CN109141225A - Shafting five, six degree of freedom error measurement method and measuring system based on Circular gratings - Google Patents
Shafting five, six degree of freedom error measurement method and measuring system based on Circular gratings Download PDFInfo
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- CN109141225A CN109141225A CN201710464459.0A CN201710464459A CN109141225A CN 109141225 A CN109141225 A CN 109141225A CN 201710464459 A CN201710464459 A CN 201710464459A CN 109141225 A CN109141225 A CN 109141225A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The present invention relates to a kind of shafting five, six degree of freedom error measurement method and measuring system based on Circular gratings.More than two measurement planes are arranged in interval on the axial position of the measured axis of shafting, Circular gratings are set at the position that detection measured axis corresponds to each measurement plane, and reading head corresponding with Circular gratings is set in each measurement plane, if axis moves, measured axis tangential displacement when measuring Plane Rotation will change, to generate the in-plane displancement in detection plane of measured axis, due to the opposite variable that the displacement is relative initial position, the influence of the circularity of measured axis itself not will receive.
Description
Technical field
The present invention relates to a kind of shafting five, six degree of freedom error measurement method and measuring system based on Circular gratings.
Background technique
Precise rotary shaft, which ties up in many precision machineries, application, and the cutter measured axis or workpiece such as precision machine tool are tested
Axis, the turntable measured axis of gear measuring center, gear integrated error tester worm screw measured axis and gear measured axis, roundness measuring equipment
Workpiece measured axis etc. belong to precision rotating shafting.
Ideal shafting does not have error, and measured axis is in addition to revolution without the movement of other freedom degrees at work.But it is practical
Shafting have error, in revolution, along each freedom degree error motion can all occur for measured axis.It is tested in precision rotating shafting
Axis is the rigid space motion of six degree of freedom relative to movement made by fixed reference in revolution, can behave as measured axis
Run-out error, axial float error and the heeling error in two orthogonal shaft sections.The movement of rotary axis system
Error directly affects the detection accuracy of machine finish and instrument, therefore how accurately to measure axial system error, improves shafting
Rotating accuracy is always the research emphasis being machined with metrology and measurement field.
Existing axial system error measurement method is intended to be arranged in shafting high-precision standard ball as tested surface, using electricity
The radial linear movement pick-up of sense formula, condenser type or optical reflection type carries out the measurement of axial system error.Therefore it is tested datum level
Form error can be mixed into the measurement result of axial system error, the separation of rotating error of axis and measured piece itself error with axis movement
Key difficulties as axial system error measurement.Axial system error measurement in main error separating method have multipoint method, reverse method and
Multistep processes.It is measured axis revolution that wherein reverse method and multistep processes, which can efficiently separate measured axis turn error and the premise of deviation from circular from,
Repeatability is good for error；For non-repeatability axial system error, traditionally only can just be measured using multipoint method.In multiple spot
The line-of-sight course being most widely used in method measures measured axis using three linear movement pick-ups, can be one to measured axis
The Radial mixing in section is separated with deviation from circular from.The turn error for measuring measured axis six-freedom degree needs to arrange
More sensors are just able to achieve.The sensor that existing multipoint method measuring principle uses is mainly inductance type or condenser type principle
Linear movement pick-up and gradient sensor based on reflective optic measuring principle.These sensors exist more serious
It is non-linear, when drift, temperature drift the problems such as, need calibrate and demarcate after could use, progressive is needed when number of sensors is more
Can matching, the difficulty of system debug is larger, thus it is most be applied to researching and analysing under laboratory condition, seldom prolonged application in
Production scene.In addition, existing measured axis turn error test method, which usually will install standard ball in shaft end, is used as tested benchmark,
Arrange that multiple linear movement pick-ups constitute measuring system around it again, the levels of precision of linear movement pick-up installation site is direct
The precision of measurement result is influenced, therefore structure is complicated for measuring system, test condition is required high, it is difficult to be integrated at low cost
The on-line measurement and compensation of rotating error of axis are realized in the instrument product of volume production, it most importantly can be straight by the deviation from circular from of side
Connect the measurement result for influencing product, low measurement accuracy.
