CN110514165A - Based on moving synchronously formula roundness error separation device - Google Patents
Based on moving synchronously formula roundness error separation device Download PDFInfo
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- CN110514165A CN110514165A CN201910818168.6A CN201910818168A CN110514165A CN 110514165 A CN110514165 A CN 110514165A CN 201910818168 A CN201910818168 A CN 201910818168A CN 110514165 A CN110514165 A CN 110514165A
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- error
- roundness
- main shaft
- turntable
- ultraprecise
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
Abstract
The present invention is based on move synchronously formula roundness error separation device to belong to precision instrument manufacture and field of measuring technique；The device mainly introduces the error separate turntable that can follow rotation in the same direction with ultraprecise roundness error measurement instrument live spindle in ultraprecise roundness measuring instrument, by measuring the circumference signal containing different systematic components three times, isolate the deviation from circular from of measured piece, any one in the Errors in Radial Rotation Error of Spindle of ultraprecise roundness measuring instrument and the Radial mixing of error separate turntable, compared with most widely used multistep processes, the method solves the problems, such as in airspace completely, it is not related to Fourier transformation, completely avoid harmonics restraint, and measurement is simple with calculating process, model-free error, a kind of new thinking is provided for superfinishing level of confidentiality roundness error separation.
Description
The application is the divisional application of application for a patent for invention " based on formula roundness error separation device and method is moved synchronously ".
The original bill applying date: 2017-12-17.
Original bill application number: 2017113596628.
Original bill denomination of invention: based on moving synchronously formula roundness error separation device and method.
Technical field
The present invention is based on move synchronously formula roundness error separation device to belong to precision instrument manufacture and field of measuring technique.
Background technique
In recent years, the continuous development in Ultra-precision Turning field, the precision for directly resulting in many process equipment processing do not have
Corresponding detection device, so that machining accuracy can not be further increased.By taking circularity as an example, the circularity of Modern Astronomical telescope is missed
Difference has reached ± 5nm, and the gyroscope circularity on spaceship requires to be less than 10nm, and the silicon wafer ball of high-precision density benchmark is arbitrarily cut
Face deviation from circular from has reached within 10nm, and the instrument Errors in Radial Rotation Error of Spindle of the roundness measuring instrument of full accuracy also exists now
± 10nm or so is unable to measure the deviation from circular from of these superhigh precision parts.Only it has been difficult to mention by hard technology such as traditional handicrafts
The precision of high roundness measuring instrument, it is necessary to use error separating technology (Error Separation Techniques, EST), come
Isolate the systematic error of roundness measuring instrument itself.
In general, now used in roundness fault separating method be broadly divided into two kinds of big methods, multi-index method and more
Gauge head method, multi-index method are so that error separate turntable is driven multiple indexings of measured piece by increasing an error separate turntable
It measures to realize error separate, more gauge head methods are to realize roundness error separation by the number and layout of increase sensor.
Reverse method belongs to multi-index method, but needs to stop the measuring state of measuring instrument in measurement process, while will be by
The direction transformation 180 degree for surveying part and sensor needs to readjust among these concentric, increase of the measured piece with roundness measuring device
The intervention of people, not can guarantee yet and has converted 180 degree really, can only estimate by human eye, be unfavorable for automatic measurement.
And most popular multistep processes in multi-index method, because there are the hard defects of harmonics restraint, on this basis
The full Harmonic Method to grow up, multiple multistep processes are all to change space with the time, increase the indexable number of measurement, when lengthening measurement
Between, more measurement errors are introduced, if sensor is there are linear drift, electrical noise etc., these are all unfavorable for high-speed and high-efficiency
Measurement.
Single-turn position method in patent " single-transposition roundness fault separating method " is to carry out on the basis of multi-index method into one
The simplification of step, essence are consistent with multistep processes, and obtained result is also consistent with multi-index method.Above-mentioned several method is equal
It is to be analyzed and processed to collected signal, but be easy singular point, near singular point using Fourier transformation as template
The problem of value has the influence infinitely amplified, and is not fully solved harmonics restraint, can only be in a certain range without harmonics restraint.
