CN110514164A - One kind is based on moving synchronously formula roundness error separation device - Google Patents
One kind is based on moving synchronously formula roundness error separation device Download PDFInfo
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- CN110514164A CN110514164A CN201910818162.9A CN201910818162A CN110514164A CN 110514164 A CN110514164 A CN 110514164A CN 201910818162 A CN201910818162 A CN 201910818162A CN 110514164 A CN110514164 A CN 110514164A
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- error
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
One kind of the invention belongs to precision instrument manufacture and field of measuring technique based on formula roundness error separation device is moved synchronously；The device mainly introduces one in ultraprecise roundness measuring instrument can be with the error separate turntable of ultraprecise roundness error measurement instrument rotary table rotating Vortex, by measuring the circumference signal containing different systematic components three times, isolate the deviation from circular from of measured piece, any one in the rotary table Radial mixing of ultraprecise roundness measuring instrument and the Radial mixing of error separate turntable, compared with most widely used multistep processes, the method solves the problems, such as in airspace completely, it is not related to Fourier transformation, completely avoid harmonics restraint, and measurement is simple with calculating process, model-free error, a kind of new thinking is provided for superfinishing level of confidentiality roundness error separation.
Description
The application is the division of application for a patent for invention " one kind is based on moving synchronously formula roundness error separation device and method "
Application.
The original bill applying date: 2017-12-17.
Original bill application number: 2017113596539.
Original bill denomination of invention: one kind is based on moving synchronously formula roundness error separation device and method.
Technical field
One kind of the invention belongs to precision instrument manufacture and measuring technique neck based on formula roundness error separation device is moved synchronously
Domain.
Background technique
In recent years, the continuous development in Ultra-precision Turning field, the precision for directly resulting in many process equipment processing do not have
Corresponding detection device, so that machining accuracy can not be further increased.By taking circularity as an example, the circularity of Modern Astronomical telescope is missed
Difference has reached ± 5nm, and the gyroscope circularity on spaceship requires to be less than 10nm, and the silicon wafer ball of high-precision density benchmark is arbitrarily cut
Face deviation from circular from has reached within 10nm, and the instrument Errors in Radial Rotation Error of Spindle of the roundness measuring instrument of full accuracy also exists now
± 10nm or so is unable to measure the deviation from circular from of these superhigh precision parts.Only it has been difficult to mention by hard technology such as traditional handicrafts
The precision of high roundness measuring instrument, it is necessary to use error separating technology (Error Separation Techniques, EST), come
Isolate the systematic error of roundness measuring instrument itself.
In general, now used in roundness fault separating method be broadly divided into two kinds of big methods, multi-index method and more
Gauge head method, multi-index method are so that error separate turntable is driven multiple indexings of measured piece by increasing an error separate turntable
It measures to realize error separate, more gauge head methods are to realize roundness error separation by the number and layout of increase sensor.
Reverse method belongs to multi-index method, but needs to stop the measuring state of measuring instrument in measurement process, while will be by
The direction transformation 180 degree for surveying part and sensor needs to readjust among these concentric, increase of the measured piece with roundness measuring device
The intervention of people, not can guarantee yet and has converted 180 degree really, can only estimate by human eye, be unfavorable for automatic measurement.
And most popular multistep processes in multi-index method, because there are the hard defects of harmonics restraint, on this basis
The full Harmonic Method to grow up, multiple multistep processes are all to change space with the time, increase the indexable number of measurement, when lengthening measurement
Between, more measurement errors are introduced, if sensor is there are linear drift, electrical noise etc., these are all unfavorable for high-speed and high-efficiency
Measurement.
Single-turn position method in patent " single-transposition roundness fault separating method " is to carry out on the basis of multi-index method into one
The simplification of step, essence are consistent with multistep processes, and obtained result is also consistent with multi-index method.Above-mentioned several method is equal
It is to be analyzed and processed to collected signal, but be easy singular point, near singular point using Fourier transformation as template
The problem of value has the influence infinitely amplified, and is not fully solved harmonics restraint, can only be in a certain range without harmonics restraint.