Summary of the invention
The purpose of the present invention is to provide a kind of shafting measuring systems that measurement accuracy is high；The present invention also provides one kind simultaneously
Shafting five degree of freedom error measurement method based on Circular gratings, the shafting six degree of freedom error measurement method based on Circular gratings.
To achieve the above object, the shafting five degree of freedom error measurement method of the invention based on Circular gratings uses following skill
Art scheme:
Technical solution 1: the shafting five degree of freedom error measurement method based on Circular gratings, on the axial position of measured axis between
Every more than two measurement planes are arranged, are corresponded in detection measured axis and Circular gratings are set at each position for measuring plane, and
Reading head corresponding with Circular gratings is set in each measurement plane and passes through reading head and corresponding Circular gratings when measured axis rotates
Cooperation detection measured axis tangential displacement to obtaining displacement and rotational angle of the measured axis at the measurement plane, according to
Measured axis calculates the beat amount of measured axis in the displacement of each measurement plane, in conjunction with the rotational angle and beat amount of measured axis
Be calculated measured axis rotation when except measured axis axial float displacement in addition to five freedom degrees kinematic parameter rule to
Obtain the kinematic error of measured axis.
Technical solution 2, on the basis of technical solution 1: there are two the measurement planes, on one of two measurement planes
The quantity of reading head be m, quantity of the reading head in another measurement plane is n, and m >=2, n >=2, m+n >=5.
Technical solution 3, on the basis of technical solution 2: setting two measurement planes is respectively plane P1 and plane P2, flat
Face P1 is with theoretical centre of gyration O1Coordinate system X is established for origin1O1Y1, with theoretical centre of gyration O on plane P22For origin foundation
Coordinate system X2O2Y2, O1O2Wire definition be Z axis, if the initial reading of each reading head be 0, the side of rotating counterclockwise about the z axis
To for positive direction, H1i(t) displacement of Circular gratings tangential direction is indicated, then measured axis is in X1O1Y1The displacement of coordinate plane and by
Survey the rotation angle of axis are as follows:
In formula, RO, Circular gratings exradius；The rotation angle of θ (t), Circular gratings；
When the reading head on plane P2 is evenly distributed in a circumferential direction, measured axis is around O2The rotation angle θ of point2(t) are as follows:
When the reading head on plane P2 is not in a circumferential direction uniformly distributed, then enable:
θ2(t)=θ1(t),
Then measured axis is in X2O2Y2The displacement of coordinate plane are as follows:
Displacement coordinate Tx (t), Ty (t) in the six degree of freedom coordinate of measured axis spatial movement and around initial coordinate axis X,
Y, the rotational coordinates Rx (t) of Z, Ry (t), Rz (t) are as follows:
L is the distance between plane P1 and P2 in formula.
Technical solution 4, on the basis of technical solution 3: as the O found out1x(t) and O1y(t) absolute value is greater than the set value
When, the compensation of nonlinear effect is carried out to calculated result, that is,
Nlc in formula1xAnd nlc1yIt is in advance in laboratory conditions by experiment by the non-of the higher instrument acquisition of precision
Linear compensation function.
Technical solution 5, on the basis of technical solution 4: the setting value is 100 microns.
Shafting six degree of freedom error measurement method based on Circular gratings of the invention adopts the following technical scheme that
Technical solution 1: the shafting six degree of freedom error measurement method based on Circular gratings, on the axial position of measured axis between
Every more than two measurement planes are arranged, are corresponded in detection measured axis and Circular gratings are set at each position for measuring plane, and
Reading head corresponding with Circular gratings is set in each measurement plane and passes through reading head and corresponding Circular gratings when measured axis rotates
Cooperation detection measured axis tangential displacement to obtaining displacement and rotational angle of the measured axis at the measurement plane, simultaneously
The displacement for detecting measured axis axial float calculates the beat amount of measured axis according to measured axis in the displacement of each measurement plane,
Rotational angle, axial float in conjunction with measured axis are displaced and axial direction when measured axis rotates except measured axis is calculated in beat amount
The kinematic parameter rule of six-freedom degree other than play displacement is to obtain the kinematic error of measured axis.