More gauge head methods are the numbers (two or more sensor methods are known as more gauge head methods) by increasing sensor,
And rational deployment realizes roundness error separation.Two-point method is that two gauge heads are placed at 180 degree, and three gauge head methods are to sense three
Device is placed at an angle, and four gauge head methods are also only that a sensor is increased on three gauge heads, and mixing method is by three gauge heads
A displacement sensor in method changes angular transducer into, and quadrature hybrid method is by one angular transducer of a displacement sensor
It is placed in 90 degree, these types of method is all that will sample obtained several signals to carry out Fourier transformation and inverse transformation, obtains circularity
The axial system error of measuring instrument and the deviation from circular from of measured piece.But disadvantage is also it will be apparent that the increase such as number of probes can be led
Cause the characteristic of each sensor inconsistent, the layout of sensor is not on the same measurement section, and there are zero points etc. for transmission function
Problem.
Above method the problem is that, 1, signal is subjected to error separate with being fourier transformed into frequency domain, divided
Spectrum information from signal, then Fourier inversion is carried out, the signal after finally obtaining separation calculates complexity, there is truncation and house
Enter error；2, due to having used Fourier transformation, making to separate signal has a harmonics restraint, model there are the errors of principles,
Corresponding ameliorative way can only solve to can not achieve all band without harmonics restraint without harmonics restraint in a certain range；3, cannot
The deviation from circular from of measured piece, the Errors in Radial Rotation Error of Spindle of ultraprecise roundness measuring instrument and error separate turntable are isolated simultaneously
Radial mixing.
Summary of the invention
To solve the above-mentioned problems, it the invention discloses based on formula roundness error separation device and method is moved synchronously, is somebody's turn to do
Device and method is not separated in airspace only, and Fourier transformation is not needed, and is calculated simply, and press down in all band without harmonic wave
System additionally has and isolates three errors (main shaft radial direction of the deviation from circular from of measured piece, ultraprecise roundness measuring instrument simultaneously
The Radial mixing of turn error and error separate turntable) technical advantage.
The object of the present invention is achieved like this:
Based on moving synchronously formula roundness error separation device, including rotary main shaft, cross slide way, displacement sensor, error
Separation turntable, workbench and upright guide rail, rotary main shaft are crossed the heart with cross slide way and are connect, displacement sensor water on cross slide way
It moves flat, rotary main shaft, cross slide way and displacement sensor moved in coaxial, error separate turntable is laid flat on the table, accidentally
Difference is turned round together with measured piece from turntable, and workbench drives error separate turntable to transport up and down together with measured piece along upright guide rail
It is dynamic, find measured section position.
Above-mentioned to be based on moving synchronously formula roundness error separation device, the rotary main shaft is hydraulic, close pearl or air bearing shape
Formula.
Above-mentioned to be based on moving synchronously formula roundness error separation device, the error separate turntable can be same with rotary main shaft
Walk continuous rotation.
