CN106989723A - Superhigh precision inclining test platform - Google Patents

Superhigh precision inclining test platform Download PDF

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Publication number
CN106989723A
CN106989723A CN201710321697.6A CN201710321697A CN106989723A CN 106989723 A CN106989723 A CN 106989723A CN 201710321697 A CN201710321697 A CN 201710321697A CN 106989723 A CN106989723 A CN 106989723A
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CN
China
Prior art keywords
base
optical grating
grating ruler
platform
measurement mechanism
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Granted
Application number
CN201710321697.6A
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Chinese (zh)
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CN106989723B (en
Inventor
李树德
周云耀
马鑫
陈志遥
吕永清
张道忠
齐军伟
吴欢
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Institute of Earthquake of China Earthquake Administration
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Institute of Earthquake of China Earthquake Administration
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Application filed by Institute of Earthquake of China Earthquake Administration filed Critical Institute of Earthquake of China Earthquake Administration
Priority to CN201710321697.6A priority Critical patent/CN106989723B/en
Publication of CN106989723A publication Critical patent/CN106989723A/en
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Publication of CN106989723B publication Critical patent/CN106989723B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details
    • G01C9/06Electric or photoelectric indication or reading means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details
    • G01C9/06Electric or photoelectric indication or reading means
    • G01C2009/066Electric or photoelectric indication or reading means optical

Abstract

The invention discloses a kind of superhigh precision inclining test platform, the inclining test technology of instrument is learned with being related to.This platform, which includes this platform, includes PC controllers, the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism, the 1st base, the 2nd base, the 1st thrust balancing device, the 2nd thrust balancing device, the 3rd optical grating ruler measurement mechanism, Linear Motor Drive Mechanism, platform panel, positioning pedestal and the 3rd thrust balancing device;PC controllers are connected with Linear Motor Drive Mechanism, the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism, the 1st base and the 3rd optical grating ruler measurement mechanism respectively, PC controllers gather the probe displacement signal of the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism and the 3rd optical grating ruler measurement mechanism, while the stepper motor motion of PC controllers control Linear Motor Drive Mechanism, the 1st base, the 2nd base.The present invention is applied to sloping platform test, completes the detection and calibration of instrument.

Description

Superhigh precision inclining test platform
Technical field
The present invention relates to the inclining test technology of ground instrument, more particularly to a kind of superhigh precision inclining test platform.
Background technology
In geophysical observatory instrument field, tiltmeter can be 1 direction(1 dimension)Or 2 directions(2 dimensions)Survey simultaneously Amount.According to existing standard, the index in each direction is 0.003 rad of worst error, 2 rads of range, 0.0002 rad of taste. It is difficult to trace to the source with existing sloping platform measuring technology, it is impossible to complete the detection and calibration of instrument very well.
The inclination apparatus measures placed on positioning pedestal surface are the tilt displacement on earth's crust surface, speed, acceleration Response;It is placed on when tilting instrument on sloping platform, and sloping platform tilts instrument survey when being placed on positioning pedestal surface Amount be earth's crust surface tilt angular displacement, speed, acceleration plus sloping platform provide inclination angular displacement, speed, acceleration The comprehensive response of degree.When flat surface and sloping platform is provided during the geo-stationary of positioning pedestal surface inclination angular displacement, speed plus Speed is 0, and instrument output is exactly the response curve on earth's crust surface.When being worked using the time-division, i.e., a period of time sloping platform is protected Hold static, a period of time sloping platform work, instrument curve of output contains the apparatus measures earth's crust and provided with platform standard angular displacement Two kinds of information.If accurately obtaining sloping platform relative to positioning pedestal surface relative position relation, the mark that can be traced to the source is provided Quasi- angular displacement, the standard angular displacement of inclination apparatus measures is with regard to that can obtain error(Or negative correction)With uncertainty, therefore survey The height change of real-time measurement and positioning base-plates surface and sloping platform surface is needed during amount, i.e., with three independent superelevation essences The grating scale of degree nm magnitudes measures the change of sloping platform in real time.
The tiltmeter test platform of development of new helps to meet tracing to the source for standard requirement, tested dipmeter is carried out real Test the taste of room, static there is provided the correction of tested instrument and standard uncertainty with dynamic test.Be conducive to seismic industry The calibration of unified tiltmeter device, factory testing, the technical regulation of operation detection, it is ensured that the confidence level of test data, make to be tested The actual measurement data of instrument turns into useful historical summary and is saved.
Sloping platform in the X direction can complete test data, including taste, range, it is non-linear, repeated, trace to the source, mark The contents such as quasi- deviation.At this moment only need the inclination lifting of X-direction, provide angle signal, referred to as one-dimensional sloping platform.As tested When platform has inclination lifting in the Y direction, measurement direction X measuring state keeps constant performance, then referred to as 1.5 dimensions tilt flat Platform.As Y-direction can be reached such as the ability of complete test data in X-direction, while having in Y(Or X)When direction tilts lifting, survey Try direction X(Or Y)Measuring state keep constant performance, then be referred to as two-dimentional sloping platform.
Dipmeter laterally influence definition be, dipmeter Y-axis(Laterally)Cause dipmeter survey when inclined vertically Direction X-axis(Longitudinal direction)The change of output data is referred to as the horizontal influence of dipmeter.Laterally influenceed for test dipmeter, it is desirable to be to survey Examination platform does not produce horizontal influence in itself, i.e., when tilting lifting in the Y direction, and measurement direction X measuring state keeps constant property Energy.So laterally the test of influence need to use 1.5 dimensions or 2 dimension sloping platforms.
The content of the invention
It is an object of the invention to provide a kind of superhigh precision inclining test platform, with the minutely inclination that can conveniently trace to the source The experiment test equipment of deformation quantity, calibration and experiment test for the existing tiltmeter device miniature deformation amount with recent studies on.
