CN110346137A - Automatic continuous dynamic loading method for the test of air-floating ball bearing bearer properties - Google Patents
Automatic continuous dynamic loading method for the test of air-floating ball bearing bearer properties Download PDFInfo
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- CN110346137A CN110346137A CN201910535867.XA CN201910535867A CN110346137A CN 110346137 A CN110346137 A CN 110346137A CN 201910535867 A CN201910535867 A CN 201910535867A CN 110346137 A CN110346137 A CN 110346137A
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Abstract
The invention discloses the automatic continuous dynamic loading methods tested for air-floating ball bearing bearer properties.Existing air-floating ball bearing performance detection bearing capacity can not be loaded continuously.The present invention is able to use computer via controller control loading device and applies continuously adjustable dynamically load power according to experiment demand, arbitrary Dynamic Signal can be set during the experiment, such as sinusoidal signal, square-wave signal, ramp signal, different bearing capacities is generated according to different input signals, realizes the air-floating ball bearing performance parameter measurement under the effect of different bearer power；Also, when inputting constant value signal, loading mechanism exports constant continuous loading force, can measure the bearing dynamic characteristic under constant loading effect；On-line checking can be achieved to the real-time record analysis of measurement data by computer.Bearer properties under analog air-floating ball bearing different working condition of the present invention.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields, and in particular to a kind of air-floating ball bearing bearer properties test connects automatically
Continuous dynamic loading method.
Background technique
Air-floating ball bearing has many advantages, such as high kinematic accuracy, low friction resistance and adaptable, and it is flat to be widely used in air bearing
The precision equipments such as platform, accurate main shaft and gyroscope are the ideal supporting parts of ultra precise measurement instrument.
To meet requirement of the application field to air-floating ball bearing, influence situation of each parameter to bearing performance need to be analyzed, into
And complete Parameters Optimal Design.Air-floating ball bearing performance detection mainly measures air-floating ball bearing in different supply gas pressures and difference
The static performance index such as pressure distribution situation in bearing capacity and air film gap under air-film thickness.Wherein, the air film pressure of bearing
Power distribution and air-film thickness are directly affected by the bearer properties of bearing again, therefore, the bearing under measurement different bearer power effect
Performance parameter carries out experimental analysis, has certain realistic meaning to the Parameters Optimal Design of bearing.
For in the experiment of air-floating ball bearing performance detection, bearing capacity loading method mainly uses weight type, air-cylinder type, spring
Formula etc..Weight type: apply pressure to measured bearing using using counterweight, cannot achieve continuous load, flexibility is not high；Spring
Apply pressure to measured bearing using telescopic spring power, the elastic element in spring influences the vibration characteristics of measured bearing likes:；Gas
Cylinder formula: apply pressure to measured bearing using the power output of cylinder and added due to cylinder air supply pressure fluctuation and gas leakage contribution
It is unstable to carry power, and the compressibility of cylinder interior gas will affect the vibration characteristics of measured bearing.These loading methods exist
It can not continuously load, influence the defects of bearing dynamic characteristic.Currently, the scholars such as Wang Wen, Tang Chaofeng of Electronic University Of Science & Technology Of Hangzhou
A kind of air-floating ball bearing device for detecting performance and method are devised, the loading method of air-cylinder type is used in device, device is in reality
Just have the defects that continuously to load during testing, therefore, it is impossible to the continuous load for bearing air-floating ball bearing in practical application
Lotus carries out Research on Dynamic Characteristic, and application range is relatively narrow.
Summary of the invention
The purpose of the present invention is being directed to the deficiency of air-floating ball bearing performance detection bearing capacity loading method, a kind of air bearing is proposed
The automatic continuous dynamic loading method of ball bearing bearer properties test is able to use computer by controller and controls loading device
Apply continuously adjustable dynamically load power according to experiment demand, arbitrary Dynamic Signal can be set during the experiment, such as just
String signal, square-wave signal, ramp signal etc. generate different bearing capacities according to different input signals, realize different bearer power
Air-floating ball bearing performance parameter measurement under effect.Also, when inputting constant value signal, loading mechanism exports constant continuous load
Power can measure the bearing dynamic characteristic under constant loading effect；It can be real to the real-time record analysis of measurement data by computer
Existing on-line checking；Bearer properties under above-mentioned loading method analog air-floating ball bearing different working condition.