Technical solution 2, on the basis of technical solution 1: there are two the measurement planes, on one of two measurement planes
The quantity of reading head be m, quantity of the reading head in another measurement plane is n, and m >=2, n >=2, m+n >=5.
Technical solution 3, on the basis of technical solution 2: setting two measurement planes is respectively plane P1 and plane P2, flat
Face P1 establishes coordinate system X1O1Y1 using theoretical centre of gyration O1 as origin, using theoretical centre of gyration O2 as origin on plane P2
Establish coordinate system X2O2Y2, the wire definition of O1O2 is Z axis, if the initial reading of each reading head is 0, about the z axis counterclockwise
Rotation direction is positive direction, and H1i (t) indicates the displacement of Circular gratings tangential direction, then measured axis is in X1O1Y1 coordinate plane
The rotation angle of displacement and measured axis are as follows:
In formula, RO, Circular gratings exradius；The rotation angle of θ (t), Circular gratings；
When the reading head on plane P2 is evenly distributed in a circumferential direction, measured axis is around O2The rotation angle θ of point2(t) are as follows:
When the reading head on plane P2 is not in a circumferential direction uniformly distributed, then enable:
θ2(t)=θ1(t),
Then measured axis is in X2O2Y2The displacement of coordinate plane are as follows:
The displacement of the play of measured axis axial direction is Oz(t)；
Displacement coordinate Tx (t), Ty (t), Tz (t) in the six degree of freedom coordinate of measured axis spatial movement and around initial coordinate
Rotational coordinates Rx (t), Ry (t), the Rz (t) of axis X, Y, Z are as follows:
L is the distance between plane P1 and P2 in formula.
Technical solution 4, on the basis of technical solution 3: as the O found out1x(t) and O1y(t) absolute value is greater than the set value
When, the compensation of nonlinear effect is carried out to calculated result, that is,
Nlc in formula1xAnd nlc1yIt is in advance in laboratory conditions by experiment by the non-of the higher instrument acquisition of precision
Linear compensation function.
Technical solution 5, on the basis of technical solution 4: the setting value is 100 microns.
Shafting measuring system of the invention adopts the following technical scheme that
Technical solution 1: the shafting measurement error system based on Circular gratings, including multi-point displacement sensor subsystem, data
Acquisition subsystem and Data Analysis Services subsystem, the multi-point displacement sensor subsystem include at least two in measured axis
Axial direction on it is spaced for detecting measured axis in the radial displacement of corresponding position and the rotational angle of measured axis
Displacement sensor component, the displacement sensor component include the Circular gratings for being mounted on measured axis and rotating with measured axis
Disk and the reading head being correspondingly arranged with the periphery of Circular gratings disk, the data acquisition subsystem and the multi-point displacement sensor
Subsystem and Data Analysis Services subsystem are conductively connected that the data of multi-point displacement sensor subsystem are acquired and passed
Be defeated by the Data Analysis Services subsystem, thus make the Data Analysis Services subsystem according to measured axis at different locations
Radial displacement calculate the beat amount of measured axis, and combine the rotational angle of measured axis when measured axis rotation is calculated except axis
To play displacement other than other five freedom degrees kinematic parameter rule to obtain the kinematic error of measured axis.
Technical solution 2, on the basis of technical solution 1: the multi-point displacement sensor subsystem further includes for detecting
The shaft position sensor of the axis play displacement of measured axis.
Technical solution 4, on the basis of technical solution 1 or 2: there are two the displacement sensor components, and the displacement passes
The Circular gratings disk of sensor component is between the upper and lower m every the quantity of a corresponding reading head in setting, two Circular gratings, another is right
The reading head quantity answered is n, and m >=2, n >=2, m+n >=5.