The object of the present invention is achieved like this:
This platform includes PC controllers, the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism, the 1st base, the 2nd base, the 1 thrust balancing device, the 2nd thrust balancing device, the 3rd optical grating ruler measurement mechanism, Linear Motor Drive Mechanism, platform panel, positioning base Seat and the 3rd thrust balancing device;
Its position and annexation are:
The 1st base and the 2nd base are provided with below the left side of platform panel, is installed in the lower right interposition of platform panel Linear Motor Drive Mechanism is equipped with, the 1st base, the 2nd base and Linear Motor Drive Mechanism are all disposed within positioning pedestal;
The 1st optical grating ruler measurement mechanism and the 2nd optical grating ruler measurement mechanism are symmetrically arranged with the left of platform panel, in platform panel Right side centre position is provided with the 3rd optical grating ruler measurement mechanism, the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism and the 3rd The upper surface of the probe of optical grating ruler measurement mechanism respectively with platform panel, the 1st optical grating ruler measurement mechanism and the 2nd grating scale are surveyed Measuring mechanism is arranged in positioning pedestal by measuring seat, and the 3rd optical grating ruler measurement mechanism is arranged on positioning pedestal by gantry base On;
The 1st thrust balancing device, the 2nd thrust balancing device are respectively arranged with the lower section front and rear sides position of platform panel, in platform It is provided with the 3rd thrust balancing device on the left of panel, the 1st thrust balancing device, the 2nd thrust balancing device and the 3rd thrust balancing device upper end The end cap of steel ball and platform panel is slidably connected, the base of the 1st thrust balancing device, the 2nd thrust balancing device and the 3rd thrust balancing device It is arranged in positioning pedestal;
PC controllers respectively with Linear Motor Drive Mechanism, the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism, the 1st bottom Seat and the connection of the 3rd optical grating ruler measurement mechanism, PC controllers gather the 1st optical grating ruler measurement mechanism, the 2nd optical grating ruler measurement mechanism and the The probe displacement signal of 3 optical grating ruler measurement mechanisms, while PC controllers control Linear Motor Drive Mechanism, the 1st base, the 2nd bottom The stepper motor motion of seat.
The present invention has following advantages and good effect:
1. this project is made for 6 points using the strength of figure of the supporting and measurement of Multipoint process power with A, O, B, C, D1, D2
Gravity is supported, and D1, D2, A point are supported with force equalizer(Force equalizer has declared patent), platform rotating shaft side A, O, B's Gravity is assigned as 45%, 10%, 45%, makees position supporting, O point fixed platforms position at 3 points with O, B, C, A, B, C are measurement point, B points Rotated around O points there is provided Y-axis inclination angle, there is provided X-axis inclination angle around the rotation of AOB lines for C points;
2. platform does not produce horizontal influence, and when testing dipmeter laterally influence, the useful range of C points is not influenceed;
3. to make platform not produce horizontal influence, XY coordinate systems, length baseline, X, Y titling axis of platform are all moved on to Platform upper surface mark sets line segment, is conducive to direct measurement;
4. the locus of the nm level grating scale direct measurement platform upper surfaces of superhigh precision is used, the output angle of platform, light is obtained Grid chi is simple in construction, and ambient influnence is small, and length keeps reliable and stable, traces to the source conveniently, measuring speed is fast;
5. with high speed actuator driving wedge, switched to from level vertical to motion, industrial computer control motion state, by grating scale The signal of tested dipmeter is defeated by measurement, is reclaimed the output of tested dipmeter, is calculated the performance of tested dipmeter.
Suitable for sloping platform test, the detection and calibration of instrument are completed.
Brief description of the drawings
Fig. 1 is the structural representation of this platform;
Fig. 2 is the top view of this platform;
Fig. 3 is the structural representation of the 1st optical grating ruler measurement mechanism 2;
Fig. 4 is the structural representation of the 1st base 4;
Fig. 5 is the structural representation of the 1st thrust balancing device 6;
Fig. 6 is the structural representation of the 3rd optical grating ruler measurement mechanism 8;
Fig. 7 is the structural representation of Linear Motor Drive Mechanism 9;
Fig. 8 is the structural representation of platform panel 10.
In figure:
1-PC controllers;
2-the 1 optical grating ruler measurement mechanism,
21-grating scale installing plate,
22-probe,
23-reading head installing plate;
24-measuring mechanism lateral frame,
25-measuring mechanism column,
26-measuring mechanism base,
27-measuring mechanism levelling bolt;
3-the 2 optical grating ruler measurement mechanism;
4-the 1 base,
41-pedestal,
42-stepper motor,
43-lifting column,
44-plain radial bearing outer ring;
5-the 2 base;
6-the 1 thrust balancing device,
61-dynamic balance base,
62-dynamic balance support frame,
63-weight adjusting bracket,
64-weight,
65-lever,
66-dynamic balance column
67-steel ball;
7-the 2 thrust balancing device;
8-the 3 optical grating ruler measurement mechanism;
81-gantry base,
82-measurement head installing plate;
83-reading head installing plate,
84-grating scale installing plate,
85-probe;
9-Linear Motor Drive Mechanism;
91-linear electric motors,
92-wedge,
93-vertical to lifting pin,
94-jacking rod sleeve;
10-platform panel,
101-plain radial bearing inner ring,
102-end cap,
103-sleeve;
11-positioning pedestal;
12-the 3 thrust balancing device.
