JP2018173313A - 物質検出素子 - Google Patents
物質検出素子 Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 152
- 239000000126 substance Substances 0.000 title claims abstract description 146
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000001179 sorption measurement Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 15
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000000470 constituent Substances 0.000 abstract description 29
- 239000010408 film Substances 0.000 description 28
- 239000007789 gas Substances 0.000 description 24
- 230000008602 contraction Effects 0.000 description 6
- 235000019645 odor Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- OMOVVBIIQSXZSZ-UHFFFAOYSA-N [6-(4-acetyloxy-5,9a-dimethyl-2,7-dioxo-4,5a,6,9-tetrahydro-3h-pyrano[3,4-b]oxepin-5-yl)-5-formyloxy-3-(furan-3-yl)-3a-methyl-7-methylidene-1a,2,3,4,5,6-hexahydroindeno[1,7a-b]oxiren-4-yl] 2-hydroxy-3-methylpentanoate Chemical compound CC12C(OC(=O)C(O)C(C)CC)C(OC=O)C(C3(C)C(CC(=O)OC4(C)COC(=O)CC43)OC(C)=O)C(=C)C32OC3CC1C=1C=COC=1 OMOVVBIIQSXZSZ-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000033310 detection of chemical stimulus Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G01N29/02—Analysing fluids
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- G01N29/22—Details, e.g. general constructional or apparatus details
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- H10N30/00—Piezoelectric or electrostrictive devices
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Abstract
Description
貫通孔が設けられた支持基板と、
前記貫通孔の縁から対向する縁へ向かって延びて前記貫通孔の一部を塞ぎ、検出対象の物質が付着する物質吸着膜を支持し、前記物質が前記物質吸着膜に付着することで振動周波数が変化する、圧電素子を有する板状の梁と、
前記圧電素子に電圧を印加して前記梁を振動変形させる駆動電極と、
前記梁の振動周波数に関する情報を検出する検出電極と、
を備える。
こととしてもよい。
前記貫通孔の縁に固定された少なくとも一方端に前記駆動電極が設けられた板状の第1の梁と、前記貫通孔の縁に固定された少なくとも一方端に前記検出電極が設けられ、前記第1の梁と交差する板状の第2の梁とで構成される、
こととしてもよい。
前記第2の梁には、貫通孔の縁に固定された両端に前記検出電極が設けられ、
前記第1の梁と前記第2の梁とは、それぞれの中央で連結されている、
こととしてもよい。
こととしてもよい。
こととしてもよい。
こととしてもよい。
こととしてもよい。
こととしてもよい。
前記貫通孔毎に前記梁が設けられ、
前記梁各々が支持する物質吸着膜の種類が異なっている、
こととしてもよい。
Claims (10)
- 貫通孔が設けられた支持基板と、
前記貫通孔の縁から対向する縁へ向かって延びて前記貫通孔の一部を塞ぎ、検出対象の物質が付着する物質吸着膜を支持し、前記物質が前記物質吸着膜に付着することで振動周波数が変化する、圧電素子を有する板状の梁と、
前記圧電素子に電圧を印加して前記梁を振動変形させる駆動電極と、
前記梁の振動周波数に関する情報を検出する検出電極と、
を備える物質検出素子。 - 前記梁は、少なくとも2箇所で前記貫通孔の縁に固定される、
請求項1に記載の物質検出素子。 - 前記梁は、
前記貫通孔の縁に固定された少なくとも一方端に前記駆動電極が設けられた板状の第1の梁と、前記貫通孔の縁に固定された少なくとも一方端に前記検出電極が設けられ、前記第1の梁と交差する板状の第2の梁とで構成される、
請求項2に記載の物質検出素子。 - 前記第1の梁には、貫通孔の縁に固定された両端に前記駆動電極が設けられ、
前記第2の梁には、貫通孔の縁に固定された両端に前記検出電極が設けられ、
前記第1の梁と前記第2の梁とは、それぞれの中央で連結されている、
請求項3に記載の物質検出素子。 - 前記第1の梁と前記第2の梁との連結部分の幅は、前記第1の梁と前記第2の梁とにおける前記連結部分を除く他の部分の幅よりも広く設定されている、
請求項4に記載の物質検出素子。 - 前記第1の梁の幅が、前記第2の梁の幅よりも広くなるように設定されている、
請求項5に記載の物質検出素子。 - 前記第1の梁と前記第2の梁とが直交している、
請求項5又は6に記載の物質検出素子。 - 前記第2の梁の両端に形成された前記検出電極同士を繋ぐ導線が前記第2の梁上に形成され、前記検出電極の一方と導通する導線が前記第2の梁の外部に引き出されている、