The technical solution adopted by the present invention to solve the technical problems is:
The present invention is used for the automatic continuous dynamic loading method of air-floating ball bearing bearer properties test, specific as follows:
It is mutually perpendicular to and two radially distributed airflow holes Step 1: being opened up on the bulb of air-floating ball bearing, two
Airflow hole communicates, and one of air-flow outer end of hole port is embedded in flow controller.By the bearing ball-and-socket bottom of air-floating ball bearing and Dali
Stone platform is fixed, and is overlapped the central axis of bearing ball-and-socket vertical direction with the central axis of broadwise rotating disk；Bulb is put
It sets on bearing ball-and-socket, and the airflow hole for being embedded in flow controller is arranged towards bearing ball-and-socket；Bulb spherical surface position where flow controller
Point is test point.Open type air bearing ball-and-socket is arranged above bulb, and the gas outlet at the top of open type air bearing ball-and-socket is higher than at the top of bulb；
Be passed through pressed gas in bearing ball-and-socket and open type air bearing ball-and-socket, between bearing ball-and-socket and bulb and open type air bearing ball-and-socket and
Air film gap is formed between bulb supports bulb.When being in each location point using gas pressure sensor acquisition bulb test point
The air pressure of airflow hole；Displacement sensor is fixed above bulb, displacement sensing when detection test points are in each location point
Gap h between at the top of the gauge head and bulb of device, when bearing ball-and-socket and open type air bearing ball-and-socket are not passed through pressed gas, displacement sensing
Gap between at the top of the gauge head and bulb of device is set as h0, then air film gap value is h-h0.
Step 2: one of following three kinds of schemes is selected to carry out bearing capacity load to air-floating ball bearing:
1. dead load moves measuring point
The computer via controller load signal specified to AC servo motor input, AC Servo Motor Control ball wire
Thick stick rotation, sleeve and ball-screw constitute screw pair drive transmission rod along ball-screw axially move to designated position after stop；
In AC servo motor rotation process, Rotating speed measring is carried out by the rotary encoder that AC servo motor carries, and passed by torque
Sensor carries out torque detection, and the signal that rotary encoder and torque sensor detect is transmitted to computer through data collecting card；By
The bearing capacity of transmission rod output, is transmitted on bulb by pressure sensor, force transmitting board and open type air bearing ball-and-socket；Pressure sensor
The bearing capacity size of AC servo motor output is measured, and is transmitted to computer through data collecting card.Then, computer is according to input
Longitude and latitude two-dimensional coordinate data, the test point position of via controller positioned in sequence bulb；The test point of bulb navigates to
The process of source location is as follows: firstly, computer compares the longitude of source location and test point longitude, if phase
Deng then straight line decelerating motor does not start, and otherwise via controller control straight line decelerating motor drives driving gear to rotate, broadwise rotation
The internal tooth of turntable and the external tooth engagement rotation of driving gear, to drive through being rotated directly to rotating mechanism is synchronous with bulb along broadwise
It is equal to source location longitude to test point longitude；Then, computer is by the latitude value of source location and test point latitude
Angle value comparison, if equal, through motionless to rotating mechanism, otherwise via controller control to rotating mechanism through driving through to whirler
Structure through synchronous with bulb along through to being rotated up test point latitude value equal to source location latitude value, this process to rotating disk
In, straight line decelerating motor is constantly in halted state.
2. dynamic loading determines measuring point
Computer controls straight line decelerating motor according to the source location longitude of input, via controller to drive driving tooth
Wheel rotation, the internal tooth of broadwise rotating disk and the external tooth engagement rotation of driving gear, to drive through same to rotating mechanism and bulb
Step is rotated up test point longitude equal to source location longitude along broadwise；Then, computer is according to the target position of input
Set a latitude value, via controller control through to rotating mechanism drive through to rotating mechanism through synchronous with bulb along warp to rotating disk
To being rotated up test point latitude value equal to source location latitude value, during this, straight line decelerating motor is constantly in stopping
State.Finally, computer input waveform signal, to controller, controller controls AC servo motor and controls rolling according to waveform signal
Ballscrew rotation, sleeve constitute screw pair with ball-screw and transmission rod are driven axially to move along ball-screw；AC servo motor
In rotation process, Rotating speed measring is carried out by the rotary encoder that AC servo motor carries, and torque is carried out by torque sensor
The signal of detection, rotary encoder and torque sensor detection is transmitted to computer through data collecting card；By transmission rod output
Bearing capacity is transmitted on bulb by pressure sensor, force transmitting board and open type air bearing ball-and-socket；Pressure sensor measures AC servo
The bearing capacity size of motor output, and computer is transmitted to through data collecting card.
