CN106556413B - A kind of two axis based on piezoelectric ceramic motor are without magnetic electrical turntable - Google Patents
A kind of two axis based on piezoelectric ceramic motor are without magnetic electrical turntable Download PDFInfo
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- CN106556413B CN106556413B CN201610970811.3A CN201610970811A CN106556413B CN 106556413 B CN106556413 B CN 106556413B CN 201610970811 A CN201610970811 A CN 201610970811A CN 106556413 B CN106556413 B CN 106556413B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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Abstract
The present invention provides a kind of two axis based on piezoelectric ceramic motor without magnetic electrical turntable, including horizontal rotation part and pitching part, horizontal rotation part includes bottom plate, three HR2 ceramic motors, three HR2 ceramic motors are set and export the ceramic ring stirred between finger, with the pivoted loop of ceramic ring adhesion, the grating disc being connect with pivoted loop, revolution grating reading head bracket is provided on one in three HR2 ceramic motors, revolution grating reading head is provided on grating reading head bracket, pendulum body is fixed on grating disc, post grating scale in grating disk upper surface, pitching part includes two upper pendulum supporting blocks connecting with upper pendulum body, two HR4 ceramic motors being separately mounted in two upper pendulum supporting blocks, two HR4 ceramic motors are set and export two potsherds stirred between finger, bonding Top pendular body between two potsherds.The present invention has the advantages that not introducing magnetic field, precision is high, and dynamic property is good, and controllability is good.
Description
Technical field
The present invention relates to a kind of two axis based on piezoelectric ceramic motor belong to high-accuracy measuring instrument skill without magnetic electrical turntable
Art field.
Background technique
With sharply increasing for industry, traffic, electric power and living facilities, people are in an increasingly complicated electromagnetism ring
Among border, earth's magnetic field has become to become increasingly complex in local scope.However, with the continuous progress of science and technology, being surveyed in precision
In the fields such as amount, space flight and aviation, metrology and measurement, the requirement to extraneous environmental magnetic field is higher and higher.For example, in aerospace and
The gyroscope of navigation in ship, interference magnetic field drastically influence its navigation accuracy, it is necessary to eliminate to interference magnetic field.In nothing
In man-machine, inertial guidance long- and medium-range missiles, the performance of inertial navigation sensor directly affects its trajectory accuracy.So used in order to simulate
The posture of property navigation sensor in actual use, is designed to that a kind of high-accuracy non-magnetic turntable becomes an important link.
Two-axis platcform can be directed to the modules such as gyro, Inertial Measurement Unit, the attitude heading reference system based on micro electronmechanical MEMS
And products thereof test and whole system motion simulation.External magnetic field interference, turntable motor cannot be introduced during the test
Magnetic prevention and control processing is done, turntable material selection nonferromagnetic material copper and aluminium etc., cable will be done every magnetic treatment.Two axis electrical turntables need
Higher kinematic accuracy is wanted, horizontally rotates and is generally not less than 0.1 ' with pitching precision；Turntable also needs higher processing
The positional repeatability of precision, turntable is not more than 0.1 '.Turntable load should also design rationally, because under biggish load,
Turntable bad dynamic performance.At design initial stage, these require to fully consider, and reasonable reliable method should be selected to go to avoid magnetic
The introducing and the good precision of acquisition of field.
