CN110514164B - Based on synchronous motion formula circularity error separator - Google Patents
Based on synchronous motion formula circularity error separator Download PDFInfo
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- CN110514164B CN110514164B CN201910818162.9A CN201910818162A CN110514164B CN 110514164 B CN110514164 B CN 110514164B CN 201910818162 A CN201910818162 A CN 201910818162A CN 110514164 B CN110514164 B CN 110514164B
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Abstract
The invention relates to a roundness error separating device based on synchronous motion, belonging to the technical field of manufacturing and measuring of precision instruments; the device mainly introduces an error separation rotary table which can rotate in the same direction as a rotary table of the ultra-precise roundness error measuring instrument into the ultra-precise roundness measuring instrument, and separates out any one of the roundness error of a measured piece, the radial gyration error of the rotary table of the ultra-precise roundness measuring instrument and the radial gyration error of the error separation rotary table by measuring the circumferential signals containing different system components three times.
Description
The application is a divisional application of the invention patent application 'a roundness error separating device and method based on synchronous motion'.
Application date of the original case: 2017-12-17.
Original application No.: 2017113596539.
the name of the original invention is: a roundness error separation device and method based on synchronous motion.
Technical Field
The invention discloses a roundness error separating device based on synchronous motion, and belongs to the technical field of manufacturing and measuring of precision instruments.
Background
In recent years, the development of ultra-precision machining field directly results in that machining precision of a plurality of machining devices does not have corresponding detection devices, so that the machining precision cannot be further improved. Taking roundness as an example, the roundness error of a modern astronomical telescope reaches +/-5 nm, the roundness of a gyroscope on a spaceship is required to be less than 10nm, the roundness error of any section of a silicon ball with high-precision density reference reaches within 10nm, the radial gyration error of an instrument main shaft of the existing roundness measuring instrument with highest precision is about +/-10 nm, and the roundness error of ultrahigh-precision parts cannot be measured. It is difficult to improve the accuracy of the roundness measuring instrument only by hard Techniques such as the conventional technique, and an Error Separation Technique (EST) must be used to separate the system Error of the roundness measuring instrument.
Generally, the roundness error separation method used at present is mainly divided into two major methods, a multiple-index method and a multiple-measuring-head method, the multiple-index method is to realize error separation by adding an error separation turntable so that the error separation turntable drives multiple index measurements of a measured piece, and the multiple-measuring-head method is to realize roundness error separation by increasing the number and layout of sensors.
The reverse method belongs to a multi-index method, but the measurement state of a measuring instrument needs to be stopped in the measurement process, and the direction of a measured piece and a sensor needs to be changed by 180 degrees, so that the concentricity of the measured piece and a roundness measuring device needs to be adjusted again, human intervention is increased, the 180 degrees cannot be guaranteed to be changed, the measurement can be carried out only by human eyes, and the automatic measurement is not facilitated.
The most widely used multi-step method in the multi-index method is a total harmonic method developed on the basis of the hard damage of the harmonic suppression problem, and the multi-step method is a full harmonic method which is developed on the basis of the hard damage of the harmonic suppression problem, and is not favorable for high-speed and high-efficiency measurement because all the methods change space in time, increase the index number of measurement, prolong the measurement time and introduce more measurement errors, such as linear drift of a sensor, electrical noise and the like.
The single-transposition method in the patent 'single-transposition roundness error separation method' is further simplified on the basis of the multi-transposition method, the essence of the single-transposition method is consistent with that of the multi-step method, and the obtained result is also consistent with that of the multi-transposition method. In the methods, the acquired signals are analyzed and processed by Fourier transform templates, but singular points are easy to exist, the influence of infinite amplification on values near the singular points is caused, the problem of harmonic suppression is not completely solved, and the harmonic suppression can only be avoided within a certain range.
The multi-head method is a method in which the roundness error separation is realized by increasing the number of sensors (a method of two or more sensors is called a multi-head method) and arranging them reasonably. The two-point method is that two measuring heads are placed at 180 degrees, the three-measuring-head method is that three sensors are placed at a certain angle, the four-measuring-head method is that only one sensor is added on the three measuring heads, the hybrid method is that one displacement sensor in the three-measuring-head method is changed into an angle sensor, the orthogonal hybrid method is that one displacement sensor and one angle sensor are placed at 90 degrees, and the methods are that several signals obtained by sampling are subjected to Fourier transform and inverse transform to obtain the axis error of the roundness measuring instrument and the roundness error of a measured piece. However, the disadvantages are obvious, for example, the increase of the number of the sensors can cause the characteristics of each sensor to be inconsistent, the layout of the sensors is not on the same measuring section, the transfer function has zero points and the like.