Embodiment
Describe in detail with reference to the accompanying drawings and examples:
First, it is overall
Such as Fig. 1,2, this platform includes PC controllers 1, the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement mechanism 3, the 1st base 4th, the 2nd base 5, the 1st thrust balancing device 6, the 2nd thrust balancing device 7, the 3rd optical grating ruler measurement mechanism 8, Linear Motor Drive Mechanism 9th, platform panel 10, the thrust balancing device 12 of positioning pedestal 11 and the 3rd;
Its position and annexation are:
The 1st base 4 and the 2nd base 5 are provided with below the left side of platform panel 10, in the middle of the lower right of platform panel 10 Position is provided with the base 4 of Linear Motor Drive Mechanism the 9, the 1st, the 2nd base 5 and Linear Motor Drive Mechanism 9 and is all disposed within positioning On pedestal 11;
The 1st optical grating ruler measurement mechanism 2 and the 2nd optical grating ruler measurement mechanism 3 are symmetrically arranged with the left side of platform panel 10, in flat surface The right side centre position of plate 10 is provided with the 3rd optical grating ruler measurement mechanism 8, the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement machine The upper surface of the probe 22 of the optical grating ruler measurement mechanism 8 of structure 3 and the 3rd respectively with platform panel 10, the 1st optical grating ruler measurement mechanism 2 and the 2nd optical grating ruler measurement mechanism 3 is arranged in positioning pedestal 11 by measuring seat, and the 3rd optical grating ruler measurement mechanism 8 passes through gantry Base 81 is arranged in positioning pedestal 11;
The 1st thrust balancing device 6, the 2nd thrust balancing device 7 are respectively arranged with the lower section front and rear sides position of platform panel 10, The left side of platform panel 10 is provided with the 3rd thrust balancing device 12, the 1st thrust balancing device 6, the 2nd thrust balancing device 7 and the 3rd dynamic balance The end cap of the steel ball and platform panel 10 of the upper end of device 12 is slidably connected, the 1st thrust balancing device 6, the 2nd thrust balancing device 7 and the 3rd The base of thrust balancing device 12 is arranged in positioning pedestal 11;
PC controllers 1 respectively with Linear Motor Drive Mechanism 9, the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement mechanism 3, 1 base 4 and the 3rd optical grating ruler measurement mechanism 8 are connected, and PC controllers 1 gather the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement The displacement signal of probe 22 of optical grating ruler measurement mechanism 8 of mechanism 3 and the 3rd, while the control of PC controllers 1 Linear Motor Drive Mechanism 9, 1st base 4, the stepper motor 42 of the 2nd base 5 are moved.
2nd, functional part
1st, PC controllers 1
Such as Fig. 1, PC controllers 1 are a kind of industrial computers, and PC controllers 1 are surveyed with Linear Motor Drive Mechanism 9, the 1st grating scale respectively Measuring mechanism 2, the 2nd optical grating ruler measurement mechanism 3, the 1st base 4, the 2nd base 5 and the 3rd optical grating ruler measurement mechanism 8 are connected.
Its function is:Gather the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement mechanism 3 and the 3rd optical grating ruler measurement mechanism The motion of 8 probe displacement signal and the stepper motor 42 of the control base 4 of Linear Motor Drive Mechanism 9 and the 1st and the 2nd base 5.
Its working mechanism is:Using PC gather three grating scale data and measured inclination instrument output data, Control the base 4 of Linear Motor Drive Mechanism 9 and the 1st, the action of the stepper motor 42 of the 2nd base 5, carry out data by standard requirement Processing obtains test report, can remotely shake control measurement and automatic measurement.
2nd, the 1st optical grating ruler measurement mechanism 2
Such as Fig. 1, Fig. 3, the 1st optical grating ruler measurement mechanism 2 includes measurement head and measurement seat, measurement head include grating scale installing plate 21, Probe 22 and reading head installing plate 23;Measuring seat includes measuring mechanism lateral frame 24, measuring mechanism column 25, measuring mechanism base 26 and measuring mechanism levelling bolt 27;
Its position and annexation are:
Measuring mechanism base 26 is arranged in positioning pedestal 11, and the both sides of measuring mechanism base 26 are provided with two measuring mechanism leveling Screw 27, the centre position of measuring mechanism base 26 is provided with measuring mechanism column 25, and the upper end of measuring mechanism column 25 is provided with survey Measuring mechanism lateral frame 24, the right-hand member of measuring mechanism lateral frame 24 connection reading head installing plate 23, reading head installing plate 23 and grating scale Installing plate 21 is slidably connected, and the lower end of grating scale installing plate 21 is provided with probe 22.
Its function is:The change in displacement of 10 upper surface of measuring table panel, one measurement point B vertical direction.
Its working mechanism is:Using three independent nm grades of grating scale synchro measure flat surfaces position vertical with the face of positioning pedestal 11 The change of shifting, grating scale is easy to trace to the source than surveying and can keep constant for a long time.
1)Grating scale installing plate 21
Grating scale installing plate 21 is a kind of thin can of rectangle, and its both sides is provided with the wedge being slidably connected with reading head installing plate 23 Shape groove, the lower end of grating scale installing plate 21 is provided with the screwed hole being connected with the upper end of probe 22, and the inner side of grating scale installing plate 21 is provided with light Grid chi;
Its function is:Fixed probe 22 is installed, while the grating scale in grating scale installing plate 21 vertically upper can glide It is dynamic.
2)Probe 22
Probe 22 is a kind of round stock, and top is provided with ruby probe;
Its function is:By the upper surface of ruby probe contacts platform panel 10 on the top of probe 22, by the upper table of platform panel 10 Face vertical direction change in displacement is delivered to grating scale;
3)Reading head installing plate 23
Reading head installing plate 23 is a kind of rectangle can, and its both sides, which is provided with, to be coordinated with grating scale installing plate 21, can slide relatively Dynamic wedge-shaped slot, the left end of reading head installing plate 23 is provided with the screwed hole fixed with measuring mechanism lateral frame 24, reading head installing plate 23 inner sides are provided with reading head;
Its function is:For installing reading head, the change in displacement of probe 22 is read;
4)Measuring mechanism lateral frame 24
Measuring mechanism lateral frame 24 is the metallic plate that a kind of left side is provided with manhole, and the left side of measuring mechanism lateral frame 24 is provided with The through hole coordinated with measuring mechanism column 25, the right side of measuring mechanism lateral frame 24 is provided with the reading head installing plate 23 with measurement head a The screwed hole of cooperation;
Its function is:The measurement head that is connected a reading head installing plate 23;
5)Measuring mechanism column 25
Measuring mechanism column 25 is a kind of circular stock, and its upper end coordinates with measuring mechanism lateral frame 24, and lower end is provided with and measurement The screw thread that the screwed hole of mechanism base 26 is matched somebody with somebody;
Its function is:Be connected measuring mechanism lateral frame 24;
6)Measuring mechanism base 26
Measuring mechanism base 26 is a kind of bloom of L-shaped, and the two ends of measuring mechanism base 26 are provided with two and measuring mechanism leveling spiral shell The screwed hole coordinated in the middle of the screwed hole that nail 27 coordinates, measuring mechanism base 26 provided with through hole with measuring mechanism column 25;
Its function is:Measuring mechanism column 25 is supported, is that whole 1st optical grating ruler measurement mechanism 2 provides support;
7)Measuring mechanism levelling bolt 27
Measuring mechanism levelling bolt 27 is a kind of precision screw;
Its function is:For leveling measuring mechanism base 26;
3rd, the 2nd optical grating ruler measurement mechanism 3
2nd optical grating ruler measurement mechanism 3 is identical with the structure of the 1st optical grating ruler measurement mechanism 2.