Based on move synchronously realized on formula roundness error separation device based on moving synchronously formula roundness fault separating method,
The following steps are included:
Stepa, by error separate turntable place on the table, coarse adjustment error separate turntable and rotary main shaft are concentric；
Step b, the section to be measured for determining measured piece, along upright guide rail self-powered platform, make the section to be measured of measured piece with
Displacement sensor gauge head adjusts measured piece, keeps the section to be measured of measured piece and error separate turntable concentric on same section；
Step c, error separate turntable and measured piece are considered as an entirety, alignment error separates turntable and thereon tested
The rotary main shaft of part and ultraprecise roundness measuring instrument is concentric, and the main alignment error of this step separates turntable, and measured piece is in error point
It is remained unchanged from the position on turntable；
Step d, by displacement sensor, transversely guide rail is mobile, contacts displacement sensor with measured piece reliability, adjusts
Displacement sensor makes displacement sensor dynamometry in best one section of the linearity, starts the main shaft rotating mould of ultraprecise roundness measuring instrument
Formula waits turning after main shaft 1 drives displacement sensor rotation steady for ultraprecise roundness measuring instrument, and displacement sensor carries out sampling survey
Amount, the signal that displacement sensor picks up are Radial mixing S (θ) and the measured piece section to be measured for including instrument rotary main shaft
The composition error A (θ) of deviation from circular from R (θ), wherein
A (θ)=S (θ)+R (θ) (1)
Step e, the rotary main shaft rotation for stopping ultraprecise roundness measuring instrument, after coming to a complete stop, starting error separate turntable
Rotary mode, error separate turntable are rotated with revolving speed same as ultraprecise roundness measuring instrument rotary main shaft in step d, rotation
After turning steady, displacement sensor carries out sampled measurements, and the signal that displacement sensor picks up is the circle for including measured piece section to be measured
The composition error B (θ) of the Radial mixing E (θ) of error R (θ) and error separate turntable is spent, whereinThe initial position sampled in this step is consistent with the initial position in step d；
B (θ)=R (θ)+E (θ) (2)
Step f, start the main shaft rotary mode of ultraprecise roundness measuring instrument and keep the rotary mode of error separate turntable
It opens, after and speed steady after the rotation of two axis keeps being consistent with the rotation speed in step d, displacement sensor is adopted
Sample measurement, the signal that displacement sensor picks up are to include the Radial mixing S (θ) of instrument rotary main shaft and turned by error separate
The composition error C (θ) of the Radial mixing E (θ) of platform, whereinIt is necessary in this step
Guarantee consistent in the relative position and step d of error separate turntable and rotary main shaft；
C (θ)=S (θ)+E (θ) (3)
Step g, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates measured piece
The deviation from circular from signal of specified cross-section,
Wherein
Step h, the deviation from circular from signal isolated in step g progress circularity in Circularity error evaluation system is input to comment
It is fixed, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, obtain the circularity of measured piece specified cross-section；
Step i, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates ultraprecise
The rotary main shaft Radial mixing signal of roundness measuring instrument,
Wherein
Step j, the rotary main shaft Radial mixing signal for the ultraprecise roundness measuring instrument isolated in step i is inputted
Roundness evaluation is carried out into Circularity error evaluation system, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency
Rate obtains the rotary main shaft Radial mixing circularity of ultraprecise roundness measuring instrument；
Step k, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates error point
Radial mixing signal from turntable,
Wherein
Step l, the Errors in Radial Rotation Error of Spindle signal for the error separate turntable isolated in step k circularity is input to miss
Roundness evaluation is carried out in poor assessment system, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, is missed
Radial mixing circularity of the difference from turntable.
The utility model has the advantages that
The first, all collected signals are only handled in spatial domain, are not related to using Fourier transformation completely, due to saving
The step of having omited Fourier transform, therefore have calculating step few, it calculates simply, detects fireballing technical advantage.
The second, due to avoiding Fourier transform, the distinctive truncation of Fourier transform would not also occur and rounding-off misses
Difference calculates accurate technical advantage so having no dropout.
Third, due to not being related to Fourier transformation, the problem of separation signal is completely absent harmonics restraint, therefore model is former
Manage error free, can be realized all band without harmonics restraint, it is same have calculate accurate technical advantage.
4th, the method for the present invention can be as needed, while isolating the deviation from circular from of measured piece, ultraprecise roundness measurement
The Errors in Radial Rotation Error of Spindle of instrument and the Radial mixing of error separate turntable, therefore there is an instrument to detect multiple ginsengs
Several multi-functional technical advantages.
5th, it can be directly separated out the Radial mixing of error separate turntable due to the method for the present invention, also have
There is the function of self-calibration.
