CN104154849B - Three-axis linkage-based complicated part accurate measurement central path planning realizing method and device - Google Patents

Abstract

The invention provides a method and device for realizing path planning of a quasi-measurement center of complex parts based on three-axis linkage: it includes a base, a workpiece column, and a measurement column, and the measurement column is provided with an inductive probe that can move vertically and horizontally. The invention utilizes the back and forth movement of the measuring column to control the distance between the measuring head and the center of the main shaft rotary shaft system, and can realize the stepless adjustment of the base circle without using a series of base discs to assist in the measurement of the gear, which simplifies the detection process, and The detection error caused by the wear of the base disc is solved. The present invention can respectively realize the control of the measuring track of the measuring head by controlling the vertical movement, the horizontal movement of the measuring head and the linkage with the main shaft rotary shaft system, and finally can realize the tooth orientation, Fully automatic measurement of tooth shape and pitch error, the invention can also realize path planning for eccentric gears, and realize full automatic measurement of tooth direction, tooth shape and pitch error of eccentric gears.

Description

Realization method and implementation method of quasi-measurement center path planning for complex parts based on three-axis linkage device

technical field

The invention belongs to the field of precision measurement of complex profiles, and in particular relates to a method and device for realizing path planning of quasi-measurement centers of complex parts based on three-axis linkage.

Background technique

With the development of the machinery manufacturing industry, especially with the rapid development of the automobile industry and wind power industry, the demand for gears is increasing day by day, and the processing accuracy of gears has an important impact on the quality of mechanical products. Too low gear accuracy will make The transmission of mechanical equipment is unstable, which in turn causes aggravated vibration and noise, which seriously affects the health of operators and greatly shortens the life of mechanical equipment. In order to improve the operating comfort of the product and increase the life of the product, the requirements for the quality of gear processing are getting higher and higher, which puts forward higher requirements for gear testing equipment.

The 320 series measuring instrument designed by Harbin Measuring Cutting Tool Group Co., Ltd. realizes the path planning of the measuring head by controlling the linkage of X and W axes, but this series of products needs to use a series of base discs (13) to assist in the measurement of gears , the process is complicated, and the base disc will be worn, resulting in detection errors.

At present, the most commonly used method for the measurement of eccentric gears is to design eccentric tooling. Through the eccentric tooling, the center of the eccentric gear coincides with the center of the main shaft rotation shaft system, that is, the eccentricity of the eccentric gear is compensated by the eccentric tooling. However, this method has high requirements on the accuracy of the tooling, and the processing of the tooling is difficult, and if the tooling is used for too long, it will cause wear and tear and reduce the detection accuracy.

Contents of the invention

The object of the present invention is to provide a method and device for realizing path planning of quasi-measurement center of complex parts based on three-axis linkage.

To achieve the above object, the present invention adopts the following technical solutions:

A device for realizing the path planning of the quasi-measurement center of complex parts based on three-axis linkage. The device includes a base, a workpiece column and a spindle rotation shaft set on one end of the base. On the top shaft system, the other end of the base is provided with a measuring column that can move back and forth. The distance between the measuring column and the workpiece column is adjusted through the forward and backward movement. The measuring column is equipped with an electrical probe that can move vertically and horizontally. .

The device also includes a manual control assembly for controlling the forward and backward movement of the measuring column. The manual control assembly includes a lead screw arranged on the base and a handwheel connected with the lead screw. The measuring column is connected with the lead screw.

The device also includes a drive control assembly, the drive control assembly includes a computer, a first grating ruler for detecting the displacement variation of the vertical movement, a second grating ruler for detecting the displacement variation of the horizontal movement, and a second grating ruler for detecting the displacement variation of the horizontal movement. The third grating scale that detects the amount of displacement change in the forward and backward movement, the computer respectively communicates with the reading head of the first grating scale, the reading head of the second grating scale, the reading head of the third grating scale, and the motor for driving the rotary shaft system of the main shaft , the motor used to drive the vertical movement of the electrical probe and the motor used to drive the electrical probe to move horizontally are connected.

The motor that drives the rotary axis of the main shaft is a DC servo motor, and the motor that drives the vertical or horizontal movement of the electrical probe is an AC servo motor.