Its function is:The change in displacement of 10 upper surface of measuring table panel, second point A measurement point vertical direction.
4th, the 1st base 4
Such as Fig. 1,4, the 1st base 4 includes pedestal 41, stepper motor 42, lifting column 43 and plain radial bearing outer ring 44;
Its position and annexation are:Pedestal 41 is arranged in positioning pedestal 11, and the left side of pedestal 41 is provided with stepper motor 42, The right side of pedestal 41 is provided with lifting column 43, stepper motor 42, lifting column 43 are connected by internal gear, lifting column The plain radial bearing outer ring 44 that 43 upper ends are provided with coordinates with the hole B of the platform panel 10 plain radial bearing inner rings 101 set.
Its function is:1st base 4 is that platform panel 10 provides support, while the 1st base 4 is adjusted by stepper motor 42 The height of platform panel 10 and tilt quantity, the 1st base 4 make flat surface by the plain radial bearing outer ring 44 of the upper end of lifting column 43 Plate 10 can slide laterally.
1)Pedestal 41
Pedestal 41 is a kind of cuboid bloom, and other parts of the processing for mounting seat 4 are emptied inside it, and the right side of pedestal 41 is set There is the screwed hole being connected with lifting column 43, its bottom is contacted provided with 3 small stairs with positioning pedestal 11.
Its function is:Framework is provided as base 4, whole platform panel 10 is supported.
2)Stepper motor 42
Stepper motor 42 is a kind of general part;
Its function is:Stepper motor 42 is controlled by PC controllers 1, stepper motor 42 drives lifting column 43 to lift.
3)Lifting column 43
Lifting column 43 is a kind of cylinder, and the lower end of lifting column 43 is provided with the screwed hole coordinated with pedestal 41, lifting column 43 End is provided with the groove for installing plain radial bearing outer ring 44;
Its function is:The peaceful deck plate 10 of pedestal 41 is connected, the height of lifting column 43 is adjusted by motor 42.
4)Plain radial bearing outer ring 44
Plain radial bearing outer ring 44 is an a kind of part for joint ball bearing.
Its function is:Form plain radial bearing outer ring 44 and the hole B of platform panel 10 plain radial bearing inner ring 101 It is slidably connected, while making the shaft centerline of platform panel 10 be positioned at the upper surface of platform panel 10.
5th, the 2nd base 5
Such as Fig. 1, Fig. 4, the 2nd base 5 are identical with the structure of the 1st base 4, below the O points of platform panel 10.
Its function is:Support is provided for platform panel 10;When platform test is horizontal, pass through the 2nd base 5 and the 1st base 4 Collective effect, makes the horizontal center line in the upper surface of platform panel 10 keep highly constant.
6th, the 1st thrust balancing device 6
Such as Fig. 1, Fig. 5, thrust balancing device 6 includes:Dynamic balance base 61, dynamic balance support frame 62, weight adjusting bracket 63, weight 64th, lever 65, dynamic balance column 66 and steel ball 67;
Its position and annexation are:The dynamic balance base 61 of thrust balancing device 6 is fixed in positioning pedestal 11, dynamic balance base 61 left sides are provided with weight adjusting bracket 63, and weight 64 is provided with the top of weight adjusting rod 63;Connected on the right side of dynamic balance base 61 Strong balanced support frame 62, dynamic balance support frame 62 can freely be rotated on dynamic balance base 61;Put down with power the centre of lever 65 Weighing apparatus support frame 62 is connected;The left end of lever 65 inserts weight 64;The right-hand member of lever 65 connection dynamic balance column 66, balance column 66 upper end It is slidably connected provided with steel ball 67 and the end cap 102 of the hole D1 upper surfaces of platform panel 10.
Its function is:Pass through dynamic balance base 61, dynamic balance support frame 62, weight adjusting bracket 63, weight 64, the and of lever 65 The lever construction of the formation support platform of dynamic balance column 66 panel 10, the weight transfer of weight 64 is put down to the power of the other end of lever 65 Weigh column 66;The quiescent value of compensating platform panel 10 and quality of loads, weight 64 consolidate the arm of force of the both sides of lever 65 once fixing Fixed, its balancing force is unrelated with the position of lever vertical direction, the 1st thrust balancing device 6 in platform 10 any obliquity of panel Balancing force it is constant.
Its working mechanism is:Using the thrust balancing device 6 of lever the 1st and the 2nd thrust balancing device 7 in parallel, plane is compensated The rest mass of sliding end(Platform and load)And the power that planar slide end supporting dynamic mass needs.
1)Dynamic balance base 61
Gravity compensation base 61 is a kind of rectangular blocks, and its right side is provided with the counterbore of installing force balanced support frame 62, gravity compensation Waist hole of the left side of base 61 provided with connection weight adjusting bracket 63;
Its function is:Installing force balanced support frame 62, is that lever 65 provides support, fixed weight adjusting bracket 63;
2)Dynamic balance support frame 62
Dynamic balance support frame 62 is a kind of short cylindrical, and its lower end coordinates with the gap of dynamic balance base 61, and dynamic balance support frame 62 can Freely rotated in the counterbore of dynamic balance base 61, its upper end is provided with the groove being connected with lever 65;
Its function is:It is used as the fulcrum of lever 65.
3)Weight adjusting bracket 63
Weight adjusting bracket 63 is a kind of U-bracket, and its lower end is provided with the stock coordinated with the gap of dynamic balance base 61, weight regulation In the stock insertion force balance base 61 of the lower end of frame 63, weight adjusting bracket 63 can be slided up and down;The both sides of weight adjusting bracket 63 Provided with the through hole being connected with weight 64;
Its function is:Weight 64 is connected, while weight 64 is limited to the level of dynamic balance support frame 62 to distance, while making weight 64 can only vertical direction motion.