The method has the problems that 1, the signal is subjected to Fourier transform to a frequency domain for error separation to obtain the frequency spectrum information of the separated signal, then the inverse Fourier transform is carried out to finally obtain the separated signal, the calculation is complex, and truncation and rounding errors exist; 2. because Fourier transform is used, the problem of harmonic suppression exists in the separation signal, the model has principle errors, and the corresponding improvement method can only solve the problem that no harmonic suppression exists in a certain range and can not realize the full-band no harmonic suppression; 3. the roundness error of a measured piece, the radial gyration error of a rotating shaft of the ultra-precise roundness measuring instrument and the radial gyration error of the error separation turntable can not be separated simultaneously.
Disclosure of Invention
In order to solve the problems, the invention discloses a roundness error separation device and method based on synchronous motion, which not only separate in a space domain without Fourier transform, have simple calculation and no harmonic suppression in a full wave band, but also have the technical advantages of simultaneously separating three errors (roundness error of a measured piece, radial gyration error of a gyration worktable of an ultra-precise roundness measuring instrument and radial gyration error of an error separation turntable).
The purpose of the invention is realized as follows:
the utility model provides a based on synchronous motion formula circularity error separator, includes transverse guide, displacement sensor, error separation revolving stage, rotary table and vertical guide, and displacement sensor is at the transverse guide upper level to removing, and transverse guide drives displacement sensor along vertical guide up-and-down motion, and the error separation revolving stage is kept flat on rotary table, and the error separation revolving stage revolves with being surveyed a piece together, and rotary table drives the error separation revolving stage and is surveyed a coaxial rotation.
In the roundness error separating device based on the synchronous motion, the rotary worktable is in a hydraulic, dense-bead or air-floating mode.
According to the roundness error separating device based on the synchronous motion, the error separating rotary table can rotate synchronously and continuously with the rotary working table.
A roundness error separation method based on synchronous motion realized on the roundness error separation device based on synchronous motion comprises the following steps:
step a, placing an error separation rotary table on a rotary worktable, and roughly adjusting the error separation rotary table to be concentric with the rotary worktable;
b, determining the section to be measured of the measured piece, adjusting the heights of the transverse guide rail and the displacement sensor along the vertical guide rail to enable the section to be measured of the measured piece and a measuring head of the displacement sensor to be on the same section, and adjusting the measured piece to enable the section to be measured of the measured piece to be concentric with the error separation rotary table;
step c, regarding the error separation rotary table and the measured piece as a whole, adjusting the error separation rotary table and the measured piece on the error separation rotary table to be concentric with the rotary worktable of the ultra-precision roundness measuring instrument, wherein the error separation rotary table is mainly adjusted, and the position of the measured piece on the error separation rotary table is kept unchanged;
d, moving the displacement sensor along the transverse guide rail to enable the displacement sensor to be in reliable contact with the measured piece, adjusting the displacement sensor to enable the force of the displacement sensor to be measured at a section with the best linearity, starting a rotation mode of a rotary table of the ultra-precise roundness measuring instrument, and after the rotary table of the ultra-precise roundness measuring instrument rotates stably, sampling and measuring are carried out by the displacement sensor, wherein signals picked up by the displacement sensor are comprehensive errors A (theta) including a radial rotary error S (theta) of the rotary table and a roundness error R (theta) of the section to be measured of the measured piece, and the signals are signals picked up by the displacement sensor
A(θ)＝S(θ)+R(θ) (1)
E, stopping the rotation of the rotary table of the ultra-precise roundness measuring instrument, starting a rotation mode of the error separation rotary table after the rotation is stopped stably, enabling the error separation rotary table to rotate at the same rotating speed as the rotary table of the ultra-precise roundness measuring instrument in the step d, enabling the displacement sensor to perform sampling measurement after the rotation is stable, and enabling signals picked up by the displacement sensor to be comprehensive errors B (theta) including the roundness error R (theta) of the section to be measured of the measured piece and the radial gyration error E (theta) of the error separation rotary table, wherein the comprehensive errors B (theta) include the roundness error R (theta) of the
The initial position of sampling in the step is consistent with the initial position in the step d;
B(θ)＝R(θ)+E(θ) (2)
step f, starting a rotation mode of a rotary table of the ultra-precise roundness measuring instrument and keeping the rotation mode of the error separation rotary table on, after the two shafts rotate stably and the speed keeps consistent with the rotation speed in the step d, sampling and measuring are carried out by a displacement sensor, and signals picked up by the displacement sensor are a comprehensive error C (theta) comprising a radial rotary error S (theta) of the rotary table of the instrument and a radial rotary error E (theta) of the error separation rotary table, wherein the comprehensive error C (theta) comprises the radial rotary error S (theta) of the rotary table of the instrument and the radial rotary
In the step, the relative positions of the error separation rotary table and the rotary table are ensured to be consistent with those in the step d;
C(θ)＝S(θ)+E(θ) (3)
step g, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating out a roundness error signal of the specified section of the measured piece,
wherein
Step h, inputting the roundness error signal separated in the step g into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the roundness of the specified section of the measured piece;
step i, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating radial rotary error signals of the rotary table of the ultra-precision roundness measuring instrument,
wherein
J, inputting the radial gyration error signal of the rotary table of the ultra-precise roundness measuring instrument separated in the step i into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the rotary table of the ultra-precise roundness measuring instrument;
step k, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotation error signal of the error separation turntable,
wherein
And step l, inputting the radial gyration error signal of the error separation turntable separated in the step k into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the error separation turntable.