3. dynamic loading moves measuring point
To controller, controller controls AC servo motor and controls ball according to waveform signal computer input waveform signal
Lead screw rotation, sleeve constitute screw pair with ball-screw and transmission rod are driven axially to move along ball-screw；AC servo motor turns
During dynamic, Rotating speed measring is carried out by the rotary encoder that AC servo motor carries, and torque inspection is carried out by torque sensor
It surveys, the signal of rotary encoder and torque sensor detection is transmitted to computer through data collecting card；By holding for transmission rod output
Power is carried, is transmitted on bulb by pressure sensor, force transmitting board and open type air bearing ball-and-socket；Pressure sensor measures AC servo electricity
The bearing capacity size of machine output, and computer is transmitted to through data collecting card.Then, computer is according to the longitude and latitude two of input
Tie up coordinate data, the test point position of via controller positioned in sequence bulb；The test point of bulb navigates to the mistake of source location
Journey is as follows: firstly, computer compares the longitude of source location and test point longitude, if equal, straight line slows down electric
Machine does not start, and otherwise via controller control straight line decelerating motor drives driving gear to rotate, the internal tooth of broadwise rotating disk and master
The external tooth engagement rotation of moving gear, to drive through being rotated up test point longitude along broadwise to rotating mechanism is synchronous with bulb
Equal to source location longitude；Then, computer compares the latitude value of source location and test point latitude value, if phase
Deng, then through motionless to rotating mechanism, otherwise via controller control through to rotating mechanism drive through to rotating mechanism through Xiang Xuanzhuan
Disk is synchronous with bulb along through to being rotated up test point latitude value equal to source location latitude value, and during this, straight line slows down
Motor is constantly in halted state.
Step 3: the air-floating ball bearing performance parameter under measurement bearing capacity load:
Computer establishes under setting bearing capacity bulb test point not according to the collected atmospheric pressure value of gas pressure sensor
With position and gas film pressure relationship, and the gap that the bearing capacity and displacement sensor measured according to pressure sensor measures, it establishes
Bulb test point and is established bulb test point and is being set in the relationship of setting position bearing capacity and the gentle intermembrane space of gas film pressure
The relationship of place's gas film pressure and air film gap is set in positioning；Then, computer shows that gas film pressure is tested about bulb on the screen
The scatter chart of point position, the graph of relation and gas film pressure and gas of the gentle intermembrane space of gas film pressure and bearer properties
The graph of relation of intermembrane space.
Step 4: measurement terminates, computer via controller controls AC servo motor, straight line decelerating motor and minisize dc
Reset motor.
H0 value in 5~60 microns.
If the case where extreme position that sleeve reaches limit switch occur, computer receives limit switch through data collecting card
Output signal, and via controller control relay cutting AC servo motor power supply, spring, which works as a buffer, to be prevented from loading
Rigid collision in the process.
The waveform signal is sinusoidal signal, square-wave signal or ramp signal.
The gas pressure sensor acquisition bulb test point is in the atmospheric pressure value of different location, cut-off line decelerating motor
The atmospheric pressure value of 3~5s after halt instruction is received with miniature DC motor；When pressure sensor acquires bearing capacity, AC servo is taken
Motor receive start or stop instruction after 3~5s pressure value.
The invention has the advantages that:
(1) loading force is exported using AC servo motor, rotary encoder and torque sensor are fed back, ball-screw
It will move along a straight line as conversion of motion mechanism mating sleeve, linear guide and vertical loading force pass to transmission rod, in conjunction with open type
Air bearing ball-and-socket, bulb can keep motion state, the working condition of bearing when convenient for judging detection performance.Meanwhile energy of the present invention
Enough guarantee the load of loading force continuous-stable, realizes various forms of controllable loading methods, simulate a variety of bearing working states, and not
The dynamic characteristic of air-floating ball bearing can be changed, it is special dynamic can be carried out to the continuous load that air-floating ball bearing in practical application is born
Journal of Sex Research, application range are wider.
(2) motor driven broadwise rotating mechanism can cooperate different load sides by computer controlled measurement speed, orientation
Formula realizes on-line checking, it can be achieved that bearer properties relationship under different bearer power state between air-floating ball bearing performance parameter.
(3) computer can establish bulb test point under setting bearing capacity according to the collected atmospheric pressure value of gas pressure sensor
Different location and gas film pressure relationship, and the gap that the bearing capacity and displacement sensor measured according to pressure sensor measures,
Bulb test point is established in the relationship of setting position bearing capacity and the gentle intermembrane space of gas film pressure, and establishes bulb test point
In the relationship of setting position gas film pressure and air film gap.
(4) it when air film gap displacement measures, using the displacement variable of the direct measure-ball of displacement sensor gauge head, avoids
Measured deviation caused by measurement plane indirectly.
(5) when broadwise rotating mechanism works independently, only to its adjustment effect of the position of bulb, without bearing bearing capacity
It influences.