In design of two axis without magnetic electrical turntable, piezoelectric ceramic motor is selected to be driven, using the gold of nonferromagnetic
Belong to material, grating encoder selecting degree of precision, introducing without magnetic field is a relatively reasonable scheme.Turntable can load weight
Amount is 2.0Kg, it is driven using piezoelectric ceramic motor, can be to avoid the magnetic field for using conventional motor to introduce, and basic machine is complete
Using the metal material of nonferromagnetic, relative permeability < 1.01 of material.Position, velocity and acceleration detection use Reinshaw
Grating encoder, optical-mechanical system minimum resolution can achieve 0.1 μm, and two axis are put without horizontally rotating for magnetic electrical turntable with pitching
Dynamic precision is 0.01 ', and turntable is equipped with digital display angles of display, display precision 0.01 ', and turntable has good dynamic
Can, speed adjustable range is wide.Turret base has levelling function, reserves datum level on base plane, is realized using two-dimensional gradienter high
Precision leveling.For opposite other methods, which can effectively avoid the introducing of external magnetic field without magnetic electrical turntable, and structure is opposite
It simply, can be it is easy to ensure that very high precision, dynamic property be good.It can without magnetic electrical turntable based on two axis of piezoelectric ceramic motor
To control angular speed, maximum angular acceleration, turntable can be rotated in a manner of interval-pause, and the good performance of piezoelectric ceramic motor is true
The high-precision and excellent dynamic of turntable are protected.
Summary of the invention
The purpose of the invention is to provide a kind of two axis based on piezoelectric ceramic motor without magnetic electrical turntable,
The object of the present invention is achieved like this: including horizontal rotation part and pitching part, horizontal rotation part
Including bottom plate, three level adjusters that three ends of bottom plate are set, three HR2 ceramic electricals being symmetricly set on bottom plate
Pivoted loop and pivoted loop that the ceramic ring between finger and ceramic ring adhesion are stirred in three HR2 ceramic motor outputs is arranged in machine
The grating disc of connection is provided with revolution grating reading head bracket, grating reading head branch on one in three HR2 ceramic motors
Revolution grating reading head is provided on frame, and the first grating reading head and grating disc are in the same horizontal position, the grating disc
On be fixed with pendulum matrix, grating scale is posted in grating disk upper surface, and upper pendulum matrix side is provided with the finger with grating scale cooperation
Needle, upper pendulum matrix upper end are provided with dust excluding plate；The pitching part includes two upper pendulum supports connecting with upper pendulum matrix
Block, two HR4 ceramic motors being separately mounted in two upper pendulum supporting blocks, setting are stirred in two HR4 ceramic motor outputs
Two potsherds between finger, the top pendular body being bonded between two potsherds, the T-slot being arranged on the pendular body of top
Platform, the middle position of the grating disc are provided with rocking grating reading head bracket, are provided with pendulum on rocking grating reading head bracket
Dynamic grating reading head, the middle position of dust excluding plate is provided with the through-hole with rocking grating reading head dimensional fits, top pendular body
One side on be provided with pendulum dial.
The invention also includes structure features some in this way:
1. be additionally provided with the external shell of envelope level rotating part on the bottom plate, external shell by the turntable of side outside
Shell a and horizontal turntable shell b composition, and angular display unit, zero button and two-dimentional water are additionally provided in external shell upper end
Level.
2. being provided in the gap between pivoted loop and bottom plate, between top pendular body and corresponding upper pendulum supporting block
Gap regulating block and gap adjustment screws.
3. being viscous by 3M acrylic adhesive tape between the ceramic ring and pivoted loop, between potsherd and top pendular body
Knot is together.
Compared with prior art, the beneficial effects of the present invention are: two axis of the invention based on piezoelectric ceramic motor are without magnetic
Electrical turntable is a kind of high accuracy gyroscope test equipment, can provide the rotation of high-precision rate and positioning movement.For testing gyro
The projects such as threshold value, resolution ratio, scale factor, hysteresis error, the cross-coupling coefficient of instrument.Two-axis platcform can not introduce outer add
Under conditions of magnetic field, by the rotary motion of turntable horizontal direction and the swing of pitch orientation, meets inertial navigation sensors and exist
Research and development produce, the demands such as calibration, debugging, inspection in use process.Two axis have without magnetic electrical turntable does not introduce magnetic field, precision
The advantages that height, dynamic property is good, and controllability is good.