4)Weight 64
Weight 64 is a kind of square bloom, and the horizontal direction of weight 64 is provided with the through hole coordinated with lever 65, and the both sides of weight 64 are provided with The through hole coordinated with 63 liang of side through hole of weight adjusting bracket.
Its function is:The platform panel 10 that the other end dynamic balance column 66 of weight balancing lever 65 of weight 64 is born Pressure.
5)Lever 65
Lever 65 is a kind of circular stock, the screwed hole that its right side coordinates provided with square block with dynamic balance column 66, the left side of lever 65, In, right-hand member is slidably connected with weight 64, dynamic balance support frame 62, dynamic balance column 66 respectively;
Its function is:The pressure for the platform panel 10 that transmission dynamic balance column 66 is born.
6)Dynamic balance column 66
Dynamic balance column 66 is the short cylindrical that a kind of centre is provided with boss, and the screw thread that its lower end is connected with lever 65, dynamic balance is stood The upper end of post 66 is provided with the groove for installing steel ball 67.
Its function is:By the weight transfer of platform panel 10 to the right-hand member of lever 65.
7)Steel ball 67
Steel ball 67 is a kind of general part.
Its function is:The formation of end cap 101 for being provided with the dynamic balance column 66 and hole D1 of platform panel 10 is slidably connected, its turn Dynamic center is in the upper surface of platform panel 10.
7th, the 2nd thrust balancing device 7
2nd thrust balancing device 7 is identical with the structure of the 1st thrust balancing device 6, and the 2nd thrust balancing device 7 is arranged under the D2 of platform panel Side, the 2nd thrust balancing device 7 and the 1st thrust balancing device 6 are arranged symmetrically in the both sides of the lower section of platform panel 10, the 2nd thrust balancing device 7 and the center of rotation of the 1st thrust balancing device 6 line in the upper surface of platform panel 10.
Its function is:2nd thrust balancing device 7 and the parallel operation of the 1st thrust balancing device 6, the static state at compensation planar slide end Quality(Platform and load).
8th, the 3rd optical grating ruler measurement mechanism 8
Such as Fig. 1, Fig. 6, the 3rd optical grating ruler measurement mechanism 8 includes measurement seat a and measurement head b;
Measurement seat a includes gantry base 81, measurement head installing plate 82;Measurement head b includes reading head installing plate 83, grating scale Installing plate 84, probe 85;
Its position and annexation are:Gantry base 81 is fixedly mounted in positioning pedestal 11, and the upper end of gantry base 81 is fixed with Measurement head installing plate 82, the front end of measurement head installing plate 82 is installed by fixed reading head installing plate 83, reading head installing plate 83 and grating Chi installing plate 84 is slidably connected, and the lower end of grating scale installing plate 84 is fixed with probe 85.
Its function is:The change in displacement of the 3rd measurement point C vertical direction in the upper surface of measuring table panel 10.Using three Independent nm grades of optical grating ruler measurement flat surface and the change of the face vertical displacement of positioning pedestal 11, grating scale are easy to trace to the source than surveying simultaneously energy Keep for a long time constant.
Its working mechanism is:1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement mechanism 3, the 3rd optical grating ruler measurement mechanism 8 Three independent grating scales, form synchronous continuous measuring table panel 10 upper surface three Vertical Square of three independent meters To height, determine the spatial variations of three measurement point planes, obtain the nominal tilt amount of input load;Three grating scales have Stability Analysis of Structures and trace to the source easily, temperature, humidity influence are smaller, can anti-vibration and measuring speed the advantages of segment easy soon.
1)Gantry base 81
Gantry base 81 is a kind of overall gantry shape steel base, and its lower end is provided with mounting hole in positioning pedestal 11;
Its function is:Fix and support whole 3rd optical grating ruler measurement mechanism 8.
2)Measurement head installing plate 82
Measurement head installing plate 82 is a kind of square long steel plate, and lower section is provided with the square groove coordinated with the lower end of gantry base 81;
Its function is:Connect reading head installing plate 83 and gantry base 81.
3)Measurement head b
Measurement head b is identical with the measurement head b structures of the 1st optical grating ruler measurement mechanism 2.
9th, Linear Motor Drive Mechanism 9
Such as Fig. 1, Fig. 7, Linear Motor Drive Mechanism 9 includes:It is linear electric motors 91, wedge 92, vertical to lifting pin 93 and jacking Rod sleeve 94;
Its position and annexation are:Linear electric motors 91 are fixed on the correct position of positioning pedestal 11;The slip of linear electric motors 91 Block is connected with wedge 92;Vertically to the lower end of lifting pin 93 and the sliding contact of wedge 92;Vertically to lifting pin 93 and top Rising stem sleeve 94 coordinates, and can vertically be slided up and down to lifting pin 93 in jacking rod sleeve 94, and jacking rod sleeve 94 is fixed on fixed On the pedestal 11 of position;Vertically it is connected to the upper end of lifting pin 93 with the hole C of platform panel 10 axle sleeves 103 being provided with;
Its function is:The horizontal direction that linear electric motors 91 are exported is converted to the right side lifting end of platform panel 10 compared with thin tail sheep amount and hung down Nogata to small displacement.
Its working mechanism is:Because the upper surface of wedge 92 is provided with certain gradient(The gradient is set to 1:1000), work as wedge shape Block 92 is when displacement is 1 in the horizontal direction, the displacement 0.001 of vertical direction, and by the smaller position of linear electric motors horizontal direction Transfer is changed to the small displacement in the Right vertical direction of platform panel 10;Using based on a μm priming for level Linear Motor Drive Mechanism Device promotes 1/1000 wedge to make horizontal motion, switchs to nm grades of vertical to motion, true positions from 1/1000 wedge Move by independent nm level grating scale tracking measurements.The height for sliding laterally end using the threads of lead screw lifting based on μm level makes platform Lateral inclination, the transversal effect of tester.The real displacement of sliding end is by independent nm level grating scale tracking measurements.