Detailed description of the invention
Fig. 1 is the structural perspective of loading mechanism in the present invention；
Fig. 2 is the two-dimensional representation of loading mechanism in the present invention；
Fig. 3 is the structural perspective of broadwise rotating mechanism in the present invention；
Fig. 4 is the overall structure diagram of the automatic continuous dynamic loading device of the present invention；
Fig. 5 is flow chart of the invention；
Fig. 6 is the flow chart that the present invention moves that measuring point mode carries out bearing capacity load using dead load；
Fig. 7 is that the present invention uses dynamic loading to determine the flow chart that measuring point mode carries out bearing capacity load；
Fig. 8 is the flow chart that the present invention moves that measuring point mode carries out bearing capacity load using dynamic loading；
In figure: 1- lid, 2- pedestal, 3- sensor support base, 4- slide unit, 5- spring, 6- transmission rod, 7- shaft stool, 8- set
Cylinder, 9- yielding coupling, 10- torque sensor, 11- motor support base, 12- AC servo motor, 13- ball-screw seat, 14- rolling
Ballscrew, 15- linear guide, 16- limit switch, 17- bulb, 18- pilot bar, 19- gas pressure sensor, 20- displacement pass
Sensor, 21- force transmitting board, 22- pressure sensor, 23- linear bearing, 24- top plate, 25- open type air bearing ball-and-socket, 26- is through Xiang Xuanzhuan
Disk, 27- miniature DC motor, 28- support slipper, 29- rotary shaft, 30- turret supports frame, 31- bearing ball-and-socket, 32- marble
Platform, 33- driving gear, 34- DC speed-reducing, 35- thrust ball bearing, 36- broadwise rotating disk, 37- limit sleeve.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings.
As shown in Fig. 1,2 and 4, the present invention is used for the automatic continuous dynamically load side of air-floating ball bearing bearer properties test
Method, the automatic continuous dynamic loading device of use, including loading mechanism, linear bearing 23, top plate 24, force transmitting board 21, open type gas
Floating ball nest 25, through to rotating mechanism and broadwise rotating mechanism；Loading mechanism includes pedestal 2, AC servo motor (built-in connection meter
The rotary encoder of calculation machine) 12, yielding coupling 9, torque sensor 10, ball-screw 14, linear guide 15, limit switch
16, sleeve 8, shaft stool 7, spring 5 and transmission rod 6；Pedestal 2 is fixed on top plate 24；Top plate 24 is fixed on Dali by column
On stone platform 32；The pedestal of AC servo motor is fixed on motor support base 11, and motor support base 11 is fixed on pedestal 2；Exchange
The output shaft of servo motor 12 is fixedly connected with ball-screw 14 by yielding coupling 9；Ball-screw 14 and ball-screw seat
13 constitute revolute pair, and ball-screw seat 13 is fixed on slide unit 4；Torque sensor 10 is fixed on sensor support base 3, and is detected
Torque signal is transmitted to computer through data collecting card by the output shaft torque of AC servo motor 12；Sensor support base 3 is fixed on
On pedestal 2；Feed screw nut and ball-screw 14 constitute screw pair；Sleeve 8 is fixed with feed screw nut, and is constituted with linear guide 15
Sliding pair；Linear guide 15 is fixed on slide unit 4, and slide unit 4 is fixed on pedestal 2；Limit switch 16 is arranged in linear guide 15
One end far from AC servo motor 12, and be fixed on slide unit 4；Shaft stool 7 is fixed on 8 end face of sleeve, transmission rod 6 and axis branch
Seat 7 is fixed；Spring 5 is nested on transmission rod 6, and only sleeve 8 reaches limit far from one end end face of AC servo motor 12 and opens
(central axis of limit switch 16 and transmission rod 6 distance is greater than 7 diameter of shaft stool, therefore, transmission rod 6 and axis when closing 16 position
When support 7 reaches 16 position of limit switch, there is no generate signal for limit switch 16), 5 ability of spring has contacted buffering with top plate 24
Effect avoids shaft stool 7 from colliding top plate 24；Lid 1 is fixed on pedestal 2, and only transmission rod 6 and spring 5 stretch out outside lid 1；
Transmission rod 6 is supported on top plate 24 by linear bearing 23, and is connect with force transmitting board 21 by pressure sensor 22；Open type air bearing
Ball-and-socket 25 is fixed on 21 bottom of force transmitting board；AC servo motor 12 applies the bearing capacity of unlike signal eventually by open type air floatation ball
Nest 25 is loaded on bulb 17；Displacement sensor 20 is used to detect the gap between gauge head and air-floating ball bearing bulb top, and passes through
Output signal is transmitted to computer by data collecting card；When output loads overstep the extreme limit, computer receives the defeated of limit switch 16
Signal out, the power supply of control relay cutting alternating current generator, prevents from colliding.
As shown in figure 3, broadwise rotating mechanism includes driving gear 33, straight line decelerating motor 34, thrust ball bearing 35, broadwise
Rotating disk 36 and limit sleeve 37；The central axis of 25 vertical direction of open type air bearing ball-and-socket and the central axis weight of broadwise rotating disk 36
It closes；Broadwise rotating disk 36 is supported on limit sleeve 37 by thrust ball bearing 35；Marble platform 32 is fixed on limit sleeve 37；
Broadwise rotating disk 36 is equipped with index line, and limit sleeve 37 is equipped with dial；The pedestal and limit sleeve 37 of straight line decelerating motor 34
It is fixed；Driving gear 33 is fixed on the output shaft of straight line decelerating motor 34；The external tooth and broadwise rotating disk 36 of driving gear 33
Interior tooth engagement.