請求項5から7のいずれか一項に記載の物質検出素子。 - 前記第1の梁の両端に形成された前記駆動電極各々と導通する導線が前記第1の梁の外部に引き出され、1本にまとめられている、
請求項5から8のいずれか一項に記載の物質検出素子。 - 前記支持基板に前記貫通孔が複数設けられ、
前記貫通孔毎に前記梁が設けられ、
前記梁各々が支持する物質吸着膜の種類が異なっている、
請求項1から9のいずれか一項に記載の物質検出素子。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
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JP2017070353A JP6863009B2 (ja) | 2017-03-31 | 2017-03-31 | 物質検出素子 |
CN202111091330.2A CN113758972A (zh) | 2017-03-31 | 2018-03-16 | 物质检测元件 |
KR1020217016107A KR102326647B1 (ko) | 2017-03-31 | 2018-03-16 | 물질 검출 소자 |
EP18776794.2A EP3605057A4 (en) | 2017-03-31 | 2018-03-16 | SUBSTANCE DETECTION ELEMENT |
PCT/JP2018/010449 WO2018180589A1 (ja) | 2017-03-31 | 2018-03-16 | 物質検出素子 |
US16/483,344 US11448619B2 (en) | 2017-03-31 | 2018-03-16 | Substance detecting element |
KR1020197032109A KR102303896B1 (ko) | 2017-03-31 | 2018-03-16 | 물질 검출 소자 |
CN201880020078.6A CN110462371A (zh) | 2017-03-31 | 2018-03-16 | 物质检测元件 |
TW107110074A TWI671538B (zh) | 2017-03-31 | 2018-03-23 | 物質檢測元件 |
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JP2018173313A5 JP2018173313A5 (ja) | 2019-04-04 |
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US (1) | US11448619B2 (ja) |
EP (1) | EP3605057A4 (ja) |
JP (1) | JP6863009B2 (ja) |
KR (2) | KR102303896B1 (ja) |
CN (2) | CN110462371A (ja) |
TW (1) | TWI671538B (ja) |
WO (1) | WO2018180589A1 (ja) |
Cited By (4)
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WO2020149075A1 (ja) | 2019-01-15 | 2020-07-23 | 第一精工株式会社 | 検出システム |
WO2021200066A1 (ja) * | 2020-04-02 | 2021-10-07 | I-Pex株式会社 | 物質検出システム |
JP2021165730A (ja) * | 2020-04-02 | 2021-10-14 | I−Pex株式会社 | 物質検出システム |
WO2023090140A1 (ja) * | 2021-11-19 | 2023-05-25 | I-Pex株式会社 | 物質検出システム |
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JP6863009B2 (ja) * | 2017-03-31 | 2021-04-21 | I−Pex株式会社 | 物質検出素子 |
WO2019059326A1 (ja) * | 2017-09-20 | 2019-03-28 | 旭化成株式会社 | 表面応力センサ、中空構造素子及びそれらの製造方法 |
JP6867630B2 (ja) * | 2018-03-29 | 2021-04-28 | 国立大学法人東北大学 | センサ、検出方法、及び、センサ製造方法 |
JP6864966B2 (ja) * | 2018-03-29 | 2021-04-28 | 三井化学株式会社 | センサ、及び、センサ製造方法 |
KR20210065244A (ko) * | 2019-11-26 | 2021-06-04 | 삼성디스플레이 주식회사 | 전자 장치 |
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WO2021200066A1 (ja) * | 2020-04-02 | 2021-10-07 | I-Pex株式会社 | 物質検出システム |
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KR20210064435A (ko) | 2021-06-02 |
TW201842343A (zh) | 2018-12-01 |
CN113758972A (zh) | 2021-12-07 |
WO2018180589A1 (ja) | 2018-10-04 |
TWI671538B (zh) | 2019-09-11 |
JP6863009B2 (ja) | 2021-04-21 |
US11448619B2 (en) | 2022-09-20 |
KR102303896B1 (ko) | 2021-09-17 |
EP3605057A1 (en) | 2020-02-05 |
KR102326647B1 (ko) | 2021-11-15 |
CN110462371A (zh) | 2019-11-15 |
KR20190134712A (ko) | 2019-12-04 |
US20210278377A1 (en) | 2021-09-09 |
EP3605057A4 (en) | 2020-04-01 |
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