Detailed description of the invention
Fig. 1 is that the present invention is based on the structural schematic diagrams for moving synchronously formula roundness error separation device.
In figure: 1 rotary main shaft, 2 cross slide ways, 3 displacement sensors, 4 measured pieces, 5 error separate turntables, 6 workbench, 7
Upright guide rail
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
Following embodiment is that the present invention is based on move synchronously formula roundness error separation Installation practice.
The present embodiment based on moving synchronously formula roundness error separation device, which is characterized in that including rotary main shaft 1, horizontal
Direction guiding rail 2, displacement sensor 3, error separate turntable 5, workbench 6 and upright guide rail 7, rotary main shaft 1 and cross slide way 2 cross the heart
Connection, the horizontal direction on cross slide way 2 of displacement sensor 3 is mobile, and rotary main shaft 1, cross slide way 2 and displacement sensor 3 are coaxial
Movement, error separate turntable 5 are lain on workbench 6, and error separate turntable 5 turns round together with measured piece 4, and workbench 6 drives
Error separate turntable 5 moves up and down along upright guide rail 7 together with measured piece 4, finds measured section position.
The rotary main shaft 1 is hydraulic, close pearl or air floatation form.In the present embodiment, rotary main shaft 1 is fluid pressure type.
The error separate turntable 5 being capable of continuous rotation synchronous with rotary main shaft 1.
Specific embodiment two
Following embodiment is that the present invention is based on move synchronously formula roundness fault separating method embodiment.
The present invention is based on move synchronously formula roundness fault separating method, comprising the following steps:
Step a, error separate turntable 5 is placed on workbench 6, coarse adjustment error separate turntable 5 and rotary main shaft 1 are same
The heart；
Step b, the section to be measured for determining measured piece 4 makes to be measured section of measured piece 4 along 7 self-powered platform 6 of upright guide rail
Face and 3 gauge head of displacement sensor adjust measured piece 4 on same section, make section to be measured and the error separate turntable of measured piece 4
5 with one heart；
Step c, error separate turntable 5 and measured piece 4 are considered as an entirety, alignment error separates turntable 5 and thereon
Measured piece 4 and the rotary main shaft 1 of ultraprecise roundness measuring instrument are concentric, and the main alignment error of this step separates turntable 5, measured piece 4
Position on error separate turntable 5 remains unchanged；
Step d, by displacement sensor 3, transversely guide rail 2 is mobile, contacts displacement sensor 3 with 4 reliability of measured piece,
Adjustment displacement sensor 3 makes 3 dynamometry of displacement sensor in best one section of the linearity, starts the main shaft of ultraprecise roundness measuring instrument
Rotary mode, wait ultraprecise roundness measuring instrument turn main shaft 1 drive displacement sensor 3 rotate it is steady after, displacement sensor 3 into
Row sampled measurements, the signal that displacement sensor 3 picks up is the Radial mixing S (θ) and measured piece for including instrument rotary main shaft 1
The composition error A (θ) of the deviation from circular from R (θ) in 4 sections to be measured, wherein
A (θ)=S (θ)+R (θ) (1)
Step e, the rotary main shaft 1 for stopping ultraprecise roundness measuring instrument rotates, and after coming to a complete stop, starts error separate turntable 5
Rotary mode, error separate turntable 5 revolved with revolving speed same as ultraprecise roundness measuring instrument rotary main shaft 1 in step d
Turn, after rotation is steady, displacement sensor 3 carries out sampled measurements, the signal that displacement sensor 3 picks up be include that measured piece 4 is to be measured
The composition error B (θ) of the Radial mixing E (θ) of the deviation from circular from R (θ) and error separate turntable 5 in section, wherein The initial position sampled in this step is consistent with the initial position in step d；
B (θ)=R (θ)+E (θ) (2)
Step f, start the main shaft rotary mode of ultraprecise roundness measuring instrument and keep the rotary mode of error separate turntable 5