As shown in figure 4, through including pilot bar 18, through to rotating disk 26, miniature DC motor 27, turntable branch to rotating mechanism
Support 30 and support slipper 28.Pilot bar 18 and rotary shaft 29 are coaxially disposed, and constitute rotate with a support slipper 28 respectively
It is secondary；Two support slippers 28 constitute the sliding pair of vertical direction with turret supports frame 30；Support slipper 28 can be with bulb 17
Float up and down and slided up and down along turret supports frame 30, thus guarantee bulb 17 always with pilot bar 18 and rotary shaft 29 along through to
Rotation；Turret supports frame 30 is fixed on the top surface of broadwise rotating disk 36；The pedestal of miniature DC motor 27 is fixed on turntable branch
On support 30, output shaft and 29 outer end of rotary shaft of miniature DC motor 27 are fixed；Through being fixed on rotary shaft 29 to rotating disk 26
On；Through being equipped with dial to rotating disk 26, turret supports frame 3 with through to the opposite face of rotating disk 7 equipped with index line；Gas
Pressure sensor 19 is fixed on 15 outer end of pilot bar, is connected to the centre bore of pilot bar 15；The pressure of gas pressure sensor 19
Signal is transmitted to computer through data collecting card；The inner end of rotary shaft 6 and pilot bar 15 is equipped with external screw thread.
The equal via controller of the signal input part of AC servo motor 12, straight line decelerating motor 34 and miniature DC motor 27 connects
Computer.
Air-floating ball bearing includes bearing ball-and-socket 31 and bulb 17, is the test object of bearer properties test of the present invention.
As shown in figure 5, the present invention is used for the automatic continuous dynamic loading method of air-floating ball bearing bearer properties test, specifically
It is as follows:
Step 1: being mutually perpendicular to and radially distributed two as shown in figure 4, being opened up on the bulb 17 of air-floating ball bearing
Airflow hole, two airflow holes communicate, and one of air-flow outer end of hole port is embedded in flow controller.By the bearing ball-and-socket of air-floating ball bearing
31 bottoms and marble platform 32 are fixed, and make the central axis of 31 vertical direction of bearing ball-and-socket and the center of broadwise rotating disk 36
Axis is overlapped, and bearing ball-and-socket 31 is the support member of air-floating ball bearing；Bulb 17 is placed on bearing ball-and-socket 31, and is embedded in section
The airflow hole for flowing device is arranged towards bearing ball-and-socket 31；17 spherical surface position point of bulb where flow controller is test point.Open type gas
Floating ball nest 25 is arranged above bulb 17, and the gas outlet at 25 top of open type air bearing ball-and-socket is higher than at the top of bulb 17；Bearing ball-and-socket 31
It is passed through pressed gas in open type air bearing ball-and-socket 25, between bearing ball-and-socket 31 and bulb 17 and 25 He of open type air bearing ball-and-socket
Air film gap (micron order) is formed between bulb 17 and supports bulb 17, keeps bulb 17 in running order, it can be around the bulb centre of sphere
Do the approximate rotary motion without frictional resistance.When being in each location point using the acquisition of gas pressure sensor 19 bulb test point
The air pressure of airflow hole；Displacement sensor 20 is fixed at 17 top of bulb, and detection test points are displaced when being in each location point
Gap h between at the top of the gauge head and bulb of sensor 20, bearing ball-and-socket 31 and open type air bearing ball-and-socket 25 are not passed through pressed gas
When, at the top of the gauge head and bulb of displacement sensor 20 between gap be set as h0, then air film gap value is h-h0, and h0 is 5~60
Value in micron.
Step 2: one of following three kinds of schemes is selected to carry out bearing capacity load to air-floating ball bearing:
1. dead load moves measuring point
As shown in fig. 6, computer via controller is to the specified load signal of AC servo motor input, (load signal is carried
The lap information that AC servo motor should rotate), AC Servo Motor Control ball-screw 14 rotates, sleeve 8 and ball-screw
14 composition screw pairs drive transmission rods 6 along ball-screw 14 axially move to designated position after stop；AC servo motor rotation
In the process, Rotating speed measring is carried out by the rotary encoder that AC servo motor carries, and torque inspection is carried out by torque sensor 10
It surveys；If the case where extreme position that sleeve 8 reaches limit switch 16 occur, computer receives the output signal of limit switch 16,
Via controller controls the power supply of relay cutting AC servo motor, and spring 5 works as a buffer the rigidity prevented in loading procedure
Collision；The bearing capacity exported by transmission rod 6 is transmitted to ball by pressure sensor 22, force transmitting board 21 and open type air bearing ball-and-socket 25
On head；Pressure sensor 22 measures the bearing capacity size that AC servo motor 12 exports.Then, computer is according to the longitude of input
With latitude two-dimensional coordinate data, the test point position of via controller positioned in sequence bulb 17；The test point of bulb 17 navigates to mesh
The process of cursor position point is as follows: firstly, computer compares the longitude of source location and test point longitude, if equal,
Then straight line decelerating motor 34 does not start, and otherwise via controller controls straight line decelerating motor 34 to drive the rotation of driving gear 33, latitude
To the internal tooth of rotating disk 36 and the external tooth engagement rotation of driving gear 33, to drive through to rotating mechanism edge synchronous with bulb 17
Broadwise is rotated up test point longitude equal to source location longitude；Then, computer is by the latitude value of source location
It is compared with test point latitude value, if equal, through motionless to rotating mechanism, otherwise via controller control to rotating mechanism through driving
Through to rotating mechanism through synchronous with bulb 17 along through to being rotated up test point latitude value equal to target position to rotating disk 26
Point latitude value, during this, straight line decelerating motor 34 is constantly in halted state.