The beneficial effects of the present invention are: the shafting six degree of freedom error measurement method of the invention based on Circular gratings is in axis
More than two measurement planes are arranged in interval on the axial position of the measured axis of system, correspond to each measurement plane in detection measured axis
Position at Circular gratings are set, and corresponding with Circular gratings reading head is set in each measurement plane, it is logical when measured axis rotation
Reading head is crossed with the tangential displacement of the cooperation detection measured axis of corresponding Circular gratings to obtain measured axis at the measurement plane
Displacement and rotational angle, while the displacement of measured axis axial float is detected, according to measured axis in the position of each measurement plane
Move the beat amount of measured axis of calculating, rotational angle, the axial float in conjunction with measured axis are displaced and beat amount be calculated by
The kinematic parameter rule of six-freedom degree when surveying axis rotation in addition to the displacement of the axial float of measured axis is to obtain measured axis
Kinematic error, measured axis rotation when, if axis moves, tangential displacement will when measuring Plane Rotation for measured axis
It changes, so that the in-plane displancement in detection plane of measured axis is generated, due to the phase that the displacement is relative initial position
To variable, the influence of the circularity of measured axis itself not will receive.
Detailed description of the invention
Fig. 1 is the principle signal of the embodiment of the shafting six degree of freedom error measurement method of the invention based on Circular gratings
Figure；
Fig. 2 has schematic illustration when 9 sensors for the multi-point displacement sensor subsystem in Fig. 1；
Fig. 3 is the stereoscopic schematic diagram of Fig. 2；
Fig. 4 has stereoscopic schematic diagram when 6 sensors for the multi-point displacement sensor subsystem in Fig. 1；
Fig. 5 is the plane P1's in the embodiment of the shafting six degree of freedom error measurement method of the invention based on Circular gratings
Measurement of in-plane motion schematic diagram；
Fig. 6 is the plane P2's in the embodiment of the shafting six degree of freedom error measurement method of the invention based on Circular gratings
Measurement of in-plane motion schematic diagram；
Fig. 7 is the spatial movement measuring principle of the shafting six degree of freedom error measurement method of the invention based on Circular gratings
Figure；
In attached drawing: 1, reading head；2, shaft position sensor；3, the first grating disc；4, the second grating disc.
Specific embodiment
Embodiments of the present invention are described further with reference to the accompanying drawing.
The specific embodiment of shafting six degree of freedom error measurement method based on Circular gratings of the invention, such as Fig. 1 to Fig. 7
Shown, the measuring system is using the Circular gratings be used widely in industry spot as main sensors part, with Circular gratings
Reading head is as tangential displacement sensor, it is established that the strong axial system error of high-precision, high reliability, environmental suitability measures system
System realizes the measurement of shaft error.The measurement method is analyzed and is handled by the reading to each sensor, and axis is obtained
It is the coordinate of six-freedom motion.
As shown in Figure 1, the measuring system consists of three parts: (1) multi-point displacement sensor subsystem, (2) data are adopted
Subsystem, (3) Data Analysis Services subsystem.
Wherein, multi-point displacement sensor subsystem consists of three parts: (1) in the position of the axially different position installation of measured axis
Displacement sensor component, the displacement sensor component include the two Circular gratings disks installed at the different location of measured axis；(2) exist
The multiple reading heads arranged around Circular gratings disk；(3) linear movement pick-up being arranged in the end of axis.First grating disc 1 and
The distance between two planes locating for two grating discs 2 should structure allow in the range of select as far as possible it is larger, with improve measurement essence
Degree.First grating disc, 1 surrounding arranges m reading head, and 2 surrounding of the second grating disc arranges n reading head, and the number of reading head meets
M >=2, n >=2, m+n >=5.Reading head around Circular gratings disk can be evenly distributed in the circumferential direction, can also uneven cloth
It sets.One or more can be set in the linear movement pick-up of axis direction setting, can be set in one end of axis, can also divide
The both ends of axis are not set.The number for the grating reading head arranged in Fig. 3 is more, shares eight, can there is more redundant digit
According to for corroborating each other, examining and determine certainly for measuring system is realized；The grating reading head number arranged in Fig. 4 is less, and cost is relatively low.It is real
When the application present invention of border, the number and arrangement mode of reading head can be with the differences in Fig. 3, Fig. 4, but measuring principle used is
The same；Interval on the axial position of measured axis can also be set, multiple Circular gratings are set to form multiple measurement planes.