More gauge head methods are the numbers (two or more sensor methods are known as more gauge head methods) by increasing sensor,
And rational deployment realizes roundness error separation.Two-point method is that two gauge heads are placed at 180 degree, and three gauge head methods are to sense three
Device is placed at an angle, and four gauge head methods are also only that a sensor is increased on three gauge heads, and mixing method is by three gauge heads
A displacement sensor in method changes angular transducer into, and quadrature hybrid method is by one angular transducer of a displacement sensor
It is placed in 90 degree, these types of method is all that will sample obtained several signals to carry out Fourier transformation and inverse transformation, obtains circularity
The axial system error of measuring instrument and the deviation from circular from of measured piece.But disadvantage is also it will be apparent that the increase such as number of probes can be led
Cause the characteristic of each sensor inconsistent, the layout of sensor is not on the same measurement section, and there are zero points etc. for transmission function
Problem.
Above method the problem is that, 1, signal is subjected to error separate with being fourier transformed into frequency domain, divided
Spectrum information from signal, then Fourier inversion is carried out, the signal after finally obtaining separation calculates complexity, there is truncation and house
Enter error；2, due to having used Fourier transformation, making to separate signal has a harmonics restraint, model there are the errors of principles,
Corresponding ameliorative way can only solve to can not achieve all band without harmonics restraint without harmonics restraint in a certain range；3, cannot
The deviation from circular from of measured piece, the rotary shaft Radial mixing of ultraprecise roundness measuring instrument and error separate is isolated simultaneously to turn
The Radial mixing of platform.
Summary of the invention
To solve the above-mentioned problems, it is based on moving synchronously formula roundness error separation device and side the invention discloses one kind
Method, the device and method are not separated in airspace only, and Fourier transformation is not needed, and are calculated simply, and nothing in all band
Harmonics restraint additionally has while isolating three errors (deviation from circular from of measured piece, the revolution of ultraprecise roundness measuring instrument
The Radial mixing of workbench and the Radial mixing of error separate turntable) technical advantage.
The object of the present invention is achieved like this:
One kind is based on moving synchronously formula roundness error separation device, including cross slide way, displacement sensor, error separate turn
Platform, rotary table and upright guide rail, displacement sensor horizontal direction on cross slide way is mobile, and cross slide way drives displacement sensing
Device moves up and down along upright guide rail, and error separate turntable is lain on rotary table, and error separate turntable is together with measured piece
Revolution, rotary table drive error separate turntable to rotate coaxially with measured piece.
Above-mentioned to be based on moving synchronously formula roundness error separation device, the rotary table is hydraulic, close pearl or air bearing
Form.
Above-mentioned to be based on moving synchronously formula roundness error separation device, the error separate turntable can be with rotary table
Synchronous continuous rotation.