2. dynamic loading determines measuring point
As shown in fig. 7, source location longitude of the computer according to input, via controller control control straight line slows down electric
Machine 34 drives driving gear 33 to rotate, the external tooth engagement rotation of the internal tooth of broadwise rotating disk 36 and driving gear 33, thus band
It moves through being rotated up test point longitude equal to source location longitude along broadwise to rotating mechanism is synchronous with bulb 17；So
Afterwards, computer is according to the source location latitude value of input, and via controller control to rotating mechanism through driving through to rotating mechanism
Through synchronous with bulb 17 along through to being rotated up test point latitude value equal to source location latitude value, this mistake to rotating disk 26
Cheng Zhong, straight line decelerating motor 34 are constantly in halted state.Finally, computer input waveform signal (sinusoidal signal, square wave letter
Number, ramp signal etc.) give controller, controller controls AC servo motor and rotates according to waveform signal control ball-screw 14,
Sleeve 8 and ball-screw 14 constitute screw pair and transmission rod 6 are driven to be axially moved along ball-screw 14；AC servo motor rotated
Cheng Zhong carries out Rotating speed measring by the rotary encoder that AC servo motor carries, and carries out torque detection by torque sensor 10；
The bearing capacity exported by transmission rod 6 is transmitted on bulb by pressure sensor 22, force transmitting board 21 and open type air bearing ball-and-socket 25；
Pressure sensor 22 measures the bearing capacity size that AC servo motor 12 exports.
3. dynamic loading moves measuring point
As shown in figure 8, computer input waveform signal (sinusoidal signal, square-wave signal, ramp signal etc.) is given to controller,
Controller controls AC servo motor and rotates according to waveform signal control ball-screw 14, and sleeve 8 and ball-screw 14 constitute spiral shell
It revolves subband and moves transmission rod 6 along the axial movement of ball-screw 14；In AC servo motor rotation process, carried by AC servo motor
Rotary encoder carry out Rotating speed measring, and by torque sensor 10 carry out torque detection；The bearing capacity exported by transmission rod 6,
It is transmitted on bulb by pressure sensor 22, force transmitting board 21 and open type air bearing ball-and-socket 25；The measurement exchange of pressure sensor 22 is watched
Take the bearing capacity size of the output of motor 12.Then, longitude and latitude two-dimensional coordinate data of the computer according to input, via controller
The test point position of positioned in sequence bulb 17；The process that the test point of bulb 17 navigates to source location is as follows: firstly, calculating
Machine compares the longitude of source location and test point longitude, if equal, straight line decelerating motor 34 does not start, and otherwise passes through
Controller controls straight line decelerating motor 34 to drive the rotation of driving gear 33, internal tooth and the driving gear 33 of broadwise rotating disk 36
External tooth engagement rotation, to drive through being rotated up test point longitude equal to mesh along broadwise to rotating mechanism is synchronous with bulb 17
Cursor position point longitude；Then, computer compares the latitude value of source location and test point latitude value, if equal, passes through
It is motionless to rotating mechanism, otherwise via controller control through to rotating mechanism drive through to rotating mechanism through to rotating disk 26 and ball
First 17 is synchronous along through to being rotated up test point latitude value equal to source location latitude value, during this, straight line decelerating motor
34 are constantly in halted state.
Step 3: the air-floating ball bearing performance parameter under measurement bearing capacity load:
Computer establishes 17 test point of bulb under setting bearing capacity according to the collected atmospheric pressure value of gas pressure sensor 19
Different location and gas film pressure relationship, and between the bearing capacity measured according to pressure sensor 22 and displacement sensor 20 measure
Gap establishes 17 test point of bulb in the relationship of setting position bearing capacity and the gentle intermembrane space of gas film pressure, and establishes bulb
Relationship of 17 test points in setting position gas film pressure and air film gap (17 displacement of bulb)；Then, computer is in screen
Scatter chart of the upper display gas film pressure about 17 test point position of bulb, the gentle intermembrane space of gas film pressure and bearer properties
The graph of relation of graph of relation and gas film pressure and air film gap.Wherein, gas pressure sensor 19 acquires bulb 17
In the atmospheric pressure value of different location, cut-off line decelerating motor 34 and miniature DC motor 27 receive 3 after halt instruction test point
The atmospheric pressure value of~5s guarantees that straight line decelerating motor 34 and miniature DC motor 27 stop completely, to guarantee the atmospheric pressure value of acquisition
Precision；Pressure sensor 22 acquire bearing capacity when, take AC servo motor 12 receive start or stop instruction after 3~5s pressure
Value guarantees 12 steady running of AC servo motor or stops completely, to guarantee the bearing capacity precision of acquisition.