Data acquisition subsystem by each reading head, the interface circuit of sensor, Data acquisition and storage hardware circuit and
Relevant software composition, effect is the reading for synchronously recording each reading head, the Data Analysis Services subsystem after being
Data are provided.Data acquisition subsystem can be realized with motion control card, the counter card of finished product, can also develop dedicated be based on
The data acquisition device of MCU, DSP, FPGA.
The measurement of each reading head, sensor that Data Analysis Services subsystem obtains data acquisition subsystem and records
Data are analyzed and are calculated, and the six-freedom motion coordinate data of tested measured axis is therefrom obtained.Data Analysis Services subsystem
System mainly completes its function by software, and related software may operate at embedding assembly machine platform, also may operate in and be based on
The industrial computer system of PC also may operate on cloud computing platform or other computer platforms.
The magnitude very little of measured axis error when rotated in precision bearing system, two of plane locating for two Circular gratings disks are mutually
The circular runout of vertical direction is usually no more than 100 microns, and the distance between two planes are far longer than 100 microns, therefore
The six degree of freedom rigid space motion of measured axis can be approximately decomposed into mutually independent Rigid Planar a little in two planes
Movement and along measured axis axis direction translation a little.Likewise, since error magnitude is very when rotated for precision bearing system measured axis
Small, the change in location between Circular gratings disk and reading head is seldom, therefore reading head can be counted normally in the measurements.
The measurement method, which refers to, analyzes and calculates measured axis from the measurement result that each reading head, sensor obtain
It is the method for the six-freedom motion coordinate data of measured axis.Total process is first calculated separately in two Circular gratings disk planes
The coordinate of the rigid body three degree of freedom of plane motion a little, calculating rigid body then in conjunction with shaft position sensor, space is transported a little
The coordinate of dynamic six-freedom degree.
Measurement method comprises the steps of:
(1) coordinate system is established.
As shown in Fig. 5, Fig. 6 and Fig. 7, the label of plane locating for the first grating disc 1 is plane locating for the second grating disc 2
Label be.Coordinate system X is established on plane P11O1Y1, point O1For the theoretical centre of gyration.Coordinate is established on plane P2
It is X2O2Y2, point O2For the theoretical centre of gyration.Reference axis X1With X2In parallel, Y1With Y2In parallel. O1O2Line and reference axis X1,Y1,
X2,Y2It is all vertical, it is defined as Z axis.The error of the measured axis centre of gyration line of this method measurement is relative value, therefore point O1And point
O2It does not need highly precisely to determine its position.It can be first considered that initial position locating for axis is exactly O when starting measurement1、
O2Point, then again O after being measured1、O2Point position correction to survey orbit of shaft center Least Square Circle the center point,
The purpose for the arrangement is that convenient show measurement result to graphically.
(2) coordinate of the three degree of freedom of plane motion a little of Circular gratings disk is calculated in plane P1.
As shown in figure 4, i-th of reading head H in note plane P11iLocating azimuth is θ1i, i=1,2 ..., m.Azimuth
With X1Axis forward direction be 0 °, using around the direction that center O rotates counterclockwise as positive direction.If the initial reading of each reading head is 0,
It is H in the reading of i-th of reading head of moment t1i(t)。H1i(t) displacement of Circular gratings tangential direction is indicated, with length evaluation.
Then in t moment, rigid body is with basic point coordinate O1(O1x(t),O1y(t)) rotation angle θ of translation and rigid body around O point1(t) it is represented by
In formula, ROFor the exradius of Circular gratings；θ (t) is the rotation angle of Circular gratings namely the rotation angle of measured axis
Degree.