It is a kind of it is above-mentioned based on move synchronously realized on formula roundness error separation device based on move synchronously formula circularity miss
Poor separation method, comprising the following steps:
Step a, error separate turntable is placed on rotary table, coarse adjustment error separate turntable and rotary table are same
The heart；
Step b, the section to be measured for determining measured piece adjusts the height of cross slide way and displacement sensor along upright guide rail,
The section to be measured for making measured piece and displacement sensor gauge head adjust measured piece, make the section to be measured of measured piece on same section
It is concentric with error separate turntable；
Step c, error separate turntable and measured piece are considered as an entirety, alignment error separates turntable and thereon tested
The rotary table of part and ultraprecise roundness measuring instrument is concentric, and the main alignment error of this step separates turntable, and measured piece is in error
Position on separation turntable remains unchanged；
Step d, by displacement sensor, transversely guide rail is mobile, contacts displacement sensor with measured piece reliability, adjusts
Displacement sensor makes displacement sensor dynamometry in best one section of the linearity, starting ultraprecise roundness measuring instrument rotary table
Rotary mode, after waiting the rotary table rotation of ultraprecise roundness measuring instrument steady, displacement sensor carries out sampled measurements, position
The signal that displacement sensor picks up is circularity mistake of the Radial mixing S (θ) with measured piece section to be measured for including rotary table
The composition error A (θ) of poor R (θ), wherein
A (θ)=S (θ)+R (θ) (1)
Step e, the rotary table rotation for stopping ultraprecise roundness measuring instrument starts error separate turntable after coming to a complete stop
Rotary mode, error separate turntable revolved with revolving speed same as ultraprecise roundness measuring instrument rotary table in step d
Turn, after rotation is steady, displacement sensor carries out sampled measurements, the signal that displacement sensor picks up be include measured piece section to be measured
Deviation from circular from R (θ) and error separate turntable Radial mixing E (θ) composition error B (θ), wherein The initial position sampled in this step is consistent with the initial position in step d；
B (θ)=R (θ)+E (θ) (2)
Step f, start the rotary mode of ultraprecise roundness measuring instrument rotary table and keep the rotation of error separate turntable
Rotary-die type is opened, after and speed steady after the rotation of two axis keeps being consistent with the rotation speed in step d, displacement sensor
Carry out sampled measurements, displacement sensor pick up signal be include instrument rotary table Radial mixing S (θ) and missed
The composition error C (θ) of Radial mixing E (θ) of the difference from turntable, whereinThis step
It must assure that in rapid consistent in the relative position and step d of error separate turntable and rotary table；
C (θ)=S (θ)+E (θ) (3)
Step g, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates measured piece
The deviation from circular from signal of specified cross-section,
Wherein
Step h, the deviation from circular from signal isolated in step g progress circularity in Circularity error evaluation system is input to comment
It is fixed, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, obtain the circularity of measured piece specified cross-section；
Step i, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates ultraprecise
The rotary table Radial mixing signal of roundness measuring instrument,
Wherein
Step j, the rotary table Radial mixing signal for the ultraprecise roundness measuring instrument isolated in step i is defeated
Enter and carry out roundness evaluation into Circularity error evaluation system, by requirement selection Method of Roundness Assessment, filter function and cut-off
Frequency obtains the rotary table Radial mixing circularity of ultraprecise roundness measuring instrument；
Step k, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates error point
Radial mixing signal from turntable,
Wherein
Step l, the Radial mixing signal for the error separate turntable isolated in step k deviation from circular from is input to comment
Determine to carry out roundness evaluation in system, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, obtains error point
Radial mixing circularity from turntable.
The utility model has the advantages that
The first, all collected signals are only handled in spatial domain, are not related to using Fourier transformation completely, due to saving
The step of having omited Fourier transform, therefore have calculating step few, it calculates simply, detects fireballing technical advantage.
The second, due to avoiding Fourier transform, the distinctive truncation of Fourier transform would not also occur and rounding-off misses
Difference calculates accurate technical advantage so having no dropout.
Third, due to not being related to Fourier transformation, the problem of separation signal is completely absent harmonics restraint, therefore model is former
Manage error free, can be realized all band without harmonics restraint, it is same have calculate accurate technical advantage.
4th, the method for the present invention can be as needed, while isolating the deviation from circular from of measured piece, ultraprecise roundness measurement
The Radial mixing of instrument rotary table and the Radial mixing of error separate turntable, therefore there is an instrument detection
The multi-functional technical advantage of multiple parameters.
5th, it can be directly separated out the Radial mixing of error separate turntable due to the method for the present invention, also have
There is the function of self-calibration.
Detailed description of the invention
Fig. 1 is that the present invention is based on the structural schematic diagrams for moving synchronously formula roundness error separation device.
In figure: 1 cross slide way, 2 displacement sensors, 3 measured pieces, 4 error separate turntables, 5 rotary tables, 6 lead vertically
Rail.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
Following embodiment is that one kind of the invention is based on moving synchronously formula roundness error separation Installation practice.