1)Linear electric motors 91
Linear electric motors 91 are a kind of high-accuracy general parts of outsourcing;
Its function is:Small displacement, pulse of um levels of horizontal direction etc. are provided;
2)Wedge 92
Wedge 92 is a kind of rectangular blocks, and its upper surface is provided with certain slope(1 can be set to:1000)Domatic, its lower end Provided with the screwed hole being connected with the sliding block of linear electric motors 91;
Its function is:Due to being provided with certain gradient due to the upper surface of wedge 92(The gradient is set to 1:1000), when wedge 92 When displacement is 1 in the horizontal direction, the displacement 0.001 of vertical direction, so that the horizontal direction position that linear electric motors 91 are exported Shifting amount passes to vertical to lifting pin 93, and the relatively thin tail sheep of linear electric motors horizontal direction is converted to vertically hung down to lifting pin 93 Nogata to small displacement;
3)Vertically to lifting pin 93
Vertical is a long cylinder to lifting pin 93, and long cylinder lower end is provided with the bulb slided with the domatic cooperation of wedge 93;
Its function is:Contacted with wedge 92, be the small displacement that platform panel 10 provides vertical direction by relative motion;
4)Jacking rod sleeve 94
Jacking rod sleeve 94 be it is a kind of with it is vertical to lifting pin 93 coordinate cylinder.
Its function is:Jacking rod sleeve 94 is limited vertically can only be in movement in vertical direction to lifting pin 93.
10th, platform panel 10
Such as Fig. 1, Fig. 8, platform panel 10 is a kind of aviation aluminium sheet, and length size is 1200*1000*80mm;Platform panel 10 left ends are arranged with two through holes A, B, and the right side centre position of platform panel 10 is provided with through hole C, and the right side of platform panel 10 is symmetrical Provided with through hole D1, D2;Hole A, B of platform panel 10 are respectively mounted the plain radial bearing inner ring 101 of joint ball bearing, all centripetal Oscillating bearing inner ring is concordant with the upper surface of platform panel 10;Hole D1, D2 upper surface are slidably connected provided with end cap 102 with steel ball; Hole C is provided with sleeve 103, and the boss support of sleeve 103 is in platform panel bottom;Processing is emptied in the center section of platform panel 10, Do not reduce its it is rigid under the premise of reduce its weight;
Its function is:As the working face of tester, the plain radial bearing outer ring central point of the 1st base 4 and the 2nd base 5 In the upper surface of platform panel 10,2 lines as platform panel 10 rotating shaft;The right side of platform panel 10 is provided as lifting end The inclination angle of platform panel 10;
Its working mechanism is:Using in test benchmark face of the upper surface of platform panel 10 as platform;Determine three surveys of platform Amount point is in the upper surface of platform panel 10;Length baseline is in the upper surface of platform panel 10;Platform shaft centerline is in platform panel 10 Upper surface.
1)Plain radial bearing inner ring 101
Plain radial bearing inner ring 101 is a kind of standard component.
Its function is:Coordinate with the plain radial bearing outer ring of the 1st base 4 and the 2nd base 5, the central point that thing is rotated exists The upper surface of platform panel 10.
2)End cap 102
End cap 102 is a kind of circular metal plate, is threadedly coupled with platform panel 10 hole D1, D2 upper surface.
Its function is:It is slidably connected with the steel ball of the 1st thrust balancing device 6 and the 2nd thrust balancing device 7.
3)Sleeve 103
Sleeve 103 is the long annulus that a kind of lower end is provided with boss.
Its function is:Sleeve 103 is slidably connected with vertical to the upper end of lifting pin 93, support platform panel 10.
11st, positioning pedestal 11
Such as Fig. 1, positioning pedestal 11 is a kind of work top for having fixed and positioned each miscellaneous part function, in positioning pedestal 11 Provided with the mounting-positioning holes for installing each miscellaneous part.
Its function is:Require that miscellaneous part is installed according to size by the mounting-positioning holes in positioning pedestal 11, and be each Part provides support;Ensure platform panel 10 in the relatively low environmental work of absolute stability, a noise.
12nd, the 3rd thrust balancing device 12
3rd thrust balancing device 12 is identical with the structure of the 1st thrust balancing device 6, below the A points for being arranged in platform panel 10.
Its function is:Gravity of the compensating platform panel 10 in A points.
3rd, the operation principle of this platform
This platform is made up of driver element, load bearing unit and the part of detection unit three;This platform being capable of independent accurate control platform Tilt quantity, and accurately measure the tilt quantity of platform.
1st, driver element
The driver element being made up of PC controllers 1, Linear Motor Drive Mechanism 9, driving is provided for platform, produces platform panel 10 There is provided the standard vibration source from static state to 10Hz for raw small to nm grades displacement of raising;Using based on a μm level linear electric motors driving The actuator of mechanism promotes 1/1000 wedge 92 to make horizontal motion, switchs to nm grades vertically by 1/1000 wedge 92 To motion, real displacement is by independent nm level grating scale tracking measurements.
The height for sliding laterally end using the threads of lead screw lifting based on μm level makes platform lateral inclination, the horizontal stroke of tester To effect;The real displacement of sliding end is by independent nm level grating scale tracking measurements;The real displacement of fixing end is by independent nm Level grating scale tracking measurement, the change to monitor fixing end height;Driver element is first in Linear Motor Drive Mechanism 9 Linear electric motors 91 produce small level to displacement, and raising for small to nm grades of platform panel 10 is converted to by wedge 92 Displacement, according to the different ratio of slope of the wedge 92 of design(1 can be set to:1000)Produce the 1/ of the displacement of linear electric motors 91 1000, it is the microvibration source that platform panel 10 provides vertical direction.