Step 4: measurement terminates, computer via controller controls AC servo motor 12, straight line decelerating motor 34 and miniature
Direct current generator 27 resets.
Claims (5)
1. the automatic continuous dynamic loading method for the test of air-floating ball bearing bearer properties, it is characterised in that: this method is specific
It is as follows:
It is mutually perpendicular to and two radially distributed airflow holes Step 1: being opened up on the bulb of air-floating ball bearing, two air-flows
Hole communicates, and one of air-flow outer end of hole port is embedded in flow controller；The bearing ball-and-socket bottom of air-floating ball bearing is put down with marble
Platform is fixed, and is overlapped the central axis of bearing ball-and-socket vertical direction with the central axis of broadwise rotating disk；Bulb is placed on
On bearing ball-and-socket, and the airflow hole for being embedded in flow controller is arranged towards bearing ball-and-socket；Bulb spherical surface position point where flow controller is
For test point；Open type air bearing ball-and-socket is arranged above bulb, and the gas outlet at the top of open type air bearing ball-and-socket is higher than at the top of bulb；Bearing
It is passed through pressed gas in ball-and-socket and open type air bearing ball-and-socket, between bearing ball-and-socket and bulb and open type air bearing ball-and-socket and bulb
Between formed air film gap support bulb；Air-flow when being in each location point using gas pressure sensor acquisition bulb test point
The air pressure in hole；Displacement sensor is fixed above bulb, displacement sensor when detection test points are in each location point
Gap h between at the top of gauge head and bulb, when bearing ball-and-socket and open type air bearing ball-and-socket are not passed through pressed gas, displacement sensor
Gap between at the top of gauge head and bulb is set as h0, then air film gap value is h-h0；
Step 2: one of following three kinds of schemes is selected to carry out bearing capacity load to air-floating ball bearing:
1. dead load moves measuring point
The computer via controller load signal specified to AC servo motor input, AC Servo Motor Control ball-screw turn
It is dynamic, sleeve and ball-screw constitute screw pair drive transmission rod along ball-screw axially move to designated position after stop；Exchange
In servo motor rotation process, Rotating speed measring is carried out by the rotary encoder that AC servo motor carries, and by torque sensor
Torque detection is carried out, the signal that rotary encoder and torque sensor detect is transmitted to computer through data collecting card；By power transmission
The bearing capacity of bar output, is transmitted on bulb by pressure sensor, force transmitting board and open type air bearing ball-and-socket；Pressure sensor measurement
The bearing capacity size of AC servo motor output, and computer is transmitted to through data collecting card；Then, computer is according to the warp of input
Degree and latitude two-dimensional coordinate data, the test point position of via controller positioned in sequence bulb；The test point of bulb navigates to target
The process of location point is as follows: firstly, computer compares the longitude of source location and test point longitude, if equal,
Straight line decelerating motor does not start, and otherwise via controller control straight line decelerating motor drives driving gear to rotate, broadwise rotating disk
Internal tooth and driving gear external tooth engagement rotation, thus drive through being rotated up survey along broadwise to rotating mechanism is synchronous with bulb
Pilot longitude is equal to source location longitude；Then, computer is by the latitude value of source location and test point latitude value
Comparison, if equal, through motionless to rotating mechanism, otherwise via controller control to rotating mechanism through driving through to rotating mechanism
Through synchronous with bulb along through to being rotated up test point latitude value equal to source location latitude value to rotating disk, during this,
Straight line decelerating motor is constantly in halted state；
2. dynamic loading determines measuring point
Computer controls straight line decelerating motor according to the source location longitude of input, via controller to drive driving tooth to rotate
It is dynamic, the internal tooth of broadwise rotating disk and the external tooth engagement rotation of driving gear, to drive through to rotating mechanism edge synchronous with bulb
Broadwise is rotated up test point longitude equal to source location longitude；Then, computer is according to the source location of input
Latitude value, via controller control through to rotating mechanism drive through to rotating mechanism through to rotating disk edge synchronous with bulb through Xiang Xuan
Turn to be equal to source location latitude value until test point latitude value, during this, straight line decelerating motor is constantly in halted state；
Finally, computer input waveform signal, to controller, controller controls AC servo motor and controls ball wire according to waveform signal
Thick stick rotation, sleeve constitute screw pair with ball-screw and transmission rod are driven axially to move along ball-screw；AC servo motor rotation
In the process, Rotating speed measring is carried out by the rotary encoder that AC servo motor carries, and torque detection is carried out by torque sensor,
Rotary encoder and the signal of torque sensor detection are transmitted to computer through data collecting card；The carrying exported by transmission rod