One kind of the present embodiment is based on moving synchronously formula roundness error separation device, and structural schematic diagram is as shown in Figure 1.The base
In moving synchronously formula roundness error separation device, including cross slide way 1, displacement sensor 2, error separate turntable 4, revolution work
Platform 5 and upright guide rail 6, the horizontal direction on cross slide way 1 of displacement sensor 2 is mobile, and cross slide way 1 drives 2 edge of displacement sensor
Upright guide rail 6 moves up and down, and error separate turntable 4 lies on rotary table 5, error separate turntable 4 with measured piece 3 together
Revolution, rotary table 5 drive error separate turntable 4 to rotate coaxially with measured piece 3.
The rotary table 5 is hydraulic, close pearl or air floatation form.In the present embodiment, rotary table 5 is air bearing
Formula.
The error separate turntable 4 being capable of continuous rotation synchronous with rotary table 5.
Specific embodiment two
Following embodiment is that one kind of the invention is based on moving synchronously formula roundness fault separating method embodiment.
One kind of the invention is based on moving synchronously formula roundness fault separating method, comprising the following steps:
Step a, error separate turntable 4 is placed on rotary table 5, coarse adjustment error separate turntable 4 and revolution work
Platform 5 is concentric；
Step b, the section to be measured for determining measured piece 3 adjusts the height of cross slide way 1 and displacement sensor 2 along upright guide rail 6
Degree, make measured piece 3 section to be measured and 2 gauge head of displacement sensor on same section, adjust measured piece 3, make measured piece 3 to
It surveys section and error separate turntable 4 is concentric；
Step c, error separate turntable 4 and measured piece 3 are considered as an entirety, alignment error separates turntable 4 and thereon
Measured piece 3 and the rotary table 5 of ultraprecise roundness measuring instrument are concentric, and the main alignment error of this step separates turntable 4, measured piece
3 position on error separate turntable 4 remains unchanged；
Step d, by displacement sensor 2, transversely guide rail 1 is mobile, contacts displacement sensor 2 with 3 reliability of measured piece,
Adjustment displacement sensor 2 makes 2 dynamometry of displacement sensor in best one section of the linearity, and starting ultraprecise roundness measuring instrument turns round work
Make the rotary mode of platform 5, after waiting the rotary table 5 of ultraprecise roundness measuring instrument to rotate steadily, displacement sensor 2 is adopted
Sample measurement, displacement sensor 2 pick up signal be include rotary table 5 Radial mixing S (θ) and measured piece 3 it is to be measured
The composition error A (θ) of the deviation from circular from R (θ) in section, wherein
A (θ)=S (θ)+R (θ) (1)
Step e, the rotary table 5 for stopping ultraprecise roundness measuring instrument rotates, and after coming to a complete stop, starts error separate turntable
4 rotary mode, error separate turntable 4 are carried out with revolving speed same as ultraprecise roundness measuring instrument rotary table 5 in step d
Rotation, after rotation is steady, displacement sensor 2 carries out sampled measurements, the signal that displacement sensor 2 picks up be include measured piece 3 to
The composition error B (θ) of the deviation from circular from R (θ) in section and the Radial mixing E (θ) of error separate turntable 4 are surveyed, whereinThe initial position sampled in this step is consistent with the initial position in step d；
B (θ)=R (θ)+E (θ) (2)
Step f, start the rotary mode of ultraprecise roundness measuring instrument rotary table 5 and keep error separate turntable 4
Rotary mode is opened, after and speed steady after the rotation of two axis keeps being consistent with the rotation speed in step d, displacement sensing
Device 2 carries out sampled measurements, and the signal that displacement sensor 2 picks up is the Radial mixing S (θ) for including instrument rotary table 5
With by the composition error C (θ) of the Radial mixing E (θ) of error separate turntable 4, whereinIt must assure that the relative position of error separate turntable 4 Yu rotary table 5 in this step
With it is consistent in step d；
C (θ)=S (θ)+E (θ) (3)
Step g, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates measured piece 3
The deviation from circular from signal of specified cross-section,
Wherein
Step h, the deviation from circular from signal isolated in step g progress circularity in Circularity error evaluation system is input to comment
It is fixed, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, obtain the circularity of 3 specified cross-section of measured piece；
Step i, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates ultraprecise
The 5 Radial mixing signal of rotary table of roundness measuring instrument,
Wherein
Step j, by the 5 Radial mixing signal of rotary table for the ultraprecise roundness measuring instrument isolated in step i
It is input in Circularity error evaluation system and carries out roundness evaluation, by requirement selection Method of Roundness Assessment, filter function and cut
Only frequency obtains the 5 Radial mixing circularity of rotary table of ultraprecise roundness measuring instrument；
Step k, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates error point
Radial mixing signal from turntable 4,
Wherein
Step l, the Radial mixing signal for the error separate turntable 4 isolated in step k is input to deviation from circular from
Roundness evaluation is carried out in assessment system, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, obtains error
Separate the Radial mixing circularity of turntable 4.