Has the advantages that:
the first and all the collected signals are only processed in a space domain, Fourier transform is not involved at all, and the step of Fourier transform is omitted, so the method has the technical advantages of less calculation steps, simple calculation and high detection speed.
Secondly, the fourier transform is avoided, so that truncation and rounding errors peculiar to the fourier transform do not occur, and the method has the technical advantages of no signal loss and accurate calculation.
And thirdly, because Fourier transform is not involved, the problem of harmonic suppression does not exist in the separation signal, so that the model principle is error-free, the full-band harmonic suppression-free effect can be realized, and the method also has the technical advantage of accurate calculation.
Fourthly, the method can simultaneously separate out the roundness error of the measured piece, the radial gyration error of the gyration worktable of the ultra-precise roundness measuring instrument and the radial gyration error of the error separation turntable according to the requirement, thereby having the multifunctional technical advantage that one instrument can detect a plurality of parameters.
Fifthly, the method can directly separate the radial rotation error of the error separation turntable, so that the method also has a self-calibration function.
Drawings
Fig. 1 is a schematic structural diagram of a roundness error separating device based on synchronous motion according to the present invention.
In the figure: the device comprises a transverse guide rail 1, a displacement sensor 2, a measured piece 3, an error separation rotary table 4, a rotary table 5 and a vertical guide rail 6.
Detailed Description
The following describes in further detail specific embodiments of the present invention with reference to the accompanying drawings.
Detailed description of the invention
The following embodiment is an embodiment of a roundness error separating apparatus based on a synchronous motion according to the present invention.
A roundness error separating apparatus based on synchronous motion according to this embodiment is shown in fig. 1. This based on synchronous motion formula circularity error separator, including transverse guide 1, displacement sensor 2, error separation revolving stage 4, rotary table 5 and vertical guide 6, displacement sensor 2 is at 1 levels of transverse guide to the removal, transverse guide 1 drives displacement sensor 2 along 6 up-and-down motion of vertical guide, error separation revolving stage 4 is kept flat on rotary table 5, error separation revolving stage 4 revolves with 3 measured pieces together, rotary table 5 drives error separation revolving stage 4 and is measured 3 coaxial rotations of piece.
The rotary worktable 5 is in a hydraulic, dense-bead or air-floating mode. In the present embodiment, the rotary table 5 is air-floating.
The error separation rotary table 4 can rotate synchronously and continuously with the rotary table 5.
Detailed description of the invention
The following embodiment is an embodiment of a roundness error separation method based on synchronous motion.