Piezoelectric ceramic motor of the invention will not introduce complementary field, and piezoelectric ceramic motor minimum step can achieve
10nm, speed adjustable range is extensively to 1 μm/s~250mm/s.Position, velocity and acceleration detection use Reinshaw grating encoder, light
Grating system minimum resolution can achieve 0.1 μm, so turntable can achieve very high precision.Turntable can load 2.0Kg's
Weight, and the maximum angular acceleration that can be provided is 400 (°)/s2.The use environment of high-precision two-axis platcform is 0~50 DEG C, empty
Air humidity degree 0~80%.Two axis are without magnetic electrical turntable mainly by pedestal, piezoelectric ceramic motor, ceramic motor driver, grating encoding
The composition such as device, sliding bearing, angle controller.Pedestal of the invention can be leveled, multiple symmetrical cloth of piezoelectric ceramic motor
Setting ensures enough driving forces；Sliding bearing has gap adjusting mechanism, can guarantee to turn under the premise of ensuring enough rigidity
The precision of platform；Reinshaw grating will not introduce the interference of external magnetic field, and position detection accuracy is very high；Angle controller can be with
The each freedom degree of turntable is controlled respectively, has angle digital display, and display precision is 0.01 '；Because bottom revolution is individual pen
Rotation, can change the drive characteristic of piezoelectric ceramic motor using conducting slip ring, so conducting slip ring is not used, motor cable and light
Grid reading head cable directly walks axial location.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is revolution explosive view in bottom of the invention；
Fig. 3 is pitching explosive view of the invention；
Fig. 4 is full sectional view of the invention.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
In conjunction with Fig. 1 to Fig. 4, the present invention is by handle 1, horizontal rotation part 2, turntable shell a 3, level adjuster 4, zero
Button 5, angular display unit 6, horizontal circle 7, pitching part 8, upper pendulum dial 9, turntable shell b 10, two-dimensional level
Instrument 11 forms.Wherein, horizontal rotation part 2 by HR2 ceramic motor 12, bottom plate 13, ceramic ring (3M acrylic adhesive tape bonding) 14,
Pivoted loop 15, grating reading head bracket 16, grating reading head 17, grating disc 18, upper pendulum matrix 19, dust excluding plate 20, adjusting block pressure
The parts such as plate 21, gap adjustment screws 22, gap regulating block 23 composition.Pitching part 8 reads head bracket by rocking grating
24, rocking grating reading head 25, upper pendulum supporting block 26, motor frame 27, HR4 ceramic motor 28, gap adjustment screws 29, gap
The parts such as adjusting block 30, T-slot platform 31, top pendular body 32, potsherd 33, pointer 34 composition.
The working principle of the invention is:
There are two handles 1 below turntable, and can hold during haulage equipment prevents from skidding.3 adjustable support legs 4
It is used for regulating device levelness on base 13 by the way that screw rod and nut are fixed.Turntable shell a 3 and turntable shell b 10 pass through
Screw is fixed on bottom plate, and shell does purpose into two and is easy for dismantling, after cable arranges and horizontal rotation part 2
After all installation and debugging of pitching part 8, then device housings are installed.The cooperation of pointer 34 is recessed upper pendulum 19 side of matrix
In slot, and pointer 34 is pushed down with dust excluding plate 20, pointer 34, which can be observed roughly, horizontally rotates angle.Two-dimensional gradienter 11, angle are aobvious
Show that device 6 and zero button 5 are mounted on turntable shell a.Datum level is reserved on base plane, realizes height using two-dimensional gradienter 11
Precision leveling.6 display precision 0.01 ' of angular display unit, duplicate rows show angle of revolution and swing angle.Zero button 6 can make
Turntable automatically restores to initial zero position.