Power is transmitted on bulb by pressure sensor, force transmitting board and open type air bearing ball-and-socket；Pressure sensor measures AC servo motor
The bearing capacity size of output, and computer is transmitted to through data collecting card；
3. dynamic loading moves measuring point
To controller, controller controls AC servo motor and controls ball-screw according to waveform signal computer input waveform signal
Rotation, sleeve constitute screw pair with ball-screw and transmission rod are driven axially to move along ball-screw；AC servo motor rotated
Cheng Zhong carries out Rotating speed measring by the rotary encoder that AC servo motor carries, and carries out torque detection, rotation by torque sensor
The signal for turning encoder and torque sensor detection is transmitted to computer through data collecting card；The bearing capacity exported by transmission rod,
It is transmitted on bulb by pressure sensor, force transmitting board and open type air bearing ball-and-socket；It is defeated that pressure sensor measures AC servo motor
Bearing capacity size out, and computer is transmitted to through data collecting card；Then, computer is sat according to the longitude and latitude two dimension of input
Mark data, the test point position of via controller positioned in sequence bulb；The test point of bulb navigates to the process of source location such as
Under: firstly, computer compares the longitude of source location and test point longitude, if equal, straight line decelerating motor is not
Starting, otherwise via controller control straight line decelerating motor drives driving gear to rotate, the internal tooth and driving tooth of broadwise rotating disk
The external tooth engagement rotation of wheel, to drive through being rotated up test point longitude to rotating mechanism is synchronous with bulb along broadwise and being equal to
Source location longitude；Then, computer compares the latitude value of source location and test point latitude value, if equal,
Through motionless to rotating mechanism, otherwise via controller control through to rotating mechanism drive through to rotating mechanism through to rotating disk and ball
Head is synchronous along through to being rotated up test point latitude value equal to source location latitude value, during this, straight line decelerating motor one
Directly it is in halted state；
Step 3: the air-floating ball bearing performance parameter under measurement bearing capacity load:
Computer establishes the different positions of bulb test point under setting bearing capacity according to the collected atmospheric pressure value of gas pressure sensor
Set with gas film pressure relationship, bulb is established in and the gap that the bearing capacity and displacement sensor measured according to pressure sensor measures
Test point setting position bearing capacity and the gentle intermembrane space of gas film pressure relationship, and establish bulb test point setting position
Set the relationship of place's gas film pressure and air film gap；Then, computer shows that gas film pressure tests point about bulb on the screen
The scatter chart set, between the gentle intermembrane space of gas film pressure and the graph of relation and gas film pressure and air film of bearer properties
The graph of relation of gap；
Step 4: measurement terminates, computer via controller controls AC servo motor, straight line decelerating motor and miniature DC motor
It resets.
2. the automatic continuous dynamic loading method according to claim 1 for the test of air-floating ball bearing bearer properties,
It is characterized in that: h0 value in 5~60 microns.
3. the automatic continuous dynamic loading method according to claim 1 for the test of air-floating ball bearing bearer properties,
Be characterized in that: if the case where extreme position that sleeve reaches limit switch occur, computer receives limit through data collecting card and opens
The output signal of pass, and the power supply of via controller control relay cutting AC servo motor, spring, which works as a buffer, to be prevented from adding
Rigid collision during load.
4. the automatic continuous dynamic loading method according to claim 1 for the test of air-floating ball bearing bearer properties,
Be characterized in that: the waveform signal is sinusoidal signal, square-wave signal or ramp signal.
5. the automatic continuous dynamic loading method according to claim 1 for the test of air-floating ball bearing bearer properties,
Be characterized in that: in the atmospheric pressure value of different location, cut-off line slows down electric the gas pressure sensor acquisition bulb test point
Machine and miniature DC motor receive the atmospheric pressure value of 3~5s after halt instruction；When pressure sensor acquires bearing capacity, exchange is taken to watch
Take motor receive start or stop instruction after 3~5s pressure value.
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| CN111982385A (en) * | 2020-09-04 | 2020-11-24 | 电子科技大学 | Device and method for detecting dynamic and static pressure of local air film of ultra-precise air-floatation thrust bearing |
| CN111982385B (en) * | 2020-09-04 | 2021-09-14 | 电子科技大学 | Method for detecting dynamic and static pressure of local air film of ultra-precise air-flotation thrust bearing |
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| CN114441330B (en) * | 2022-02-07 | 2023-09-22 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Air floatation stiffness loading device, air floatation stiffness testing equipment and air floatation stiffness testing method |
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