2nd, load bearing unit
By the 1st base 4, the 2nd base 5, the 1st thrust balancing device 6, the 2nd thrust balancing device 7, platform panel 10,11 groups of positioning pedestal Into load bearing unit, for be tested test instrument provides stably test environment;Three displacement detecting points are arranged on platform panel 10 Upper surface, is adapted to the spatial position measuring of table top measurement baseline;3 dot points that platform is made up of A, B, C, wherein 2 uses Ball-and-socket supporting constitutes platform rotating shaft, and its center is overlapped with platform plane, and center line will not be moved during rotation, is adapted to grating scale direct Measurement, using three independent supporting mass supporting platforms, one is fixed, and one is to slide laterally, and another can put down Slide in face;The upper surface of platform panel 10 determines three measurement points of air coordinates in flat surface as the test benchmark face of platform The upper surface of plate 10;Length baseline is in the upper surface of platform panel 10;Platform shaft centerline is in the upper surface of platform panel 10, using one To the thrust balancing device 6 of lever the 1st and the rest mass of the sliding end of 7 shunt compensation platform panel of the 2nd thrust balancing device 10(Platform With load)The power needed;
The quiet of platform panel 10 and tester is offset using the lever construction of the 1st thrust balancing device 6 and the 2nd thrust balancing device 7 State quality;Lifting mechanism is set only to bear torque caused by the rotary inertia of platform and quality of loads, reservation provides oblique standard value Function, and reduce static deformation of the platform panel 10 in A, B, C at 3 points;
According to the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement mechanism 3 and the 3rd optical grating ruler measurement mechanism 8 and platform panel 10 3 contact points, determine three fixing points on the platform panel 10 of platform(A、B、C), thereby determine that X/Y plane;AB constitutes platform Panel 10(Y-direction)Rotary shaft, A is that rotary shaft lifting end, B are rotation shaft-fixing ends, and C is drive end;In C vertical direction (Z)During driving, platform panel 10 is around AB axles(That is Y-axis)Tilt, therefore platform panel 10 is in tilting procedure, B is kept with AB axles It is motionless, so table top does not have translation, the only tilt rotation around AB axles;Due to 3 points of upper surfaces in platform panel 10 of A, B, C On, can also real-time detection platform and instrument in use so the coordinate position of its X/Y plane is easy to accurate measurement Change between device pier.
3rd, detection unit
It is made up of PC controllers 1, the 1st optical grating ruler measurement mechanism 2, the 2nd optical grating ruler measurement mechanism 3 and the 3rd optical grating ruler measurement mechanism 8 Three point phases on detection unit, the synchronous continuous upper surface same plane of measuring table panel 10 of grating scale independent A, B, C tri- For the height of base surface(Z-direction)Change, it is determined that the spatial variations of plane where three points A, B, C of measurement, according to test Instrument obtains the standard volume of input load in the position of platform panel 10;Using three independent nm grades of optical grating ruler measurement flat surfaces with Positioning pedestal identity distance from change, grating scale is easy to trace to the source than surveying and can keep constant for a long time;
With 3 height changes of A, B, C on grating scale+probe direct measurement platform panel 10, the advantage of grating scale is Stability Analysis of Structures With trace to the source easily, temperature, humidity, influence small, can anti-vibration, measuring speed is very fast, the advantages of segmenting easy;Gathered using PC Three grating scale data are carried out at data with measured dipmeter output data, the action of control actuator, by standard requirement Reason obtains test report, can remotely shake control measurement and automatic measurement.

Claims (6)

1. a kind of superhigh precision inclining test platform, it is characterised in that:
Including PC controllers(1), the 1st optical grating ruler measurement mechanism(2), the 2nd optical grating ruler measurement mechanism(3), the 1st base(4), the 2nd Base(5), the 1st thrust balancing device(6), the 2nd thrust balancing device(7), the 3rd optical grating ruler measurement mechanism(8), linear electric motors driving machine Structure(9), platform panel(10), positioning pedestal(11)With the 3rd thrust balancing device(12);
Its position and annexation are:
In platform panel(10)Left side below be provided with the 1st base(4)With the 2nd base(5), in platform panel(10)Lower section Right side centre position is provided with Linear Motor Drive Mechanism(9), the 1st base(4), the 2nd base(5)And Linear Motor Drive Mechanism (9)It is all disposed within positioning pedestal(11)On;
In platform panel(10)Left side is symmetrically arranged with the 1st optical grating ruler measurement mechanism(2)With the 2nd optical grating ruler measurement mechanism(3), Platform panel(10)Right side centre position be provided with the 3rd optical grating ruler measurement mechanism(8), the 1st optical grating ruler measurement mechanism(2), the 2nd Optical grating ruler measurement mechanism(3)With the 3rd optical grating ruler measurement mechanism(8)Probe(22)Respectively with platform panel(10)Upper surface connect Touch, the 1st optical grating ruler measurement mechanism(2)With the 2nd optical grating ruler measurement mechanism(3)Positioning pedestal is arranged on by measuring seat(11)On, 3rd optical grating ruler measurement mechanism(8)Pass through gantry base(81)It is arranged on positioning pedestal(11)On;
In platform panel(10)Lower section front and rear sides position be respectively arranged with the 1st thrust balancing device(6), the 2nd thrust balancing device (7), in platform panel(10)Left side is provided with the 3rd thrust balancing device(12), the 1st thrust balancing device(6), the 2nd thrust balancing device (7)With the 3rd thrust balancing device(12)The steel ball of upper end and platform panel(10)End cap be slidably connected, the 1st thrust balancing device (6), the 2nd thrust balancing device(7)With the 3rd thrust balancing device(12)Base be arranged on positioning pedestal(11)On;
PC controllers(1 point)Not and Linear Motor Drive Mechanism(9), the 1st optical grating ruler measurement mechanism(2), the 2nd optical grating ruler measurement machine Structure(3), the 1st base(4)With the 3rd optical grating ruler measurement mechanism(8)Connection, PC controllers(1)Gather the 1st optical grating ruler measurement mechanism (2), the 2nd optical grating ruler measurement mechanism(3)With the 3rd optical grating ruler measurement mechanism(8)Probe(22)Displacement signal, while PC controllers (1)Control Linear Motor Drive Mechanism(9), the 1st base(4), the 2nd base(5)Stepper motor(42)Motion.
2. a kind of superhigh precision inclining test platform as described in claim 1, it is characterised in that:
The 1st described optical grating ruler measurement mechanism(2)Including measurement head and measurement seat, measurement head includes grating scale installing plate(21)、 Probe(22)With reading head installing plate(23);Measuring seat includes measuring mechanism lateral frame(24), measuring mechanism column(25), measurement Mechanism base(26)With measuring mechanism levelling bolt(27);
Its position and annexation are:
Measuring mechanism base(26)It is arranged on positioning pedestal(11)On, measuring mechanism base(26)Both sides are provided with two measuring machines Structure levelling bolt(27), measuring mechanism base(26)Centre position is provided with measuring mechanism column(25), measuring mechanism column (25)Upper end is provided with measuring mechanism lateral frame(24), measuring mechanism lateral frame(24)Right-hand member connects reading head installing plate(23), Reading head installing plate(23)With grating scale installing plate(21 are slidably connected), in grating scale installing plate(21)Lower end is provided with probe (22).