The path planning implementation method of the above-mentioned path planning implementation device for quasi-measurement center path planning of complex parts based on three-axis linkage, the method includes the following steps:

For non-eccentric gears, the gear to be tested is clamped between the upper top shaft system and the main shaft rotary shaft system, so that the center of the tested gear coincides with the center of the main shaft rotary shaft system, and then the measuring column is manually controlled to move forward and backward, so that the electric sensor The distance between the measuring ball at the front end of the head and the center of the spindle shaft system is the radius of the base circle of the gear to be tested. At the same time, the electric probe is manually controlled to move along the vertical and horizontal directions, so that the electric probe can move to any tooth of the gear under test. or, for eccentric gears, the gear to be tested is clamped between the upper top shaft system and the main shaft rotation shaft system, and then the measuring column is manually controlled to move back and forth, so that the inductive probe and the tooth top of the gear to be tested are compressed at a certain Then fix the position of the measuring column, and then make the main shaft rotary axis drive the gear to be tested to rotate, and through the horizontal movement of the inductive probe, ensure that the compression of the inductive probe is in contact with the tooth part of the tested gear Under the condition of keeping the same, the position data of several tooth tops of the tested gear are measured, and the circle fitting is carried out on the measured position data, and the center _O2 of the tooth top circle of the tested gear is obtained at the axis of rotation The point O ₁ on the center of the system is the position in the coordinate system of the coordinate origin, O ₁ and O ₂ are in the same horizontal plane, and then the measuring ball at the front end of the inductive probe passes through the addendum circle of the measured gear through the forward and backward movement of the measuring column The distance between the vertical lines of the center _O2 is equal to the radius of the base circle of the gear under test.

The method also includes the steps of:

Keep the position of the measuring column unchanged, and make the inductive probe contact with the tooth surface of the gear to be tested by a certain amount of compression through the rotation of the spindle shaft system. The compression is S/4～S/2, S is the range of the inductive probe, and then Drive the electric probe to move vertically, so that the electric probe moves along the tooth width direction of the gear under test.

The distance that the electric probe moves along the tooth width direction of the gear under test is defined according to the tooth width of the gear under test, or the electric probe first moves below the lower end face of the gear under test, and then the underside of the gear under test The end face moves above the upper end face of the gear under test.

The method also includes the steps of:

Keep the position of the measuring column unchanged, so that the inductive probe moves to the middle position of the tooth width of the gear under test through vertical movement, and then drives the gear under test to rotate through the rotation of the main shaft rotation shaft, so that the inductive probe and any tooth groove There is a compression amount of S/4～S/2 between the side tooth surfaces, and S is the range of the electric probe; then, for non-eccentric gears, by controlling the linkage of the rotation of the main shaft rotary shaft system and the horizontal movement of the electric probe, Make the motion track of the electric probe relative to the base circle of the gear under test be the involute of the gear under test, or, for eccentric gears, according to the center of the addendum circle _O2 of the gear under test on the center of the shaft system with the main shaft rotating O ₁ is the position in the coordinate system of the origin, and by controlling the rotation of the main shaft rotary shaft system and the linkage of the horizontal movement of the electrical probe, the motion track of the electrical probe relative to the base circle of the gear under test is the gear under test involute.

The method also includes the steps of:

1) Keep the position of the measuring column unchanged; for non-eccentric gears, drive the gear to be tested to rotate left and right through the shaft system of the main shaft, and determine the cogging distance of the gear to be tested on the base circle according to the change in the compression of the inductive probe, and then Calculate the middle position of the tooth groove, or, for eccentric gears, make the main shaft rotary shaft rotate left and right, and according to the center _O2 of the addendum circle of the gear to be tested, in the coordinate system with the point O1 _on the center of the main shaft rotary shaft as the origin Control the horizontal movement of the inductive probe and the rotation of the main shaft rotary shaft to ensure that the measuring ball at the front end of the inductive probe is always on the base circle of the gear to be tested, and then determine it according to the change in the compression amount of the inductive probe The cogging distance of the measured gear on the base circle, and then calculate the middle position of the cogging;

2) After detecting a tooth slot, make the electric probe leave the tooth slot through vertical motion, then make the main shaft rotating shaft drive the gear to be tested to rotate, and then make the electric probe enter the adjacent next tooth slot through vertical motion , according to step 1) calculation to obtain the middle position of the alveolar;

3) Repeat step 2) until all the intermediate positions of the gears under test are obtained.