In horizontal rotation part 2, ceramic ring 14 is bonded on pivoted loop 15 by 3M acrylic adhesive tape, and drips two drip ring oxygen
Base resin directly drives ceramic ring 14 as protection, HR2 ceramic motor 12.Two of ceramic motor front end stir finger in high frequency
The movement of high frequency elliptical path is done under the driving of high-tension circuit, is stirred ceramic ring and is moved without travel limit.When ceramic motor is necessary
It carves and keeps impaction state, do not allow to be detached from ceramic ring, pretightning force is 105N~140N.Driving of the HR2 ceramic motor at 20 DEG C
Power is 7N, is centrosymmetrically arranged using 3 ceramic motors, and the load of radial tightening power can be eliminated by being arranged symmetrically ceramic motor in this way
Lotus.Gap regulating block 23 and gap adjustment screws 22 are used cooperatively, and can eliminate the sky between pivoted loop 15 and gap regulating block
Gap adjusts the limit that block pressur plate 21 carries out vertical direction to adjusting block to obtain accurately rotary motion.Reinshaw grating
Reading head 17 is fixed on grating reading head bracket 16, and sticking type grating scale is attached on 18 periphery of grating disc, grating reading head
It can accurately measure the information such as position, the speed, acceleration of rotating part with grating scale, grating reading head and grating scale
Gap is 2.2mm, and optical-mechanical system refers to zero-bit equipped with IN-TRAC bi-directional optical.Upper pendulum matrix 19 is connected by screw in grating
On disk 18, upper pendulum matrix is for connecting entire pitching part 8.Dust excluding plate 20 is above to put 19 middle cavity of matrix in order to prevent
Into dust.
Base is put with upper in horizontal rotation part 3 by upper pendulum 26 load-bearing of supporting block in left and right two, supporting block in pitching part 8
Body 19 connects.Two HR4 ceramic motors 28 being arranged symmetrically are fixed by screws on motor frame 27, and motor frame passes through spiral shell
Nail is separately mounted in two upper pendulum supporting blocks 26, and such structure makes the installation of ceramic motor, disassembly more convenient, can be with
Reach good maintenanceability energy.By being adapted to gasket in the contact surface of motor frame 27 and upper pendulum supporting block 26, make ceramic electrical
The adjusting of the installation accuracy and pretightning force of machine is more easier to guarantee.Ceramic motor 28 is forced with potsherd 33 with certain preload
Tightly, it by the way of lateral surface compressing ceramics half-turn, is bonded between potsherd and top pendular body 32 with 3M acrylic adhesive tape.In order to
Mitigate the quality that top is swung, top pendular body does lightization processing, processes series of grooves loss of weight.Gap adjustment screws 29 and gap
Adjusting block 30 is used cooperatively, and is eliminated the gap between top pendular body 32 and upper pendulum supporting block 26, is swung top and obtain one
Preferable rigidity.Pitching pendulum is measured by the grating reading head 25 of the gratings strips and its underpart pasted on 32 cylindrical surface of top pendular body
Information, the reading accuracy such as speed, the position of dynamic part can achieve 0.01 '.T-slot platform 31 is fixed on top using screw and swings
On body 32, for fixing gyroscope to be tested on table top.
Two axis based on piezoelectric ceramic motor of the invention are to test the projects such as gyroscope according to China without magnetic electrical turntable
Actual needs, and made in conjunction with general performance testing index condition, meet following design requirement:
1) turntable can 0~2.0Kg of load quality；
2) turntable table top is manipulated using electronic mode in the horizontal direction, slewing area ± 175 °.Horizontal rotation angle is controllable,
Rotating minimum angles is 0.01 ', and error is not more than 0.01 '.The range of speeds -25~25 (°)/s, precision are not less than 0.01 (')/s.
Maximum angular acceleration 300 (°)/s2；
3) it is manipulated in pitch orientation using electronic mode, pitch orientation slewing area ± 40 °, the range of speeds -25~25
(°)/s, precision are not less than 0.01 (')/s；
4) turntable can be rotated in a manner of interval-pause, dead time most short 0.1s, and error is not more than 0.05s, dead time
Controllably.