3. a kind of superhigh precision inclining test platform as described in claim 1, it is characterised in that:
The 1st described base(4)Including pedestal(41), stepper motor(42), lifting column(43)With plain radial bearing outer ring (44);
Its position and annexation are:Pedestal(41)It is arranged on positioning pedestal(11)On, in pedestal(41)Left side is provided with stepping Motor(42), in pedestal(41)Right side is provided with lifting column(43), stepper motor(42), lifting column(43)Pass through inside Gear is connected, lifting column(43)The plain radial bearing outer ring that upper end is provided with(44)With platform panel(10)What hole B was set Plain radial bearing inner ring(101)Coordinate.
4. a kind of superhigh precision inclining test platform as described in claim 1, it is characterised in that:
Described bascule(6)Including dynamic balance base(61), dynamic balance support frame(62), weight adjusting bracket(63), weight (64), lever(65), dynamic balance column(66)And steel ball(67);
Its position and annexation are:Thrust balancing device(6)Dynamic balance base(61)It is fixed on positioning pedestal(11)On, power is put down Weigh base(61)Left side is provided with weight adjusting bracket(63), in weight adjusting rod(63)Top is provided with weight(64);In dynamic balance Base(61)Right side is connected with dynamic balance support frame(62), dynamic balance support frame(62)Can be in dynamic balance base(61)It is upper freely to turn It is dynamic;Lever(65)Centre and dynamic balance support frame(62)Connection;Lever(65)Left end inserts weight(64);Lever(65)Right-hand member Connect dynamic balance column(66), balance column(66)Upper end is provided with steel ball(67)With platform panel(10)The end cap of hole D1 upper surfaces (102)It is slidably connected.
5. a kind of superhigh precision inclining test platform as described in claim 1, it is characterised in that:
Described Linear Motor Drive Mechanism(9)Including linear electric motors(91), wedge(92), it is vertical to lifting pin(93)And top Rising stem sleeve(94);
Its position and annexation are:Linear electric motors(91)It is fixed on positioning pedestal(11)Correct position;Linear electric motors(91) Sliding shoe and wedge(92)It is connected;Vertically to lifting pin(93)Lower end and wedge(92)Sliding contact;It is vertical to Lifting pin(93)With jacking rod sleeve(94)Coordinate, vertically to lifting pin(93)Can be in jacking rod sleeve(94)Inside slide up and down, Jacking rod sleeve(94)It is fixed on positioning pedestal(11)On;Vertically to lifting pin(93)Upper end and platform panel(10)Hole C is provided with Axle sleeve(103)Connection.
6. a kind of superhigh precision inclining test platform as described in claim 1, it is characterised in that:
Described platform panel(10)It is a kind of aviation aluminium sheet, length size is 1200*1000*80mm;Platform panel (10)Left end is arranged with two through holes A, B, platform panel(10)Right side centre position is provided with through hole C, platform panel(10)It is right Side is arranged with through hole D1, D2;Platform panel(10)Hole A, B be respectively mounted the plain radial bearing inner ring of joint ball bearing (101), all plain radial bearing inner rings and platform panel(10)Upper surface is concordant;Hole D1, D2 upper surface are provided with end cap (102)It is slidably connected with steel ball;Hole C is provided with sleeve(103), sleeve(103)Boss support in platform panel bottom;Flat surface Plate(10)Processing is emptied in center section, do not reduce its it is rigid under the premise of reduce its weight.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109059959A (en) * 2018-06-12 2018-12-21 湖北省地震局 Water tube inclinometer complete machine detection system and its method
CN109738943A (en) * 2019-03-20 2019-05-10 中国地震局地壳应力研究所 A kind of fast and stable system of the pendulum sensor for seismic monitoring instrument

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019565A (en) * 1996-07-05 1998-01-23 Nippon Haazen Kk Inclination observing apparatus
CN102288282A (en) * 2011-05-04 2011-12-21 浙江大学 Vibration table system with feedback control device based on linear optical grating ruler
CN102607523A (en) * 2012-03-29 2012-07-25 华中科技大学 Laser beat frequency sensing technology-based high-precision inclinator and measurement method
CN103868453A (en) * 2014-01-24 2014-06-18 嘉兴华嶺机电设备有限公司 Automatic detection device for direct driving grating ruler
CN206862350U (en) * 2017-05-09 2018-01-09 中国地震局地震研究所 A kind of superhigh precision inclining test platform

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019565A (en) * 1996-07-05 1998-01-23 Nippon Haazen Kk Inclination observing apparatus
CN102288282A (en) * 2011-05-04 2011-12-21 浙江大学 Vibration table system with feedback control device based on linear optical grating ruler
CN102607523A (en) * 2012-03-29 2012-07-25 华中科技大学 Laser beat frequency sensing technology-based high-precision inclinator and measurement method
CN103868453A (en) * 2014-01-24 2014-06-18 嘉兴华嶺机电设备有限公司 Automatic detection device for direct driving grating ruler
CN206862350U (en) * 2017-05-09 2018-01-09 中国地震局地震研究所 A kind of superhigh precision inclining test platform

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109059959A (en) * 2018-06-12 2018-12-21 湖北省地震局 Water tube inclinometer complete machine detection system and its method
CN109059959B (en) * 2018-06-12 2023-07-07 湖北省地震局 Complete machine detection system and method for water pipe inclinometer
CN109738943A (en) * 2019-03-20 2019-05-10 中国地震局地壳应力研究所 A kind of fast and stable system of the pendulum sensor for seismic monitoring instrument
CN109738943B (en) * 2019-03-20 2023-09-22 应急管理部国家自然灾害防治研究院 Quick stabilizing system for pendulum sensor of earthquake monitoring instrument

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