CN110417371A - 基于声子晶体的薄膜体声波谐振器 - Google Patents
基于声子晶体的薄膜体声波谐振器 Download PDFInfo
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- CN110417371A CN110417371A CN201910557023.5A CN201910557023A CN110417371A CN 110417371 A CN110417371 A CN 110417371A CN 201910557023 A CN201910557023 A CN 201910557023A CN 110417371 A CN110417371 A CN 110417371A
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/0211—Means for compensation or elimination of undesirable effects of reflections
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/023—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the membrane type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
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CN201910557023.5A CN110417371B (zh) | 2019-06-25 | 2019-06-25 | 基于声子晶体的薄膜体声波谐振器 |
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CN201910557023.5A CN110417371B (zh) | 2019-06-25 | 2019-06-25 | 基于声子晶体的薄膜体声波谐振器 |
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CN110417371A true CN110417371A (zh) | 2019-11-05 |
CN110417371B CN110417371B (zh) | 2022-06-14 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111464147A (zh) * | 2020-04-14 | 2020-07-28 | 诺思(天津)微系统有限责任公司 | 滤波器及其提升功率容量的方法、多工器及通信设备 |
CN111877058A (zh) * | 2020-08-12 | 2020-11-03 | 中南大学 | 一种基于三维声子晶体的浮置板轨道隔振器装置 |
CN111988006A (zh) * | 2020-08-18 | 2020-11-24 | 武汉衍熙微器件有限公司 | 薄膜体声波谐振器及其制作方法 |
CN112073024A (zh) * | 2020-09-14 | 2020-12-11 | 电子科技大学 | 一种差分输入输出式mems谐振器及其加工方法 |
CN112367058A (zh) * | 2020-10-27 | 2021-02-12 | 武汉大学 | 一种用声子晶体结构封装的薄膜体声波谐振器 |
CN112532206A (zh) * | 2020-12-16 | 2021-03-19 | 武汉大学 | 一种双工器 |
CN113411065A (zh) * | 2021-06-18 | 2021-09-17 | 深圳市封神微电子有限公司 | 一种具有布拉格反射栅结构的体声波谐振器 |
WO2024061051A1 (zh) * | 2022-09-20 | 2024-03-28 | 武汉大学 | 带有声子晶体的横向激励体声波谐振器及制备方法 |
Citations (7)
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CN101997512A (zh) * | 2010-10-28 | 2011-03-30 | 哈尔滨工业大学 | 固贴式薄膜体声波谐振器及其全绝缘布拉格反射栅制备方法 |
WO2012049174A1 (fr) * | 2010-10-15 | 2012-04-19 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Filtre passe bande à ondes acoustiques comprenant un guidage acoustique intégré avec conversion d'impédance et/ou de mode |
US20150237423A1 (en) * | 2013-03-21 | 2015-08-20 | Bichoy BAHR | Acoustic bandgap structures for integration of mems resonators |
CN105703733A (zh) * | 2016-01-18 | 2016-06-22 | 佛山市艾佛光通科技有限公司 | 一种固态装配型薄膜体声波谐振器的制备方法 |
CN107091686A (zh) * | 2017-05-09 | 2017-08-25 | 国网江西省电力公司电力科学研究院 | 一种采用多层耦合声子晶体的声波谐振器 |
US20190036512A1 (en) * | 2017-07-26 | 2019-01-31 | Texas Instruments Incorporated | Bulk acoustic wave resonators having a phononic crystal acoustic mirror |
CN109921759A (zh) * | 2017-12-12 | 2019-06-21 | Ii-Vi有限公司 | 声谐振器 |
-
2019
- 2019-06-25 CN CN201910557023.5A patent/CN110417371B/zh active Active
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WO2012049174A1 (fr) * | 2010-10-15 | 2012-04-19 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Filtre passe bande à ondes acoustiques comprenant un guidage acoustique intégré avec conversion d'impédance et/ou de mode |
CN101997512A (zh) * | 2010-10-28 | 2011-03-30 | 哈尔滨工业大学 | 固贴式薄膜体声波谐振器及其全绝缘布拉格反射栅制备方法 |
US20150237423A1 (en) * | 2013-03-21 | 2015-08-20 | Bichoy BAHR | Acoustic bandgap structures for integration of mems resonators |
CN105703733A (zh) * | 2016-01-18 | 2016-06-22 | 佛山市艾佛光通科技有限公司 | 一种固态装配型薄膜体声波谐振器的制备方法 |
CN107091686A (zh) * | 2017-05-09 | 2017-08-25 | 国网江西省电力公司电力科学研究院 | 一种采用多层耦合声子晶体的声波谐振器 |
US20190036512A1 (en) * | 2017-07-26 | 2019-01-31 | Texas Instruments Incorporated | Bulk acoustic wave resonators having a phononic crystal acoustic mirror |
CN109921759A (zh) * | 2017-12-12 | 2019-06-21 | Ii-Vi有限公司 | 声谐振器 |
Non-Patent Citations (4)
Title |
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ALEKSANDR OSEEV等: ""Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions"", 《MICROSYST TECHNOL》 * |
TSUNG-TSONG WU等: ""Surface and bulk acoustic waves in two-dimensional phononic crystal consisting of materials with general anisotropy"", 《PHYSICAL REVIEW B》 * |
WEIMIN KUANG等: ""The effects of shapes and symmetries of scatterers on the phononic band gap in 2D phononic crystals"", 《PHYSICS LETTERS A》 * |
王振: ""弹性波声子晶体的物理效应研究"", 《中国优秀博硕士学位论文全文数据库(博士) 工程科技Ⅰ辑》 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111464147A (zh) * | 2020-04-14 | 2020-07-28 | 诺思(天津)微系统有限责任公司 | 滤波器及其提升功率容量的方法、多工器及通信设备 |
CN111877058A (zh) * | 2020-08-12 | 2020-11-03 | 中南大学 | 一种基于三维声子晶体的浮置板轨道隔振器装置 |
CN111988006A (zh) * | 2020-08-18 | 2020-11-24 | 武汉衍熙微器件有限公司 | 薄膜体声波谐振器及其制作方法 |
CN112073024A (zh) * | 2020-09-14 | 2020-12-11 | 电子科技大学 | 一种差分输入输出式mems谐振器及其加工方法 |
CN112073024B (zh) * | 2020-09-14 | 2023-10-20 | 电子科技大学 | 一种差分输入输出式mems谐振器及其加工方法 |
CN112367058A (zh) * | 2020-10-27 | 2021-02-12 | 武汉大学 | 一种用声子晶体结构封装的薄膜体声波谐振器 |
CN112532206A (zh) * | 2020-12-16 | 2021-03-19 | 武汉大学 | 一种双工器 |
CN113411065A (zh) * | 2021-06-18 | 2021-09-17 | 深圳市封神微电子有限公司 | 一种具有布拉格反射栅结构的体声波谐振器 |
WO2024061051A1 (zh) * | 2022-09-20 | 2024-03-28 | 武汉大学 | 带有声子晶体的横向激励体声波谐振器及制备方法 |
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