As the O found out1x(t) and O1y(t) it when absolute value is greater than the set value, needs to carry out non-linear effect to calculated result
The compensation answered, the setting value are 100 microns, certainly can also be other numerical value, i.e.,
Nonlinear compensation function nlc in formula1xAnd nlc1yIt is higher by precision by testing in laboratory conditions in advance
Instrument obtain.For general precision bearing system, due to O1x(t) and O1y(t) absolute value very little (being no more than 100 microns),
Can without nonlinear compensation, even
(3) the three degree of freedom coordinate of the plane motion a little of Circular gratings disk is calculated in plane P2.
As shown in fig. 6, i-th of reading head H in note plane P22iLocating azimuth is θ2i, i=1,2 ..., n.Azimuth
With X2Axis forward direction is 0 °, around center O2The direction rotated counterclockwise is positive direction.
It is H in the reading of i-th of reading head of moment t if the initial reading of each reading head is 02i(t)。H2i(t) table
Show the displacement of Circular gratings tangential direction, with length evaluation.
Rigid body is calculated first around O2The rotation angle θ of point2(t).When n reading head in plane P2 around the second grating disc 2 exists
When circumferencial direction is uniformly distributed, have
In formula, ROFor the exradius of Circular gratings；θ2It (t) is the rotation angle of Circular gratings 2.
When n reading head is not that circumferencial direction is uniformly distributed, then enable
θ2(t)=θ1(t)
Namely rotation angle is not calculated by plane P2, and directly adopt rotation of the rotation angle of plane P1 as plane P2
Gyration.The purpose for the arrangement is that in some cases, in order to save cost, only can arrange two in sensitive direction in plane P2
An a or even reading head.
Rigid body is with basic point coordinate O2(O2x(t),O2y(t)) translation is represented by
As the O found out2x(t) and O2y(t) it when absolute value is greater than the set value, needs to carry out nonlinear effect to calculated result
Compensation, the setting value be 100 microns, certainly, setting value may be other numerical value, i.e.,
Nonlinear compensation function nlc in formula2xAnd nlc2yIt is to be obtained in advance by experiment.For general accurate axis
System, due to O2x(t) and O2y(t) absolute value very little (be no more than 100 microns), can without nonlinear compensation, even
(4) measured axis axially translation coordinate is calculated.
As shown in Figure 3 and Figure 4, axially translation coordinate can be calculated measured axis by the reading of axial linear movement pick-up,
Using the arithmetic mean of instantaneous value of each axial linear movement pick-up as measured axis axial direction translation coordinate value, it is denoted as Oz(t)。
(5) the six degree of freedom coordinate of measured axis rigid space plane motion is calculated.
As shown in fig. 7, selected measured axis on plane P1 with O1The point of coincidence is the basic point of rigid space motion.Work as rotation
When to moment t, due to the influence of axial system error, O1Point moves to O1' at.The six degree of freedom coordinate of rigid space motion is with base
Translation coordinate Tx (t), Ty (t), Tz (t) and the rotational coordinates Rx (t), Ry (t), Rz (t) around initial coordinate axis X, Y, Z put.
This six coordinates can be calculated by following formula:
In formula, L is the distance between plane P1 and P2.
According to the fortune of the parameter of above-mentioned six coordinates you can get it compared with the theory movement parameter of standard axle measured axis
Dynamic error, in rotation, if axis moves, measured axis tangential displacement when measuring Plane Rotation will occur measured axis
Variation, so that the in-plane displancement in detection plane of measured axis is generated, since the displacement is that the opposite of relative initial position becomes
Amount, not will receive the influence of the circularity of measured axis itself.
The embodiment of shafting five degree of freedom error measurement method based on Circular gratings of the invention, it is described based on Circular gratings
The embodiment of shafting five degree of freedom error measurement method and the above-mentioned shafting six degree of freedom error measurement method based on Circular gratings
The difference is that being not provided with shaft position sensor, the survey of other five freedom degrees in addition to axial float is displaced only is carried out
Amount.