A kind of two axis based on piezoelectric ceramic motor without magnetic electrical turntable be mainly used in the mark of gyroscope compared with, debugging, inspection
During survey, turntable overall dimensions are as follows: bottom surface is the equilateral triangle that side length is 360mm, and a height of 142mm, turntable total quality is about
For 7Kg.Turntable integral layout is divided into two parts: horizontal rotation part and pitching part.
Specific work process of the invention is:
(1) preparation: during moving turntable, do not allow to grab pitching part or its residual strength is relatively low
Position, the handle 1 of part under turntable should be held on.After two-axis platcform is placed to experiment place, by adjusting Level tune
Foot 4 keeps the air bubble of two-dimensional gradienter 11 in an intermediate position.Gyroscope to be tested is installed on T-slot platform top, top is swung
It is about 100N that the static state of ceramic motor, which locks power, so it should be noted that not exceeding locked power during installation gyroscope.Finally
Zero button is pressed, horizontal rotation movement and top is swung and returns to 0 ° of position.
(2) horizontal rotation part: three compress pottery about the Nanomotion HR2 ceramic motor 12 being centrosymmetrically arranged
Ceramic ring 14, pretightning force are 105N~140N.Two of piezoelectric ceramic motor front end stir finger in the driving of high-frequency high-voltage circuit
Under do the movement of high frequency elliptical path, stir ceramic ring and moved without travel limit, ceramic motor arranged direction with horizontally rotate
Axis of rotation is vertical.Piezoelectric ceramic motor does not have an introducing in magnetic field, and step pitch minimum can achieve 10nm, speed adjustable range extensively to 1 μm/
S~250mm/s.Gratings strips are pasted on 18 cylindrical surface of grating disc, grating reading head minimum resolution can achieve 0.1 μm, grating
The spacing of reading head and grating scale is 2.15~2.45mm.
(3) top swing process: two upper pendulum supporting blocks 26 are fixed on pendulum matrix 19, are used to support entire top pendulum
Dynamic weight.Two HR4 ceramic motors 28 are arranged symmetrically in pendulum supporting block, and total driving force reaches 36N.Ceramic motor is mounted on
On motor frame 27, in order to Fast Installation, disassembly ceramic motor, and turntable overall precision will not influence.Potsherd 33 is logical
It crosses 3M acrylic adhesive tape to be sticked on top pendular body 32, the pretightning force that ceramic motor compresses potsherd is 54N.HR4 piezoelectric ceramics
Four of motor front end stir finger and do the movement of high frequency elliptical path under the driving of high-frequency high-voltage circuit, stir ceramic ring fortune
Dynamic, ceramic motor arranged direction is parallel with the axis of rotation of pitching.The light that upper pendulum grating reading head 25 issues passes through grating
Received again after diffraction reflection, the maximal accuracy that grating head can achieve is 0.1 μm.Grating reading head carries out position, speed
Degree, accelerator feedback simultaneously control ceramic motor.
Grating head and ceramic motor cable are arranged in cabling in central through hole, because HR ceramic motor is high-frequency and high-voltage letter
Number control, the use of conducting slip ring can change the frequency point of motor itself.Because ± 175 ° of revolution, does not add conducting slip ring energy
Enough meet requirement.
To sum up, two axis of the invention based on piezoelectric ceramics can be avoided the magnetic of conventional motor introducing without magnetic electrical turntable
Field interference does not have to carry out magnetic prevention and control processing to motor, can be with base with the turntable basic machine for sharing non-ferromagnetic metal material processing
Originally accomplish non-magnetic environment.Piezoelectric ceramic motor controllability is good, and control precision is high, and dynamic property is good, and small in size, multiple ceramics
Motor is arranged symmetrically the driving force that can reach sufficiently large.This is turned based on the two-axis platcform of piezoelectric ceramic motor in small-sized no magnetic
There is apparent advantage in platform field.