The invention relates to a roundness error separation method based on synchronous motion, which comprises the following steps:
step a, placing an error separation rotary table 4 on a rotary table 5, and roughly adjusting the error separation rotary table 4 to be concentric with the rotary table 5;
b, determining the section to be measured of the measured piece 3, adjusting the heights of the transverse guide rail 1 and the displacement sensor 2 along the vertical guide rail 6 to enable the section to be measured of the measured piece 3 and a measuring head of the displacement sensor 2 to be on the same section, and adjusting the measured piece 3 to enable the section to be measured of the measured piece 3 and the error separation rotary table 4 to be concentric;
step c, regarding the error separation rotary table 4 and the measured piece 3 as a whole, adjusting the error separation rotary table 4 and the measured piece 3 on the error separation rotary table to be concentric with the rotary worktable 5 of the ultra-precision roundness measuring instrument, wherein the error separation rotary table 4 is mainly adjusted, and the position of the measured piece 3 on the error separation rotary table 4 is kept unchanged;
d, moving the displacement sensor 2 along the transverse guide rail 1 to ensure that the displacement sensor 2 is reliably contacted with the measured piece 3, and adjusting the displacement sensor 2 to ensure that the displacement sensor 2 measures the forceStarting a rotation mode of a rotary table 5 of the ultra-precise roundness measuring instrument at a section with the best linearity, waiting for the stable rotation of the rotary table 5 of the ultra-precise roundness measuring instrument, sampling and measuring by a displacement sensor 2, wherein a signal picked up by the displacement sensor 2 is a comprehensive error A (theta) comprising a radial rotary error S (theta) of the rotary table 5 and a roundness error R (theta) of a section to be measured of a measured piece 3, wherein the comprehensive error A (theta) comprises the radial rotary error S (theta) of the rotary table 5 and the roundness error R (theta)
A(θ)＝S(θ)+R(θ) (1)
E, stopping the rotation of the rotary table 5 of the ultra-precise roundness measuring instrument, starting a rotation mode of the error separation rotary table 4 after the rotation is stopped stably, enabling the error separation rotary table 4 to rotate at the same rotating speed as the rotary table 5 of the ultra-precise roundness measuring instrument in the step d, enabling the displacement sensor 2 to perform sampling measurement after the rotation is stable, and enabling signals picked up by the displacement sensor 2 to be comprehensive errors B (theta) including the roundness error R (theta) of the section to be measured of the measured piece 3 and the radial gyration error E (theta) of the error separation rotary table 4, wherein the comprehensive errors B (theta) comprise signals picked up by the displacement sensor 2
The initial position of sampling in the step is consistent with the initial position in the step d;
B(θ)＝R(θ)+E(θ) (2)
step f, starting a rotation mode of a rotary table 5 of the ultra-precise roundness measuring instrument and keeping the rotation mode of an error separation rotary table 4 open, after the two shafts rotate stably and the speed keeps consistent with the rotation speed in the step d, sampling measurement is carried out by a displacement sensor 2, and signals picked up by the displacement sensor 2 are a comprehensive error C (theta) comprising a radial rotary error S (theta) of the rotary table 5 of the instrument and a radial rotary error E (theta) of the error separation rotary table 4, wherein
In the step, the relative positions of the error separation rotary table 4 and the rotary table 5 are ensured to be consistent with those in the step d;
C(θ)＝S(θ)+E(θ) (3)
step g, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating out a roundness error signal of the specified section of the measured piece 3,
wherein
Step h, inputting the roundness error signal separated in the step g into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the roundness of the specified section of the measured piece 3;
step i, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotary error signal of the rotary table 5 of the ultra-precision roundness measuring instrument,
wherein
J, inputting the radial gyration error signal of the rotary table 5 of the ultra-precise roundness measuring instrument separated in the step i into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the rotary table 5 of the ultra-precise roundness measuring instrument;
step k, performing mathematical operation on the combined error signals of the steps d, e and f, namely separating the radial rotation error signals of the error separation rotary table 4,
wherein
And step l, inputting the radial rotation error signal of the error separation rotary table 4 separated in the step k into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial rotation error roundness of the error separation rotary table 4.