The embodiment of shafting measuring system of the invention, for example above-mentioned axis based on Circular gratings of axial system error measuring system
It is the measuring system in the embodiment of six degree of freedom error measurement method, repeats no more.
Claims (10)
1. the shafting five degree of freedom error measurement method based on Circular gratings, it is characterised in that: between on the axial position of measured axis
Every more than two measurement planes are arranged, are corresponded in detection measured axis and Circular gratings are set at each position for measuring plane, and
Reading head corresponding with Circular gratings is set in each measurement plane and passes through reading head and corresponding Circular gratings when measured axis rotates
Cooperation detection measured axis tangential displacement to obtaining displacement and rotational angle of the measured axis at the measurement plane, according to
Measured axis calculates the beat amount of measured axis in the displacement of each measurement plane, in conjunction with the rotational angle and beat amount of measured axis
Be calculated measured axis rotation when except measured axis axial float displacement in addition to five freedom degrees kinematic parameter rule to
Obtain the kinematic error of measured axis.
2. the shafting five degree of freedom error measurement method according to claim 1 based on Circular gratings, it is characterised in that: described
It measures there are two planes, the quantity of the reading head on one of two measurement planes is m, the reading head in another measurement plane
Quantity be n, and m >=2, n >=2, m+n >=5.
3. the shafting five degree of freedom error measurement method according to claim 2 based on Circular gratings, it is characterised in that: set two
A measurement plane is respectively plane P1 and plane P2, in plane P1 with theoretical centre of gyration O1Coordinate system X is established for origin1O1Y1,
With theoretical centre of gyration O on plane P22Coordinate system X is established for origin2O2Y2, O1O2Wire definition be Z axis, if each reading
The initial reading of head is 0, and the direction that rotates counterclockwise about the z axis is positive direction, H1i(t) displacement of Circular gratings tangential direction is indicated
Amount, then measured axis is in X1O1Y1The displacement of coordinate plane and the rotation angle of measured axis are as follows:
In formula, RO, Circular gratings exradius；The rotation angle of θ (t), Circular gratings；
When the reading head on plane P2 is evenly distributed in a circumferential direction, measured axis is around O2The rotation angle θ of point2(t) are as follows:
When the reading head on plane P2 is not in a circumferential direction uniformly distributed, then enable:
θ2(t)=θ1(t),
Then measured axis is in X2O2Y2The displacement of coordinate plane are as follows:
Displacement coordinate Tx (t), Ty (t), Tz (t) in the six degree of freedom coordinate of measured axis spatial movement and around initial coordinate axis X,
Y, the rotational coordinates Rx (t) of Z, Ry (t), Rz (t) are as follows:
L is the distance between plane P1 and P2 in formula.
4. the shafting five degree of freedom error measurement method according to claim 3 based on Circular gratings, it is characterised in that: when asking
O out1x(t) and O1y(t) when absolute value is greater than the set value, the compensation of nonlinear effect is carried out to calculated result, that is,
Nlc in formula1xAnd nlc1yIt is in advance in laboratory conditions by experiment by the non-linear of the higher instrument acquisition of precision
Penalty function.
5. the shafting six degree of freedom error measurement method based on Circular gratings, it is characterised in that: between on the axial position of measured axis
Every more than two measurement planes are arranged, are corresponded in detection measured axis and Circular gratings are set at each position for measuring plane, and
Reading head corresponding with Circular gratings is set in each measurement plane and passes through reading head and corresponding Circular gratings when measured axis rotates
Cooperation detection measured axis tangential displacement to obtaining displacement and rotational angle of the measured axis at the measurement plane, simultaneously
The displacement for detecting measured axis axial float calculates the beat amount of measured axis according to measured axis in the displacement of each measurement plane,
Rotational angle, axial float in conjunction with measured axis are displaced and axial direction when measured axis rotates except measured axis is calculated in beat amount
The kinematic parameter rule of six-freedom degree other than play displacement is to obtain the kinematic error of measured axis.