Claims (3)
1. one kind is based on moving synchronously formula roundness error separation device, which is characterized in that including cross slide way (1), displacement sensing
Device (2), error separate turntable (4), rotary table (5) and upright guide rail (6), displacement sensor (2) is on cross slide way (1)
Horizontal direction is mobile, and cross slide way (1) drives displacement sensor (2) to move up and down along upright guide rail (6), error separate turntable (4)
It lies on rotary table (5), error separate turntable (4) turns round together with measured piece (3), and rotary table (5), which drives, to be missed
Difference is rotated coaxially from turntable (4) and measured piece (3).
2. being based on moving synchronously formula roundness error separation device according to claim 1, which is characterized in that the revolution work
Making platform (5) is hydraulic, close pearl or air floatation form.
3. being based on moving synchronously formula roundness error separation device according to claim 1, which is characterized in that the error point
It being capable of continuous rotation synchronous with rotary table (5) from turntable (4).
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| CN201910818162.9A CN110514164B (en) | 2017-12-17 | 2017-12-17 | Based on synchronous motion formula circularity error separator |
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| CN201910818162.9A CN110514164B (en) | 2017-12-17 | 2017-12-17 | Based on synchronous motion formula circularity error separator |
| CN201711359653.9A CN108061532B (en) | 2017-12-17 | 2017-12-17 | One kind is based on moving synchronously formula roundness error separation device and method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111595286A (en) * | 2020-06-01 | 2020-08-28 | 虞结全 | Circle checking equipment for outer circle of gear ring of automobile synchronizer |
| CN112432625A (en) * | 2020-09-27 | 2021-03-02 | 华南理工大学 | Roundness measuring method based on two sensors |
| CN113607117A (en) * | 2021-08-09 | 2021-11-05 | 湖南江滨机器（集团）有限责任公司 | Automatic measuring instrument and measuring method for shape error of piston ring groove |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114061945A (en) * | 2021-11-15 | 2022-02-18 | 安徽理工大学 | Precision spindle rotation error measurement and separation experimental device |
| CN114178594B (en) * | 2021-12-10 | 2022-12-23 | 上海交通大学 | System and method for milling inner cavity of deviation-containing cylindrical thin-wall casting |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111595286A (en) * | 2020-06-01 | 2020-08-28 | 虞结全 | Circle checking equipment for outer circle of gear ring of automobile synchronizer |
| CN112432625A (en) * | 2020-09-27 | 2021-03-02 | 华南理工大学 | Roundness measuring method based on two sensors |
| CN112432625B (en) * | 2020-09-27 | 2022-01-18 | 华南理工大学 | Roundness measuring method based on two sensors |
| CN113607117A (en) * | 2021-08-09 | 2021-11-05 | 湖南江滨机器（集团）有限责任公司 | Automatic measuring instrument and measuring method for shape error of piston ring groove |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108061532B (en) | 2019-12-03 |
| CN108061532A (en) | 2018-05-22 |
| CN110514164B (en) | 2020-11-24 |
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