Claims (1)
1. A roundness error separating device based on synchronous motion comprises a transverse guide rail (1), a displacement sensor (2), an error separating rotary table (4), a rotary table (5) and a vertical guide rail (6), wherein the displacement sensor (2) moves horizontally on the transverse guide rail (1), the transverse guide rail (1) drives the displacement sensor (2) to move up and down along the vertical guide rail (6), the error separating rotary table (4) is horizontally arranged on the rotary table (5), the error separating rotary table (4) and a measured piece (3) rotate together, and the rotary table (5) drives the error separating rotary table (4) and the measured piece (3) to coaxially rotate;
the rotary worktable (5) is in a hydraulic, dense-bead or air-floating mode;
the error separation rotary table (4) and the rotary table (5) synchronously and continuously rotate;
it is characterized in that the preparation method is characterized in that,
the working principle of the roundness error separating device based on the synchronous motion is as follows:
step a, placing an error separation rotary table (4) on a rotary table (5), and roughly adjusting the error separation rotary table (4) to be concentric with the rotary table (5);
b, determining the section to be measured of the measured piece (3), adjusting the heights of the transverse guide rail (1) and the displacement sensor (2) along the vertical guide rail (6) to enable the section to be measured of the measured piece (3) and a measuring head of the displacement sensor (2) to be on the same section, and adjusting the measured piece (3) to enable the section to be measured of the measured piece (3) to be concentric with the error separation rotary table (4);
step c, regarding the error separation rotary table (4) and the measured piece (3) as a whole, adjusting the error separation rotary table (4) and the measured piece (3) on the error separation rotary table to be concentric with the rotary worktable (5) of the ultra-precision roundness measuring instrument, wherein the error separation rotary table (4) is mainly adjusted, and the position of the measured piece (3) on the error separation rotary table (4) is kept unchanged;
d, moving the displacement sensor (2) along the transverse guide rail (1), enabling the displacement sensor (2) to be in reliable contact with the measured piece (3), adjusting the displacement sensor (2) to enable the force measured by the displacement sensor (2) to be at a section with the best linearity, starting a rotation mode of a rotary table (5) of the ultra-precise roundness measuring instrument, waiting for the rotary table (5) of the ultra-precise roundness measuring instrument to rotate stably, sampling and measuring the displacement sensor (2), wherein signals picked up by the displacement sensor (2) are comprehensive errors A (theta) including a radial rotary error S (theta) of the rotary table (5) and a roundness error R (theta) of a section to be measured of the measured piece (3), and the comprehensive errors A (theta) comprise a radial rotary error S (theta) of the rotary table (5)
n＝0，1，...，N-1；
A(θ)＝S(θ)+R(θ) (1)
E, stopping the rotation of the rotary table (5) of the ultra-precise roundness measuring instrument, starting a rotation mode of the error separation rotary table (4) after the rotation is stopped stably, enabling the error separation rotary table (4) to rotate at the same rotating speed as the rotary table (5) of the ultra-precise roundness measuring instrument in the step d, enabling the displacement sensor (2) to perform sampling measurement after the rotation is stable, and enabling signals picked up by the displacement sensor (2) to be comprehensive errors B (theta) including the roundness error R (theta) of the section to be measured of the measured piece (3) and the radial gyration error E (theta) of the error separation rotary table (4), wherein the comprehensive errors B (theta) comprise
The initial position of sampling in the step is consistent with the initial position in the step d;
B(θ)＝R(θ)+E(θ) (2)
step f, starting the rotation mode of the rotary table (5) of the ultra-precise roundness measuring instrument and keeping the rotation mode of the error separation rotary table (4) on, and after the two shafts rotate stably and the speed keeps consistent with the rotation speed in the step d, positioningThe displacement sensor (2) carries out sampling measurement, and the signals picked up by the displacement sensor (2) are the comprehensive error C (theta) comprising the radial rotary error S (theta) of the instrument rotary table (5) and the radial rotary error E (theta) of the error separation rotary table (4), wherein
In the step, the relative position of the error separation rotary table (4) and the rotary table (5) is ensured to be consistent with that in the step d;
C(θ)＝S(θ)+E(θ) (3)
step g, performing mathematical operation on the combined error signals of the step d, the step e and the step f to separate out a roundness error signal of the specified section of the measured piece (3),
wherein
Step h, inputting the roundness error signal separated in the step g into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the roundness of the specified section of the measured piece (3);
step i, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotary error signal of a rotary table (5) of the ultra-precision roundness measuring instrument,
wherein
J, inputting the radial gyration error signal of the rotary table (5) of the ultra-precise roundness measuring instrument separated in the step i into a roundness error evaluation system for roundness evaluation, and selecting a roundness evaluation method, a filter function and a cut-off frequency according to use requirements to obtain the radial gyration error roundness of the rotary table (5) of the ultra-precise roundness measuring instrument;
step k, performing mathematical operation on the combined error signals of the step d, the step e and the step f, namely separating a radial rotation error signal of the error separation rotary table (4),
wherein
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| CN112432625B (en) * | 2020-09-27 | 2022-01-18 | 华南理工大学 | Roundness measuring method based on two sensors |
| CN113607117A (en) * | 2021-08-09 | 2021-11-05 | 湖南江滨机器（集团）有限责任公司 | Automatic measuring instrument and measuring method for shape error of piston ring groove |
| CN114061945A (en) * | 2021-11-15 | 2022-02-18 | 安徽理工大学 | An experimental device for precision spindle rotation error measurement and separation |
| CN114178594B (en) * | 2021-12-10 | 2022-12-23 | 上海交通大学 | System and method for milling inner cavity of deviation-containing cylindrical thin-wall casting |
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| CN110514164A (en) | 2019-11-29 |
| CN108061532B (en) | 2019-12-03 |
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