The vertical movement and horizontal movement of the electric probe and the rotation of the main shaft axis are controlled by a computer, and the computer calculates and displays the electric sensor according to the reading of the third grating scale used to detect the displacement variation of the front and rear movement. The distance between the head and the center of the rotary shaft system of the main shaft, and the displacement variation of the vertical movement and the horizontal movement of the electric sensing head are respectively collected by the computer through the first and second grating scales.

The beneficial effects of the present invention are reflected in:

1) The present invention uses the movement of the Y-axis (that is, the front and rear movement of the measuring column) to control the distance between the measuring head and the center of the main shaft rotation shaft system, and can realize the stepless adjustment of the base circle without using a series of base discs to assist in completing the gears The measurement simplifies the detection process and solves the detection error caused by the wear of the base disc.

2) The present invention can control the movement of the Z-axis (that is, the vertical movement of the probe), and control the linkage between the X-axis (that is, the horizontal movement of the probe) and the W-axis (that is, the rotation axis of the main shaft) to realize the probe respectively. The control of the measurement track, combined with the measurement data of the probe and the readings of the grating ruler, can finally realize the automatic measurement of the tooth direction, tooth profile and pitch error of the gear with any base circle radius value within the measurement range.

3) The present invention can also realize the path planning of the eccentric gear, and realize the automatic measurement of the tooth orientation, tooth profile and pitch error of the eccentric gear.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Figure 2 is one of the schematic diagrams of measuring the tooth error (non-eccentric gear);

Figure 3 is the second schematic diagram of the measurement of the tooth error (non-eccentric gear);

Fig. 4 is a schematic diagram of tooth shape error measurement (non-eccentric gear);

Figure 5 is a schematic diagram of pitch error measurement (non-eccentric gear);

Fig. 6 is one of schematic diagrams of eccentric gear measurement;

Fig. 7 is the second schematic diagram of eccentric gear measurement;

In the figure: 1 is the base circle, 2 is the tooth root circle, 3 is the base, 4 is the workpiece column, 5 is the spindle rotary shaft system, 6 is the measuring column, 7 is the electric probe, 8 is the handwheel, 9 is the passive Measured gear, 10 is the measured tooth profile, 11 is the grating scale, 12 is the top shaft system, 13 is the addendum circle, A, B, C, D represent gear teeth.

detailed description

The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

(1) Device structure

Referring to FIG. 1 , the device for realizing path planning of the quasi-measurement center of complex parts based on three-axis linkage in the present invention includes a base 3 and a workpiece column 4 and a spindle rotation axis system 5 arranged on one end of the base 3 . An upper tip shaft system 12 opposite to the main shaft rotation shaft system 5 is provided, and the other end of the base 3 is provided with a measuring column 6 that can move back and forth (Y axis), and the distance between the measuring column 6 and the workpiece column 4 passes through the front and back The movement is adjusted, and the measuring column 6 is provided with an electric probe 7 that can move vertically (Z-axis) and horizontally (X-axis).

The device also includes a manual control assembly for controlling the forward and backward movement of the measuring column 6. The manual control assembly includes a lead screw arranged on the base 3 and a handwheel 8 connected with the lead screw, and the measuring column 6 is connected with the lead screw. .

The device also includes a drive control assembly, the drive control assembly includes a computer, a first grating ruler for detecting the displacement variation of the vertical movement, a second grating ruler for detecting the displacement variation of the horizontal movement, and a second grating ruler for detecting the displacement variation of the horizontal movement. The third grating scale that detects the amount of displacement change in the forward and backward movement, the computer respectively communicates with the reading head of the first grating scale, the reading head of the second grating scale, the reading head of the third grating scale, and the motor for driving the rotary shaft system of the main shaft , the motor used to drive the vertical movement of the electrical probe and the motor used to drive the electrical probe to move horizontally are connected.