It opens, after and speed steady after the rotation of two axis keeps being consistent with the rotation speed in step d, displacement sensor 3 is carried out
Sampled measurements, the signal that displacement sensor 3 picks up are to include the Radial mixing S (θ) of instrument rotary main shaft 1 and divided by error
The composition error C (θ) of Radial mixing E (θ) from turntable 5, whereinThis step
In must assure that it is consistent in the relative position and step d of error separate turntable 5 and rotary main shaft 1；
C (θ)=S (θ)+E (θ) (3)
Step g, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates measured piece 4
The deviation from circular from signal of specified cross-section,
Wherein
Step h, the deviation from circular from signal isolated in step g progress circularity in Circularity error evaluation system is input to comment
It is fixed, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, obtain the circularity of 4 specified cross-section of measured piece；
Step i, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates ultraprecise
The 1 Radial mixing signal of rotary main shaft of roundness measuring instrument,
Wherein
Step j, the 1 Radial mixing signal of rotary main shaft for the ultraprecise roundness measuring instrument isolated in step i is defeated
Enter and carry out roundness evaluation into Circularity error evaluation system, by requirement selection Method of Roundness Assessment, filter function and cut-off
Frequency obtains the 1 Radial mixing circularity of rotary main shaft of ultraprecise roundness measuring instrument；
Step k, step d, step e, a few road integrated error signals of step f are performed mathematical calculations, that is, isolates error point
Radial mixing signal from turntable 5,
Wherein
Step l, the Errors in Radial Rotation Error of Spindle signal for the error separate turntable 5 isolated in step k is input to circularity
Roundness evaluation is carried out in error evaluation system, by requirement selection Method of Roundness Assessment, filter function and cutoff frequency, is obtained
The Radial mixing circularity of error separate turntable 5.
Claims (3)
1. based on moving synchronously formula roundness error separation device, which is characterized in that including rotary main shaft (1), cross slide way (2),
Displacement sensor (3), error separate turntable (5), workbench (6) and upright guide rail (7), rotary main shaft (1) and cross slide way (2)
Heart connection is crossed, displacement sensor (3) horizontal direction on cross slide way (2) is mobile, rotary main shaft (1), cross slide way (2) and displacement
Sensor (3) moved in coaxial, error separate turntable (5) are lain on workbench (6), error separate turntable (5) and measured piece (4)
It turns round together, workbench (6) drives difference to move up and down together along upright guide rail (7) from turntable (4) and measured piece (4), finds
Measured section position.
2. being based on moving synchronously formula roundness error separation device according to claim 1, which is characterized in that the revolution master
Axis (1) is hydraulic, close pearl or air floatation form.
3. being based on moving synchronously formula roundness error separation device according to claim 1, which is characterized in that the error point
It being capable of continuous rotation synchronous with rotary main shaft (1) from turntable (5).
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| CN201910818168.6A CN110514165B (en) | 2017-12-17 | 2017-12-17 | Roundness error separating device based on synchronous motion |
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| CN201910818168.6A CN110514165B (en) | 2017-12-17 | 2017-12-17 | Roundness error separating device based on synchronous motion |
| CN201711359662.8A CN108036751B (en) | 2017-12-17 | 2017-12-17 | roundness error separation device and method based on synchronous motion |
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| CN108413858A (en) * | 2018-06-07 | 2018-08-17 | 中国计量大学 | A kind of contact ball pen bead sizes form measuring instrument and measurement method |
| CN109000575B (en) * | 2018-09-11 | 2019-08-27 | 北京航空航天大学 | Hot wire probe and wall surface distance measurement method and device |
| CN111678432B (en) * | 2020-05-20 | 2021-10-22 | 常州机电职业技术学院 | Ball-end milling cutter abrasion loss detection device and detection method thereof |
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| CN110514165B (en) | 2021-01-08 |
| CN108036751A (en) | 2018-05-15 |
| CN108036751B (en) | 2019-12-13 |
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