 5,
wherein
And step l, inputting the main shaft radial rotation error signal of the error separation rotary table 5 separated in the step k into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial rotation error roundness of the error separation rotary table 5.
Claims (1)
1. Based on synchronous motion formula circularity error separator, including rotation main shaft (1), transverse guide (2), displacement sensor (3), error separation revolving stage (5), workstation (6) and vertical guide (7), rotation main shaft (1) and transverse guide (2) cross the heart and be connected, displacement sensor (3) are horizontal on transverse guide (2) to the removal, rotation main shaft (1), transverse guide (2) and displacement sensor (3) coaxial motion, error separation revolving stage (5) are kept flat on workstation (6), error separation revolving stage (5) and measured piece (4) are revolved together, workstation (6) drive error separation revolving stage (5) and measured piece (4) along vertical guide (7) up-and-down motion together, seek measured cross section position;
the rotary main shaft (1) is in a hydraulic, dense-bead or air-floating mode;
the error separation rotary table (5) can synchronously and continuously rotate with the rotary main shaft (1);
it is characterized in that the preparation method is characterized in that,
the working principle of the roundness error separating device based on the synchronous motion is as follows:
step a, placing an error separation rotary table (5) on a workbench (6), and roughly adjusting the error separation rotary table (5) to be concentric with a rotary main shaft (1);
b, determining the section to be measured of the measured piece (4), lifting the workbench (6) along the vertical guide rail (7), enabling the section to be measured of the measured piece (4) and a measuring head of the displacement sensor (3) to be on the same section, and adjusting the measured piece (4) to enable the section to be measured of the measured piece (4) to be concentric with the error separation rotary table (5);
step c, regarding the error separation rotary table (5) and the measured piece (4) as a whole, adjusting the error separation rotary table (5) and the measured piece (4) on the error separation rotary table to be concentric with the rotary main shaft (1) of the ultra-precision roundness measuring instrument, wherein the error separation rotary table (5) is mainly adjusted, and the position of the measured piece (4) on the error separation rotary table (5) is kept unchanged;
d, moving the displacement sensor (3) along the transverse guide rail (2) to ensure the reliability of the displacement sensor (3) and the tested piece (4)The method comprises the steps of contacting, adjusting a displacement sensor (3) to enable the force measured by the displacement sensor (3) to be at the section with the best linearity, starting a main shaft rotation mode of the ultra-precise roundness measuring instrument, waiting for a rotation main shaft (1) of the ultra-precise roundness measuring instrument to drive the displacement sensor (3) to rotate stably, sampling and measuring the displacement sensor (3), and acquiring signals by the displacement sensor (3) to be a comprehensive error A (theta) comprising a radial rotation error S (theta) of the rotation main shaft (1) and a roundness error R (theta) of a section to be measured of a measured piece (4), wherein the comprehensive error A (theta) comprises signals picked up by the
A(θ)＝S(θ)+R(θ) (1)
E, stopping the rotation of the rotation main shaft (1) of the ultra-precise roundness measuring instrument, starting a rotation mode of the error separation rotary table (5) after the rotation mode is stopped stably, enabling the error separation rotary table (5) to rotate at the same rotating speed as the rotation main shaft (1) of the ultra-precise roundness measuring instrument in the step d, enabling the displacement sensor (3) to perform sampling measurement after the rotation is stable, and enabling signals picked up by the displacement sensor (3) to be comprehensive errors B (theta) including the roundness error R (theta) of the section to be measured of the measured piece (4) and the radial rotation error E (theta) of the error separation rotary table (5), wherein the comprehensive errors B (theta) comprise
The initial position of sampling in the step is consistent with the initial position in the step d;
B(θ)＝R(θ)+E(θ) (2)
step f, starting a main shaft rotation mode of the ultra-precise roundness measuring instrument and keeping the rotation mode of the error separation rotary table (5) on, after the two shafts rotate stably and the speed keeps consistent with the rotation speed in the step d, sampling measurement is carried out by the displacement sensor (3), signals picked up by the displacement sensor (3) are a comprehensive error C (theta) comprising a radial gyration error S (theta) of the gyration main shaft (1) and a radial gyration error E (theta) of the error separation rotary table (5), wherein
In this step it must be ensured that the error separates the turntable (5) from the returnThe relative position of the spindle (1) is consistent with that in the step d;
C(θ)＝S(θ)+E(θ) (3)
step g, performing mathematical operation on the combined error signals of the step d, the step e and the step f to separate out a roundness error signal of the section to be measured of the measured piece (4),
wherein
Step h, inputting the roundness error signal separated in the step g into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the roundness of the section to be measured of the measured piece (4);
step i, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial gyration error signal of a gyration main shaft (1) of the ultra-precision roundness measuring instrument,
wherein
J, inputting the radial gyration error signal of the gyration main shaft (1) of the ultra-precise roundness measuring instrument separated in the step i into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the gyration main shaft (1) of the ultra-precise roundness measuring instrument;
step k, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotation error signal of the error separation turntable (5),
wherein
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| CN111678432B (en) * | 2020-05-20 | 2021-10-22 | 常州机电职业技术学院 | Ball-end milling cutter abrasion loss detection device and detection method thereof |
| CN112405112B (en) * | 2020-12-03 | 2024-07-16 | 中国工程物理研究院机械制造工艺研究所 | Five-axis machine tool linkage error detection device and measurement method |
| CN115451899B (en) * | 2022-10-07 | 2024-09-10 | 哈尔滨工业大学 | Calibration method and device for axiality assembly measuring instrument of aero-engine |
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| CN108036751B (en) | 2019-12-13 |
| CN108036751A (en) | 2018-05-15 |
| CN110514165A (en) | 2019-11-29 |
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