The motor that drives the rotary axis of the main shaft is a DC servo motor, and the motor that drives the vertical or horizontal movement of the electrical probe is an AC servo motor.

(2) The path planning implementation method of the complex part quasi-measurement center path planning implementation device based on three-axis linkage of the present invention, comprising the following steps:

(2.1) The tested gear is a non-eccentric gear

a1) Clamp the gear to be tested between the main shaft rotary shaft system 5 and the upper top shaft system 12, so that the center of the tested gear coincides with the center of the main shaft rotary shaft system 5, and then manually control the movement of the measuring column 6 back and forth, so that the inductance The distance from the measuring ball at the front end of the measuring head 7 to the center of the main shaft rotary shaft system is the radius of the base circle of the gear to be tested. in any of the alveoli.

Referring to Fig. 2 and Fig. 3, described method also comprises the following steps (detection of gear error):

After step a1), the position of the measuring column 6 (coordinate along the Y axis) remains unchanged, and the inductive probe 7 contacts the left tooth surface of the measured gear 9 with a certain amount of compression through the clockwise rotation of the main shaft rotation shaft system. S/4～S/2, S is the measuring range of the electric probe 7, and then drives the electric probe 7 to move vertically, so that the electric probe 7 moves along the tooth width direction of the gear under test 9, and measures A series of data on the change of the compression amount of the measuring head in the tooth width direction are processed to obtain the tooth error of the gear under test.

The distance that the electric probe 7 moves along the tooth width direction of the gear under test 9 is defined according to the tooth width of the gear under test (selected within the tooth width range), or the electric probe 7 is moved to the position of the gear under test 9 first. Below the lower end face, then move from the lower end face of the gear under test 9 to above the upper end face of the gear under test 9 .

Referring to Fig. 4, described method also comprises the following steps (detection of tooth form error):

After step a1), keep the position of the measuring column 6 (along the Y-axis coordinates) unchanged, make the electric probe 7 move to the middle position of the approximate tooth width of the gear to be tested through vertical motion, and then pass through the rotation shaft system 5 of the main shaft The rotation drives the gear to be tested to rotate, so that there is a compression amount of S/4 to S/2 between the electric probe 7 and the tooth surface on either side of the tooth groove, S is the range of the electric probe 7, and then by controlling the main shaft to rotate the shaft system The linkage between the rotation of 5 and the horizontal movement of the electric sensor head 7 (the linkage between the W axis and the X axis) makes the motion track of the electric sensor head 7 relative to the base circle of the measured gear the involute of the measured gear, and passes The change of the compression amount of the probe can obtain a series of data describing the deformation of the tooth profile, and the data is processed to obtain the tooth profile error of the measured gear.

Referring to Fig. 5, described method also comprises the following steps (detection of pitch error):

1) After step a1), keep the position of the measuring column 6 (along the Y-axis coordinates) unchanged, drive the gear to be tested to rotate left and right through the main shaft rotation shaft system 5, and determine the gear to be tested according to the change in the compression amount of the inductive probe 7 The cogging distance on the base circle, and then calculate the middle position of the cogging;

2) After detecting a tooth slot, move the electric probe 7 vertically upward along the Z axis until it leaves the tooth slot, and then make the main shaft rotation shaft system 5 drive the tested gear to rotate 360°/n, where n is the number of teeth of the tested gear , then make the electrical sensor head 7 move vertically downward along the Z axis into the corresponding next cog, and calculate the middle position of the cog according to step 1);

3) Repeat step 2) until all the intermediate positions of the gears under test are obtained; then, the pitch error of the gear under test is obtained by processing the data of each intermediate position of the gear under test.

The vertical movement and horizontal movement of the electrical probe 7 and the rotation of the main shaft rotary shaft system 5 are controlled by a computer, and the computer calculates and displays the center of the electrical probe 7 and the main shaft rotary shaft system 5 according to the readings of the third grating ruler. distance, the displacement variation of the vertical movement and horizontal movement of the electric sensor head 7 is collected by the computer through the first and second grating scales respectively.