Claims (5)
1. a kind of two axis based on piezoelectric ceramic motor are without magnetic electrical turntable, it is characterised in that: including horizontal rotation part and bow
Swing part is faced upward, horizontal rotation part includes bottom plate, three level adjusters that three ends of bottom plate are arranged in, is symmetricly set on
Three HR2 ceramic motors on bottom plate are arranged in three HR2 ceramic motors outputs and stir ceramic ring and ceramic ring between finger
The pivoted loop of adhesion, the grating disc connecting with pivoted loop are provided with revolution grating on one in three HR2 ceramic motors and read
Head bracket is counted, revolution grating reading head is provided on grating reading head bracket, and the first grating reading head and grating disc are in same
One horizontal position is fixed with pendulum matrix on the grating disc, and grating scale is posted in grating disk upper surface, and upper pendulum matrix side is set
It is equipped with the pointer with grating scale cooperation, upper pendulum matrix upper end is provided with dust excluding plate；The pitching part includes and upper pendulum base
The upper pendulum supporting block of two of body connection, is arranged at two two HR4 ceramic motors being separately mounted in two upper pendulum supporting blocks
The output of HR4 ceramic motor stirs two potsherds between finger, is bonded between two potsherds top pendular body, setting exist
T-slot platform on the pendular body of top, the middle position of the grating disc are provided with rocking grating reading head bracket, and rocking grating is read
It is provided with rocking grating reading head on number head bracket, the middle position of dust excluding plate is provided with and rocking grating reading head dimensional fits
Through-hole, be provided with pendulum dial on the one side of top pendular body.
2. a kind of two axis based on piezoelectric ceramic motor according to claim 1 are without magnetic electrical turntable, it is characterised in that: institute
State the external shell that envelope level rotating part is additionally provided on bottom plate, external shell is by the turntable shell a of side and horizontal
Turntable shell b composition, and angular display unit, zero button and two-dimensional gradienter are additionally provided in external shell upper end.
3. a kind of two axis based on piezoelectric ceramic motor according to claim 1 or 2 are without magnetic electrical turntable, feature exists
In: gap tune is provided in the gap between pivoted loop and bottom plate, between top pendular body and corresponding upper pendulum supporting block
Locking nub and gap adjustment screws.
4. a kind of two axis based on piezoelectric ceramic motor according to claim 1 or 2 are without magnetic electrical turntable, feature exists
In: between the ceramic ring and pivoted loop, between potsherd and top pendular body be to be bonded in one by 3M acrylic adhesive tape
It rises.
5. a kind of two axis based on piezoelectric ceramic motor according to claim 3 are without magnetic electrical turntable, it is characterised in that: institute
It states between ceramic ring and pivoted loop, between potsherd and top pendular body be bonded together by 3M acrylic adhesive tape.
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| CN201610970811.3A CN106556413B (en) | 2016-11-07 | 2016-11-07 | A kind of two axis based on piezoelectric ceramic motor are without magnetic electrical turntable |
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| CN201610970811.3A CN106556413B (en) | 2016-11-07 | 2016-11-07 | A kind of two axis based on piezoelectric ceramic motor are without magnetic electrical turntable |
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| CN106556413B true CN106556413B (en) | 2019-10-18 |
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| CN107972605B (en) * | 2017-11-21 | 2021-01-08 | 上海航天测控通信研究所 | High-precision vehicle-mounted rotary table |
| CN109986381B (en) * | 2019-04-11 | 2019-11-08 | 菏泽广信船配油嘴油泵有限公司 | A kind of flexibility is quickly remodeled, combination-type oil spraying nozzle spray orifice precision drilling clamp |
| CN114199119B (en) * | 2021-12-07 | 2023-01-06 | 上海交通大学 | Composite detection sensor and detection device suitable for angle and angular speed of swing rotor |
| CN117220438A (en) * | 2023-11-07 | 2023-12-12 | 普达迪泰(成都)智造研究院有限公司 | Two-axis high-precision turntable |
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| CN106556413A (en) | 2017-04-05 |
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