6. the shafting six degree of freedom error measurement method according to claim 5 based on Circular gratings, it is characterised in that: described
It measures there are two planes, the quantity of the reading head on one of two measurement planes is m, the reading head in another measurement plane
Quantity be n, and m >=2, n >=2, m+n >=5.
7. the shafting six degree of freedom error measurement method according to claim 6 based on Circular gratings, it is characterised in that: set two
A measurement plane is respectively plane P1 and plane P2, in plane P1 with theoretical centre of gyration O1Coordinate system X is established for origin1O1Y1,
With theoretical centre of gyration O on plane P22Coordinate system X is established for origin2O2Y2, O1O2Wire definition be Z axis, if each reading
The initial reading of head is 0, and the direction that rotates counterclockwise about the z axis is positive direction, H1i(t) displacement of Circular gratings tangential direction is indicated
Amount, then measured axis is in X1O1Y1The displacement of coordinate plane and the rotation angle of measured axis are as follows:
In formula, RO, Circular gratings exradius；The rotation angle of θ (t), Circular gratings；
When the reading head on plane P2 is evenly distributed in a circumferential direction, measured axis is around O2The rotation angle θ of point2(t) are as follows:
When the reading head on plane P2 is not in a circumferential direction uniformly distributed, then enable:
θ2(t)=θ1(t),
Then measured axis is in X2O2Y2The displacement of coordinate plane are as follows:
The displacement of the play of measured axis axial direction is Oz(t)；
Displacement coordinate Tx (t), Ty (t), Tz (t) in the six degree of freedom coordinate of measured axis spatial movement and around initial coordinate axis X,
Y, the rotational coordinates Rx (t) of Z, Ry (t), Rz (t) are as follows:
L is the distance between plane P1 and P2 in formula.
8. the shafting six degree of freedom error measurement method according to claim 7 based on Circular gratings, it is characterised in that: when asking
O out1x(t) and O1y(t) when absolute value is greater than the set value, the compensation of nonlinear effect is carried out to calculated result, that is,
Nlc in formula1xAnd nlc1yIt is in advance in laboratory conditions by experiment by the non-linear of the higher instrument acquisition of precision
Penalty function.
9. the shafting measurement error system based on Circular gratings, it is characterised in that: adopted including multi-point displacement sensor subsystem, data
Subsystem and Data Analysis Services subsystem, the multi-point displacement sensor subsystem include at least two in measured axis
It is spaced for detecting measured axis in the radial displacement of corresponding position and the position of the rotational angle of measured axis in axial direction
Displacement sensor component, the displacement sensor component include the Circular gratings disk for being mounted on measured axis and rotating with measured axis
And the reading head being correspondingly arranged with the periphery of Circular gratings disk, the data acquisition subsystem and multi-point displacement sensor
System and Data Analysis Services subsystem are conductively connected that the data of multi-point displacement sensor subsystem are acquired and transmitted
To the Data Analysis Services subsystem, thus make the Data Analysis Services subsystem according to measured axis at different locations
Radial displacement calculates the beat amount of measured axis, and combines the rotational angle of measured axis when measured axis rotation is calculated except axial
Play displacement other than other five freedom degrees kinematic parameter rule to obtain the kinematic error of measured axis.
10. the shafting measurement error system according to claim 9 based on Circular gratings, it is characterised in that: the displacement passes
There are two sensor components, and the Circular gratings disk of the displacement sensor component is right every one in setting, two Circular gratings between the upper and lower
The quantity for answering reading head is m, another corresponding reading head quantity is n, and m >=2, n >=2, m+n >=5.
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| CN113587855A (en) * | 2021-07-29 | 2021-11-02 | 大连探索者科技有限公司 | Non-contact type shafting rotation precision testing method based on optical-mechanical coupling |
| CN114440766A (en) * | 2022-01-12 | 2022-05-06 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom motion error of rotating shaft |
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