(2.2) The gear under test is an eccentric gear

b1) Referring to Figure 6 and Figure 7, for the eccentric gear, the gear to be tested is clamped between the upper top shaft system 12 and the main shaft rotation shaft system 5, and then the measuring column 6 is manually controlled to move back and forth, so that the inductive probe 7 and the measured The tooth top of the measured gear is in contact with a certain amount of compression, and then the position of the measuring column is fixed, and then the shaft system of the main shaft drives the gear to be tested to rotate, and through the horizontal movement of the inductive probe, the compression of the inductive probe is guaranteed to be in line with the measured gear. Under the condition that the teeth part of the measured gear remains in contact, the position data of several teeth (generally greater than or equal to 3) tooth tops of the measured gear are measured, and the measured position data is circle fitted to obtain _The position of the center of the addendum circle O ₂ of the gear under test in the coordinate system with the point O _{1 on} the center of the spindle rotation axis system as the coordinate origin. The distance between the measuring ball at the front end of the electric probe and the vertical straight line passing through the center _O2 of the addendum circle of the gear under test is equal to the radius of the base circle of the gear under test.

Detection of tooth pitch error: same as non-eccentric gear.

Detection of tooth profile error: After step b1), keep the position of the measuring column 6 unchanged, and move the electric probe 7 to the middle position of the approximate tooth width of the gear to be tested through vertical movement, and then pass through the rotation shaft system 5 of the main shaft The rotation drives the gear under test to rotate, so that there is a compression amount of S/4～S/2 between the electric probe 7 and the tooth surface on either side of the tooth groove, S is the range of the electric probe, and then, according to the tooth surface of the gear under test, The position of the top circle center O ₂ in the coordinate system with the point O ₁ on the center of the spindle rotary axis system as the origin, and by controlling the linkage between the rotation of the spindle rotary shaft system and the horizontal movement of the electrical probe, the electrical probe is relative to The motion track of the base circle of the gear under test is the involute of the gear under test.

Detection of pitch error:

1) After step b1), keep the position of the measuring column 6 unchanged, rotate the main shaft rotary shaft system 5 left and right, and take the point O1 _on the center of the main shaft rotary shaft system as the origin according to the addendum circle center _O2 of the gear to be tested The position in the coordinate system, control the horizontal movement of the electric probe and the rotation of the main shaft rotary axis to make sure that the measuring ball at the front end of the electric probe is always on the base circle of the gear under test, and then according to the compression amount of the electric probe 7 The size change determines the cogging distance of the tested gear on the base circle, and then calculates the middle position of the cogging;

2) After detecting a tooth slot, make the electric sensor head 7 leave the tooth slot through vertical movement, then make the main shaft rotary shaft system 7 drive the gear to be tested to rotate, and then make the electric sensor head enter the adjacent next tooth slot through vertical motion Alveolar, according to step 1) calculate the middle position of this alveolar;

3) Repeat step 2) until all the intermediate positions of the gears under test are obtained.

Example

Referring to Fig. 1, a path planning realization device for the quasi-measurement center of complex parts based on three-axis linkage, including a manually controlled measuring column that can move along the Y-axis direction, and a measuring column that is controlled by a servo drive system and can move along the Y-axis. The measuring head that moves in the directions of X and Z axes also includes a main shaft rotary shaft system that can rotate along the direction of W axis. The distance between the measuring head along the Y axis and the center of the spindle rotary shaft system can be displayed in real time by the computer.

The device also includes a base, a workpiece column for clamping workpieces, and a drive control assembly (computer and three grating scales 11 corresponding to X, Y, and Z axes).

The probe is a TESA electric probe.

Taking the non-eccentric gear measurement process as an example, after inputting the parameters of the measured gear into the computer, the theoretical value of the radius of the base circle is obtained through calculation, and then the machine tool is adjusted (the center of the spindle rotary shaft system is determined by the standard mandrel), and then the Y-axis is manually shaken Handwheel, so that the distance from the measuring ball to the center of the spindle shaft system is the theoretical base circle radius. After the adjustment is completed, the Y axis will not be adjusted during the measurement of the gear. Manually control the X and Z axis motors to move the probe to the middle position of any tooth slot of the gear under test.

