CN110462371A - 物质检测元件 - Google Patents

物质检测元件 Download PDF

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Publication number
CN110462371A
CN110462371A CN201880020078.6A CN201880020078A CN110462371A CN 110462371 A CN110462371 A CN 110462371A CN 201880020078 A CN201880020078 A CN 201880020078A CN 110462371 A CN110462371 A CN 110462371A
Authority
CN
China
Prior art keywords
substance
detection
hole
detecting element
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201880020078.6A
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English (en)
Chinese (zh)
Inventor
绪方健治
黑木省吾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
I Pex Inc
Original Assignee
Dai Ichi Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Ichi Seiko Co Ltd filed Critical Dai Ichi Seiko Co Ltd
Priority to CN202111091330.2A priority Critical patent/CN113758972B/zh
Publication of CN110462371A publication Critical patent/CN110462371A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G01N2291/0215—Mixtures of three or more gases, e.g. air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/022—Liquids
    • G01N2291/0224—Mixtures of three or more liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN201880020078.6A 2017-03-31 2018-03-16 物质检测元件 Pending CN110462371A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111091330.2A CN113758972B (zh) 2017-03-31 2018-03-16 物质检测元件

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-070353 2017-03-31
JP2017070353A JP6863009B2 (ja) 2017-03-31 2017-03-31 物質検出素子
PCT/JP2018/010449 WO2018180589A1 (ja) 2017-03-31 2018-03-16 物質検出素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202111091330.2A Division CN113758972B (zh) 2017-03-31 2018-03-16 物质检测元件

Publications (1)

Publication Number Publication Date
CN110462371A true CN110462371A (zh) 2019-11-15

Family

ID=63675873

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201880020078.6A Pending CN110462371A (zh) 2017-03-31 2018-03-16 物质检测元件
CN202111091330.2A Active CN113758972B (zh) 2017-03-31 2018-03-16 物质检测元件

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202111091330.2A Active CN113758972B (zh) 2017-03-31 2018-03-16 物质检测元件

Country Status (7)

Country Link
US (1) US11448619B2 (enExample)
EP (1) EP3605057B1 (enExample)
JP (1) JP6863009B2 (enExample)
KR (2) KR102326647B1 (enExample)
CN (2) CN110462371A (enExample)
TW (1) TWI671538B (enExample)
WO (1) WO2018180589A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113758972A (zh) * 2017-03-31 2021-12-07 第一精工株式会社 物质检测元件
CN115335679A (zh) * 2020-04-02 2022-11-11 爱沛股份有限公司 物质检测系统

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019059326A1 (ja) * 2017-09-20 2019-03-28 旭化成株式会社 表面応力センサ、中空構造素子及びそれらの製造方法
JP6864966B2 (ja) * 2018-03-29 2021-04-28 三井化学株式会社 センサ、及び、センサ製造方法
JP6867630B2 (ja) * 2018-03-29 2021-04-28 国立大学法人東北大学 センサ、検出方法、及び、センサ製造方法
CN113302469B (zh) * 2019-01-15 2024-07-30 爱沛股份有限公司 检测系统
KR102822739B1 (ko) 2019-11-26 2025-06-23 삼성디스플레이 주식회사 전자 장치
JP6981560B2 (ja) * 2020-04-02 2021-12-15 Ｉ−Ｐｅｘ株式会社 物質検出システム
JP7632243B2 (ja) * 2021-11-19 2025-02-19 Ｉ－Ｐｅｘ株式会社 物質検出システム
KR102822962B1 (ko) 2024-10-15 2025-06-19 주식회사 나비자원순환 악취 검출시스템

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JP2006220546A (ja) * 2005-02-10 2006-08-24 Seiko Instruments Inc ケミカルセンサ
JP2007240252A (ja) * 2006-03-07 2007-09-20 National Institute Of Advanced Industrial & Technology 検出センサ、振動子
JP2009204584A (ja) * 2008-02-29 2009-09-10 Hitachi Metals Ltd 化学センサデバイス、及びそれを備えた物質計測装置
US20100000292A1 (en) * 2008-07-02 2010-01-07 Stichting Imec Nederland Sensing device
JP2010032389A (ja) * 2008-07-29 2010-02-12 Dainippon Printing Co Ltd 物理量センサ及びその製造方法
CN101802586A (zh) * 2007-09-13 2010-08-11 富士胶片株式会社 悬臂型探测器以及使用该探测器的物质探测系统和物质探测方法
CN102269615A (zh) * 2011-05-07 2011-12-07 大连理工大学 一种基于槽型悬臂梁结构的微质量传感器
US20140305191A1 (en) * 2011-11-04 2014-10-16 Danmarks Tekniske Universitet Resonant fiber based aerosol particle sensor and method
CN204944974U (zh) * 2015-09-30 2016-01-06 江苏苏净集团有限公司 一种空气颗粒的检测装置

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JP2006069112A (ja) 2004-09-03 2006-03-16 Fuji Xerox Co Ltd インクジェット記録ヘッド及びインクジェット記録装置
JP5019120B2 (ja) * 2007-03-16 2012-09-05 独立行政法人産業技術総合研究所 検出センサ
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US5719324A (en) * 1995-06-16 1998-02-17 Lockheed Martin Energy Systems, Inc. Microcantilever sensor
JP2006220546A (ja) * 2005-02-10 2006-08-24 Seiko Instruments Inc ケミカルセンサ
JP2007240252A (ja) * 2006-03-07 2007-09-20 National Institute Of Advanced Industrial & Technology 検出センサ、振動子
CN101802586A (zh) * 2007-09-13 2010-08-11 富士胶片株式会社 悬臂型探测器以及使用该探测器的物质探测系统和物质探测方法
JP2009204584A (ja) * 2008-02-29 2009-09-10 Hitachi Metals Ltd 化学センサデバイス、及びそれを備えた物質計測装置
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JP2010032389A (ja) * 2008-07-29 2010-02-12 Dainippon Printing Co Ltd 物理量センサ及びその製造方法
CN102269615A (zh) * 2011-05-07 2011-12-07 大连理工大学 一种基于槽型悬臂梁结构的微质量传感器
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CN204944974U (zh) * 2015-09-30 2016-01-06 江苏苏净集团有限公司 一种空气颗粒的检测装置

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113758972A (zh) * 2017-03-31 2021-12-07 第一精工株式会社 物质检测元件
CN113758972B (zh) * 2017-03-31 2025-06-13 第一精工株式会社 物质检测元件
CN115335679A (zh) * 2020-04-02 2022-11-11 爱沛股份有限公司 物质检测系统

Also Published As

Publication number Publication date
TW201842343A (zh) 2018-12-01
JP6863009B2 (ja) 2021-04-21
KR102326647B1 (ko) 2021-11-15
CN113758972B (zh) 2025-06-13
EP3605057A4 (en) 2020-04-01
EP3605057B1 (en) 2024-10-02
US20210278377A1 (en) 2021-09-09
TWI671538B (zh) 2019-09-11
US11448619B2 (en) 2022-09-20
EP3605057A1 (en) 2020-02-05
JP2018173313A (ja) 2018-11-08
KR20210064435A (ko) 2021-06-02
KR20190134712A (ko) 2019-12-04
CN113758972A (zh) 2021-12-07
KR102303896B1 (ko) 2021-09-17
WO2018180589A1 (ja) 2018-10-04

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Application publication date: 20191115