Tooth error detection: W-axis rotates clockwise until the probe touches the left tooth surface of the gear to be tested with a certain amount of compression (compression is a quarter of the range of the probe), and the motor drives the Z-axis to make the probe move along the tooth width. Direction movement, the movement distance can be customized, or it can be moved below the lower end surface of the gear under test, and then moved from the lower end surface to above the upper end surface, and the data measured by the probe is processed to obtain the gear tooth error of the measured gear.

Detection of tooth profile error: move the probe to the approximate middle position of the tooth width in the tooth groove, through the automatic rotation of the W axis, there is a compression amount of a quarter of the probe range between the probe and the tooth surface, and then pass The software controls the linkage of the W-axis and the X-axis, so that the movement track of the probe relative to the base circle of the gear under test is the involute of the gear under test. By processing the data representing the compression of the probe, the measurement of the measured gear is completed. Measurement of gear tooth profile errors.

Detection of pitch error: the probe moves into the tooth groove, and through the left and right rotation of the W axis, the tooth groove spacing of the measured gear on the base circle is confirmed, and the middle position of the tooth groove is obtained by calculation. After a tooth groove is detected , the Z-axis moves up a distance greater than the tooth width, and then the W-axis rotates 360°/n (n is the number of teeth of the gear to be tested), the probe falls into the next tooth slot, and repeats the aforementioned actions until the measurement is completed. The pitch error is obtained by comparing the data obtained from the middle position of the cogging.

The invention can realize stepless adjustment of the base circle of the gear to be measured, does not need to process different base discs, is easy to operate and greatly improves the measurement accuracy, realizes the planning of complex paths of eccentric gears and non-eccentric gears, and can realize the measurement process fully automatic.

Claims (8)

1. A path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the device includes a base (3) and a workpiece column ( 4) and the spindle rotary shaft system (5), the workpiece column (4) is provided with an upper top shaft system (12) opposite to the spindle rotary shaft system (5), and the other end of the base (3) is provided with a The moving measuring column (6), the distance between the measuring column (6) and the workpiece column (4) is adjusted through the forward and backward movement, and the measuring column (6) is provided with an inductive probe (7) capable of vertical and horizontal movement The device also includes a drive control assembly, the drive control assembly includes a computer, a first grating ruler for detecting the displacement variation of the vertical movement, a second grating ruler for detecting the displacement variation of the horizontal movement, and a For detecting the third grating scale of the front and rear movement displacement variation, the computer is respectively connected with the reading head of the first grating scale, the reading head of the second grating scale, the reading head of the third grating scale, and the head for driving the rotary shaft of the main shaft. The motor, the motor for driving the vertical motion of the electrical probe and the motor for driving the horizontal motion of the electrical probe are connected; the method comprises the following steps: For non-eccentric gears, the gear to be tested is clamped between the upper top shaft system (12) and the main shaft rotary shaft system (5), so that the center of the tested gear coincides with the center of the main shaft rotary shaft system, and then the measuring column is manually controlled (6) Move back and forth, so that the distance between the measuring ball at the front end of the electric probe (7) and the center of the spindle shaft system is the radius of the base circle of the gear to be tested. At the same time, manually control the electric probe (7) along the vertical and horizontal directions Move the electric probe to any tooth slot of the gear under test, or, for eccentric gears, clamp the gear under test between the upper top shaft system (12) and the main shaft rotation shaft system (5), and then Manually control the movement of the measuring column (6) back and forth, so that the inductive probe (7) contacts the tooth top of the gear under test with a certain amount of compression, then fix the position of the measuring column, and then make the main shaft rotating shaft drive the gear under test to rotate, and Through the horizontal movement of the electric probe, under the condition that the compression amount of the electric probe remains unchanged when it is in contact with the gear tooth part of the tested gear, the position data of several tooth tops of the tested gear are measured. Carry out circle fitting on the measured position data, and obtain the position of the center O ₂ of the addendum circle of the measured gear in the coordinate system with the upper point O ₁ on the center of the spindle rotary shaft system as the coordinate origin. O ₁ and O ₂ are at the same In a horizontal plane, the distance between the measuring ball at the front end of the electric sensor head and the vertical line passing through the center _O2 of the tooth top circle of the tested gear is equal to the radius of the base circle of the tested gear through the back and forth movement of the measuring column. 2. According to claim 1, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the method also includes the following steps: Keep the position of the measuring column (6) unchanged, and through the rotation of the main shaft rotating shaft system (5), the electric probe (7) contacts the tooth surface of the gear under test with a certain amount of compression, the amount of compression is S/4～S/2, S is the measuring range of the electrical probe, and then drives the electrical probe (7) to move vertically, so that the electrical probe (7) moves along the tooth width direction of the gear to be tested. 3. According to claim 2, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the inductive probe (7) is along the tooth width direction of the measured gear The moving distance is customized according to the tooth width of the gear under test, or the electric probe is moved below the lower end face of the gear under test, and then moved from the lower end face of the gear under test to above the upper end face of the gear under test. 4. According to claim 1, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the method also includes the following steps: Keep the position of the measuring column (6) unchanged, move the electric probe (7) to the middle position of the tooth width of the gear under test through vertical movement, and then drive the gear under test to rotate through the rotation of the main shaft rotation shaft system (5), Make the compression of S/4～S/2 between the electric probe (7) and the tooth surface on either side of the tooth groove, S is the measuring range of the electric probe; then, for non-eccentric gears, by controlling the main shaft rotation The linkage between the rotation of (5) and the horizontal movement of the electric probe makes the motion track of the electric probe relative to the base circle of the tested gear be the involute of the tested gear, or, for eccentric gears, according to the measured gear’s The position of the center O ₂ of the addendum circle in the coordinate system whose origin is the point O ₁ on the center of the spindle rotary shaft system, and by controlling the linkage of the rotation of the spindle rotary shaft system and the horizontal movement of the electric probe, the electric probe is relatively The motion track of the base circle of the gear under test is the involute of the gear under test. 5. According to claim 1, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the method also includes the following steps: 1) Keep the position of the measuring column (6) unchanged; for non-eccentric gears, drive the gear under test to rotate left and right through the main shaft rotation shaft system (5), and determine the gear under test according to the change in the compression of the inductive probe (7). Then calculate the cogging distance on the base circle, and then calculate the middle position of the cogging, or, for eccentric gears, make the main shaft rotation shaft system (5) rotate left and right, and rotate the main shaft according to the addendum circle center O ₂ of the gear under test. The point O ₁ on the center of the rotating shaft system is the position in the coordinate system of the origin, and the horizontal movement of the electric sensor head is controlled to be linked with the rotation of the main shaft rotary shaft system to ensure that the measuring ball at the front end of the electric sensor head is always on the base circle of the gear to be tested , then determine the cogging distance of the measured gear on the base circle according to the change of the compression amount of the electric probe (7), and then calculate the middle position of the cogging; 2) After detecting a tooth slot, make the electric probe (7) move away from the tooth slot through vertical movement, then make the main shaft rotary shaft system (7) drive the gear to be tested to rotate, and then make the electric probe enter the phase through vertical motion For the next adjacent alveolar, calculate the middle position of the alveolar according to step 1); 3) Repeat step 2) until all the intermediate positions of the gears under test are obtained. 6. According to claim 2, 3, 4 or 5, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the vertical movement of the electrical probe, The horizontal movement and the rotation of the main shaft rotary shaft system are controlled by a computer, and the computer calculates and displays the distance between the electric probe and the center of the main shaft rotary shaft system according to the reading of the third grating ruler used to detect the displacement variation of the front and rear movement, The displacement variations of the vertical movement and the horizontal movement of the electric probe are respectively collected by the computer through the first and second grating rulers. 7. According to claim 1, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the device also includes a method for controlling the front and rear of the measuring column (6) A manual control assembly for movement, the manual control assembly includes a lead screw arranged on the base (3) and a hand wheel (8) connected with the lead screw, and the measuring column (6) is connected with the lead screw. 8. According to claim 1, a path planning implementation method based on a three-axis linkage quasi-measurement center path planning implementation device for complex parts, characterized in that: the motor that drives the main shaft rotary shaft system is a DC servo motor, and the drive inductor The motor for the vertical or horizontal movement of the probe is an AC servo motor.